Ulvac VPC-061A User manual

No.31920-2-02-1
Desktop vacuum Coater
VPC-061A
Ulvac Kiko, Inc.
User’s Manual
Please read this manual thoroughly to ensure safe and effective
operation of this equipment. Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.

Table of Contents
Items with shade include description on safety.
To Safely Use This Equipment
(1) Before Using.............................................................................1
1. Target Users .....................................................................1
2. Read the Manual Thoroughly............................................1
3. Keep This Manual in a Safe Place ....................................1
4. Warranty............................................................................1
5. Statutory Requirements for Disposal.................................1
6. Safety during Repair .........................................................1
(2) Product Overview .....................................................................2
1. Purpose of This Product and Actions that are Prohibited..2
2. Safety Device and its Purpose and Functions...................2
3. Product Specifications.......................................................3
4. Individual Unit Specifications ............................................3
5. Standard Accessories.......................................................5
6. How to Use Switches, Handles, and Operation Levers.....5
7. Layout of Switches, Handles, and Operation Levers ........6
Evacuation system drawing
Electrical system drawing
(3) Opening the Package and Installation......................................7
1. General Cautions..............................................................7
2. Package upon Delivery.....................................................7
3. Installation Site..................................................................7
4. Power Supply....................................................................8
5. Necessary Tool List...........................................................9
6. How to change the Oil cap into Exhaust cap.....................9
(4) Operations............................................................................ 10
1. Risks and Safety Measures upon Operations.................10
2. Device Operation Procedure...........................................11
2-1 Preparation..............................................................11
2-2 Operations...............................................................11
2-3 Stop.........................................................................11
3. Deposition Steps.............................................................12
3-1 Opening bell jar .......................................................12
3-2 Vacuum evacuation of bell jar .................................12
4. Film Formation Steps......................................................13
4-1 Preparation..............................................................13
4-2 Film formation..........................................................13

5. Measures upon Abnormal Conditions.............................13
5-1 Instantaneous power outage ...................................13
5-2 Long power outage..................................................13
5-3 Operation after power recovery...............................13
(5) Maintenance and Repair.........................................................14
1. Risks and Safety Measure upon Maintenance and Repair ..14
2. Maintenance and Repair that Can be Made by User ......14
3. Removal, Maintenance, and Installation of Devices........15
3-1 Oil sealed rotary vacuum pump...............................15
3-2 Oil diffusion pump....................................................15
3-3 Oil mist trap .............................................................16
3-4 O-ring at gas bell jar................................................16
3-5 Glass bell jar............................................................16
4. Maintenance and Inspection Points ................................17
5. Troubleshooting ..............................................................18
6. Storage of Equipment .....................................................19
7. Consumable List .............................................................19
(6) Disposal..................................................................................20
1. Cautions upon Disposal..................................................20
(7) Optional Parts.........................................................................21
1. Standard Optional Parts List...........................................21

A
To Safely Use This Equipment
Thank you for purchasing our product. This pump is designed exclusively for
vacuum evacuation, and it may malfunction or cause accidents if operated
inappropriately. Please read the manual thoroughly, and pay specific attention to
inspection, maintenance and safety guidelines. Read and fully understand the
description of this manual to prevent serious accidents from occurring.
The copyright of this user’s manual and safety guides are reserved by Technical
Division of Ulvac Kiko. No part of this document, in whole or part may be
reproduced without permission of Ulvac Kiko Inc.
Read this section before using the VPC-061A. Always follow the instructions below
to safely use the device and prevent personal injuries from occurring.
The symbols below have the following meaning.
Danger
Incorrect handling of the equipment is very likely to
result in death or serious injury to the operator.
Warning
Incorrect handling of the equipment may result in
death or serious injury to the operator.
Caution
Incorrect handling of the equipment may result in
light or medium injuries to the operator or damage
to the equipment.
This indicates action or practice that should be
made.
Always make connection with the earth.
This indicates the action or practice that should be
prohibited.
Do not disassemble.
Do not touch.

