Ulvac EGL-206M User manual

EB0007-03e
INSTRUCTION MANUAL
MULTI‐HEARTH ELECTRON BEAM SOURCS
model：EGL-206M/EGL-406M
4nd edition 2023/08/01
ULVAC, Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

EB0007-03e

EB0007-03e

EB0007-03e
This manual is intended to serve as a guide for safe and efficient use of this
electron beam source. It contains important information, such as cautions and
operating, inspecting and maintenance procedures that are required in using this
electron beam source. Carefully read this manual and fully understand them
before operation to prevent accidents and troubles.
CAUTION
Read this manual before operation and fully understand operating, inspecting and
maintaining procedures.
Do not operate this electron beam source before you fully understand them.
Carefully read and fully understand Safety Cautions and Safety .
Read this manual until you fully understand it and can operate the power
supply correctly.
Keep this manual at your hand for immediate reference.
If this electron beam source is moved to other location, attach this manual to
the power supply.
The contents of this manual are subject to change without notice for
improvement.
If you come up with any question or trouble, contact your local ULVAC
representative or ULVAC,Inc..
Always use the electron beam source safely and take care of it correctly.
NOTICE
No part of this may be copied or reproduced for use by a third party without
consent by ULVAC in writing.

EB0007-03e
Safety Cautions
1
Most accidents are attributed to careless operation, inspection, maintenance or
repair. Also failure to comply with safety cautions or predict potential danger is
responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an
early stage.
2
Personal injuries are caused by erroneous operation or inadequate maintenance or
inspection.
Never try to operate an electron beam source before you read sections on operation,
inspection and maintenance and fully understand them.
3
Safety denotations are used throughout this manual and are labeled on the
equipment.
Failure to comply with these warnings or cautions may lead to personal injuries or
loss of life.
4
The supervisor, operator and maintenance personnel should read this manual
before operation or maintenance. Only those who have been trained and know
how to operate correctly should operate this equipment using correct techniques
and tools.

EB0007-03e
Safety Denotations
Safety denotations are used throughout this manual and labeled on the equipment
to call operator s attention to safety.
Safety denotations are classified as follows.
DANGER Failure to comply with this involves the possibility of
impending death or serious personal injury.
WARNING Failure to comply with this involves the possibility of death or
serious personal injury.
CAUTION Failure to comply with this involves the possibility of a
medium degree of injury, though not serious, or serious
damage to the equipment.
NOTICE Failure to comply with this involves the possibility of damage
to or short life of the equipment.
It is hardly possible to predict all potential dangers in operation, inspection or
maintenance under all operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not
mean to meet all safety requirements.
In operating or maintaining this power supply, the operator or the maintenance
personnel must use every care so that any serious accident like personal injury
or damage to the equipment does not occur.
If operation, inspection or maintenance not described in this manual is
performed, it is the user s responsibility to take necessary care for safety.

EB0007-03e
Warranty and Repair
Warranty
This EB gun has been shipped after rigorous inspection at the factory, but if any
trouble occurs due to defects or if any component is found damaged in transit,
please contact your local ULVAC organization or representative.
This EB gun is warranted free from defects in material or workmanship for a
period of one year from the date of shipment if it is properly operated and
maintained. If the trouble is evidently imputable to defects in material or
workmanship, ULVAC will correct it free of charge. However, troubles caused
by misuse or abuse of the equipment, negligence of operating instructions, or
modification or by force majeure are not covered by this warranty.
-Consumable parts, which are not covered by the warranty-
1. Filament 210004027700
2. Insulator 210004028100
3. Insulation bush 210004028200
4. Fixed insulator 210004028300
5. Beam former 210004025900
6. Anode plate 210004026400
In Repair
• Verification of trouble
If any trouble is found, check the trouble symptom and verify that it is a trouble
referring to "Maintenance" in this manual. Complete information about the
trouble will prevent loss on both sides due to misunderstanding or misjudgment
and allow us to take quick actions for repair.
• Service call
If you encounter any trouble or come up with any question, please contact your
local ULVAC representative.
In your service call, please furnish us with as complete information as possible,
including the name, model number and serial number of your equipment and
trouble symptom.

