Ulvac EMP-14W User manual

D/N. MJCE004E, 2019.01 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-14W
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual gives information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and
are familiar with the safety precautions required to avoid possible injury. To ensure proper
use of this product, read this instruction manual carefully and keep this manual close at
hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.
General Precautions
(1) It is strictly prohibited to duplicate or reproduce this manual either partially or entirely,
or disclose or transfer to a third party without written permission from ULVAC
CRYOGENICS.
(2) Information in this document is subject to change without notice, along with the
specification change or improvement of the product.
(3) If you have any questions or comments on this document, please contact us. The
contact details are listed at the end of this book.

II ULVAC CRYOGENICS INCORPORATED
Safety Conventions
Our products have been designed to provide extremely safe and dependable operation when
properly used. Following safety precautions must be observed during normal operation and
when servicing them.
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.
CAUTION
A caution describes safety hazards or unsafe practices
which could result in personal injury or equipment
damage.
Low-temperature area present.
There is a risk of frostbite. Do not touch.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ··················································································· 1
Disposal Considerations············································································· 3
1. General Description of the System ····················································· 5
1.1 Liquid nitrogen generator (EMP-14W) ············································· 5
1.2 Helium gas compressor (model:SW115) ············································ 5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator ······················ 5
1.4 Membrane Nitrogen Generator (type IM-120) ··································· 5
2. Component Description ···································································· 6
2.1 Front view of EMP-14W (Figure 2-1) ··············································· 7
2.2 Operation panel of EMP-14W (Figure 2-2)········································ 7
2.3 Inside view of EMP-14W front door and lower panel ························ 10
2.4 Inside the lower back panel of EMP-14W ······································· 10
2.5 EMP-14W Electric Circuit (Figure 2-4) ···········································11
2.6 Top of the EMP-14W (Figure 2-5) ···················································11
3. Flow Diagram ················································································12
4. Specifications·················································································13
4.1 Liquid nitrogen generator ···························································· 13
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator ················· 13
4.3 Membrane nitrogen gas generator ················································· 13
5. Utilities ························································································14
5.1 Power source (for EMP-14W) ························································ 14
5.2 Power source for GN-10i (when using GN-10i) ································ 14
5.3 Dry air for IM-120 (when using IM-120)········································· 14
6. Installation ···················································································15
6.1 Conditions for installation place···················································· 15
6.2 Connection of GN-10i to power source············································ 16
6.3 Dry air connection of IM-120 ························································ 16
6.4 Utility connection of EMP-14W ····················································· 16

IV ULVAC CRYOGENICS INCORPORATED
7. Electric Wiring···············································································19
8. Operation······················································································21
8.1 Checks prior to operation ····························································· 21
8.2 Preparation for operation ····························································· 21
8.3 Shutdown··················································································· 22
8.4 When suspending for long time (for 1 to 2 weeks) and
resuming EMP-14W····································································· 22
8.5 Corrective action in the event of an error ······································· 23
9. Dispense Liquid Nitrogen Manually ··················································25
9.1 Connecting liquid nitrogen supply flexible hose······························· 25
9.2 Supply of liquid nitrogen ······························································ 25
9.3 Disconnection of the flexible hose ·················································· 26
10. Automatic Transfer of Liquid Nitrogen ··············································27
10.1 Inspections before starting automatic transfer ································ 27
10.2 Automatic transfer ······································································ 27
10.3 Time limit of automatic transfer ··················································· 27
11. eco Mode ·······················································································28
11.1 eco mode ···················································································· 28
12. Maintenance and Inspection ····························································29
12.1 Daily inspection ·········································································· 29
12.2 Periodical maintenance/inspection················································· 29
12.3 Regular customer inspection························································· 30
13. Troubleshooting ·············································································31
14. Accessories ····················································································35
15. Warranty ······················································································36

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen level in the
atmosphere (the oxygen concentration of 18% or below is defined as an
oxygen-depleted state). Choose a well-ventilated and good-air-circulated location to
install the EMP-14W, and install a ventilator with a capacity of at least 1000 m3/hr
airflow. In addition, do not stay together with a dewar containing liquid nitrogen in a
sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining atmospheric
pressure liquid nitrogen in an airtight space produces high-pressure gas as high as
700Atm, possibly resulting in explosion. Use liquid nitrogen in the condition constantly
open to air.
1. Danger of electric shock: Do not touch
the live part.
2. Danger of oxygen deficiency: Ventilate
well.
3. Danger of explosion: Do not seal LN
2
.