B
Warning
Check the
capacity
Primary power supply
Please prepare the following: Single-phase 100 V, 6.3 A
or more Single-phase 200 V, 7.5 A or more
Smaller power supply capacity may cause the breaker to trip due to
overcurrent during the operation.
Do not share
For the primary power supply, a single power supply
should be provided for the device, and other equipment
should not be connected with it.
Breaker capacity shortage may cause the breaker to trip due to
overcurrent during the operation.
Ground the
grounding wire
Employ Level D grounding.
The grounding wire for 200-V power supply is the green
wire.
Use a plug with grounding wire for 100-V power supply.
If you use a plug adapter, connect the grounding wire
with a nearest grounding terminal.
If incorrect grounding is made, this may cause electrical shock in
case of failure or current leakage.
Check the cable
capacity
Avoid using an extension cable. However, if it must be
used by necessity, use the following cable.
For 200-V power supply: 2.0 mm2or more
For 100-V power supply: 1.25 mm2 or more
If a thinner cable is used, this may cause overheating, ignition, or
fire.
Avoid this
action
Do not place any object on the cable for the primary side.
Otherwise, such action may cause electrical shock or fire.
Avoid electrical
shock
Do not touch the terminal block or other connectors if the
primary cable plug is being inserted in a socket.
Otherwise, the operator may suffer electrical shock.
Power Supply

C
Warning
Avoid this
action
This product does not have explosion-proof design, and
thus use in environments where inflammable substances
are present should be avoided.
Otherwise, explosion could occur, causing fire and burns.
Avoid this
action
Temperature at a lower part of the oil diffusion pump is
extremely high during operation. Do not place flammable
objects around it.
This can cause fire.
Do not touch
Do not touch the product with a bare hand during
operation or within 30 minutes after operation ceases
because the temperature of the oil diffusion pump and
the oil sealed rotary vacuum pump temperature rise.
Otherwise, your hands may be burned.
Caution
Use oil mist
trap
Oil mist will be spread from the evacuation outlet of the
oil sealed rotary vacuum pump during roughing
operation. Use an oil mist trap (sold separately).
Otherwise, oil spread may contaminate the room or affect human
health.
Ventilate
Pump is heated during operation.
Room temperature rises.
Warning
Check the
environment
Install the equipment where the following conditions are
satisfied.
1) Flat surface
2) Floor with sufficient strength
3) Well-ventilated place
4) Place without direct sunlight
5) Room with temperatures between 7°C and 30°C.
6) Location where there is no risk of fire
7) Location where no corrosive chemicals or gases are
present.
8) Place without electrical noises, which may cause
adverse effect to the product.
Otherwise, operation failure or durability degradation may occur.
Caution
Work by two or
more people
Lifting and moving of the equipment should be made by
two or more people.
Otherwise, you could injure your back.
Environment
Installation

D
Warning
Avoid this
action
Do not apply any shock to the glass bell jar, and avoid
heating it to 50°C or higher.
In a case of explosion upon vacuum condition, the
exploded pieces will spread.
This may cause a serious damage to the product.
Check
ventilation
Please make sure to ventilate the room when using liquid
nitrogen.
The nitrogen can potentially reduce the oxygen in the
room.
This may cause an oxygen deficiency accident.
Caution
Wear gloves
When using liquid nitrogen, wear gloves to protect your
hands.
If liquid nitrogen splashes and adheres to your skin, you may feel
acute pain momentary.
Confirm
complete close
After confirming complete closure of the main valve, let
out the air in the bell jar.
If air comes into the oil diffusion pump during operation, it
deteriorates the oil and lowers the performance.
Operation failure of the three-way valve may occur.
An inflow of air during liquid nitrogen injection will cause
condensable gases to adhere to the trap excessively, thus
degrading the performance.
Operations

