Ulvac EMP-20W User manual

D/N.MJOM117E, 2016SR03 ULVAC CRYOGENICS INCORPORATED
Liquid Nitrogen Generator
Instruction Manual
EMP-20W
Export Control Policy
When applying our refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan’s Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.

ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our products. This instruction manual gives information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and
are familiar with the safety precautions required to avoid possible injury. To ensure proper
use of this product, read this instruction manual carefully and keep this manual close at
hand so that you can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.

II ULVAC CRYOGENICS INCORPORATED
Safety Conventions
Our products have been designed to provide extremely safe and dependable operation when
properly used. Following safety precautions must be observed during normal operation and when
servicing them.
Low-temperature area present.
There is a risk of frostbite. Do not touch.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
A caution describes safety hazards or unsafe practices
which could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ··················································································· 1
Disposal Considerations············································································· 3
1. General Description of the System ····················································· 5
1.1 Liquid nitrogen generator (EMP-20W)·············································5
1.2 Helium gas compressor (model:UW404) ···········································5
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type
GN-15i) ······························································································5
1.4 Membrane Nitrogen Generator (type IM-120)···································5
2. Component Description ···································································· 6
2.1 Front view of EMP-20W (Figure 2-1) ···············································7
2.2 Operation panel of EMP-20W (Figure 2-2)········································7
2.3 Inside view of EMP-20W front door and lower panel
(Figure 2-3) ······················································································· 10
2.4 EMP-20W Electrical circuit（Figure 2-4）····································· 10
3. Flow Diagram ················································································12
4. Specifications·················································································13
4.1 Liquid nitrogen generator···························································· 13
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator················· 13
4.3 Membrane nitrogen gas generator ················································ 13
5. Utilities ························································································14
5.1 Power source (for EMP-20W)························································ 14
5.2 Cooling water (for EMP-20W)······················································· 14
5.3 Power source for GN-15i (when using GN-15i) ································ 16
5.4 Dry air for IM-120 (when using IM-120) ········································ 16
6. Installation ···················································································17
6.1 Conditions for installation place ··················································· 17
6.2 Connection of GN-15i to power source ··········································· 18
6.3 Dry air connection of IM-120························································ 18

IV ULVAC CRYOGENICS INCORPORATED
6.4 Utility connection of EMP-20W ···················································· 18
7. Electric Wiring···············································································21
8. Operation······················································································23
8.1 Checks prior to operation····························································· 23
8.2 Preparation for operation ···························································· 23
8.3 Shutdown·················································································· 24
8.4 When suspending for long time (for 1 to 2 weeks) and
resuming EMP-20W ··········································································· 24
8.5 Corrective action in the event of an error ······································· 25
9. Dispense Liquid Nitrogen Manually ··················································27
9.1 Connecting liquid nitrogen supply flexible hose ······························ 27
9.2 Supply of liquid nitrogen ····························································· 27
9.3 Disconnection of flexible hose······················································· 28
10. Automatic Transfer of Liquid Nitrogen ··············································29
10.1 Inspections before starting automatic transfer································ 29
10.2 Automatic transfer ····································································· 29
10.3 Time limit of automatic transfer ··················································· 29
11. eco Mode ·······················································································30
11.1 eco mode ··················································································· 30
12. Maintenance and Inspection ····························································31
12.1 Daily inspection ········································································· 31
12.2 Periodical maintenance/inspection ················································ 31
12.3 Regular customer inspection ························································ 32
13. Troubleshooting ·············································································33
14. Accessories ····················································································37
15. Warranty ······················································································38

ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
1. Danger of electric shock: Do not touch
the live
p
art.
2. Danger of oxygen deficiency: Ventilate
well.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen
concentration in the atmosphere (the oxygen concentration of 18% or below is defined
as an oxygen-depleted state).Choose a well-ventilated and good-air-circulated
location to install the present unit, and install a ventilator with a capacity of at least
2000 m3/Hr airflow. In addition, do not stay together with a dewar containing liquid
nitrogen in a sealed space, such as an elevator or a car.
3. Danger of explosion: Do not seal LN2.
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining atmospheric
pressure liquid nitrogen in an airtight space produces high-pressure gas as high as
700 Atm, possibly resulting in explosion. Use liquid nitrogen in the condition constantly
open to air.

