Ulvac EMP-07A User manual

D/N.MJOM115E, 2022.12 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-07A/07W
Export Control Policy
When applying our refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual provides information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and are
familiar with the safety precautions required to avoid possible injury. To ensure proper use of
this product, read this instruction manual carefully and keep this manual close at hand so that
you can use for reference during operation.
If you purchased other products and/or optional devices with this product, read relevant
instruction manuals carefully.
(1) It is prohibited to duplicate or distribute this instruction manual or any of its parts to a third
party without permission from ULVAC CRYOGENICS.
(2) Information in this document is subject to change without notice due to specification
change or the improvement of the product.
(3) If you have any questions or comments on this document, please contact us. Our contact
detail is listed at the end of this book.

II
Safety Conventions
Our products have been designed to provide extremely safe and reliable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices which
could result in severe injury or loss of life.
A caution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.
Low-temperature area present.
There is a risk of frostbite. Do not touch.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ················································································· 1
Disposal Considerations·········································································· 3
1. General Description of the System ·················································· 5
1.1 Liquid nitrogen generator (EMP-07A/07W) ································ 5
1.2 Helium compressor (SA/SW112-C) ············································ 5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator
(type: GN-10i) ······································································· 5
1.4 Pressure regulator set (when nitrogen gas is supplied from
the customer’s system)···························································· 5
2. Component Description ································································· 6
2.1 Front view of EMP-07A/07W (Figure 2-1)··································· 7
2.2 Operation panel of EMP-07A/07W (Figure 2-2) ··························· 7
2.3 Inside view of the EMP front door and lower panel (Figure 2-3)····10
2.4 EMP-07A/07W Electrical circuit (Figure 4-4)·····························12
2.5 EMP-07A/07W top surface······················································ 12
3. Flow Diagram ·············································································13
4. Specifications ··············································································14
4.1 Liquid nitrogen generator·······················································14
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator ············14
5. Utilities······················································································15
5.1 Power source (for EMP-07A/07W) ············································15
5.2 EMP-07W Cooling water (for water-cooled SW112-C only)···········15
5.3 Power source (for GN-10i)·······················································16
5.4 Nitrogen supply ···································································· 16
6. Installation·················································································17
6.1 Conditions for installation site ················································ 17
6.2 Connect GN-10i to power source ··············································18
6.3 Utility connection of EMP-07A/07W ·········································18

IV
7. Electric Wiring ············································································21
8. Operation ···················································································23
8.1 Checks prior to operation ·······················································23
8.2 Operation preparation ···························································23
8.3 Shutdown ············································································ 24
8.4 When suspending for long time (for 1 to 2 weeks) and resuming···24
8.5 Corrective action in the event of an error ·································· 25
9. Dispense Liquid Nitrogen Manually ···············································27
9.1 Connecting liquid nitrogen manual dispense flexible hose ···········27
9.2 Dispense liquid nitrogen ························································27
9.3 Disconnect flexible hoses for manual dispense ···························28
10. Automatic Transfer of Liquid Nitrogen············································29
10.1 Inspection before starting automatic transfer ···························· 29
10.2 Automatic transfer ································································29
10.3 Time limit of automatic transfer·············································· 29
11. eco Mode ····················································································30
11.1 eco mode ··············································································30
12. Maintenance and Inspection··························································31
12.1 Daily inspection ····································································31
12.2 Periodical maintenance/inspection ···········································31
12.3 Regular customer inspection ··················································· 32
13. Troubleshooting···········································································33
14. Accessories ·················································································36
15. Warranty····················································································37

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied.
It is extremely dangerous to touch the live part inside the unit. Make sure to turn
OFF the main power source before performing installation, maintenance or
repair. Contacting the internal parts that are not insulated may damage human
body or equipment such as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen level
in the atmosphere (the oxygen concentration of 18% or below is defined as an
oxygen-depleted state). Choose a well-ventilated and good-air-circulated
location to install the present unit, and install a ventilator with a capacity of at
least 2000 m3/Hr airflow. In addition, do not stay together with a Dewar
containing liquid nitrogen in a sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining
atmospheric pressure liquid nitrogen in an airtight space produces
high-pressure gas as high as 700 Atm, possibly resulting in explosion. Use
liquid nitrogen in the condition constantly open to air.
1. Danger of electric shock: Do not touch the
live part.
2. Danger of oxygen deficiency:
Ventilate well.
3. Danger of explosion: Do not seal LN2.