EB0007-03e
• Repair period
In case of trouble, every effort will be made to correct it at the earliest possible
date, but it may take time to repair it if the unit is installed in a remote place or is
severely damaged. Replacement parts for units older than five years may not be
readily available because their production may have been discontinued. In that
event, repair will take longer.
FOR DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the
Electron Beam GUN. If hazardous material as evaporation material is used,
relegate the disposal to a professional disposal firm. You would be responsible for
the cost relating to disposal

EB0007-03e
Table of Contents
Page
FOR DISPOSAL.................................................................................................................................. 8
1. GENERAL ................................................................................................................................... 1
1.1 Features of EGL-206M/EGL-406M..................................................................................... 1
1.2 Specifications ....................................................................................................................... 2
2. UNPACKING AND RECEIVING CHECK................................................................................ 4
2.1 Care to be taken in Unpacking ............................................................................................. 4
2.2 Check after Unpacking......................................................................................................... 4
2.3 Standard Spare Parts List ..................................................................................................... 5
3. MOUNTING THE ELECTRON BEAM GUN ........................................................................... 6
3.1 Necessary Equipment........................................................................................................... 6
3.2 Installation of Electron Beam Gun....................................................................................... 8
3.3 Safeguards against X-Rays (See Fig. 3-5.)...................................................................... 13
4. OPERATION ............................................................................................................................. 19
4.1 Check before Operation...................................................................................................... 19
4.2 Operation of Electron Beam Gun....................................................................................... 21
5. DISASSEMBLY AND REASSEMBLY OF ELECTRON BEAM GUN ................................. 24
5.1 Changing Filament ............................................................................................................. 24
5.3 Parts List............................................................................................................................. 29
6. MAINTENANCE....................................................................................................................... 34
6.1 Preventive Maintenance ..................................................................................................... 35
6.2 Scheduled Inspection.......................................................................................................... 37
6.3 Troubleshooting Guide....................................................................................................... 40
7. TROUBLESHOOTING ................................................................................................................. 41

SECTION 1
1
1. GENERAL
The electron beam evaporation source EGL-206M/EGL-406M provides higher
performance and reliability based on ULVAC's years of accumulation of
technologies and actual achievement. EGL-206M/EGL-406M has six crucibles
with a capacity of 20cm3(a maximum power supply of 8kW) and EGN-406M
has six crucibles with a capacity of 40cm3(a maximum power supply of 8kW),
both of which provide flexible multilayer film vapor deposition.
The general features of electron beam vapor deposition are as follows.
This can input high density energy into a micro area, which enables
evaporation of high melting point metal, such as W, Ta, and Mo, and
oxides, such as SiO2 and Al2O3.
With a water-cooled copper crucible, the pollution from the contact part
with evaporation materials is very low and high-purity vapor-deposited
film can be obtained.
A normal heat resistance evaporation source needs frequent
replacement of the filament, the boat, etc. depending on the evaporation
material, whereas an electron beam evaporation source is essentially
low in wear of the component parts.
1.1 Features of EGL-206M/EGL-406M
(1) A 6-point switching hearth with a capacity of 20cm3/ 40cm3is adopted,
providing vapor deposition of multilayer film.
(2) An electron beam deflects depending on the electromagnetic field, which
has an extremely low effect of secondary electrons on the object subject
to vapor deposition.
(3) Even sublimation substances can be smoothly evaporated by scanning the
beam spot on the X-axis and the Y-axis to eliminate a "hole-digging"
phenomenon.
(4) The electron beam is of 270 ﾟdeflection and therefore not subject to
evaporation, making the filament lifetime longer.
(5) The easy-to-detach emitter assembly provides easy replacement of the
filaments, isolation insulators, etc.
(6) The mounted hearth position detecting function enables automation of
the hearth rotation.