2 ULVAC CRYOGENICS INCORPORATED
Liquid nitrogen provides temperature as low as -196°C. If liquid nitrogen is directly
handled, frostbites, loss of sight, and others are foreseen. Be sure to wear leather
gloves, goggles, trousers without turnips, etc. to handle liquid nitrogen. In addition,
take care of liquid nitrogen transport piping, too. In this unit, there is a part with
danger of burns if it is touched directly. Carry out maintenance, repair, etc. at least 30
minutes after the unit is stopped.
In this unit, high-pressure Helium gas is filled. To disassemble or dispose of the unit,
parts, and others, be sure to discharge gas (under regular maintenance, there is no
need to discharge gas). In addition, never attempt to install the apparatus under the
atmosphere of hydrochloric acid-based, chlorine gas-based, and other corrosive
gases.
4. Danger of burns or frostbites: Never touch
high temperature and ultra-low temperature area.
5. Danger of Explosion: DON’T expose to corrosive
gases.

ULVAC CRYOGENICS INCORPORATED 3
Disposal Considerations
Disposal of industrial waste is regulated by national or local governments. Follow all
applicable local or national laws, regulations or guidelines when disposing of our
products.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us when necessary.
WARNING
When the refrigerator unit may have pumped toxic or dangerous gases, you must contact
your safety supervisor at the time of disposal, and follow the instructions to remove
hazardous substances before disposing.

4 ULVAC CRYOGENICS INCORPORATED
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ULVAC CRYOGENICS INCORPORATED 5
1. General Description of the System
1.1 Liquid nitrogen generator (EMP-20W)
EMP-20W Liquid Nitrogen Generator provides liquid nitrogen by cooling down,
condensing and liquefying nitrogen gas with the cold head (Model:S050).
Liquid nitrogen is stored the inside the dewar, and can be dispensed to another container
with easy operation. With the optional automatic transfer system, liquid nitrogen can be
automatically transferred to the dewars of customers’ equipments.
Nitrogen gas source can be selected from two types; (1) PSA nitrogen generator, (2)
Membrane nitrogen generator.
Liquid nitrogen generator is hereafter referred to as “EMP-20W” in this manual.
1.2 Helium gas compressor (model:UW404)
This unit is in the right side of EMP-20W, compress Helium gas to supply to the cold
head to provide cryogenic temperatures.It is automatically turned on and off by the
control circuit of EMP-20W.
Helium gas compressor is hereafter referred to as “UW404” in this manual.
For details of this equipment, please refer to the operation manual for “UW404”.
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-15i)
PSA Nitrogen Generator GN-15i generates highly concentrated nitrogen from air using
adsorber and supply the gas to EMP-20W. The nitrogen generated here is used as the
material for liquid nitrogen and is also used to take out liquid nitrogen.
PSA nitrogen generator is hereafter called “GN-15i” in this manual. When we describe
things that are in common with membrane nitrogen generators, they are collectively
referred to as “nitrogen generators”.
Please refer to the operation manual of GN-15i for details.
1.4 Membrane Nitrogen Generator (type IM-120)
Membrane Nitrogen Generator IM-120 takes in dry air from user’s equipments and
generates highly concentrated nitrogen with membrane separation technology. The
nitrogen generated here is used as the material for liquid nitrogen and is also used to take
out liquid nitrogen.
Membrane nitrogen generator is hereafter called “IM-120” in this manual. When we
describe things that are in common with PSA nitrogen generators, they are collectively
referred to as “nitrogen generators”.
Please refer to the operation manual of IM-120 for details.