2
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is
directly handled, frostbites, loss of sight, and others are foreseen. Be sure to
wear leather gloves, goggles, trousers without turnips, etc. to handle liquid
nitrogen. In addition, take care of liquid nitrogen transport piping, too. In this
unit, there is a part with danger of burns if it is touched directly. Carry out
maintenance, repair, etc. at least 30 minutes after the unit is stopped.
High-pressure Helium gas is filled in the EMP. To disassemble or dispose of the
unit, parts, and others, be sure to discharge gas (under regular maintenance,
there is no need to discharge gas). In addition, never attempt to install the
apparatus under the atmosphere of hydrochloric acid-based, chlorine
gas-based, and other corrosive gases.
5. Danger of Explosion: Do not expose to
corrosive gases.
4. Danger of burns or frostbites: Never touch high
temperature and ultra-low temperature parts.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of industrial waste is regulated by national or local governments.
Follow all applicable local or national laws, regulations or guidelines when
disposing of our products.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us when necessary.
WARNING
When the refrigerator unit is contaminated by toxic or dangerous gases, you must
contact your safety supervisor at the time of disposal, and follow the instructions
to remove hazardous substances before disposing.

4
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ULVAC CRYOGENICS INCORPORATED 5
1. General Description of the System
1.1 Liquid nitrogen generator (EMP-07A/07W)
EMP-07A/07W Liquid Nitrogen Generator produces liquid nitrogen by cooling
down, condensing and liquefying nitrogen gas with the cold head (S030Z).
Liquid nitrogen is stored in the dewar inside, and can be dispensed to another
container with easy operation. With the optional automatic transfer system,
liquid nitrogen can be automatically transferred to the Dewar of customers’
equipment. Refer to the Specifications and Drawings tailored to your system for
the detail of optional devices.
Nitrogen gas source can be selected from two types; (1) PSA nitrogen generator,
(2) Customer’s nitrogen supply.
Liquid nitrogen generator is hereafter referred to as “EMP-07A/07W” or “EMP”
in this book. It is also called “EMP-07A” for the model with air-cooled
compressor SA112-C, and “EMP-07W” with water-cooled compressor SW112-C
when needed to be specified.
1.2 Helium compressor (SA/SW 112-C)
This unit is installed at the bottom inside the EMP-07A/07W, compresses helium
gas to supply to the cold head to provide cryogenic temperatures. It is
automatically turned on and off by the control circuit of EMP-07A/07W.
Helium compressor is hereafter referred to as SA112-C for air-cooled type and
SW112-C for water-cooled type in this book. It may be described as
SA/SW112-C when it does not need to be distinguished.
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type: GN-10i)
PSA Nitrogen Generator GN-10i generates highly concentrated nitrogen from the
air using adsorber and supply the gas to EMP-07A/07W. Nitrogen generated
here is used as the material for liquid nitrogen and is also used to take out liquid
nitrogen.
PSA nitrogen generator is hereafter called “GN-10i” in this manual.
1.4 Pressure regulator set (when nitrogen gas is supplied from the customer’s
system)
A set of nitrogen pressure regulator is equipped when the system is supplied
nitrogen gas from customer’s system.

