Ulvac EMP-14A User manual

D/N.MJOM116E, 2019OR04 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-14A
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual gives information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and
are familiar with the safety precautions required to avoid possible injury. To ensure proper
use of this product, read this instruction manual carefully and keep this manual close at
hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.
(1) It is strictly prohibited to duplicate or distribute this instruction manual or any of its
parts to a third party without written permission from ULVAC CRYOGENICS.
(2) Information in this document is subject to change without notice due to specification
change or the improvement of the product.
(3) If you have any questions or comments on this document, please do not hesitate to
contact us. The phone numbers of local customer support centers are listed at the
end of this manual.

II ULVAC CRYOGENICS INCORPORATED
Safety Conventions
Our products have been designed to provide extremely safe and reliable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
CAUTION
A caution describes safety hazards or unsafe practices
which could result in personal injury or equipment
damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.
Low-temperature area present.
There is a risk of frostbite. Do not touch.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ·················································································1
Disposal Considerations··········································································3
1. General Description of the System ····················································5
1.1 Liquid nitrogen generator（EMP-14A）·······································5
1.2 Helium gas compressor (model:SA115-C) ····································5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i)··5
1.4 Membrane Nitrogen Generator (type IM-120) ································5
2. Component Description···································································6
2.1 Front view of EMP-14A (Figure 2-1) ············································7
2.2 Operation panel of EMP-14A (Figure 2-2)·····································7
2.3 Inside of EMP-14A front door and lower panel (Figure 2-3)············· 11
2.4 Inside the lower panel on the back············································ 11
2.5 EMP-14A Electrical circuit（Figure 2-4）··································· 12
2.6 EMP-14A Top side (Figure 2-5) ················································ 12
3. Flow Diagram·············································································· 13
4. Specifications·············································································· 14
4.1 Liquid nitrogen generator························································ 14
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator·············· 14
4.3 Membrane nitrogen gas generator ············································ 14
5. Utilities ······················································································ 15
5.1 Power source (for EMP-14A) ··················································· 15
5.2 Power source (for the use with GN-10i)······································ 15
5.3 Dry air for IM-120 (when using IM-120)······································ 15
6. Installation·················································································· 16
6.1 Conditions of installation site ··················································· 16
6.2 Connection of GN-10i to power source ······································ 17
6.3 Dry air connection to IM-120···················································· 17
6.4 Utility connection of EMP-14A·················································· 17

IV ULVAC CRYOGENICS INCORPORATED
7. Electric Wiring············································································· 20
8. Operation··················································································· 22
8.1 Checks prior to operation························································ 22
8.2 Prepare for operation ····························································· 22
8.3 Shutdown ············································································ 23
8.4 When resuming EMP-14A after suspending for 1 or 2 weeks·········· 23
8.5 Corrective action in the event of an error···································· 24
8.6 Emergency off ······································································ 25
9. Dispense Liquid Nitrogen Manually·················································· 26
9.1 Connecting liquid nitrogen flexible hose ····································· 26
9.2 Dispense liquid nitrogen ························································· 26
9.3 Disconnecting flexible hoses···················································· 27
10. Automatic Transfer of Liquid Nitrogen··············································· 28
10.1 Inspections before starting automatic transfer ····························· 28
10.2 Automatic transfer ································································· 28
10.3 Time limit of automatic transfer················································· 28
11. eco Mode··················································································· 29
11.1 eco mode ············································································ 29
12. Maintenance and Inspections ························································· 30
12.1 Daily inspection ···································································· 30
12.2 Periodical maintenance/inspection············································ 30
12.3 Regular customer inspection ··················································· 31
13. Troubleshooting··········································································· 32
14. Accessories················································································ 36
15. Warranty···················································································· 37

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen
concentration in the atmosphere (the oxygen concentration of 18% or below is defined
as an oxygen-depleted state). Choose a well-ventilated and good-air-circulated
location to install the present unit, and install a ventilator with a capacity of at least
1000m3/hour airflow. In addition, do not stay together with a dewar containing liquid
nitrogen in a sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Containing liquid nitrogen
of atmospheric pressure in an airtight space makes it into high-pressure gas as high
as 700atm, possibly resulting in explosion. Use liquid nitrogen in the condition
constantly open to air.
1. Danger of electric shock: Do not touch live part.
2. Danger of oxygen deficiency:
Ventilate well.
3. Danger of explosion: Do not seal LN2.