SECTION 1
2
1.2 Specifications
Acceleration voltage : - 4kV ～ -10 kV DC
Emission current (MAX) : 20cm３ Crucible ：0.8 A MAX （at -10kV）
40cm３ Crucible ：1.0 A MAX （at -10kV）
Maximum input power : 20cm３ Crucible ：8kW MAX
40cm３ Crucible ：10kW MAX
X-axis deflection coil : -0.4 A ～ -3.5A MAX -18Ｖ DC
2.8 (at 20 C)
Y-axis scan coil : 0 A ～±1.2A MAX± 12V DC)
0.9 (at 20 C)
Filament : 0V ～ 12V AC MAX 50A
Crucible: Quantity : 6
Capacity : EGL-206M ：20cm３
EGL-406M ：40cm３
Size : 20 cm３Crucible ： 42φ 32φ 19 H
40 cm３Crucible ： 50φ 41φ 25 H
Beam deflection angle : 270
Effective evaporation angle : 100 or more
Vapor deposition rate : 1.6 μm/min or more (Ribbon beam, Al 8 kW, 250H directly ab
ove
hearth, Crucible of 40cc)
Amount of cooling water : 10L/min or more 0.7MPa(max)
Water temperature : 15 C ～ 25 C
Hearth position detecting
mechanism
: NO contact; 4 set (Bit type)
Capacity: MAX １A 50VAC max
External dimension : 214W x 343D x 144
H, excluding protrusions. (See Chapter 8:
External Dimension Drawing of this document.)
Weight : Approx. 28 kg
Applied power supply : HPS-510S, HPS-1000S, HPS-1000N,HPS-1600F
CAUTION
1. The crucible capacity limits the maximum input power.
8 kW for a 20-cm3crucible and 10 kW for 40-cm3crucible.
2. For the cooling water, a water quality with a specific resistance of 5kΩ･cm or more is
recommended.
3. This EB gun cannot be baked. Set the temperature of the EB gun to 90 ﾟC or less.

SECTION 1
3
Fig. 1.1 Dimensional Drawing for EGL-206M/EGL-406M

SECTION 2
4
2. UNPACKING AND RECEIVING CHECK
2.1 Care to be taken in Unpacking
Carefully unpack the case containing the electron beam gun.
Prepare a clean room for inspecting the electron beam gun.
CAUTION
1. Handle the EB gun more carefully not to drop it.
2. Be careful not to hold the protruded portion of the electron beam gun or
hit the gun against other objects.
3. When lifting it, hold it at the hearth.
4.
Wear clean gloves and take out the electron beam gun.
2.2 Check after Unpacking
After the electron beam gun and all standard accessories have been taken out
from the case, check the following. If the electron beam gun is already
mounted in the coater, open the chamber so that the interior of the unit can be
inspected.
(1) Visually check the electron beam gun for scar or dent.
(2) Check protruded portions of the unit such as the cooling pipes, emitter
assembly and magnet coil electrodes for damage.
(3) Slowly turn the hearth by hand and check if it moves smoothly. Also
check that when the six crucibles have moved to their positions, they are
positioned properly with a click.
(4) Check the quantity of accessories referring to the Standard Spare Parts
List in Table 2.1.

