
ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ··················································································· 1
Disposal Considerations············································································· 3
1. General Description of the System ····················································· 5
1.1 Liquid nitrogen generator (EMP-14W) ············································· 5
1.2 Helium gas compressor (model:SW115) ············································ 5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator ······················ 5
1.4 Membrane Nitrogen Generator (type IM-120) ··································· 5
2. Component Description ···································································· 6
2.1 Front view of EMP-14W (Figure 2-1) ··············································· 7
2.2 Operation panel of EMP-14W (Figure 2-2)········································ 7
2.3 Inside view of EMP-14W front door and lower panel ························ 10
2.4 Inside the lower back panel of EMP-14W ······································· 10
2.5 EMP-14W Electric Circuit (Figure 2-4) ···········································11
2.6 Top of the EMP-14W (Figure 2-5) ···················································11
3. Flow Diagram ················································································12
4. Specifications·················································································13
4.1 Liquid nitrogen generator ···························································· 13
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator ················· 13
4.3 Membrane nitrogen gas generator ················································· 13
5. Utilities ························································································14
5.1 Power source (for EMP-14W) ························································ 14
5.2 Power source for GN-10i (when using GN-10i) ································ 14
5.3 Dry air for IM-120 (when using IM-120)········································· 14
6. Installation ···················································································15
6.1 Conditions for installation place···················································· 15
6.2 Connection of GN-10i to power source············································ 16
6.3 Dry air connection of IM-120 ························································ 16
6.4 Utility connection of EMP-14W ····················································· 16