E
Warning
Wear protective
gear
Wear a dust-proof mask and gloves to clean the thin film
adhered to the inside of the glass bell jar and the base
plate.
The thin film could be broken into minute particles, and float in the
air, which could be inhaled into human body.
Caution
Maintenance
and repair range
Maintenance and Repair that Can be Made by User.
1) Replacement of oil for the sealed vacuum pump and
oil diffusion pump.
2) Replacement of the element of oil mist trap (sold
separately)
3) O-ring replacement (except for oil sealed rotary
vacuum pump)
4) Replacement of the heater of the oil diffusion pump.
5) Cleaning of the inside of the base plate and the glass
bell jar.
To make repair or maintenance other than the above, contact us.
Replace
periodically
Oil mist trap (sold separately) should be replaced every
six months to one year.
Clogging in the element increases evacuation resistance, which may
cause oil leakage from the axis sealing area or oil level gauge
damage.
Comply with
regulations
To dispose the oil (waste oil) for the pump, comply with
industrial waste disposal rules.
Comply with regulations upon disposal.
For details on disposal, contact us.
Avoid this
action
Do not use other manufacturer’s optional parts for
modification.
We do not assume any responsibility for any damage due to such
modifications.
Maintenance, Repair, and Disposal

1
(1) Before Using
1. Target Users
Only persons who have used vacuum deposition equipment or trained based on this
manual may operate this equipment.
2. Read the Manual Thoroughly
Please read this manual thoroughly in order to use the equipment in a safe and correct
manner.
Please pay particular attention when reading the section “To Safely Use This Equipment”.
3. Keep This Manual in a Safe Place
Keep this manual in a safe place.
After reading this manual, be sure to keep it in a safe place where it is readily accessible
to other users.
4. Warranty
(1) The warranty for this pump (this equipment) extends for a period of one year from the
date of shipment.
(2) Any malfunctions or defects which occur under normal usage conditions during the
warranty period will be repaired free of charge.
Note, the warranty stated here is an individual warranty covering the pump. In addition,
the scope of the warranty coverage concerning repairs is limited to the repair and/or
replacement of parts.
Normal usage conditions refer to the following:
a) Ambient temperature and humidity during operation: 7 - 30°C, below 85% RH
b) Operation in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage,
inflammable gas, corrosive gas, radiation or pollution.
c) Malfunctions caused by usage conditions that differ from those stated in the user
manual (performance specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modifications or repairs carried out by a party other than
the manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f) Malfunctions that occur when not using a rated power supply.
g) Malfunctions that occur when there is an abnormal rise in internal pressure due to
the pump exhaust outlet being blocked during operation, etc.
h) Malfunctions that occur, when the pump is damaged as a result of being dropped
or falling, etc.
i) Malfunctions which are determined by the manufacturer’s technical personnel to be
caused by conditions that do not comply with the usage conditions for this vacuum
pump.
j) Malfunctions due to the replacement of consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions of our products caused by the customer,
regardless if the malfunction does not fall within the warranty period, nor shall we
be liable for any loss of opportunity for the customer’s clients or for compensation
for any damages to other products, labor costs, production loss, transportation
expenses and other related work.
b) We shall not be liable for any claims and patent infringements, including secondary
damages, filed a claim by a third party against the customer.
5. Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this equipment
including used oil.
Comply with regulations upon disposal.
6. Safety during Repair
When requesting repairs to this product, provide a full description of the conditions of use
(particularly any use of dangerous materials) for the safety of repair personnel.
In this case, fill in the Use Condition Check Sheet and attach to the product.
If the use conditions are unknown, repair may be refused.

