Ulvac VTR-060M/ERH User manual

No.35020-2-02-3
User Manual
Small Vacuum Deposition System
ＶＴＲ－０６０Ｍ／ＥＲＨ
Please read the following before using this product.
Keep this manual in a safe place ready for use.
The content of this manual is liable to change without prior notice due to
changes in product specifications, product improvements and revisions.
ULVAC KIKO, Inc.

Table of Contents
indicates a page with safety-related content.
For safe use of this product
（１）Introduction-------------------------------------------------------------------------------１
１．Users---------------------------------------------------------------------------------１
２．Reading and Understanding the Manual ---------------------------------------１
３．Storing the User Manual----------------------------------------------------------１
４．Warranty----------------------------------------------------------------------------１
５．Legal Compliance -----------------------------------------------------------------１
６．Safety During Repairs ------------------------------------------------------------１
（２）Product Outline --------------------------------------------------------------------------２
１．Purpose of Use and Prohibited Items-------------------------------------------２
２．Safety Equipment and its Purpose and Function------------------------------２
３．Product Specification -------------------------------------------------------------３
４．Individual Component Specifications ------------------------------------------３
５．Standard Accessories -------------------------------------------------------------４
６．Using Switches, Handles and Operation Levers------------------------------５
７．Layout of Switches, Handles and Operation Levers -------------------------６
Exhaust system diagram
Electrical system diagram
（３）Opening the Packaging and Installation----------------------------------------------８
１．General Precautions---------------------------------------------------------------８
２．Packaging at Delivery ------------------------------------------------------------８
３．Location of Installation-----------------------------------------------------------８
４．Power Supply ----------------------------------------------------------------------９
Wiring Diagram of Evaporation Power Supply Output----------------------１０
５．List of Required Tools------------------------------------------------------------１１
（４）Operation ---------------------------------------------------------------------------------１１
１．Hazards During Operation, and Associated Safety Measures --------------１１
２．Operation Procedure (Standard)-------------------------------------------------１２
２－１ Preparation ----------------------------------------------------------------１２
２－２ Operation ------------------------------------------------------------------１２
２－３ Deposition-----------------------------------------------------------------１２
２－４ Stopping -------------------------------------------------------------------１３

３．Operation Procedure (Option) ---------------------------------------------------１３
３－１ Preparation ----------------------------------------------------------------１３
３－２ Operation ------------------------------------------------------------------１３
３－３ Stopping -------------------------------------------------------------------１４
３－４ Open Vacuum Tank------------------------------------------------------１４
３－５ Evacuate Vacuum Tank -------------------------------------------------１４
３－６ Preparation for Deposition----------------------------------------------１４
３－７ Deposition-----------------------------------------------------------------１５
４．Handling Malfunctions -----------------------------------------------------------１５
４－１ Instantaneous Power Failure--------------------------------------------１５
４－２ Long-term Power Failure------------------------------------------------１５
４－３ Restoration Procedure after Power Failure ---------------------------１５
（５）Maintenance and Repairs---------------------------------------------------------------１６
１．Hazards During Maintenance and Repairs, and Associated Safety Measures ---１６
２．Customer Maintenance and Repairs --------------------------------------------１６
３．Removing, Maintaining and Fitting the Device-------------------------------１７
３－１ Sealed Rotary Vacuum Pump ------------------------------------------１７
３－２ Turbomolecular Pump---------------------------------------------------１８
３－３ Oil Mist Trap--------------------------------------------------------------１９
３－４ Replace Base Plate and Top Lid O-ring-------------------------------１９
３－５ Clean Inside of Glass Chamber ----------------------------------------１９
４．Maintenance and Inspection Locations-----------------------------------------２０
５．Troubleshooting -------------------------------------------------------------------２１
６．Storing the Equipment------------------------------------------------------------２２
７．Consumables -----------------------------------------------------------------------２２
（６）Disposal-----------------------------------------------------------------------------------２４
１．Precautions to be taken for Disposal--------------------------------------------２４
（７）Optional Components-------------------------------------------------------------------２４
１．Standard Optional Components -------------------------------------------------２４