2 ULVAC CRYOGENICS INCORPORATED
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is directly
handled, frostbites, loss of sight, and others are foreseen. Always wear leather
gloves, goggles, trousers without turnips, etc. to handle liquid nitrogen. In addition, use
cautions to liquid nitrogen transport lines, too. In this unit, there is a part with danger
of burns if it is touched directly.
In this unit, high-pressure Helium gas is filled. To disassemble or dispose of the unit,
parts, and others, be sure to discharge gas (under regular maintenance, there is no
need to discharge gas). In addition, never attempt to install the apparatus under the
atmosphere of hydrochloric acid-based, chlorine gas-based, and other corrosive
gases.
5. Danger of Explosion: DON’T expose to corrosive
gases.
4. Danger of burns or frostbites: Never touch
high and ultra-low temperature area.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us if necessary.
WARNING
The cryocooler may contain residue of hazardous substances r
esulting from actual use.
Contact your safety supervisor and follow the instructions to remove such toxic
substances before disposing.

4 ULVAC CRYOGENICS INCORPORATED
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ULVAC CRYOGENICS INCORPORATED 5
1. General Description of the System
1.1 Liquid nitrogen generator (EMP-14W)
EMP-14W Liquid Nitrogen Generator provides liquid nitrogen by cooling down,
condensing and liquefying nitrogen gas with the cold head (Model:S050).
Liquid nitrogen is stored the inside the dewar, and can be dispensed to another container
with easy operation. With the optional automatic transfer system, liquid nitrogen can be
automatically transferred to the dewars of customers’ equipments.
Nitrogen gas source can be selected from two types; (1) PSA nitrogen generator, (2)
Membrane nitrogen generator.
Liquid nitrogen generator is hereafter referred to as “EMP-14W” in this manual.
1.2 Helium gas compressor (model:SW115)
This unit is located on the lower part of EMP-14W, compress helium gas to supply to the
cold head to provide cryogenic temperatures.It is automatically turned on and off by the
control circuit of EMP-14W.
Helium gas compressor is hereafter referred to as “SW115” in this manual.
For details of this equipment, please refer to the operation manual for “SW115”.
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i)
PSA Nitrogen Generator GN-10i generates highly concentrated nitrogen from air using
adsorber and supply the gas to EMP-14W. The nitrogen generated here is used as the
material for liquid nitrogen and is also used to take out liquid nitrogen.
PSA nitrogen generator is hereafter called “GN-10i” in this manual. When we describe
things that are in common with membrane nitrogen generators, they are collectively
referred to as “nitrogen generators”.
Please refer to the operation manual of GN-10i for details.
1.4 Membrane Nitrogen Generator (type IM-120)
Membrane Nitrogen Generator IM-120 takes in dry air from user’s equipments and
generates highly concentrated nitrogen with membrane separation technology. The
nitrogen generated here is used as the material for liquid nitrogen and is also used to take
out liquid nitrogen.
Membrane nitrogen generator is hereafter called “IM-120” in this manual. When we
describe things that are in common with PSA nitrogen generators, they are collectively
referred to as “nitrogen generators”.
Refer to the operation manual of IM-120 for details.

6 ULVAC CRYOGENICS INCORPORATED
2. Component Description
Figure 2-1 Front view of EMP-14W
ＲＵＮ／ＳＴＯＰ ＲＥＳＥＴ
ＡＵＴＯ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＡＵＴＯ
ＭＡＮＵ
ＳＴＡＲＴ ＳＴＯＰ
ｅｃｏ
ＭＡＮＵ
Ｍａｉｎｔｅｎａｎｃｅ
ＣＯＭＰ．ＡＬ．
ＧＮ２ ＡＬ．
Ｌ
０
８０
ＯＲ
６０
４０
２０
Ｔｅｍｐ．
ｍｏｎｉｔｏｒ
（ｏｐｔｉｏｎ）
Figure 2-2 Operation panel of EMP-14W
Emergency Off Button
LN2 Manual Dispense Port
SW115 Display
Operation Panel
Pressure Gauge