2 ULVAC CRYOGENICS INCORPORATED
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is handled
without protective wear, frostbites, loss of sight, and other risks are anticipated. Be
sure to wear leather gloves, goggles, trousers without turnips, etc. to handle liquid
nitrogen. In addition, take care of liquid nitrogen transport piping, too. In this unit,
there is a part with danger of burns if it is touched directly. Carry out maintenance,
repair, etc. at least 30 minutes after the unit is stopped.
In this unit, high-pressure Helium gas is filled. To disassemble or dispose of the unit,
parts, and others, be sure to discharge gas (under regular maintenance, there is no
need to discharge gas). In addition, never attempt to install the apparatus under the
atmosphere of hydrochloric acid-based, chlorine gas-based, and other corrosive
gases.
5. Danger of Explosion: DO NOT expose to
corrosive gases.
4. Danger of burns or frostbites:
Never touch high temperature and
ultra-low temperature parts.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of industrial waste is regulated by national or local governments. Follow all
applicable local or national laws, regulations or guidelines when disposing of our
products.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us when necessary.
WARNING
When the refrigerator unit may have pumped toxic or dangerous gases, you must
contact your safety supervisor at the time of disposal, and follow the instructions to
remove hazardous substances before disposing.

4 ULVAC CRYOGENICS INCORPORATED
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ULVAC CRYOGENICS INCORPORATED 5
1. General Description of the System
1.1 Liquid nitrogen generator（EMP-14A）
EMP-14A Liquid Nitrogen Generator provides liquid nitrogen by cooling down,
condensing and liquefying nitrogen gas with the cold head (Model:S050).
Liquid nitrogen is stored in the dewar, and can be dispensed to another container
with easy operation. With the optional automatic transfer system, liquid nitrogen
can be automatically transferred to the dewars of customers’ equipments.
Nitrogen gas source can be selected from two types; (1) PSA nitrogen generator,
(2) Membrane nitrogen generator.
Liquid nitrogen generator is hereafter referred to as “EMP-14A” in this manual.
1.2 Helium gas compressor (model:SA115-C)
This unit is mounted in the lower part of EMP-14A, compress Helium gas and
supply to the cold head to provide cryogenic temperatures. It is automatically
turned on and off by the control circuit of EMP-14A.
Helium gas compressor is hereafter referred to as “SA115-C” in this manual.
For details of this equipment, please refer to the operation manual for “SA115-C”.
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i)
PSA Nitrogen Generator GN-10i generates highly concentrated nitrogen from air
using adsorber and supply the gas to EMP-14A. The nitrogen generated here is
used as the material for liquid nitrogen and is also used to take out liquid nitrogen.
PSA nitrogen generator is hereafter called “GN-10i” in this manual. When we
describe things that are in common with membrane nitrogen generators, they are
collectively referred to as “nitrogen generators”.
Please refer to the operation manual of GN-10i for details.
1.4 Membrane Nitrogen Generator (type IM-120)
Membrane Nitrogen Generator IM-120 takes in dry air from user’s equipments
and generates highly concentrated nitrogen with membrane separation
technology. The nitrogen generated here is used as the material for liquid nitrogen,
and is also used to dispense liquid nitrogen.
Membrane nitrogen generator is hereafter called “IM-120” in this manual. When
we describe things that are in common with PSA nitrogen generators, they are
collectively referred to as “nitrogen generators”.
Please refer to the operation manual of IM-120 for details.

6 ULVAC CRYOGENICS INCORPORATED
2. Component Description
Figure 2-1 Front view of EMP-14A
ＲＵＮ／ＳＴＯＰ ＲＥＳＥＴ
ＡＵＴＯ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＡＵＴＯ
ＭＡＮＵ
ＳＴＡＲＴ ＳＴＯＰ
ｅｃｏ
ＭＡＮＵ
Ｍａｉｎｔｅｎａｎｃｅ
ＣＯＭＰ．ＡＬ．
ＧＮ２ ＡＬ．
Ｌ
０
８０
ＯＲ
６０
４０
２０
Ｔｅｍｐ．
ｍｏｎｉｔｏｒ
（ｏｐｔｉｏｎ）
Figure 2-2 Operation panel of EMP-14A
Emergency Off Button
Operation Panel
Pressure
Gauge
LN2 Manual Dispense Port
SA115-C Display
Air Entrance
Temperature
Meter
(Optional)