6 ULVAC CRYOGENICS INCORPORATED
2. Component Descriptionription
Figure 2-1 Front view of EMP-20WFigure 2-1 Front view of EMP-20W
ＲＵＮ／ＳＴＯＰ ＲＥＳＥＴ
ＡＵＴＯ
ＲＥＡＤＹ ＳＵＰＰＬＹ
ＡＵＴＯ
ＭＡＮＵ
ＳＴＡＲＴ ＳＴＯＰ
ｅｃｏ
ＭＡＮＵ
Ｍａｉｎｔｅｎａｎｃｅ
ＣＯＭＰ．ＡＬ．
ＧＮ２ ＡＬ．
Ｌ
０
８０
ＯＲ
６０
４０
２０
Ｔｅｍｐ．
ｍｏｎｉｔｏｒ
（ｏｐｔｉｏｎ）
Figure 2-2 Operation panel of EMP-20W

ULVAC CRYOGENICS INCORPORATED 7
2.1 Front view of EMP-20W (Figure 2-1)
Emergency off button :Press this button to interrupt power supply to the control
circuit to stop such operations as liquid nitrogen supplying,
etc. Do not use the emergency off button except for
emergency.
Front left door :Remove two screws to open this door. Inside the door,
there are a liquid nitrogen dewar, a cold head and electric
circuits. Open this door only for periodic inspection,
maintenance and repair services.
Front right door :Remove two screws to open the front right door. Inside
the door, there is UW404. Open this door when you
adjust helium gas pressure.
LN2 manual dispense port :Press the panel to open. Inside the panel, there is a tube
connector used to connect liquid nitrogen supply flexible
hose. Since the port may reach extremely low temperature,
be careful not to touch such port during or right after
supply of liquid nitrogen.
Automatic transfer port :This port is an optional Swagelok coupling to connect LN2
automatic transfer tube.
(Optional) Note that the port reaches to extremely low temperature
during and immediately after dispensing LN2.
Display of “UW404” :Displays the status of UW404.
2.2 Operation panel of EMP-20W (Figure 2-2)
RUN/STOP :Use this button to start or stop the main unit. Green light
turns on during normal operation, and flickers when the
error occurs. In addition, the light will turn off when the
machine is in “eco”-mode standby.
RESET : This switch is used to reset the EMP-20W error.
AUTO READY : Use this button when you wish to use automatic transfer
function. When you wish to use the automatic transfer, turn
this on. While waiting for automatic transfer, green light
turns on. When the level sensor of the supplied dewar
detects any trouble, green light blinks.

8 ULVAC CRYOGENICS INCORPORATED
AUTO SUPPLY : Use this button to start dispensing liquid nitrogen at your
convenience when using the optional automatic transfer
function with our level sensor. This button illuminates in
white while automatic transfer is taking place.
MANU START : Press this button to manually dispense liquid nitrogen
from LN2 manual dispense port. (To be referred to as
“Manual supply”) The manual supply is terminated
automatically. This button lights in green while liquid
nitrogen is manually supplied and blinks from pressing 30
seconds in advance to automatic termination. When you
wish to supply more, press this button once again while it is
blinking to extend the supply time by 10 minutes..
MANU STOP : Push this button to interrupt the manual supply of liquid
nitrogen supply operation.
Indicator : Displays the guideline amount of liquid nitrogen in liquid
nitrogen dewar.
eco : Press this button to switch to eco-mode operation and
the button lights in blue. For eco mode, please refer to
"13.eco mode".
COMP. AL. : Turns on red when the UW404 is stopped due to error. In
this case, the RUN/STOP button flickers at the same time.
GN2 AL. : The lighting is turn on red when nitrogen gas generator
stops due to faults, or when the supply pressure of nitrogen
gas declines. Then RUN/STOP switch flickers.
Maintenance : This light turns on in orange when it approaches the
maintenance of S050 or UW404.
Temperature meter :This shows the temperature inside the dewar.