ULVAC CRYOGENICS INCORPORATED 7
2.1 Front view of EMP-14W (Figure 2-1)
Emergency off button :Press this button to interrupt power supply to the control
circuit to stop such operations as liquid nitrogen supplying,
etc.
Front door :Remove two screws to open this door. Inside the door,
there are a liquid nitrogen dewar, a cold head and electric
circuits. Open this door only for periodic inspection,
maintenance and repair services.
LN2manual dispense port :Press the panel to open. Inside the panel, there is a tube
connector used to connect liquid nitrogen dispense flexible
hose. Since the port may reach extremely low temperature,
use cautions not to touch the port during or immediately
after dispensing LN2.
Pressure Gauge : The pressure gauge indicates the pressure inside the
dewar.
Display of SW115 :The status of the compressor is displayed. When the alarm
state is cleared at the compressor, press the <RUN/STOP>
button to reset.
2.2 Operation panel of EMP-14W (Figure 2-2)
RUN/STOP :Use this button to start or stop the main unit. Green light
illuminates during normal operation, and flickers when the
error occurs. In addition, the light will turn off when the
machine is in eco-mode standby.
RESET : This switch is used to reset the EMP-14W error state after
removing the cause of a trouble.
AUTO READY : Use this button to use the optional automatic transfer
function. While turning ON this function, the EMP is in
stand-by state, and automatic transfer to the set destination
is possible by receiving the signal. While in stand-by
state, this button lights in green. When the level sensor of
the target dewar detects any trouble, green light blinks.

8 ULVAC CRYOGENICS INCORPORATED
AUTO SUPPLY : When you use the optional auto-transfer function with our
level sensor, use this button to start transfer of liquid
nitrogen at your convenience while the EMP is in standby
mode for automatic transfer.This button illuminates in
white while automatic transfer is taking place.
MANUAL START : Press this button to manually dispense liquid nitrogen
from LN2manual dispense port. (To be referred to as
“manual dispense”) The manual dispense is terminated
automatically in 10 minutes. This button lights in green
while liquid nitrogen is manually supplied and starts
blinking from 30 seconds before terminating automatically.
When you wish to supply more, press this button again
while it is blinking to extend the supply by 10 minutes..
MANUAL STOP : Press this button to stop the manual dispense of liquid
nitrogen.
Indicator : Displays the approximate amount of liquid nitrogen in the
dewar.
eco : Press this button to switch to eco-mode operation and the
button lights in blue. For eco mode, please refer to "13.eco
mode".
COMP.AL. : Red light illuminates when the SW115 is in error state.
The RUN/STOP button blinks at the same time.
GN2AL. : Red light illuminates when nitrogen gas generator stops
due to faults. The RUN/STOP switch also blinks.
Maintenance : This light turns on when the GN-10i is approaching the
maintenance interval.
Temperature meter :This shows the temperature inside the dewar.

ULVAC CRYOGENICS INCORPORATED 9
Figure 2-3 Inside view of EMP-14W front door and lower panel
Figure 2-4 Electrical circuit Figure 2-5 Top of EMP-14W
Ｓ０５０
ＳＷ１１５
He GAS CHARGE
He PRESSUREMETER
RUNNING TIME
Coldhead
Pressure Gauge
LN2 Dewar
Electric Circuit
OPERATION Switch
POWER Light
OPERATION light
ALARM Light
Compressor
自動供給配管継手
レベル計変換器 ヒューズ
電源ブレーカー
シーケンサー
端子台
レベル計変換器 ヒューズ
電源ブレーカー
シーケンサー
端子台
自動供給配管継手
Circuit breaker
Terminal Block
Level Sensor Converter Fuse
Sequencer
Auto-Supply Connector

10 ULVAC CRYOGENICS INCORPORATED
2.3 Inside view of EMP-14W front door and lower panel (Figure 2-3)
LN2Dewar :Stores liquid nitrogen up to 40 litters.
Cold head (S050) :The cold head works in conjunction with the
compressor to generate ultra-low temperature. The
cold head needs maintenance services according to the
time in operation.
Pressure gauge :Displays the pressure inside the Dewar.
He PRESSUREMETER :Displays the helium pressure of the SW115.
He GAS CHARGE :Use this port when charging helium gas. Do not use
except when needed as it may result in helium leak.
OPERATION switch :Use this lever to turn ON and OFF the SW115.
Always keep the lever ON (pressed to the upper side).
This switch can be used as the reset switch when the
SW115 is in error state.
RUNNING TIME :Displays the total operation time of the SW115. Use
this information to perform maintenance work
properly.
2.4 Inside the lower back panel of EMP-14W
L/R Switch Use this to switch between REMOTE or LOCAL
operation of SW115. When REMOTE is selected,
turning ON and OFF the SW115 is done from the
control circuit of the EMP-14W. When LOCAL is
selected, the SW115 is turned ON and OFF with the
SW115 <RUN/STOP> button. Normally, set this
switch to REMOTE. If switched to LOCAL,
EMP-14W cannot control the SW115.