ULVAC CRYOGENICS INCORPORATED 7
2.1 Front view of EMP-14A (Figure 2-1)
Emergency off button Press this button to interrupt power supply to the
control circuit to stop such operations as dispensing
liquid nitrogen. Do not use this button except for
emergency.
Front door Remove two screws to open this door. Inside the
door, there are a liquid nitrogen dewar, a cold head
and electric circuits. Open this door only for periodic
inspection, maintenance and repair services.
LN2 manual dispense port Press the panel to open. Inside the panel, there is a
tube connector for liquid nitrogen flexible hose. Since
the port may reach extremely low temperature, use
cautions not to touch such port during or right after
dispensing liquid nitrogen.
Pressure gauge Displays the pressure inside the dewar.
SA115-C display Displays the status of SA115-C. Reset with
RUN/STOP button after the cause of an error
condition of SA115-C is cleared.
Air entrance This part is for taking air into SA115-C for air-cooling.
Do not block, always leave space in front.
2.2 Operation panel of EMP-14A (Figure 2-2)
RUN/STOP Use this button to start or stop the main unit. This
button lights green during normal operation, and
blinks when an error occurs. Note that the light is off
when the device is in eco-mode standby.
RESET This switch is used to clear the error state of
EMP-14A.
AUTO READY Use this button when you wish to use automatic

8 ULVAC CRYOGENICS INCORPORATED
transfer function. While the AUTO READY is ON, the
EMP is in stand-by mode for automatic transfer, and
automatic transfer to the destination set by receiving
the signal is possible. While standing by, the button
lights green. When the level sensor in the transfer
destination detects any trouble, green light blinks.
AUTO SUPPLY While using the optional automatic transfer function
with our level sensor, press this button to start
transfer while in stand-by mode. When automatic
transfer is activated, the button lights white.
MANU START Press this button to manually dispense liquid
nitrogen from LN2 manual dispense port. (To be
referred to as “Manual supply”) The manual supply is
terminated automatically in 10 minutes. This button
lights green during manual supply, and blinks from 30
seconds before the automatic termination. When
you wish to supply more, press this button again
while it is blinking to extend 10 more minutes.
MANU STOP Press this button to interrupt the manual supply of
liquid nitrogen supply operation.
Indicator Displays the guideline amount of liquid nitrogen in
the dewar.
eco Press this button to switch to eco-mode operation.
The button lights blue when in eco-mode. Refer to
"11. eco mode " for more detail.
COMP. AL. Lights red when the SA115-C encounters an error.
The RUN/STOP button blinks at the same time.
GN2 AL. The indicator lights red when the nitrogen gas
generator stops due to faults. Then RUN/STOP
switch blinks as well.

ULVAC CRYOGENICS INCORPORATED 9
Maintenance This light illuminates when the maintenance interval
of GN-10i is approaching.
Temperature meter Temperature meter is an optional. It displays the
temperature inside the dewar.

10 ULVAC CRYOGENICS INCORPORATED
Ｈｅ ＰＲＥＳＳＵＲＥＭＥＴＥＲ
電気回路部
液化窒素デュワー
圧力計 コールドヘッド
Ｓ０５０
コンプレッサー
ＳＡ１１５
ＯＰＥＲＡＴＩＯＮスイッチ
ＲＵＮＮＩＮＧ ＴＩＭＥ
Ｈｅ ＧＡＳ ＣＨＡＲＧＥ
Figure 2-3 Inside of EMP-14A front door and lower panel
自動供給配管継手
レベル計変換器 ヒューズ
電源ブレーカー
シーケンサー
端子台
Figure 2-4 Electrical circuit
Figure 2-5 Top of EMP-14A
Level sensor converter Fuse
Circuit breaker
PLC
Terminal
block
Automatic transfer port
Pressure gauge
Liquid nitrogen dewar
Cold head
S050
Electrical circuit
Compressor
SA115-C
Operation ON/OFF switch