6
液化窒素手動取り出し口
操作パネル
圧力計
非常停止スイッチ
空気吸い込み口 ＳＡ１１２表示部
ＲＵＮ／ＳＴＯＰ ＲＥＳＥＴ
ＡＵＴＯ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＡＵＴＯ
ＭＡＮＵ
ＳＴＡＲＴ ＳＴＯＰ
ｅｃｏ
ＭＡＮＵ
Ｍａｉｎｔｅｎａｎｃｅ
ＣＯＭＰ．ＡＬ．
ＧＮ２ ＡＬ．
Ｌ
０
４０
ＯＲ
温度計
３０
２０
１０
2. Component Description
Figure 2-1 Front view of EMP-07A
Figure 2-2 Operation panel of EMP-07A/07W
Pressure gauge
Emergency OFF button
Operation panel
LN2 Manual dispense
port
Display of SA112-CAir inlet port
(SW112-C displays the
same content as well.)
EMP-07W has no air inlet
port as the compressor unit
is water-cooled SW112-C.
TEMP
Meter

ULVAC CRYOGENICS INCORPORATED 7
2.1 Front view of EMP-07A/07W (Figure 2-1)
Emergency off button :Press this button to interrupt power supply to the
control circuit to stop operations such as liquid
nitrogen transfer, etc. Do not use the emergency
off button except for emergency.
Front door :Remove two screws to open this door. Inside the
door, there are a liquid nitrogen dewar, a cold
head and electric circuits. Open this door only for
periodic inspection, maintenance and repair
services.
LN2 manual dispense port :Press the panel to open. Inside the panel, there is
a tube connector to connect flexible hose to
dispense liquid nitrogen. The port may reach
extremely low temperature during or immediately
after dispensing liquid nitrogen.
Pressure Gauge : Displays the pressure inside the dewar.
SA/SW112-C Display :Displays the status of SA/SW112-C. When
SA/SW112-C encounters an error state, press
RUN/STOP button to reset.
Air inlet port :Port to intake air for cooling SA112-C. This
port must not be blocked. SW112-C does not have
this port.
2.2 Operation panel of EMP-07A/07W (Figure 2-2)
RUN/STOP :Use this button to start or stop the main unit.
Green light turns on during normal operation, and
blinks when an error occurs. The light will turn
off when the system is in “eco”-mode standby.
RESET : This switch is used to reset the error state after
eliminating the cause of error.
AUTO READY :Use this button to use automatic transfer function.
While the AUTO READY is turned ON, the
system is in the stand-by mode, and auto-dispense
to the set destination is possible by receiving the
signal. The button lights green while waiting for
automatic transfer. When the level sensor of the
dewar encounters any trouble, green light blinks.
AUTO SUPPLY : Use this button to start dispensing liquid
nitrogen using the optional automatic transfer

8
function with our level sensor. When automatic
supply is activated, white light turns on.
MANU START : Press this button to manually dispense liquid
nitrogen from LN2 manual dispense port. (To be
referred to as “manual dispense”) The manual
dispense is terminated automatically in 10
minutes. This button lights in green during manual
dispense and starts blinking 30 seconds in
advance to automatic termination. Press this
button once again while it is blinking to extend 10
minutes.
MANU STOP : Press this button to interrupt manual dispense.
Indicator : Displays the approximate amount of remaining
liquid nitrogen in the dewar.
eco : Press this button to switch to eco-mode
operation. The button lights in blue while in eco
mode. Refer to "12. eco mode" for the detail.
COMP. AL. : Red light turns on when the SA/SW112-C
encounters trouble. The RUN/STOP button blinks
at the same time.
GN2 AL. : Red light turns on when nitrogen gas generator
stops due to an error. RUN/STOP switch also
blinks.
Maintenance : This light turns on when the maintenance
interval is reached.The interval is determined
depending on the nitrogen source; for the system
with GN-10i, the operating hours of GN-10i, and
for the system with nitrogen gas supply, the
operating hours of compressor.
Temperature meter : This shows the temperature inside the dewar.
A blank panel is set when the system has no
temperature meter.