SECTION 2
5
2.3 Standard Spare Parts List
Table 2.1
Q
’
ty
Item
Speci
fications
Part numbe
r
5
Filament
Tungsten, D=3.2
mm, L=14.5 mm
210004027700
2
Insulator
D=12 mm, L=22 mm
210004028100
4
Insulation bushing
OD=8 mm, ID=4 mm, L=3.5mm
210004028200
2
Fixed insulator
OD=5 , ID=4 mm, L=6.5mm
210004028300
2
Filament setscr
ew
M4
6
210004024000
1
O
-
ring
Neoprene ISO No. 210
C10000000001
3
O
-
ring
Neoprene ISO No. 213
C10000000002
2
O
-
ring
Viton JIS B2401 P9
C10000000417

SECTION 3
6
3. MOUNTING THE ELECTRON BEAM GUN
3.1 Necessary Equipment
(1) Power supply unit for electron beam gun
ULVAC HPS series electron beam gun power supply unit, such as
HPS-1000F, HPS-1600F, etc.
(2) Pumping unit for deposition 1 set
(3) Gun base (SUS 304) for the above 1 set
(4) High voltage feed-through 2P (dual)
(50 A, 12,000 VDC or more)
* ULCAV BERH-311A (100 A, 12,000 VDC, 1P) is recommended.
(5) Feed-through for magnet coil
(Current capacity: 5 A, breakdown voltage: 250 VAC or more)
* ULVAC recommends the use of PTS-004 (8P).
(6) Ground terminal
Fix an M10 bolt to the electron beam gun chamber wall and connect it to the
gun by means of a copper strip.
Outside the chamber, the bolt is connected to the earth cable and ground cable
of the E/B power supply.
* ULVAC recommends the use of ERZ-003.
(7) Grounding (10 or less)
* See the Electron Beam Gun Power Supply instruction manual.
(8) Flow switch
* ULVAC Model GTF-A (2 to 20 L/min) can be used.
(9) Chamber close switch 125 VAC, 0.5 A
(10) Vacuum interlock switch 125 VAC, 0.5 A
ULVAC Model DTA-001 can be used. Interlocking can be done more
effectively by using the meter relay of the ionization gauge.
(11) Water feed-through
Inside diameter: 8mm-dia. or more 2P/gun
(12) Evaporation source shutter mechanism 1 set
(13) Hearth rotation mechanism 1 set
Two-thirds turn of the hearth drive shaft of the EGL-206M/EGL-406M
moves one crucible.

SECTION 3
7
NOTE
If the hearth is to be driven with motor, the revolution of the hearth drive
shaft should be set at below 5 rpm.
(14) Electric current feed-through for hearth position detection
*ULVAC Model PTS-004 (8P) can be used.
However, this feed-through is not required if the hearth drive shaft is turned
by hand and a mechanism for detecting the crucible position mechanically is
provided.
(15) Cooling water equipment
The Model EGL-206M/EGL-406M requires a water flow rate of 10 L/min or
more. Water pressure requirement is 3 to 3.5 kg/cm2or more, which slightly
varies with piping arrangement and length.
If water flow rate is not enough, pressurization by installing a pressor pump
near the deposition equipment is needed.
WARNING
1. For thin piping subject to back-pressure or pressure loss, extra pressure
should be taken into account.
2. It is recommended to use water whose specific resistance is 5 k cm or
more (dissolved solid components 100 ppm or less). Water with a
specific resistance of less than 5 k cm can also be used, but the water
path in the hearth will be contaminated over a long time of operation,
resulting in insufficient cooling, which may shorten the service life of the
hearth.

SECTION 3
8
3.2 Installation of Electron Beam Gun
Always observe the following precautions for safe operation of the electron
beam gun. Wear clean gloves when handling parts to be installed in the
vacuum chamber.
(1) Gun base
Use a SUS304 stainless steel gun base.
CAUTION
Weight of EGL-206M /EGL-406M is 18kg, so the gun base needs enough
strength to bear the weight. Special attention is needed in case of making
notches or holes.
If the exhaust port is located under the gun base, make a notch or a hole in the
gun base so that the pumping efficiency is not lowered.
(2) Installation of electron beam gun
The electron beam gun installation area must be wide enough to easily mount
and dismount the emitter assembly in maintenance. Install the electron
beam gun in a horizontal position and couple it with the hearth rotation
mechanism. The hearth drive shaft can be installed in one of three directions.
Since it is installed in the rear as standard, it will be necessary to disassemble
and reinstall it if installed on the right or left. Two-thirds turn of the drive
shaft moves one crucible.
The system is so designed that when the six crucibles have moved to their
positions, they are positioned with a feeling of click. If it is to be driven by
motor, install an electric circuit that stops motor rotation when the crucible
has moved to their positions. The revolution of the hearth drive shaft should
be 5 rpm less. The electron beam gun is the magnetic deflection type. If
there is any ferromagnetic material near the magnetic pole, the magnetic flux
will concentrate on the material, causing magnetic loss or disturbance of the
magnetic flux distribution. Under this condition, the beam spot will be
deformed or the beam position will deflect, making normal operation
impossible. A steel bell jar can cause such a trouble.

