Ulvac EMP-07A User manual

D/N.MJOM115E, 2022.12 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-07A/07W
Export Control Policy
When applying our refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual provides information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and are
familiar with the safety precautions required to avoid possible injury. To ensure proper use of
this product, read this instruction manual carefully and keep this manual close at hand so that
you can use for reference during operation.
If you purchased other products and/or optional devices with this product, read relevant
instruction manuals carefully.
(1) It is prohibited to duplicate or distribute this instruction manual or any of its parts to a third
party without permission from ULVAC CRYOGENICS.
(2) Information in this document is subject to change without notice due to specification
change or the improvement of the product.
(3) If you have any questions or comments on this document, please contact us. Our contact
detail is listed at the end of this book.

II
Safety Conventions
Our products have been designed to provide extremely safe and reliable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices which
could result in severe injury or loss of life.
A caution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.
Low-temperature area present.
There is a risk of frostbite. Do not touch.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ················································································· 1
Disposal Considerations·········································································· 3
1. General Description of the System ·················································· 5
1.1 Liquid nitrogen generator (EMP-07A/07W) ································ 5
1.2 Helium compressor (SA/SW112-C) ············································ 5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator
(type: GN-10i) ······································································· 5
1.4 Pressure regulator set (when nitrogen gas is supplied from
the customer’s system)···························································· 5
2. Component Description ································································· 6
2.1 Front view of EMP-07A/07W (Figure 2-1)··································· 7
2.2 Operation panel of EMP-07A/07W (Figure 2-2) ··························· 7
2.3 Inside view of the EMP front door and lower panel (Figure 2-3)····10
2.4 EMP-07A/07W Electrical circuit (Figure 4-4)·····························12
2.5 EMP-07A/07W top surface······················································ 12
3. Flow Diagram ·············································································13
4. Specifications ··············································································14
4.1 Liquid nitrogen generator·······················································14
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator ············14
5. Utilities······················································································15
5.1 Power source (for EMP-07A/07W) ············································15
5.2 EMP-07W Cooling water (for water-cooled SW112-C only)···········15
5.3 Power source (for GN-10i)·······················································16
5.4 Nitrogen supply ···································································· 16
6. Installation·················································································17
6.1 Conditions for installation site ················································ 17
6.2 Connect GN-10i to power source ··············································18
6.3 Utility connection of EMP-07A/07W ·········································18

IV
7. Electric Wiring ············································································21
8. Operation ···················································································23
8.1 Checks prior to operation ·······················································23
8.2 Operation preparation ···························································23
8.3 Shutdown ············································································ 24
8.4 When suspending for long time (for 1 to 2 weeks) and resuming···24
8.5 Corrective action in the event of an error ·································· 25
9. Dispense Liquid Nitrogen Manually ···············································27
9.1 Connecting liquid nitrogen manual dispense flexible hose ···········27
9.2 Dispense liquid nitrogen ························································27
9.3 Disconnect flexible hoses for manual dispense ···························28
10. Automatic Transfer of Liquid Nitrogen············································29
10.1 Inspection before starting automatic transfer ···························· 29
10.2 Automatic transfer ································································29
10.3 Time limit of automatic transfer·············································· 29
11. eco Mode ····················································································30
11.1 eco mode ··············································································30
12. Maintenance and Inspection··························································31
12.1 Daily inspection ····································································31
12.2 Periodical maintenance/inspection ···········································31
12.3 Regular customer inspection ··················································· 32
13. Troubleshooting···········································································33
14. Accessories ·················································································36
15. Warranty····················································································37

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied.
It is extremely dangerous to touch the live part inside the unit. Make sure to turn
OFF the main power source before performing installation, maintenance or
repair. Contacting the internal parts that are not insulated may damage human
body or equipment such as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen level
in the atmosphere (the oxygen concentration of 18% or below is defined as an
oxygen-depleted state). Choose a well-ventilated and good-air-circulated
location to install the present unit, and install a ventilator with a capacity of at
least 2000 m3/Hr airflow. In addition, do not stay together with a Dewar
containing liquid nitrogen in a sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining
atmospheric pressure liquid nitrogen in an airtight space produces
high-pressure gas as high as 700 Atm, possibly resulting in explosion. Use
liquid nitrogen in the condition constantly open to air.
1. Danger of electric shock: Do not touch the
live part.
2. Danger of oxygen deficiency:
Ventilate well.
3. Danger of explosion: Do not seal LN2.

2
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is
directly handled, frostbites, loss of sight, and others are foreseen. Be sure to
wear leather gloves, goggles, trousers without turnips, etc. to handle liquid
nitrogen. In addition, take care of liquid nitrogen transport piping, too. In this
unit, there is a part with danger of burns if it is touched directly. Carry out
maintenance, repair, etc. at least 30 minutes after the unit is stopped.
High-pressure Helium gas is filled in the EMP. To disassemble or dispose of the
unit, parts, and others, be sure to discharge gas (under regular maintenance,
there is no need to discharge gas). In addition, never attempt to install the
apparatus under the atmosphere of hydrochloric acid-based, chlorine
gas-based, and other corrosive gases.
5. Danger of Explosion: Do not expose to
corrosive gases.
4. Danger of burns or frostbites: Never touch high
temperature and ultra-low temperature parts.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of industrial waste is regulated by national or local governments.
Follow all applicable local or national laws, regulations or guidelines when
disposing of our products.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us when necessary.
WARNING
When the refrigerator unit is contaminated by toxic or dangerous gases, you must
contact your safety supervisor at the time of disposal, and follow the instructions
to remove hazardous substances before disposing.

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