2
(2) Product Overview
1. Purpose of This Product and Actions that are Prohibited
This product is a system that evaporates substances in a vacuum space by means
of resistance heating evaporation source to form a thin film.
To safely and correctly use this product, avoid the following actions that are
prohibited.
Using this vacuum coater as a vacuum vessel.
Putting in materials other than evaporation materials and sample
materials in the glass bell jar.
Reselling, repairing, and refurbishing of the product that are not
permitted by us.
Avoid this action
2. Safety Device and its Purpose and Functions
Item
Purpose
Functions
How to
Check
Overload
Short-circuit
Protection for the
oil-sealed rotary
vacuum pump, oil
diffusion pump
and short-circuit
Earth leakage breaker located in
vapor deposition unit main breaker.
Manual reset after troubleshooting
N/A
Operation with the safety devices above disabled
is prohibited.
Avoid this
action

3
3. Product Specifications
Ultimate pressure
1.3 x 10-3 Pa (Upon no-load cleaning in vacuum chamber)
6.6 x 10-4 Pa (Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Evacuation time
20 minutes or less up to the 4.0 x 10-3 Pa
(Upon no-load cleaning in vacuum chamber)
20 minutes or less up to the 1.3 x 10-3 Pa
(Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Necessary power
Single-phase 100 V, 0.63 kVA
Single-phase 200 V, 1.5 kVA
External dimensions
(Main unit)
Weight(Main unit)
Width:434 mm × Depth: 422 mm × Height: 673 mm
Approx. 32kg
Finished color
(Rack) (Panel)
baking finish (Munsell 6Y 8/0.8)
baking finish (Munsell 6Y 8/0.8)
Refer to the specification sheet for special models.
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
1) Glass bell jar
- Dimensions: Internal diameter 150 mm ×
Height 200 mm
- Material: Hard glass
1 pc.
2) Base plate
- Dimensions: External diameter 200 mm
- Material: Iron and nickel coating
- Accessories: 1-point electrode
Hermetic port
Shutter
Column
2 pc.
1 pc.
1 set
4 pc.

4
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
3) Evaporation
power supply
- Model: PSE-150C
- Dimensions: 480 mm × Depth 435.3
mm × Height 149 mm
(exclude projection and
attached component)
- Weight: Approx. 40 kg
- Input: Single-phase 200 V
- Output: Max. 150 A
- Control method: Constant current
(Constant voltage/Fixed
electric power)
- Output control: 10 V
- Lode output: 1 - Position
- Rating: 30 minutes
- Attached component: Output cable (38 mm2
× 2 m)
1 set
4) Oil diffusion pump
(MAIN. PUMP)
- Model: DPF-050
- Evacuation speed: 50 L/sec
- Ultimate pressure: 10–5Pa
- Evacuation or VG 25 or equivalent,
suction opening: φ13.6 or equivalent
- Required power: 0.25 kVA
Oil for use: SY, 0.02L
1 set
5) Oil sealed rotary
vacuum pump
(BACK. PUMP)
- Model: G-20DA
- Evacuation speed: 20 L/min
- Ultimate pressure: 1.3 x 10–1Pa
- Required power: 0.1 VA
Oil for use: SMR-100, 0.18L
1 set
6) Main valve
- Model: Butterfly Valve
- Internal diameter: VG-25
1 set
7) Liquid nitrogen
trap
- Bore diameter: 25 A
- Injection volume: Approx. 0.4L
(including evaporation
amount)
1 set
8) Foreline solenoid
valve
- Model: Slide valve type
1 set
9) Three-way valve
- Model: Ball valve type
1 set
Refer to the specification sheet for special models.

