Ulvac EGL-206M User manual

EB0007-03e
INSTRUCTION MANUAL
MULTI‐HEARTH ELECTRON BEAM SOURCS
model：EGL-206M/EGL-406M
4nd edition 2023/08/01
ULVAC, Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

EB0007-03e

EB0007-03e

EB0007-03e
This manual is intended to serve as a guide for safe and efficient use of this
electron beam source. It contains important information, such as cautions and
operating, inspecting and maintenance procedures that are required in using this
electron beam source. Carefully read this manual and fully understand them
before operation to prevent accidents and troubles.
CAUTION
Read this manual before operation and fully understand operating, inspecting and
maintaining procedures.
Do not operate this electron beam source before you fully understand them.
Carefully read and fully understand Safety Cautions and Safety .
Read this manual until you fully understand it and can operate the power
supply correctly.
Keep this manual at your hand for immediate reference.
If this electron beam source is moved to other location, attach this manual to
the power supply.
The contents of this manual are subject to change without notice for
improvement.
If you come up with any question or trouble, contact your local ULVAC
representative or ULVAC,Inc..
Always use the electron beam source safely and take care of it correctly.
NOTICE
No part of this may be copied or reproduced for use by a third party without
consent by ULVAC in writing.

EB0007-03e
Safety Cautions
1
Most accidents are attributed to careless operation, inspection, maintenance or
repair. Also failure to comply with safety cautions or predict potential danger is
responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an
early stage.
2
Personal injuries are caused by erroneous operation or inadequate maintenance or
inspection.
Never try to operate an electron beam source before you read sections on operation,
inspection and maintenance and fully understand them.
3
Safety denotations are used throughout this manual and are labeled on the
equipment.
Failure to comply with these warnings or cautions may lead to personal injuries or
loss of life.
4
The supervisor, operator and maintenance personnel should read this manual
before operation or maintenance. Only those who have been trained and know
how to operate correctly should operate this equipment using correct techniques
and tools.

EB0007-03e
Safety Denotations
Safety denotations are used throughout this manual and labeled on the equipment
to call operator s attention to safety.
Safety denotations are classified as follows.
DANGER Failure to comply with this involves the possibility of
impending death or serious personal injury.
WARNING Failure to comply with this involves the possibility of death or
serious personal injury.
CAUTION Failure to comply with this involves the possibility of a
medium degree of injury, though not serious, or serious
damage to the equipment.
NOTICE Failure to comply with this involves the possibility of damage
to or short life of the equipment.
It is hardly possible to predict all potential dangers in operation, inspection or
maintenance under all operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not
mean to meet all safety requirements.
In operating or maintaining this power supply, the operator or the maintenance
personnel must use every care so that any serious accident like personal injury
or damage to the equipment does not occur.
If operation, inspection or maintenance not described in this manual is
performed, it is the user s responsibility to take necessary care for safety.

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Warranty and Repair
Warranty
This EB gun has been shipped after rigorous inspection at the factory, but if any
trouble occurs due to defects or if any component is found damaged in transit,
please contact your local ULVAC organization or representative.
This EB gun is warranted free from defects in material or workmanship for a
period of one year from the date of shipment if it is properly operated and
maintained. If the trouble is evidently imputable to defects in material or
workmanship, ULVAC will correct it free of charge. However, troubles caused
by misuse or abuse of the equipment, negligence of operating instructions, or
modification or by force majeure are not covered by this warranty.
-Consumable parts, which are not covered by the warranty-
1. Filament 210004027700
2. Insulator 210004028100
3. Insulation bush 210004028200
4. Fixed insulator 210004028300
5. Beam former 210004025900
6. Anode plate 210004026400
In Repair
• Verification of trouble
If any trouble is found, check the trouble symptom and verify that it is a trouble
referring to "Maintenance" in this manual. Complete information about the
trouble will prevent loss on both sides due to misunderstanding or misjudgment
and allow us to take quick actions for repair.
• Service call
If you encounter any trouble or come up with any question, please contact your
local ULVAC representative.
In your service call, please furnish us with as complete information as possible,
including the name, model number and serial number of your equipment and
trouble symptom.

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• Repair period
In case of trouble, every effort will be made to correct it at the earliest possible
date, but it may take time to repair it if the unit is installed in a remote place or is
severely damaged. Replacement parts for units older than five years may not be
readily available because their production may have been discontinued. In that
event, repair will take longer.
FOR DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the
Electron Beam GUN. If hazardous material as evaporation material is used,
relegate the disposal to a professional disposal firm. You would be responsible for
the cost relating to disposal

EB0007-03e
Table of Contents
Page
FOR DISPOSAL.................................................................................................................................. 8
1. GENERAL ................................................................................................................................... 1
1.1 Features of EGL-206M/EGL-406M..................................................................................... 1
1.2 Specifications ....................................................................................................................... 2
2. UNPACKING AND RECEIVING CHECK................................................................................ 4
2.1 Care to be taken in Unpacking ............................................................................................. 4
2.2 Check after Unpacking......................................................................................................... 4
2.3 Standard Spare Parts List ..................................................................................................... 5
3. MOUNTING THE ELECTRON BEAM GUN ........................................................................... 6
3.1 Necessary Equipment........................................................................................................... 6
3.2 Installation of Electron Beam Gun....................................................................................... 8
3.3 Safeguards against X-Rays (See Fig. 3-5.)...................................................................... 13
4. OPERATION ............................................................................................................................. 19
4.1 Check before Operation...................................................................................................... 19
4.2 Operation of Electron Beam Gun....................................................................................... 21
5. DISASSEMBLY AND REASSEMBLY OF ELECTRON BEAM GUN ................................. 24
5.1 Changing Filament ............................................................................................................. 24
5.3 Parts List............................................................................................................................. 29
6. MAINTENANCE....................................................................................................................... 34
6.1 Preventive Maintenance ..................................................................................................... 35
6.2 Scheduled Inspection.......................................................................................................... 37
6.3 Troubleshooting Guide....................................................................................................... 40
7. TROUBLESHOOTING ................................................................................................................. 41