A
For safe use of this product
Thank you for purchasing this product. This manual presents guidelines for the safe use of this equipment. It covers basic
precautions that are necessary when handling, procedures for operation, and procedures for inspection and maintenance.
Please read the information provided and make sure you understand it correctly so as to prevent a serious accident.
Ulvac Kiko,Inc. holds the copyright for this manual and the safety guide.
Reproduction of all or part of this manual without the permission of Ulvac Kiko, Inc. is prohibited.
Read the section “For safe use of the product” thoroughly before using the equipment. The precautions noted here
are provided to ensure that the product is used safely, and to avoid danger and injury to users and other personnel.
Ensure that these precautions are always followed.
A description of the symbols used in this manual is provided below.
Danger
Incorrect use poses an imminent threat and can result in a
fatality or a serious injury for the users.
Warning
Incorrect use poses a serious threat and can result in a
fatality or a serious injury for the users.
Caution
Incorrect use poses a risk and can result in light or
moderate injury to users, or physical damage.
Always perform this task or step.
Always connect to a ground.
Prohibited.
Do not disassemble.
Do not touch.

B
Warning Labels
Caution
Check labels
A warning label is affixed at the following location.
1) Left back of the rack. (PL018)
2) Right front of the rack．(PL019)(PL020)
Contact the manufacturer if the labels become dirty and difficult to read, or
if they are peeling off.
Power Supplies
Warning
Check
capacity
Primary power supply capacity
Prepare a single phase 100 V power supply with a minimum of
6.0 A and a single phase 100 V power supply with a minimum
of 8.0 A.
When the capacity of the power supply is insufficient, breakers may trip if
there is an overcurrent during operation.
Separate
power supply
Prepare a separate primary power supply. Do not connect other
equipment to it.
When the capacity of the breaker is insufficient, the breakers may trip if
there is an overcurrent during operation.
Connect to
ground
Connect to a Class D ground.
This equipment uses a grounded plug.
When using a plug adapter, connect the ground wire to the
nearest ground terminal.
An incomplete ground may result in electric shock in the event of a
malfunction or short circuit.
Check cable
capacity
Avoid using extension cables as much as possible.
If an extension cable must be used, make sure it is used as
follows.
Use a 100 V cable with a minimum cross-section of 2.0 mm2.
A thin cable may result in overheating, ignition, or fire.
Prohibited
Do not place objects on the primary cables.
Placing objects on the cables may result in electric shock or fire.
Caution –
electric shock
Do not touch the terminal block when inserting the primary
cable into the socket.
Electric shock.

C
Environment
Warning
Prohibited
This equipment is not explosion-proof, and therefore cannot be
used in environments where there is a danger of explosion.
Use in such environments may result in ignition and explosion causing a
fire and burn injury.
Do not touch
The sealed rotary vacuum pump becomes hot during operation.
Therefore, do not touch the pump with your hands during
operation or for 30 minutes after stopping operation.
Touching the pump causes burn injury.
Caution
Use oil mist
trap
Oil mist is discharged from the exhaust outlet on the sealed
rotary vacuum pump during roughing operation. Use an oil
mist trap .
Oil mist contaminates the room and affects personnel.
Ventilation
required
The area around the pump may become hot during the
operation of this equipment.
This will increase the room temperature.
Installation
Warning
Check the
environment
Install the equipment in a location that satisfies the following
requirements.
1) Flat and level.
2) Floor with sufficient strength.
3) Good ventilation.
4) Protected from direct sunlight.
5) Room temperature: 8 –30ºC.
6) No danger of ignition.
7) No chemicals or gases liable to corrode the equipment.
8) Not subject to electrical interference (e.g. electrical
noise).
Failure to install in accordance with these requirements may cause
problems with the operation of the equipment and may reduce its operating
life.
Caution
Do not work alone
Use two or more personnel when lifting and moving this
equipment.
Take the necessary precautions to avoid hurting your back or other body
parts.
Secure
equipment
Measuring device rack use the adjuster to secure the equipment
after installation is complete.
This helps prevent the equipment from moving and/or damage during an
earthquake, etc.

