Ulvac MP-300K User manual

D/N. MJCE003E, 2019MH01 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
MP-300K
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual provides information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards
and are familiar with the safety precautions required to avoid possible injury. To ensure
proper use of this product, read this instruction manual carefully and keep this manual
close at hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read
relevant instruction manuals carefully.
General Precautions
(1) It is strictly prohibited to duplicate or reproduce this manual either partially or entirely,
or disclose or transfer to a third party without written permission from ULVAC
CRYOGENICS.
(2) Information in this document is subject to change without notice, along with the
specification change or improvement of the product.
(3) If you have any questions or comments on this document, please contact us. The
contact details are listed at the end of this book.

II ULVAC CRYOGENICS INCORPORATED
Safety Conventions
Our products have been designed to provide extremely safe and reliable operation when
properly used. Following safety precautions must be observed during normal operation
and when servicing them.
Low-temperature area present.
There is a risk of frostbite. Do not touch.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
A caution describes safety hazards or unsafe practices
which could result in personal injury or equipment
damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ················································································· 1
Disposal Considerations·········································································· 2
1. General Description of the System ···················································· 5
1.1 Liquid nitrogen generator (MP-300K)············································ 5
1.2 Helium gas compressor (UW701N) ·············································· 5
1.3 PSA (Pressure Swing Adsorption) system nitrogen gas generator
(GN-20i) ················································································· 5
2. Component Description··································································· 6
2.1 Front panel of MP-300K (Figure 2-1) ············································ 7
2.2 Operation panel of MP-300K (Figure 2-2) ······································ 7
2.3 Inside MP-300K front door (Figure 2-3) ········································10
2.4 MP-300K Electrical circuit (Figure 2-4)·········································10
2.5 MP-300K Top (Figure 2-5)·························································11
2.6 UW701N Front (Figure 2-6) ·······················································13
2.7 UW701N Status display (Figure 2-7)············································13
3. Flow Sheet ··················································································14
4. Specifications···············································································15
4.1 Liquid nitrogen generator ··························································15
4.2 PSA system nitrogen gas generator·············································15
5. Utilities ·······················································································16
5.1 Power source (for MP-300K)······················································16
5.2 Cooling water (for MP-300K)······················································16
5.3 Power supply for GN-20i···························································17
5.4 Nitrogen gas for MP-300K (for systems with N2gas supply) ·············18
6. Installation···················································································19
6.1 Conditions for installation place ··················································19
6.2 GN-20i Power-supply connection················································20
6.3 MP-300K utility connection ························································20
7. Electric Wiring··············································································23
7.1 MP-300K ···············································································23
7.2 MP-300K(PLC) ·······································································24

IV ULVAC CRYOGENICS INCORPORATED
8. Operation····················································································25
8.1 Checks prior to operation ··························································25
8.2 Operation preparation·······························································25
8.3 Shutdown ··············································································26
8.4 Corrective action in the event of an error······································27
8.5 Emergency off ········································································28
9. Manual Dispense of Liquid Nitrogen··················································29
9.1 Connecting liquid nitrogen supply port ·········································29
9.2 Dispense liquid nitrogen····························································29
9.3 Disconnecting Manual Dispense Flexible Hoses ····························30
10. Automatic Supply of Liquid Nitrogen ·················································31
10.1 Inspections before automatic transfer ··········································31
10.2 Automatic transfer ···································································31
10.3 Time limit of automatic transfer···················································31
11. Maintenance and Inspection····························································32
11.1 Daily inspection·······································································32
11.2 Maintenance/inspection intervals ················································32
12. Troubleshooting············································································34
13. Accessories·················································································38
14. Warranty·····················································································39

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen
concentration in the atmosphere (the oxygen concentration of 18% or below is defined
as an oxygen-depleted state). Choose a well-ventilated and good-air-circulated
location to install the present unit, or install a ventilator with a capacity of at least 2000
m3/Hr airflow. In addition, do not stay together with a dewar containing liquid nitrogen
in a sealed space, such as an elevator or a car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining atmospheric
pressure liquid nitrogen in an airtight space produces high-pressure gas as high as
700 Atm, possibly resulting in explosion. Use liquid nitrogen in the condition constantly
open to air.
1. Danger of electric shock:
Do not touch the live part.
2. Danger of oxygen deficiency:
Ventilate well.
3. Danger of explosion: Do not seal LN
2
.