ULVAC CRYOGENICS INCORPORATED 9
Figure 2-3 Inside view of EMP-20W front door and lower panel
Figure 2-4 Electrical circuit
ＰＯＷＥＲ
ＲＥＳＥＴ
ＳＴＡＲＴ／ＳＴＯＰ
Ｐｒｅｓ ｓｕｒｅ ｇａｕｇｅ
Ｃｏｌｄ ｈｅａｄ
ｄｅｗａｒ
Ｅｌｅ ｃｔｒｉｃａｌ ｃｉｒｃｕｉｔ
Ｈｅｌｉｕ ｍ ｇａｓ ｐｒｅｓｓｕ ｒｅ ｇａｕｇｅ
Ｈｅｌｉｕｍ ｇａｓ ｃｈａｒｇｅ ｖａｌｖｅ
Ｈｅｌ ｉｕｍ ｇａｓ ｃｈａｒｇｅ ｐ ｏｒｔ
Ｃｏｍｐｒｅｓｓｏｒ
Ｈｏｕｒ ｍｅｔｅｒ
ＵＷ４０４
Ｐｒｅｓ ｓｕｒｅ ｇａｕｇｅ
Ｓ０５０
（Ｉｎｓｉｄｅ ｏｆ ａ ｐａｎｅｌ）
（Ｉｎｓｉｄｅ ｏｆ ａ ｐａｎｅｌ）
Ｃｏｌｄ ｈｅａｄ
Ｌｉｑｕｅｆｉｅｄ
ｎｉｔｒｏ ｇｅｎ
ｄｅｗａｒ
Ｃｏｍｐｒｅｓｓｏｒ
ＳＴＡＲＴ／ＳＴＯＰ
Ｅｌｅ ｃｔｒｉｃａｌ ｃｉｒｃｕｉｔ
ＲＥＳＥＴ
ＰＯＷＥＲ
Ｈｅｌｉｕ ｍ ｇａｓ ｐｒｅｓｓｕ ｒｅ ｇａｕｇｅ
Ｈｅｌｉｕｍ ｇａｓ ｃｈａｒｇｅ ｖａｌｖｅ Ｈｏｕｒ ｍｅｔｅｒ
Ｈｅｌ ｉｕｍ ｇａｓ ｃｈａｒｇｅ ｐ ｏｒｔ
Ｌｅｖｅｌ ｓｅｎｓｏｒ
ｃｏｎｖｅｒｔｅｒ
Ｆｕｓｅ
Ｐ
ｃｏｎｖｅｒｔｅｒ
ｏｗｅｒ ｂｒｅａｋｅｒ
ＰＬＣ
Ｔｅｒｍｉｎａｌ ｂｌｏｃｋ
Ｆｕｓｅ
ＰＬＣ
Sequencer
Ｐ ｒｏｗｅｒ ｂｒｅａｋｅ
Circuit breaker
Ｔｅｒｍｉｎａｌ ｂｌｏｃｋ

10 ULVAC CRYOGENICS INCORPORATED
2.3 Inside view of EMP-20W front door and lower panel (Figure 2-3)
Liquid nitrogen dewar :Stores liquid nitrogen (Maximum 80 litters).
Cold head (S050) :The cold head works in conjunction with the
compressor to generate ultra-low temperature and
liquefy nitrogen. The cold head needs maintenance
services according to the time in operation.
Pressure gauge :Displays the pressure inside the dewar.
He PRESSUREMETER :Displays the pressure of Helium gas filled in UW404.
When suspended: 1.85 – 1.95 MPa
When in operation: 2.10 – 2.30 MPa
He Gas charge port :This port is inside the front panel of UW404.
Connect the charging hose to this port to charge
Helium gas. Do not touch this port except when
needed.
He Gas charge valve :Used when charging Helium gas. Do not touch the
valve except when needed, as touching it may result in
Helium leakage.
START/STOP switch :This button lights in green when UW404 is in
operation. This does not work to turn on and off
UW404 as it is remotely controlled in this
configuration.
RESET button :This button lights in red when UW404 is suspended
with some fault. Use this button to reset the
abnormal state.
POWER light This lights in red when UW404 is turned on.
Hour meter :Displays the total operation time of UW404. Use
this information to conduct maintenance work
properly.
2.4 EMP-20W Electrical circuit（Figure 2-4）
Circuit breaker :This is a protective breaker for control circuit of
EMP-20W. It is tripped when an electric leak or
short-circuit occurs.
Fuse :There are protective fuses (F-1, 2: 3A) for AC circuit
and protective fuses (F3: 2A) for DC circuit.

ULVAC CRYOGENICS INCORPORATED 11
Sequencer :A controller used to control the operation of
EMP-20W. This functions to operate the necessary
unit upon reception of signal from each sensor. In the
event of an error in this unit, please inform us of the
status of input or output lights of the sequencer when
contacting us.
Level sensor converter :It is the electric parts for detecting the amount of
liquid nitrogen in EMP-20W. Since it is adjusted
precisely, please do not touch any button.
Terminal blocks :These connect the wiring of signal reception of the
electric appliances and automatic transfer destination
containers.