ULVAC CRYOGENICS INCORPORATED 11
2.5 EMP-14W Electric Circuit (Figure 2-4)
Circuit breaker : The circuit breaker protects the control circuit of
EMP-14W. It is tripped when an electric leak or
short-circuit occurs.
Fuse : The EMP14W has protective fuses for AC circuit
(F-1, 2: 3A) and protective fuses for DC circuit (F3:
2A).
Sequencer : The sequencer controls the entire system.
This receives the signals from the sensors and runs
necessary equipments. In case the system is in error
state, inform us whether the input/output light of the
sequencer is turned ON (or blinking) or OFF.
Level sensor converter : The level sensor converter is the electronic device to
monitor the LN2level inside the Dewar. Do not touch
the buttons as they are precisely adjusted.
Terminal Block : The terminal block connects the signal lines between
electric devices or Dewars.
2.6 Top of the EMP-14W (Figure 2-5)
Auto-Supply Connector : The Auto-supply connector is the joint (Swagelok) to
connect the LN2automatic supply tube. Use cautions
as it reaches to extremely low temperature during and
immediately after LN2transfer.
(Optional)

12 ULVAC CRYOGENICS INCORPORATED
3. Flow Diagram
This may vary depending on the customers’specifications.
Figure 3-1 Flow Diagram
（ＧＮ
２
P
Automatic Transfer Signal Connector
(Optional)
Nitrogen Gas Tube
Seath Thermocouple (T)
Level Sensor
Pressure Gauge
Pressure Relief Valve
Thermometer
To Target Device
(Optional)
(Optional)
LN2 Dispensing Flexible Hose
LN2 Dewar
Control Circuit
Power Cable Remote Cable
Coldhead
（Ｓ０５０）
Power Cable
Compressor
LN2 Auto Transfer Tube
Helium Gas Tube
Coldhead Cable
Pressure Control Valve
Blow）
Cable for Solenoid Valve
Ambient Temperature Solenoid Valve
Cryogenic Solenoid Valve
Cryogenic Solenoid Valve
EMP-14W
（SW11５）
Cooling Water

ULVAC CRYOGENICS INCORPORATED 13
4. Specifications
4.1 Liquid nitrogen generator
Type : EMP-14W
Amount of liquid nitrogen generated : 14L/day (50/60Hz)
High pressure gas processing capacity : 9.1 m3/day
Dimensions : 600[W]*750 [D] * 1688 [H]
Weight : Approx. 230 kg
LN2 storage capacity : Maximum 40L
Cold head : S050
Compressor : SW115
Cooling method : Water-cooled
Environment requirement : Ambient temperature: 10 – 35°C
Relative humidity: 80% or below
(Non-condensation except on LN2
dispense port)
The EMP-14W must be installed indoors.
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator
Type : GN-10i
Dimensions : 400[W] ×460[D] ×900[H]
Weight : Approx.60kg
Cooling method : Air-cooling (Inhale from the front,
exhaust from the back)
GN-10i must be installed indoors.
GN-10i must not be used in the atmosphere with organic solvents or corrosive gases.
Air inhaled from the front is discharged to the backside. Do not block the front and
backside.
4.3 Membrane nitrogen gas generator
Type : IM-120
Dimensions : 150[W] ×300[D] ×800[H]
Weight : Approx.20 kg
IM-120 must be installed indoors.
IM-120 must not be used in the atmosphere with organic solvents or corrosive gases.

14 ULVAC CRYOGENICS INCORPORATED
5. Utilities
5.1 Power source (for EMP-14W)
Voltage : 200 VAC , three-phase
Power capacity : 20A or above
Power consumption : 1.6/1.9 kW ( 50/60 Hz )
Connection : Round type crimping terminal for M5
Cooling water : 4–6L/min, 5-35°C, Maximum pressure 1MPa
<NOTE> Refer to the instruction manual of the SW115 for the detailed information on
the cooling water requirements.
5.2 Power source for GN-10i (when using GN-10i)
Voltage : 100 VAC, single phase
Power capacity : 15 A or above
Power consumption : 400W ( 50/60 Hz )
Connection : 3-pin outlet plug with ground wire
5.3 Dry air for IM-120 (when using IM-120)
Pressure : 0.5MPa – 1.0MPa
Flow Rate : 120L/min or more
Dew Point : -17 °C or below (at the atmospheric pressure)
Air Quality : Oil-free
NOTE:Use compressors equipped with a dryer.
Supply dry air continuously.
Use Class-D earthing for safety.
CAUTION
Use Class-D earthing for safety.
CAUTION