2 ULVAC CRYOGENICS INCORPORATED
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is directly
handled, there may be dangers of frostbites, loss of sight, and others. Be sure to
wear protective clothes such as leather gloves, goggles, trousers without turnips, etc.
to handle liquid nitrogen. In addition, liquid nitrogen transport piping must be carefully
checked. In this unit, there is a part with danger of burns if it is touched directly.
When performing maintenance or repair work, etc. wait for at least 30 minutes after the
unit is shutdown.
In this system, high-pressure helium gas is filled. When disassembling or disposing
the system or parts, be sure to discharge gas (under regular maintenance, there is no
need to discharge gas). In addition, never attempt to install the system under the
atmosphere of hydrochloric acid, chlorine gas, or other corrosive gases.
5. Danger of Explosion:
Do not expose to corrosive gases.
4. Danger of burns or frostbites:
Never touch high temperature and
ultra-low temperature parts.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
We provide Safety Data Sheet (called SDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING
Do not disassemble, pressurize, heat, and/or throw into fire. The adsorber may
explode.
For safe disposal of an adsorber, follow the procedures below.
(1) Depressurize the high pressure helium gas in the adsorber to an ambient
atmospheric pressure. To do so safely, connect the proper tools such as our charging
adaptor (for refrigerator maintenance).
(2) Before proceeding with disposal work, remove the couplings of the adsorber to
visually confirm that it has been depressurized.
WARNING
When it seems that the cryopump and the refrigerator have been used to evacuate a
toxic or dangerous material, you must contact a safety supervisor before discarding,
and discard it after removing the poisonous material according to directions of the
safety supervisor.

4 ULVAC CRYOGENICS INCORPORATED
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ULVAC CRYOGENICS INCORPORATED 5
1. General Description of the System
1.1 Liquid nitrogen generator (MP-300K)
MP-300K Liquid Nitrogen Generator provides liquid nitrogen by cooling down,
condensing and liquefying nitrogen gas with the cold head (Model:S050).
Liquid nitrogen is stored inside the dewar, and can be dispensed to another container
with easy operation. With the optional automatic transfer system, liquid nitrogen
can be automatically transferred to the dewars of customers’ system.
Supply of nitrogen gas can be selected from (1)PSA nitrogen gas generator
(2)Nitrogen gas supply (supplied directly from the customers’ nitrogen gas line).
Liquid nitrogen generator is hereafter referred to as “MP-300K” in this manual.
1.2 Helium gas compressor (UW701N)
This unit is in the right side of MP-300K, compress Helium gas to supply to the cold
head to provide cryogenic temperatures. It is automatically turned on and off by the
control circuit of MP-300K.
Helium gas compressor is hereafter referred to as “UW701N” in this manual.
Please refer to the operation manual of “UW701N” for details.
1.3 PSA (Pressure Swing Adsorption) system nitrogen gas generator (GN-20i)
This equipment separates nitrogen gas from air using activated carbon and supplies
to MP-300K. The nitrogen gas is cooled down to liquid nitrogen, and is also used
for dispensing liquefied nitrogen.
PSA system nitrogen gas generator is hereafter referred to as “GN-20i”. When we
refer to items which are in common with membrane nitrogen generator, they are
called “nitrogen gas generator” collectively. Please refer to the operation manual of
GN-20i about the details of this equipment.

6 ULVAC CRYOGENICS INCORPORATED
2. Component Description
Figure 2-1 MP-300K Front
Figure 2-2 MP-300K Operation panel
非常停止スイッチ
操作パネル
ＲＥＳＥＴ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＳＴＡＲＴ ＳＴＯＰ
ＣＯＭＰ．ＡＬＡＲＭ
％
０
４０
２０
６０
８０
１００
Ｎ２ ＧＡＳ ＡＬＡＲＭ
ＭＡＮＵＡＬ ＭＡＮＵＡＬ
ＡＵＴＯ ＡＵＴＯ
ＲＵＮ／ＳＴＯＰ
ＤＥＷＥＲ ＬＮ
２
液化窒素取り出し口
ＲＥＳＥＴ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＳＴＡＲＴ ＳＴＯＰ
ＣＯＭＰ．ＡＬＡＲＭ
％
０
４０
２０
６０
８０
１００
Ｎ２ ＧＡＳ ＡＬＡＲＭ
ＭＡＮＵＡＬ ＭＡＮＵＡＬ
ＡＵＴＯ ＡＵＴＯ
ＲＵＮ／ＳＴＯＰ
ＤＥＷＥＲ ＬＮ
２
LN
2Manual
dispense
port
Emergency off
button
Operation
panel