5
5. Standard Accessories
1) Power supply cable
- For the main unit: 100 V single-phase, with plug, 2 m
- For evaporation power: 200 V single-phase, with
crimp-type terminal, 2 m
1 pc.
1 pc.
2) User’s manual
- Standard paper
1 pc.
3) Vacuum
performance test
result table
- Standard paper
1 pc.
4) Hexagonal wrench
- 3 mm
1 pc.
Refer to the specification sheet for special models.
6. How to Use Switches, Handles, and Operation Levers
Confirm
Before handling switches, handles, or operation levers,
confirm the safety and conditions.
Name
How to Operate
MAIN switch
Manual ON-OFF
AUTO switch
Manual ON-OFF ON: lamp illumination
MAIN. P lamp
Manual ON-OFF ON: lamp illumination
Main valve handle
Counter clockwise: OPEN Clockwise: CLOSE
Complete open: Turn the handle 90 degrees
counter clockwise.
Complete close: Turn the handle 90 degrees
clockwise.
Three-way valve
Lever operation to the direction or FORE,
CLOSE, or ROUGH.
VENT. V
Screw tightening type
OPEN: Counter clockwise CLOSE: Clockwise
* Refer to each manual for detailed description of switches of units.

6
7. Layout of Switches, Handles, and Operation Levers
Evacuation system drawing
Electrical system drawing

7
(3) Opening the Package and Installation
1. General Cautions
Confirm
1) Is the product what you requested?
2) Are the accessories and all necessary parts included?
3) Maintain a space of more than 0.3 m from the equipment
for safety upon installation.
2. Package upon Delivery
The main unit and accessories are packed in wooden crate when delivered.
3. Installation Site
Warning
Check the
environment
Install the equipment where the following
conditions are satisfied.
1) Flat surface
2) Floor with sufficient strength
3) Well-ventilated place
4) Place without direct sunlight
5) Room with temperatures between 7°C and
30°C.
6) Location where there is no risk of fire
7) Location where no corrosive chemicals or
gases are present.
8) Place without electrical noises, which may
cause adverse effect to the product.
Otherwise, operation failure or durability degradation
may occur.
After the installation, make sure that the product has a
clearance of at least 30 cm from the wall to make space
without any hindrance for maintenance and for safety.
Confirm

8
4. Power Supply
Warning
Check the
capacity
Primary power supply
Please prepare the following:
Single-phase 100 V, 6.3 A or more
Single-phase 200 V, 7.5 A or more
Smaller power supply capacity may cause the breaker
to trip due to overcurrent during the operation.
Specifications of Primary Cable Connection
(Portions Connecting with the Equipment)
For 100-V power supply, Cable length: 2 m End: 3P plug with ground (with
adapter)
For 200-V power supply, Cable length: 2 m End: Φ 5 crimp-type terminal
Warning
Do not share
For the primary power supply, a single power
supply should be provided for the device,
and other equipment should not be
connected with it.
Breaker capacity shortage may cause the breaker to
trip due to overcurrent during the operation.
Ground the
grounding wire
Employ Level D grounding.
The grounding wire for 200-V power supply
is the green wire.
Use a plug with grounding wire for 100-V
power supply.
If you use a plug adapter, connect the
grounding wire with a nearest grounding
terminal.
If incorrect grounding is made, this may cause
electrical shock in case of failure or current leakage.
Check the
cable capacity
Avoid using an extension cable. However, if
it must be used by necessity, use the
following cable.
For 200-V power supply: 2.0 mm2or more
For 100-V power supply: 1.25 mm2or more
If a thinner cable is used, this may cause overheating,
ignition, or fire.
Avoid this
action
Do not place any object on the cable for the
primary side.
Otherwise, such action may cause electrical shock or
fire.
Avoid electrical
shock
Do not touch the terminal block or other
connectors if the primary cable plug is being
inserted into a socket
Otherwise, the operator may suffer electrical shock.