D
Operation
Warning
Prohibited
Do not expose the glass chamber to shock or heat that is 50°C
or higher.
Broken pieces or shards may shoot out if the inside is
damaged when a vacuum is created.
This can cause equipment damage.
Caution
Do not apply
sudden gas
loads
Do not apply sudden gas loads (e.g. inflow of atmosphere to
the high-vacuum side) during operation of the equipment.
Application of a sudden gas load may damage the turbomolecular pump.
Check top lid
When opening the chamber to remove the vapor source or
deposition materials, etc., remove the top lid before opening
the chamber.
If opened without removing the top lid, the top lid may fall down and
become damaged when the chamber is opened.
Pressurize to
atmospheric
pressure
When pressurizing the vacuum tank to atmospheric pressure,
stop the turbomolecular pump and turn the back pump switch
OFF. Then, open the vent valve on the turbomolecular pump
to pressurize the inside of the equipment to atmospheric
pressure.
When equipped with a solenoid valve (option), first, turn
OFF the back pump switch to automatically pressurize to
atmospheric pressure.
To prevent the reverse flow of oil.
Close
completely
When equipped with a main valve (option), make sure it is
completely closed before pressurizing the inside of the
vacuum tank to atmospheric pressure.
If air from the atmosphere enters the turbomolecular pump during
operation, it will damage the pump.

E
Maintenance, Repair and Disposal
Warning
Protective
clothing
Put on a dust mask and gloves when cleaning the thin film that
builds up and adheres to the inside of the vacuum tank.
The thin film turns into fine particles dispersing into the air and can enter
your body through inhalation.
Protective
clothing
Put on a dust mask and gloves when changed the oil on the
sealed rotary vacuum pump.
Exposure can harm your physical condition.
Inspection
check
Inspect the equipment every day and make sure that the screws
that secure the protective cover to the glass chamber and the
hinges are not loose.
If loose, the glass chamber can fall down and cause an accident.
Caution
Periodic
replacement
As a general rule, replace the oil mist trap element every 6
months to a year.
If the element is clogged, the exhaust resistance increases and can cause an
oil leak from the axis seal or damage the oil level gauge.
Legal
compliance
The owner and/or operator are legally obliged to dispose of the
equipment and pump, etc., as industrial waste.
Please dispose according to the rules or regulations established under law
and by the local governing body.
Prohibited
Do not modify without prior approval from the manufacturer.
The manufacturer assumes no responsibility for modifications undertaken.

１
(1) Introduction
1. Users
This equipment is to be operated by personnel with experience using vacuum deposition systems,
or by personnel that have received training that is based on this manual.
2. Reading and Understanding the Manual
Read the manual thoroughly before use, and ensure that the equipment is used correctly.
It is particularly important to read the section entitled “For safe use of this product.”
3. Storing the User Manual
Keep the user manual in a safe place.
After reading the manual, store it in a safe place where it is readily available to users.
4. Warranty
(1) The warranty for this equipment extends for a period of one year from the date of shipment.
(2) Any malfunctions or defects which occur under normal usage conditions during the warranty period will
be repaired free of charge.
Note, the warranty stated here is an individual warranty covering this equipment. In addition, the scope of
the warranty coverage concerning repairs is limited to the repair and/or replacement of parts.
Normal usage conditions refers to the following:
a) Ambient temperature and humidity during operation: 8 - 30°C, below 85% RH
b) Operation in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster, terrestrial upheaval or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage, inflammable gas,
corrosive gas, radiation or pollution.
c) Malfunctions caused by usage conditions that differ from those noted in the user manual (performance
specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modification or repair that is carried out by a party other than the
manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f ) Malfunctions that occur when not using a rated power supply.
g) Malfunctions that occur when there is an abnormal rise in internal pressure, due to the pump exhaust
outlet being blocked during operation, etc.
h) Malfunctions that occur when the pump is damaged, as a result of being dropped or falling, etc.
i) Malfunctions determined by the manufacturer’s technical personnel to be caused by conditions that do
not comply with the usage conditions for this vacuum pump (this equipment).
j) Consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions of our products caused by the customer, regardless if the
malfunction falls within the warranty period, nor be liable for any loss of opportunity for the customer’s
clients or for compensation of any damages to other products, labor costs, production loss, transportation
expenses and other related work.
b) We shall not be liable for any secondary damages that occur for the customer due to filed claims and
patent infringements of a third party.
5. Legal Compliance
When disposing the equipment, and specifically, when disposing used oil, there are legal
obligations.
Dispose appropriately in accordance with the law. Contact the manufacturer for further
clarification.
6. Safety During Repairs
To ensure the safety of repair personnel, please note the usage conditions, particularly the presence
of any dangerous substances, when making a repair request to the manufacturer.
Fill out the usage conditions check sheet and attach it to the equipment.
The repair request may be refused if the usage conditions are unclear.