ULVAC CRYOGENICS INCORPORATED 7
2.1 Front panel of MP-300K (Figure 2-1)
Emergency off button : Press this button
to interrupt power supply to the
control circuit to stop such operations as LN2
production or transfer. Do not use this button
except for emergency.
Front panel : Inside this panel, LN2dewar, coldhead, or electrical
wiring are located. Do not open except for regular
inspections, maintenance or repair works.
LN2manual dispense port : The
coupling to connect liquefied nitrogen supply
piping. Note that the port reaches to extremely low
temperature during and immediately after
dispensing. Do
not touch it directly while in low
temperature.
2.2 Operation panel of MP-300K (Figure 2-2)
RUN/STOP : Use this button to start or stop the main unit. This
button lights green during normal operation, and
flickers when in error state.
RESET : This switch is used to reset the MP-300K error.
AUTO READY : Press this button to use optional auto supply function.
When you wish to auto-supply, turn this ON. The
button lights green while on standby, and blinks when
an error condition is encountered at the level sensor of
the auto supply destination.
AUTO SUPPLY : Press this button to start supplying liquefied nitrogen
at a desired moment while using optional auto supply
function. The button lights white while in auto supply
state.
MANUAL START : Press this button to manually dispense liquid nitrogen
from LN2supply ports. (To be referred to as “Manual
supply”) Manual supply is terminated automatically in
10 minutes. This button lights green while liquid
nitrogen is manually supplied and blinks from pressing
30 seconds in advance to automatic termination.
When you wish to supply more, press this button once
again while it is blinking to extend 10 minutes.

8 ULVAC CRYOGENICS INCORPORATED
MANUAL STOP : Press these buttons to interrupt the manual dispense
of liquid nitrogen.
DEWAER LN2: Displays liquid nitrogen level in the dewar.
COMP. ALARM. : Turns on red when the UW701N stops due to an error.
The RUN/STOP button blinks at the same time.
N2GAS ALARM. : Red light illuminates when the nitrogen gas generator
stops due to faults, or when the supply pressure of
nitrogen gas declines. The RUN/STOP switch blinks at
the same time.

ULVAC CRYOGENICS INCORPORATED 9
Figure 2-3 Inside MP-300K front panel
Figure 2-4 MP-300K Electrical circuit
Figure 2-5 MP-300K Top
実際には、４５°回転した形で
取り付けられています。
電気回路部
コンプレッサーユニット
（ＵＷ７０１Ｎ型）
窒素ガス圧力調整器
※１
窒素ガス流量調整弁
窒素ガス流量計
※１
※１
液化窒素デュワー
圧力計
温度計
コールドヘッド
Coldhead
Attached with rotation
through 45 degrees
Temperature meter
Pressure meter
LN
2
Dewar
Electrical circuit
Nitrogen gas pressure
regulator (*1)
Nitrogen gas flow meter
(*1)
Nitrogen gas flow control
valve (*1)
Compressor unit
(UW701N)
レベル計変換器
シーケンサー
ＤＣパワーサプライ
電源ブレーカー
Ｆ－３ヒューズ
Ｆ－２ヒューズ
Ｆ－１ヒューズ
正面側
液化窒素配管継手
Level sensor
convertor
F-3 fuse
F-2 fuse
F-1 fuse
Sequencer
Circuit breaker
DC Power supply
LN
2
supply coupling
Front

