
ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions··························································································1
1. GN-30i Overview······················································································5
1.1 General································································································5
1.2 Features·······························································································5
1.3 Specifications ························································································6
2. Unpacking and Installation··········································································7
2.1 Unpacking and inspection········································································7
2.2 Cautions for Installation ···········································································7
2.3 Electric Wiring························································································7
3. Component Descriptions············································································9
3.1 External Dimensions and Component Description·········································9
3.2 Component Details··············································································· 10
4. System Diagram····················································································12
5. Operation·····························································································13
5.1 Preparation before Operation·································································· 13
5.2 Start-up and Stop (Local operation)·························································· 13
5.3 Start-up and Stop (Remote: Operation by input external signals)···················· 13
6. Operating Precautions·············································································14
6.1 Operating Precautions··········································································· 14
7. Troubleshooting·····················································································15
8. Maintenance ·························································································17
8.1 Daily Inspections and Maintenance·························································· 17
8.2 Total Inspection···················································································· 17
9. Warranty ······························································································18