２
(2) Product Outline
1. Purpose of Use and Prohibited Items
This equipment is a vacuum deposition system that creates and deposits a thin film by
evaporating substances from a vapor source using resistance heating evaporation in a
vacuum.
Observe the prohibited items below to ensure that the equipment is used correctly.
Using this equipment only as vacuum chamber.
Putting objects other than evaporation source materials or samples in the
vacuum tank.
Reselling, repairing or modifying without prior approval from the
manufacturer.
Prohibited
2. Safety Equipment and its Purpose and Function
Item
Purpose
Function
Method of
verification
Error in
internal
wiring circuit
System protection
Circuit protector causes power to turns
off. Provides protection for an internal
wiring short circuit and a burnout in the
wiring.
None
Overcurrent,
high-temper
ature,
overload
Turbomolecular
pump
Stops during free run (no brake
operation) using the protection system
built into the turbomolecular pump
controller.
None
Overcurrent
Turbomolecular
pump controller
Protects circuit in the controller using
fuses (Type: ET 3.15 A / SOC Qty. 2).
None
Operating while the above safety equipment is
disabled.
Prohibited

３
3. Product Specification
Ultimate pressure
10-4 Pa unit
(When there is no load and it is clean inside the vacuum)
Option specification ：1.5 × 10-3 Pa
Exhaust time
Under 20 minutes and up to 4.0 × 10-3 Pa
(When there is no load and it is clean inside the vacuum)
Power requirements
(Unit)
(Power supply)
100 V, single phase, 0.6 kVA
100 V, single phase, 0.8 kVA
External dimensions
(Unit)
(Power supply)
Weight (Unit)
(Power supply)
428 mm (W) × 438 mm (D) × 713 mm (H)
480 mm (W) × 435.3 mm (D) × 149 mm (H) (excluding protrusions)
Approximately 50 kg
Approximately 24 kg
Exterior paint (Unit)
JIS S5-462 Baked finish (Munsell 5GY8/0.5)
For special use, refer to the specifications sheet.
4. Individual Component Specifications
Component
Model and specifications
Qty.
1) Glass chamber
• Dimensions: Inner diameter ø 236 mm × 250 mm (H)
• Material: Borosilicate glass
1
2) Base plate
• Number of ports: 7 ports
•Dimensions: Outer diameter ø270 mm
• Material: Made from iron with nickel plating
• Accessories: Electrodes
Shutter
Sealing flange for service port
Sealing flange for base plate
1
2 set
1 set
2 set
2 set
3) Evaporation power
supply
• Model: PSE-150C
• Input: Single phase 100 V
• Output: Max. 80 A (Min. 25 A)
• Control input method: Thyristor AC phase control method
• Output control: Constant power, constant current and
constant voltage
• Output change: Load output change – Output control 1
position
• Rating: 30 min.
• Accessories: Input cable (with plug)
Output cable (with crimped terminal)
1

