Ulvac EMP-14A User manual

D/N.MJOM116E, 2019OR04 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-14A
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual gives information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and
are familiar with the safety precautions required to avoid possible injury. To ensure proper
use of this product, read this instruction manual carefully and keep this manual close at
hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.
(1) It is strictly prohibited to duplicate or distribute this instruction manual or any of its
parts to a third party without written permission from ULVAC CRYOGENICS.
(2) Information in this document is subject to change without notice due to specification
change or the improvement of the product.
(3) If you have any questions or comments on this document, please do not hesitate to
contact us. The phone numbers of local customer support centers are listed at the
end of this manual.

II ULVAC CRYOGENICS INCORPORATED
Safety Conventions
Our products have been designed to provide extremely safe and reliable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
CAUTION
A caution describes safety hazards or unsafe practices
which could result in personal injury or equipment
damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.
Low-temperature area present.
There is a risk of frostbite. Do not touch.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ·················································································1
Disposal Considerations··········································································3
1. General Description of the System ····················································5
1.1 Liquid nitrogen generator（EMP-14A）·······································5
1.2 Helium gas compressor (model:SA115-C) ····································5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i)··5
1.4 Membrane Nitrogen Generator (type IM-120) ································5
2. Component Description···································································6
2.1 Front view of EMP-14A (Figure 2-1) ············································7
2.2 Operation panel of EMP-14A (Figure 2-2)·····································7
2.3 Inside of EMP-14A front door and lower panel (Figure 2-3)············· 11
2.4 Inside the lower panel on the back············································ 11
2.5 EMP-14A Electrical circuit（Figure 2-4）··································· 12
2.6 EMP-14A Top side (Figure 2-5) ················································ 12
3. Flow Diagram·············································································· 13
4. Specifications·············································································· 14
4.1 Liquid nitrogen generator························································ 14
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator·············· 14
4.3 Membrane nitrogen gas generator ············································ 14
5. Utilities ······················································································ 15
5.1 Power source (for EMP-14A) ··················································· 15
5.2 Power source (for the use with GN-10i)······································ 15
5.3 Dry air for IM-120 (when using IM-120)······································ 15
6. Installation·················································································· 16
6.1 Conditions of installation site ··················································· 16
6.2 Connection of GN-10i to power source ······································ 17
6.3 Dry air connection to IM-120···················································· 17
6.4 Utility connection of EMP-14A·················································· 17

IV ULVAC CRYOGENICS INCORPORATED
7. Electric Wiring············································································· 20
8. Operation··················································································· 22
8.1 Checks prior to operation························································ 22
8.2 Prepare for operation ····························································· 22
8.3 Shutdown ············································································ 23
8.4 When resuming EMP-14A after suspending for 1 or 2 weeks·········· 23
8.5 Corrective action in the event of an error···································· 24
8.6 Emergency off ······································································ 25
9. Dispense Liquid Nitrogen Manually·················································· 26
9.1 Connecting liquid nitrogen flexible hose ····································· 26
9.2 Dispense liquid nitrogen ························································· 26
9.3 Disconnecting flexible hoses···················································· 27
10. Automatic Transfer of Liquid Nitrogen··············································· 28
10.1 Inspections before starting automatic transfer ····························· 28
10.2 Automatic transfer ································································· 28
10.3 Time limit of automatic transfer················································· 28
11. eco Mode··················································································· 29
11.1 eco mode ············································································ 29
12. Maintenance and Inspections ························································· 30
12.1 Daily inspection ···································································· 30
12.2 Periodical maintenance/inspection············································ 30
12.3 Regular customer inspection ··················································· 31
13. Troubleshooting··········································································· 32
14. Accessories················································································ 36
15. Warranty···················································································· 37

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen
concentration in the atmosphere (the oxygen concentration of 18% or below is defined
as an oxygen-depleted state). Choose a well-ventilated and good-air-circulated
location to install the present unit, and install a ventilator with a capacity of at least
1000m3/hour airflow. In addition, do not stay together with a dewar containing liquid
nitrogen in a sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Containing liquid nitrogen
of atmospheric pressure in an airtight space makes it into high-pressure gas as high
as 700atm, possibly resulting in explosion. Use liquid nitrogen in the condition
constantly open to air.
1. Danger of electric shock: Do not touch live part.
2. Danger of oxygen deficiency:
Ventilate well.
3. Danger of explosion: Do not seal LN2.

2 ULVAC CRYOGENICS INCORPORATED
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is handled
without protective wear, frostbites, loss of sight, and other risks are anticipated. Be
sure to wear leather gloves, goggles, trousers without turnips, etc. to handle liquid
nitrogen. In addition, take care of liquid nitrogen transport piping, too. In this unit,
there is a part with danger of burns if it is touched directly. Carry out maintenance,
repair, etc. at least 30 minutes after the unit is stopped.
In this unit, high-pressure Helium gas is filled. To disassemble or dispose of the unit,
parts, and others, be sure to discharge gas (under regular maintenance, there is no
need to discharge gas). In addition, never attempt to install the apparatus under the
atmosphere of hydrochloric acid-based, chlorine gas-based, and other corrosive
gases.
5. Danger of Explosion: DO NOT expose to
corrosive gases.
4. Danger of burns or frostbites:
Never touch high temperature and
ultra-low temperature parts.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of industrial waste is regulated by national or local governments. Follow all
applicable local or national laws, regulations or guidelines when disposing of our
products.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us when necessary.
WARNING
When the refrigerator unit may have pumped toxic or dangerous gases, you must
contact your safety supervisor at the time of disposal, and follow the instructions to
remove hazardous substances before disposing.

4 ULVAC CRYOGENICS INCORPORATED
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