12 ULVAC CRYOGENICS INCORPORATED
3. Flow Diagram. Flow Diagram
This may vary depending on the customers’ specifications.This may vary depending on the customers’ specifications.
Figure 3-1 Flow DiagramFigure 3-1 Flow Diagram
制御回路
安全弁
常温 電磁 弁
コンプレッサー ード
リモ ートコ ード
Ｈｅガス配管
冷凍機コ
電源 コー ド
ヘリ ウム ガス
電源コード
ＳＶ－１
ＳＶ －２
Ｓ Ｖ－３
φ６ ×ｔ １
（ポリウレタン樹脂）
窒素ガス発生装置
Ｐ
圧力 計
圧力調整弁
ＬＶ －２
冷却 水ホ ース
コー ルド ヘッド
ＳＶ －４
液化窒素
フレ
取り出し
キホ ース
液化 窒素 供給 配管
低温 電磁 弁（ 自動 ）
低温電磁弁（手動）
液化 窒素 供給 配管
低温電磁弁（自動）
Cryogenic Solenoid Valve (Auto)
Pressure Control
A
mbient Temperature
Solenoid Valve
LN2 Supply Tube
Cr
y
o
g
enic Solenoid Valve
(
Manu
)
LN2 Supply Flexible Hose
LN2 Supply Tube Cryogenic Soleniod Valve (Auto)
温度 指示 計（ ＴＩ ）
Control Circuit
Temperature Indicator (TI)
Pressure
Gauge
Pressure Relief Valve
Coldhead Cable
Coldhead
He Gas Tube
Remote Cable
）原料 窒素 ガス配 管 ８（ Ｔ
Cooling Water Hose
Power Cable
Nitrogen Gas Generato
r
Compresso
r
Nitrogen Gas Tube (T8)
Power Cable

ULVAC CRYOGENICS INCORPORATED 13
4. Specifications
4.1 Liquid nitrogen generator
Type :EMP-20W
Amount of liquid nitrogen generated : 19L/day (50Hz), 20L/day (60Hz)
High pressure gas processing capacity : 13.0 m3/day
Dimensions : 930[W]*740 [D] * 1661 [H]
Weight : Approx. 340 kg
Cold head type : S050
Compressortype :UW404
Cooling method : Water-cooling
Ambient conditions : Ambient temperature: 10 – 35°C
Relative humidity: 80% or less
(Non-condensation except on LN2
manual dispense port)
cEMP-20W must be installed indoors.
cEMP-20W must not be used in the atmosphere with organic solvents or corrosive
gases.
4.2 PSA (Pressure Swing Adsorption) nitrogen gas generator
Type :GN-15i
Dimensions : 480[W] ×620[D] ×1015[H]
Weight : Approx.90kg
Cooling method : Air-cooling (Inhale from the front,
exhaust from the back)
cGN-15i must be installed indoors.
cGN-15i must not be used in the atmosphere with organic solvents or corrosive gases.
cAir inhaled from the front is discharged to the backside. Do not block the front and
backside.
4.3 Membrane nitrogen gas generator
Type : IM-120
Dimensions : 150[W] ×300[D] ×800[H]
Weight : Approx.20 kg
cIM-120 must be installed indoors.
cIM-120 must not be used in the atmosphere with organic solvents or corrosive gases.

14 ULVAC CRYOGENICS INCORPORATED
5. Utilities
5.1 Power source (for EMP-20W)
Voltage : 200 VAC , 3-phase
Power capacity : 30 A or above
Power consumption : 3.3/4.1 kW ( 50/60 Hz )
Connection : Round type crimping terminal for M5
Use Class-D earthing for safety.
CAUTION
5.2 Cooling water (for EMP-20W)
Flow rate : 180 – 330L/hour (recommended: 270L/h)
Pressure : 0.04 – 0.17 MPa (recommended: 0.1MPa)
Temperature : 10 – 30°C (recommended: 20°C)
Water quality : Tap water equivalent
* Check the water quality on a regular basis.
The flow rate of cooling water should be within the following allowable range.
When the flow rate or pressure is too low, it may result in abnormal suspension,
failure, or damaging cooling water pipes due to the temperature rise.
CAUTION