9
5. Necessary Tool List
Tool
Where to be Used
Phillips head (+) screwdriver
Installation of the evaporation input power
cable
Torque wrench/socket (WAF
13)
Installation of the evaporation output power
cable
25-mm crescent wrench
Installation of the evaporation output power
cable
6. How to change the Oil cap into Exhaust cap
1. Twist the black oil cap to the left and remove it.
Oil cap
2. Mount the Exhaust cap attached with the pump.
Exhaust cap
3. After changing the Oil cap into the Exhaust Cap, remove the wire band
tied around the plug.
※Please carefully be aware
that there is a possibility that
the oil level gauge will be
blown off by switching on the
pump without changing the
cap.
Exchange confirmation indication

10
(4) Operations
1. Risks and Safety Measures upon Operations
Warning
Avoid this
action
Do not apply any shock to the glass bell jar,
and avoid heating it to 50°C or higher.
In a case of explosion upon vacuum condition,
the exploded pieces will spread.
This may cause a serious damage to the product.
Check
ventilation
Please make sure to ventilate the room when
using liquid nitrogen.
The nitrogen can potentially reduce the
oxygen in the room.
This may cause an oxygen deficiency accident.
Caution
Wear gloves
When using liquid nitrogen, wear gloves to
protect your hands.
If liquid nitrogen splashes and adheres to your skin, you
may feel acute pain momentary.
Confirm
complete close
After confirming complete closure of the main
valve, let out the air in the bell jar
If air comes into the oil diffusion pump during operation,
it deteriorates the oil and lowers the performance.
Operation failure of the three-way valve may occur.
An inflow of air during liquid nitrogen injection will cause
condensable gases to adhere to the trap excessively,
thus degrading the performance.
Exchange
confirmation
Please carefully be aware that there is a
possibility that the oil level gauge will be blown
off by switching on the pump without changing
the cap.

11
2. Evacuation Device Operation Procedure
2-1 Preparation
1) Main valve , VENT. V: CLOSE.
2) Three-way valve: FORE
3) All switches on the operation panel: OFF
4) Attach the probe to the gauge port when using the ionization
gauge.
5) User side breaker: ON
2-2 Operations
Unit setup
1) MAIN.SW: ON
2) AUTO.SW: ON
Oil Sealed Rotary Vacuum Pump : SETUP
MAIN. PUMP cooling fan: ROTATE
Foreline solenoid valve: OPEN
3) After 2-min evacuation, Oil Diffusion Pump: ON
4) D.P warming up in 15 mins: COMPLETE
OK lamp illumination
5) Liquid nitrogen (when necessary): INJECT
Note
Liquid nitrogen volume
Max. fill-in volume: Approx. 0.4 liters
(including vaporization volume upon fill-in)
The liquid nitrogen lasts approx. 4 hours when a volume of 0.4 liters
is filled.
If all of the liquid nitrogen is vaporized, the trapped condensable gases are
released, which causes an adverse effect on the pressure for about 30
minutes.
This is not a failure.
Close the MAIN valve to prevent inside of the bell jar from contamination.
2-3 Stop
Unit shutdown
1) Vacuum evacuation for maintaining vacuum condition inside the bell
jar
2) When an ionization gauge is use. Filament: OFF
3) Main valve: COMPLETE CLOSE
4) Three-way valve: FORE
5) AUTO.SW: OFF
OK lamp, MAIN. PUMP lamp: OFF
6)After 25 minutes.
BACK. P: STOP
MAIN. PUMP cooling fan: STOP
Foreline solenoid valve: CLOSE
（Rough pumping piping, automatic air release）

12
7) MAIN.SW: OFF
8) Breaker of user side: OFF
9) If there is any liquid nitrogen inside, it evaporates naturally.
3. Deposition Steps
3-1 Opening bell jar
1) When an ionization gauge is use. Filament: OFF
2) Main valve: COMPLETE CLOSE
3) Three-way valve: FORE Confirm
4) VENT. V (of Main Valve) when necessary: Open gradually
3-2 Vacuum evacuation of bell jar
1) VENT. V (of Main Valve): CLOSE
2) Bell jar: Install
3) Three-way valve: ROUGH
Rough evacuation of the inside of the bell jar,Check: 13 Pa or
lower
4) Three-way valve: FORE
5) Main valve: COMPLETE OPEN
6) When an ionization gauge is use. Filament: ON