10 ULVAC CRYOGENICS INCORPORATED
2.3 Inside MP-300K front door (Figure 2-3)
LN2dewar :Container that stores 100 litters of LN2.
Cold head :The cold head works in conjunction with the
compressor to generate ultra-low temperature.
The cold head needs maintenance services
according to the time in operation.
N2Pressure regulator (*1): :Adjusts and displays the pressure of nitrogen gas
supplied. Adjust the pressure to 0.2MPa when
using the equipment.
N2Flow meter (*1) :Displays and adjusts the flow rate of nitrogen gas.
Adjust the flow rate at the center of the ball inside
to 20 NL/min.
Pressure meter :Displays the pressure inside the dewar.
Temperature meter :Displays the temperature inside the dewar.
(Temperature meter is not equipped depending
on the condition of installation.)
(*1) Nitrogen gas pressure regulator, flow meter, and flow control valve are
mounted only on the models with nitrogen gas supply (without nitrogen gas
generator).
2.4 MP-300K Electrical circuit (Figure 2-4)
Circuit breaker :Circuit breaker to protect the control circuit of
MP-300K. This trips when an electric leakage or
short circuit occurs.
Fuse :AC protective fuse (F-1,2 : 2A) and DC protective
fuse (F-3 : 2A).
Sequencer :Controller of the system. It receives signals
from the sensors and activates functions as
needed. When you contact us in case of an error,
provide the state of sequencer input-output light
such as illuminating, blinking or off.
Level sensor converter :Electric component to detect the LN2level.
Never strip the protective sticker or touch
adjusting trimmer since it is precisely adjusted.

ULVAC CRYOGENICS INCORPORATED 11
2.5 MP-300K Top (Figure 2-5)
Auto LN2supply coupling :Swagelok coupling to connect the line for LN2
(Optional) auto supply. Note that the coupling is in
extremely low temperature during and
immediately after dispensing LN2.
Supply signal connector :Port to connect to auto supply level indicator with
(Optional) dedicated cable to input and output the signal.

12 ULVAC CRYOGENICS INCORPORATED
Figure 2-6 UW701N Front
Figure 2-7 UN701N Status display
積算計
ヘリウムガス圧力計
（パネル内側）
ステータス表示
（パネル内側）
ヘリウムガス充填口
ヘリウムガス充填弁
Status display
Elapsed time meter
Helium gas pressure
meter
Helium charge valve
(Inside the panel)
Helium charge port
(Inside
the panel)
ＰＷＲ
ＲＤＹ
ＳＴＳ
ＲＵＮ
ＣＨ１
ＣＨ２
１
２
３
４
５
６
７
８
ＲＳＴ
ＣＯＭ
リセットスイッチ
アラーム表示灯
通電表示灯
Power light
Alarm lights
Reset switch

ULVAC CRYOGENICS INCORPORATED 13
2.6 UW701N Front (Figure 2-6)
Helium gas pressure meter : Displays the helium pressure of UW701.
In operation 1.90 – 2.30MPa
Helium charge port : Connect a hose to charge helium gas. Do not
remove the cap while it is not in use.
Helium charge valve : This valve is used to charge helium gas. Do
not touch except when necessary to prevent
helium leakage.
Elapsed time meter : The meter records the number of hours the
UW701N compressor has been operating. Use
the record to determine when to perform
maintenance works.
2.7 UW701N Status display (Figure 2-7)
Power light : When the power is supplied to UW701N, this
indicator illuminates red.
Alarm lights : Eight display lights to display error states.
RESET switch : Press this button to reset when an error of
UW701N.

14 ULVAC CRYOGENICS INCORPORATED
3. Flow Sheet
The figure below shows the flow diagram of MP-300K (fixed automatic type 2)
Figure 3-1 Flow diagram
ＳＶ－１
ＳＶ－４
ＳＶ－３
ＳＶ－２
Ｐ
φ６×ｔ１
Cryogenic Solenoid Valve (Auto 1)
LN2 SupplyLine
Cryogenic Solenoid Valve (Auto 2)
LN2 Supply Line
Cryogenic Solenoid Valve (Manual)
LN2 Dispense
Flexible Hose
Pressure Regulator
Normal Temperature Solenoid Valve
Control Circuit
Temperature Indicator （TI）
Pressure Relief Valve
Pressure Meter
Coldhead Cable
Helium Gas Line
Power Cable
Remote Cable
(polyurethane resin paint)
Helium
Compressor
Power Cable
Nitrogen Gas Generator
Cooling Water Hose