
ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ··················································································· 1
Disposal Considerations············································································· 3
1. General Description of the System ····················································· 5
1.1 Liquid nitrogen generator (EMP-20W)·············································5
1.2 Helium gas compressor (model:UW404) ···········································5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type
GN-15i) ······························································································5
1.4 Membrane Nitrogen Generator (type IM-120)···································5
2. Component Description ···································································· 6
2.1 Front view of EMP-20W (Figure 2-1) ···············································7
2.2 Operation panel of EMP-20W (Figure 2-2)········································7
2.3 Inside view of EMP-20W front door and lower panel
(Figure 2-3) ······················································································· 10
2.4 EMP-20W Electrical circuit(Figure 2-4)····································· 10
3. Flow Diagram ················································································12
4. Specifications·················································································13
4.1 Liquid nitrogen generator···························································· 13
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator················· 13
4.3 Membrane nitrogen gas generator ················································ 13
5. Utilities ························································································14
5.1 Power source (for EMP-20W)························································ 14
5.2 Cooling water (for EMP-20W)······················································· 14
5.3 Power source for GN-15i (when using GN-15i) ································ 16
5.4 Dry air for IM-120 (when using IM-120) ········································ 16
6. Installation ···················································································17
6.1 Conditions for installation place ··················································· 17
6.2 Connection of GN-15i to power source ··········································· 18
6.3 Dry air connection of IM-120························································ 18