４
Component
Model and specifications
Qty.
4) Turbomolecular pump
(TMP)
• Model: TG70F
•Exhaust flow rate: 60 L/sec.
• Ultimate pressure: 5 × 10-7 Pa
• Exhaust outlet: ISO-R63, KF16
• Controller model: TC76
• Power requirements: 160 VA
1
5) Sealed rotary vacuum
pump (RP)
• Model: G-20DA
• Exhaust flow rate: 20 L/min.
• Ultimate pressure: 1.3 Pa
• Power requirements: 370 VA
• Hydraulic oil: SMR-100 180 mL
1
For special use, refer to the specifications sheet.
5. Standard Accessories
1) Power cable
• For equipment unit: 100 V single phase with plug, 4 m
• For evaporation power supply: 100 V single phase with plug,
4 m
1
1
2) User manual
• Plain paper
1
3) Vacuum performance
testing table
• Plain paper
1
4) Allen wrench
• 3 mm
1
5) TMP intake cap
• Intake cap for transporting the turbomolecular pump
1
For special use, refer to the specifications sheet.

５
6. Using Switches, Handles and Operation Levers
Check the safety and status of the switches, handles and operation
levers before operating the equipment.
Check
Name
Operation
BACK.P switch
Manual ON/OFF ON: Lamp lights up
VENT.V
Straight type Needle and value
Open: Handle is vertical Close: Handle is horizontal
TMP controller
START button
STOP / RESET button
POWER
ACCELERATION
NORMAL
FAILURE
Manual ON ON: TMP operates
Manual OFF OFF: TMP stops (free run)
Manual RESET RESET: TMP resets
(When it stops automatically to protect when TMP
malfunctions)
LED lights up: Input power has been turned ON
LED lights up: TMP starts up / accelerates
LED lights up: TMP operates normally / running at rated
speed
LED lights up: TMP controller error
Main valve handle
(Option)
Counterclockwise: OPEN Clockwise: CLOSE
Open completely: Turn handle counterclockwise 90 degrees
Close completely: Turn handle clockwise 90 degrees
3 way valve
(Option)
Turn lever in the direction FORE / CLOSE / ROUGH to
operate.
VENT.V (Option)
Screw type leak port (Valve for pressurizing vacuum to
atmospheric pressure)
Open: Counterclockwise Close: Clockwise
*Refer to each user manual for details on the device switches.

６
7. Layout of Switches, Handles and Operation Levers
Standard specification
Exhaust system diagram
Electrical system diagram

７
Option specification
Exhaust system diagram
Electrical system diagram

８
(3) Opening the Packaging and Installation
1. General Precautions
Check
1) Verify that the contents match the product that was ordered.
2) Verify that the specified accessories are included.
3) Clear a space at least 1 m around the equipment to ensure
safety during installation.
2. Packaging at Delivery
This product is delivered with the equipment packed in a crate and the accessories
in a cardboard box, etc.
3. Location of Installation
Warning
Check the
environment
Install the equipment in a location that satisfies the
following requirements.
1) Flat and level.
2) Floor with sufficient strength.
3) Good ventilation.
4) Protected from direct sunlight.
5) Room temperature: 8 –30ºC.
6) No danger of ignition.
7) No chemicals or gases liable to corrode the
equipment.
8) Not subject to electrical interference (e.g.
electrical noise).
Failure to install in accordance with these requirements may
cause problems with the operation of the equipment and may
reduce its operating life.
For safety reasons, move the equipment at least 0.5 m from the wall
after installation so that all obstructions are cleared away to have
space for opening and closing the chamber and for maintenance and
repair.
Check