ULVAC CRYOGENICS INCORPORATED 11
2.3 Inside of EMP-14A front door and lower panel (Figure 2-3)
Liquid nitrogen dewar Stores liquid nitrogen up to 40 liters.
Cold head (S050) The cold head works in conjunction with SA115-C
compressor to achieve ultra-low temperature. The
cold head requires maintenance services
according to the time it operates.
Pressure gauge Displays the pressure inside the dewar.
He PRESSURE METER Displays the pressure of helium gas filled in
SA115-C.
He Gas CHARGE The port for charging helium gas. Do not touch
except when needed, as touching it may result in
helium leakage.
OPERATION switch Use this lever to switch between start and stop of
SA115-C. Normally, move the lever upward. This
lever is also used to reset SA115-C in the event of
a failure.
RUNNING TIME Displays the total operation time of SA115-C.
Use this information to perform maintenance
properly.
2.4 Inside the lower panel on the back
L/R Switch Use this lever to choose whether to switch start
and stop of SA115-C from EMP-14Acontrol circuit
(REMOTE), or from RUN/STOP switch of
SA115-C (LOCAL). The default setting is
REMOTE. If it is changed to LOCAL, control of
EMP-14A is disabled.
(Back of SA115-C)

12 ULVAC CRYOGENICS INCORPORATED
2.5 EMP-14A Electrical circuit（Figure 2-4）
Power breaker This is a protective breaker for control circuit of
EMP-14A. It trips when an electric leak or
short-circuit occurs.
Fuse Protective fuses for AC circuit (F-1, 2: 3A) and
protective fuses for DC circuit (F3: 2A).
Sequencer A controller used to control the operation of
EMP-14A system. This functions to operate the
necessary devices upon reception of signal from
each sensor. In the event of an error, please
inform the status of input-and-output lights of the
sequencer when contacting us.
Level sensor converter An electric component for detecting the amount of
liquid nitrogen in EMP-14A. Since it is adjusted
precisely, do not touch any buttons.
Terminal block Connected to the wiring of signal reception of the
electric appliances and automatic transfer target
dewar.
2.6 EMP-14A Top side (Figure 2-5)
Automatic transfer port (Optional) Swagelok connector to connect
liquid nitrogen auto-transfer line. Do not touch
during and right after supplying liquid nitrogen as
it is extremely cold.

ULVAC CRYOGENICS INCORPORATED 13
3. Flow Diagram
<Note> The configuration may differ depending on the customer specifications.
Figure 3-1 Flow Diagram
ＬＶ－２
ＳＶ－１
ＳＶ－２
φ６×ｔ１
Ｐ
Control Circuit
Temperature Indicator （TI）: Optional
Pressure Meter
Pressure Relief Valve
Flexible Hose
LN2 Dispense
Ambient Temperature Solenoid Valve
Pressure Control Valve
Coldhead Cable
Helium Gas Tube
Helium Compressor
N2 Gas Generator
（Polyurethane Resin）
Power Cable
Power Cable
Remote Cable
Cryogenic Solenoid Valve (Manual)
Sheathed Thermocouple: Optional

14 ULVAC CRYOGENICS INCORPORATED
4. Specifications
4.1 Liquid nitrogen generator
Type :EMP-14A
Liquid nitrogen production rate :14L/day (50/60 Hz)
High pressure gas processing capacity :9.1 m3/day
Dimensions :600 [W] x 750 [D] x 1688 [H]
Weight :Approx. 235 kg (excluding LN2)
Liquid nitrogen storage capacity :Up to 40L
Cold head :S050
Compressor :SA115-C
Cooling method :Air-cooled (Intake air from the front, exhaust
from the back)
Ambient conditions :Ambient temperature: 10 – 35°C
Relative humidity: 80% or lower
(Non-condensation other than LN2 manual
dispense port)
EMP-14A is for indoor use only.
As EMP-14A is air-cooled, make sure that the air intake and exhaust ports
are always open, not blocked.
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator
Type :GN-10i
Dimensions :400[W] ×460[D] ×900[H]
Weight :Approx. 60kg
Cooling method :Air-cooled (Inhale from the front, exhaust
from the back)
GN-10i must be installed indoors.
The GN-10i are not usable under the atmosphere of organic solvent.
Air entered from the front is discharged from the back. Do not block the ports.
4.3 Membrane nitrogen gas generator
Type :IM-120
Dimensions :150[W] ×300[D] ×800[H]
Weight :Approx.20 kg
IM-120 must be installed indoors.
The IM-120 is unable in the atmosphere of organic solvent.