
ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions··························································································1
1. General··································································································5
2. Features ································································································5
3. Component Descriptions············································································6
3.1 External Dimensions and Component Description·········································6
3.2 Component Details·················································································7
4. Flow Diagram··························································································9
5. Specifications ························································································10
5.1 Nitrogen generator specifications····························································· 10
6. Electric Wiring ·······················································································11
7. Unpacking and Installation········································································12
7.1 Unpacking and Checking Contents·························································· 12
7.2 Installation··························································································· 12
7.3 Electric Wiring······················································································ 13
8. Operation·····························································································14
8.1 Preparation before Operation·································································· 14
8.2 Start-up and Stop (Tank pressure operation)*optional··································· 14
9. Maintenance ·························································································16
9.1 Daily Inspections and Maintenance·························································· 16
9.2 Overall Inspections··············································································· 16
10. Cautions before Use ···············································································17
11. Troubleshooting·····················································································18
12. Warranty ······························································································20