ULVAC CRYOGENICS INCORPORATED 9
ＲＵＮ
ＴＥMP．ＡＬ．
ＰＲＥＳＳ．ＡＬ．
Ｈｅ ＰＲＥＳＳＵＲＥＭＥＴＥＲ
ＲＵＮ／ＳＴＯＰ
Ｈｅ ＧＡＳ ＣＨＡＲＧＥ
ＨＯＵＲ ＭＥＴＥＲ
Ｌ
Ｒ
Ｓ０３０Ｚ
ＳＡ１１２
He PRESSUREMETER
L/Rｽｲｯﾁ
RUN/STOPスイッチ
HOUR METER
RUNランプ
TEMP.AL.ランプ
PRESS.AL.ランプ
電気回路部
圧力計 コールドヘッド
He GAS CHARGE
コンプレッサー
圧力調整器
窒素ガス流量計
流量調整弁
液体窒素デュワー
Figure 2-3 Inside view of EMP-07A front door and lower panel
Pressure
Gauge
LN2 Dewar
Cold Head
Electrical
Circuit
RUN light
TEMP.AL light
PRESS.AL light
Compressor
SA/SW112
-C
(SA112
-C in this
figure)
窒素ガス調整機器 一式
（窒素ガスご支給方式の場合）
Pressure Regulator
N2 Flow Meter
Flow Control Valve
N
2 gas control devices
(
for the system nitrogen gas
supplied from customer’s
equipment)
L/R Switch
RUN/STOP Switch

10
2.3 Inside view of the EMP front door and lower panel (Figure 2-3)
Liquid nitrogen dewar :Stores liquid nitrogen (Maximum 40 litters).
Cold head (S030Z) :The cold head works in conjunction with the
compressor to generate ultra-low temperature.
The cold head needs maintenance services
according to the time in operation.
Pressure gauge :Displays the pressure inside the dewar.
He PRESSURE METER :Displays the pressure of helium gas filled in
the compressor unit.
He GAS CHARGE port :Used when charging helium gas. Do not touch
this port except when needed, as touching it
may result in helium leakage.
RUN/STOP switch :Use this button to switch between ON and
OFF SA/SW112-C. Normally, turn this
button to “RUN” position. This button is
also used to reset when the compressor
encounters an error.
L/R Switch :This button is to switch between REMOTE
and LOCAL operation. When in REMOTE
mode, turning ON and OFF the SA/SW112-C
is done by the EMP control circuit. When in
LOCAL mode, it is done by RUN/STOP
自動供給配管継手
レベル計変換器 ヒューズ
電源ブレーカー
シーケンサー
端子台
Circuit breaker
Sequencer
Level sensor
Fuse
Terminal
block
Port for automatic
transfer piping
Figure 2-5 Electrical circuit
Figure 2-5 EMP-07A

ULVAC CRYOGENICS INCORPORATED 11
switch on SA/SW112-C. Normally, set this
button to REMOTE position. Do not turn to
LOCAL as it disables controlling from the
EMP.
RUN light :This lights in green when SA/SW112-C is in
operation.
TEMP.AL light :This lights in red when SA/SW112-C is
suspended due to abnormal temperature.
PRESS.AL light :This lights in red when SA/SW112-C is
suspended with abnormal helium gas pressure.
Hour meter :Displays the total operating hours of
SA/SW112-C. Use this information to
conduct maintenance work properly.