SECTION 3
9
NOTE
The ferromagnet is more than 100 mm away from the electron beam gun. If
there is a magnetic device such as an ion pump nearby, make sure that the
magnetic flux density at the electron beam gun installation position is 1 Gauss
or less.
CAUTION
If a hearth of EGL-206M/EGL-406M is operated by a motor drive, take care
so that hand is not caught in the device
.
(3) Installing multiple EG guns (See Fig. 3.1.)
Magnetic interference will occur if two or more EB guns are installed in
proximity to each other. To prevent this, provide a space of more than 75
mm between the sides of EB guns when the filament is mounted in the
opposite direction. Also provide a space of more than 130 mm between the
sides of the EB guns when the filament is mounted in the same direction.
Even if these actions are taken, the beam spot may be deformed slightly or the
beam may not be deflected over the entire surface of the crucible.
(4) High voltage feed-through
In installing the H.V. feedthrough, avoid a location that provides easy access
to operator’s hand. Cover the electrode on the atmosphere side with a rigid
metal cover.
DANGER
The cover must be a sealed one that does not allow access of fingers, sticks or
the like.
(5) Filament cable
Use a single or multi-core copper cable having a cross section of 10 mm2or
more. Make wiring arrangement so that the distance between the filament
terminal of the electron beam gun and that the terminals of the high voltage
feedthrough is as short as possible and the gun shield (mentioned in the
latter part of this manual) can be easily set. The recommended wire
thickness is 4 mm in diameter if the cable length is around 20 cm, and 5 mm

SECTION 3
10
in diameter if it exceeds 20 cm. If the cable length is greater than this,
connect a solderless terminal to the end of the cable by welding (do not
solder). If the cable end is connected by compression alone, the connection
will become loose due to heat cycle and trouble may result. A multi-wire
cable can be used by simply clamping the terminal with a terminal cramper.
Filament cables are energized with a high voltage of 10 kVDC in maximum;
so lay cables at least 15 mm away from the ground potential portion.
NOTE
If filament cable is too short, a filament terminal has overstress by thermal
expansion in operation. It may cause deformation of a filament terminal or
causes displacement of a beam former. So recommended length of a filament
cable is more than 30cm.
(6) Gun shield (See Fig. 3.2.)
Cover the filament cables with a SUS304 stainless steel cover (0.4 to 1.0
mm). Since the filament cables are energized with a high voltage of 10
kVDC in maximum, keep a spacing of 15 mm or more between the gun shield
and the cable.
Also consider the exhaust conductance so that the vacuum level inside the
shield is not deteriorated due to gas emitted from evaporant.
If the gun shield is not provided, gas particles ionized with the electron beam
will sputter the filament cables and the cables will wear in a short time. It is
also likely that an insulation layer will be formed on the surface of the
filament cable and this may cause abnormal discharge. The ionized particles
will also enter the electron beam path and strike against a part of the emitter
assembly, causing local wear.
NOTE
1. Worn parts by sputtering of Ionized gas particles need replacement.
2. A filament cable tends to be sputtered locally. If sputtered part of the cable
become apox.80% compared to new one,
please
replace it.