９
4. Power Supply
Warning
Check capacity
Primary power supply capacity
Prepare a single phase 100 V power supply
with a minimum of 6.0 A and a single phase
100 V power supply with a minimum of 8.0 A.
When the capacity of the power supply is insufficient,
breakers may trip if there is an overcurrent during
operation.
Primary cable connection specifications
Equipment: 4 m cable and 3 P plug with ground for 100 V single phase
Evaporation power supply: 4 m cable and 3 P plug with ground for 100 V single
phase
Warning
Separate power
supply
Prepare a separate primary power supply. Do
not connect other equipment to it.
When the capacity of the breaker is insufficient, the
breakers may trip if there is an overcurrent during
operation.
Connect to ground
This equipment uses a grounded plug.
When using a plug adapter, connect the ground
wire to the nearest ground terminal.
An incomplete ground may result in electric shock in the
event of a malfunction or short circuit.
Check cable
capacity
Avoid using extension cables as much as
possible. If an extension cable must be used,
make sure it is used as follows.
Use a 100 V cable with a minimum
cross-section of 2.0 mm2.
A thin cable may result in overheating,
ignition, or fire.
Prohibited
Do not place objects on the primary cables.
Placing objects on the cables may result in electric shock
or fire.
Caution –electric
shock
Do not touch the terminal block when inserting
the primary cable into the socket.
Electric shock.

１０
Wiring Diagram of Evaporation Power Supply Output
Standard specification - One point type
Option specification - Two point type
Option specification - Three point type

１１
5. List of Required Tools
Tool
Application
Phillips screwdriver
For connecting the evaporation power
supply input cable
Torque wrench/socket
(Width across flats: 13)
For connecting the evaporation power
supply cable
Spanner (Width across flats: 13)
For connecting the evaporation power
supply cable
(4) Operation
1. Hazards During Operation, and Associated Safety Measures
Warning
Prohibited
Do not expose the glass chamber to shock or heat
that is 50°C or higher.
Broken pieces or shards may shoot out if the inside
is damaged when a vacuum is created.
This can cause equipment damage.
Caution
Do not apply
sudden gas loads
Do not apply sudden gas loads (e.g. inflow of
atmosphere to the high-vacuum side) during
operation of the equipment.
Application of a sudden gas load may damage the
turbomolecular pump.
Check top lid
When opening the chamber to remove the vapor
source or deposition materials, etc., remove the top
lid before opening the chamber.
If opened without removing the top lid, the top lid may fall
down and become damaged when the chamber is opened.
Pressurize to
atmospheric
pressure
When pressurizing the vacuum tank to atmospheric
pressure, stop the turbomolecular pump and turn
the back pump switch OFF. Then, open the vent
valve on the turbomolecular pump to pressurize the
inside of the equipment piping to atmospheric
pressure.
When equipped with a solenoid valve (option),
first, turn OFF the back pump switch to
automatically pressurize to atmospheric pressure.
To prevent the reverse flow of oil.
Close
completely
When equipped with a main valve (option), make
sure it is completely closed before pressurizing the
inside of the vacuum tank to atmospheric pressure.
If air from the atmosphere enters the turbomolecular pump
during operation, it will damage the pump.

１２
2. Operation Procedure (Standard)
2-1 Preparation
1) Front panel switch: OFF
2) Primary power cable: Connect
3) Turbomolecular pump VENT.V: Close
4) Vapor source for electrodes (boat and filament, etc.): Install
5) Supply source material to vapor source
6) Shutter: Close
7) Chamber: Close
8) Mount substrate onto top lid holder
9) Put top lid onto glass chamber
10) Customer breaker: ON
2-2 Operation
Equipment startup
1) BACK.P: ON
• Roughing inside vacuum tank and TMP: Under 100 Pa (approx. 5 min.)
• Press the center part of top lid downward if the back pump exhaust sound
becomes weaker or quieter.
2) TMP controller [START]: Press (TMP starts)
• When accelerating: ACCELERATION lights up
3) TMP operates normally after approx. 2.5 min.: NORMAL lights up
2-3 Deposition
1) Evaporation power supply MAIN: ON
2) SELECT: ON (Select conducting electrodes)
3) HIGH (Lamp lights up): Check
4) MANUAL (Lamp lights up): Check
5) POWER (Lamp lights up): ON
6) Press the UP ▲ key so the current gradually passes to the vapor source.
7) Monitor the red heat of the vapor source. Once the vapor source begins to
melt, remove any impurities or contaminants in the vapor source that adhere to
the shutter.
8) Open the shutter to deposit onto the sample (substrate)
9) Shutter after deposition: Close
10) POWER (Lamp turns off): OFF
11) Evaporation power supply MAIN: OFF