12
2.4 EMP-07A/07W Electrical circuit (Figure 4-4)
Circuit breaker :This is a protective breaker for control circuit of
the EMP. It is tripped when an electric leak or
short-circuit occurs.
Fuse :There are protective fuses (F-1, 2: 3A) for AC
circuit and protective fuses (F3: 2A) for DC
circuit.
Sequencer :A controller used to control the operation of the
EMP system. This functions to operate the
necessary unit upon reception of signal from each
sensor. In the event of an error in this unit, please
inform us of the status of input or output lights of
the sequencer when contacting us.
Level sensor converter :It is the electric parts for detecting the amount of
liquid nitrogen in the dewar. Since it is adjusted
precisely, please do not touch any button.
Terminal blocks :These connect the wiring of signal reception of
the electric appliances and automatic transfer
destination.
2.5 EMP-07A/07W top surface
Port for automatic supply piping :3/8” Swagelok connector to connect liquid
nitrogen automatic transfer tube. Do not touch
during and immediately after dispensing liquid
nitrogen as it is in extremely low temperature.

ULVAC CRYOGENICS INCORPORATED 13
3. Flow Diagram
The figure below shows the standard system.
Refer to your Specifications and Drawings for the detail.
Figure 3-1 Flow Diagram
（C1220T）
φ6.35×ｔ１
（SUS304TP）
φ９．５３×ｔ０．８
Ｐ
φ６×ｔ１
（Ｃ１２２０Ｔ）
φ１２．７×ｔ１
ＬＶ－１
φ９．５３×ｔ０．８
（Ｃ１２２０Ｔ）
（C1220T）
φ６．３５×ｔ１
ＬＶ－２
ＳＶ－１
（C1220T）
ＳＶ－２
φ９．５３×ｔ０．８９
ＳＶ－３
Cryogenic Solenoid Valve (AUTO)
Cryogenic Solenoid Valve (Manual)
LN2 Transfer Tube
LN2 Dispense
Flexible Hose
Pressure Regulator Valve
Normal Temperature Solenoid Valve
Gas Release Tube (T3)
Neck Tube (NT)
Upper Mirror Panel (UM)
Sheathed Thermocouple (T)
Inner Cylinder (IP)
Level Sensor (LS)
Lower Mirror Panel (LM)
Auto Transfer Pipe (T1)
LN2 Dispense Tube (TO)
Manual Dispense Tube (T2)
Thermocouple Protection Tube (T6)
Top Flange (TF)
Temperature Indicator (TI)
Pressure Meter Tube (T5)
Safety Valve Tube (T4)
Coldhead Cable
Helium Gas Tube
1st Stage Cylinder (SYL)
LN2 Dewar (DE)
Remote Cable
Power Cable
Compressor
Helium
N2 Gas Tube (T7)
N2 Gas Generator
Cooling Water Hose (for EMP-07W)
(Polyurethane)
Pressure Gauge
Safety Valve
Power Cable Control Circuit

14
4. Specifications
4.1 Liquid nitrogen generator
Model : EMP-07A/07W
Amount of liquid nitrogen generated : 6L/day (50Hz), 8L/day (60Hz)
High pressure gas processing capacity : 5.2 m3/day
Dimensions : 600[W]x750 [D]x1628 [H](mm)
Weight EMP-07A : Approx. 220 kg (excluding LN2)
EMP-07W : Approx. 230 kg (excluding LN2)
LN2 capacity : Maximum 40L
Cold head : S030Z
Compressor EMP-07A : SA112-C Air-cooled (Air intake
from front, exhaust from back)
EMP-07W : SW112-C Water-cooled (Cooling
water hose attached on the back)
Ambient conditions : Ambient temperature: 10 – 35°C
Relative humidity: 80% or less
(Non-condensation other than LN2
manual dispense port)
The EMP must be installed indoors.
EMP-07A is air-cooled type. Clear the space of 600mm from the air intake and
300mm from the exhaust port.
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator
Type : GN-10i
Dimensions : 400[W] ×460[D] ×900[H] (mm)
Weight : Approx.60kg
Cooling method : Air-cooling (inhale from front,
exhaust from back)
GN-10i must be installed indoors.
GN-10i must not be used in the atmosphere of organic solvents or corrosive gases.
Air inhaled from the front is discharged to the backside. Clear the space of
600mm from the air intake and 300mm from the exhaust port.