Ulvac GHD-101A User manual

No. 1000902-2-01-2
Instruction Manual
Direct drive oil-sealed rotary vacuum pump
Model
GHD-101A
GHD-101B
GHD-101C
GHD-101D
Read this manual before using the product.
Keep it in a safe place ready for use as necessary.
The content of this manual is liable to change without prior notice in
the event of improvements in performance and capabilities.
ULVAC KIKO, Inc.

-01-
０．Introduction
0.1 Before using the vacuum pump
Thank you for your purchase of the vacuum pump.
After receiving the pump, check it against the details of the order, and verify that
there has been no damage in transit.
Always read this manual thoroughly before installation, operation, inspection, and
maintenance to ensure that the pump retains its performance over the long-term, and
ensure that you understand the safety cautions, pump specifications, and method of
operation.
Copying of any part of this manual for use by a third party is prohibited without
permission of Ulvac.
Warning
Attention

-02-
0.2 Safety icons
This manual and the pump warnings include safety icons to assist in understanding
points to be followed.
The meanings of these icons are as described below.
There is a very real danger of death or serious injury to the operator if the equipment
is used incorrectly.
There is a danger of death or serious injury to the operator if the equipment is used
incorrectly.
There is a danger of moderate injury or disability to the operator, or physical damage,
if the equipment is used incorrectly.
There is a possibility of damage to the equipment, or problems with operation, if the
equipment is used incorrectly.
The surface of the pump may be very hot (40-80ºC). Use appropriate protection to
avoid direct contact with these surfaces. Incorporate the pump into equipment for
use.
Contact with the motor will result in electric shock. When connected to a power
supply, disconnect the power supply plug, and check that power is no longer
supplied.
Pump intake
Pump exhaust
Danger
Warning
Caution
Attention
Warning
Warning

-03-
0.3 Safety cautions
Ensure that only dry air or dry nitrogen enters this pump.
If the pump has been used to exhaust toxic gases, the pump itself, and the vacuum
pump oil (pump oil) will also be toxic. Be aware of this when performing maintenance.
Ensure that this pump is dismantled and repaired only by a repair technician. Failure
to follow this requirements may result in abnormal operation or electric shock.
Always ensure that the main power supply has been disconnected before inspecting
or repairing. Failure to do this may result in electric chocks or injuries due to the
pump suddenly starting.
Ensure that the equipment is earthed correctly. Installation of an earth leakage
breaker is recommended. Failure to earth the equipment correctly may result in
electric shock in the event of a malfunction or earth leakage.
Do not operate the pump with the exhaust blocked, or with the passage of gas on the
exhaust side obstructed. Under these conditions, the pump pressure increases, and
this may cause it to burst, oil to spray out of the oil level gauge, or the motor to
become overloaded.
The pump is not pressure-resistant, and has an internal pressure limit of 0.03 MPa
(gauge pressure).
Danger
Danger
Warning
Warning
Warning
Warning

-04-
Do not use the pump in an explosive atmosphere. Use under such conditions may
result in fire.
Do not put your fingers or anything else in the motor openings. Failure to follow this
requirement may result in electric shocks, injuries, or fire.
Do not touch the rotating parts such as the motor, shaft or joints while the pump is
operating. Failure to do so may result in injury or fire.
Ensure that the vicinity of the motor and pump is completely free of inflammable
material. Failure to follow this requirement may result in fire.
Ensure that the vicinity of the motor is free of obstacles which may obstruct
ventilation. Obstructed ventilation may result in fire.
The pump becomes very hot during operation, and it should therefore not be
touched, either in operation or immediately after it has stopped. Contact with the hot
pump may result in burns.
Ensure that all wiring work is performed in accordance with electrical equipment
standards and internal wiring regulations. Incorrect wiring work may result in fire.
If the pump ceases to operate, or a fault occurs, switch the main power supply off
immediately to prevent any accidents, and contact your dealer or Ulvac, for
inspection and repair.
Do not operate the pump when it doesn’t have any pump oil in it. It will break the
pump.
Warning
Caution
Caution
Caution
Caution
Caution
Caution
Attention

-05-
0.4 Receiving and storing the pump
0.4.1 Receiving the pump
The pump has been shipped with great care, however the following
procedure is recommended once the packing has been removed.
(1) Check that the product is as ordered.
(2) Check that all the accessories are there.
(3) Check that no damage has occurred in transit.
(4) Check that no nuts or bolts have become loose in transit. Have any nuts
come off?
Contact your dealer or Ulvac if a problem has occurred.
0.4.2 Surroundings during storage, mounting, and operation
This pump is designed with very tight tolerances, and the following conditions
must therefore be satisfied during storage, mounting, and operation.
(1) Temperature and humidity in operation: humidity at 7ºC – 40ºC, 85% or
less RH
(2) Maximum height above sea level during storage and operation: 1,000 m
(3) Other (during storage and operation)
a) No corrosive or explosive gas.
b) No condensation.
c) No dust.
d) Installed indoors.
e) Not stacked on other items, or likely to fall.
f) Not in direct sunlight.
g) Not near a heat source.
h) Pump oil put in the pump and inlet port sealed with a cap if stored for a
long period of time.
i) Not stored with moisture inside pump.
The pump weighs 20kg or more, and lifting or moving it alone may therefore result in
injury. Failure to do so may result in injury. Always ensure that at least two people
perform the installation as shown in 3.1 Installation.
Caution

-06-
The pump will be damaged if it is subjected to shock it is overturned.
Always use the pump indoors.
Pump oil must be put in the pump and the inlet port sealed if storing it unused for a
long period of time.
Do not leave the pump unused with moisture inside it. Corrosion of pump
components is accelerated if it is left in this condition, and the pump may seize and
no longer rotate.
0.5 Protective Equipment
A single-phase motor is connected to this pump.
An overload protection device (automatic-recovery type thermal protector) is built-in
to the single-phase motor.
Other protective equipment (e.g. earth leakage breaker) is also recommended to be
fitted.
Use the motor only at the rated voltage. Use at a different voltage may result in the
overload protection not operating correctly, motor burnout, or fire.
Attention
Attention
Attention
Attention
Attention

Contents-1
Contents
0．Introduction ・・・・・・・・・・ 01
0.1 Before using the vacuum pump ・・・・・・・・・・ 01
0.2 Safety icons ・・・・・・・・・・ 02
0.3 Safety cautions ・・・・・・・・・・ 03
0.4 Receiving and storing the pump ・・・・・・・・・・ 05
0.4.1 Receiving the pump ・・・・・・・・・・ 05
0.4.2 Surroundings during storage, mounting, and operation ・・・・・・・ 05
0.5 Protective Equipment ・・・・・・・・・・ 06
1．Using the pump safely ・・・・・・・・・・ 1
1.1 Dangers unique to the pump, and safety measures ・・・・・・・ 1
1.1.1 Leakage of dangerous gases and substances・・・ 1
1.1.2 Electric shock ・・・・・・・・・・ 1
1.1.3 Bursting ・・・・・・・・・・ 2
1.1.4 High temperature ・・・・・・・・・・ 2
1.2 Safety data sheet (SDS) ・・・・・・・・・・ 2
2．Pump description ・・・・・・・・・・ 3
2.1 Performance details ・・・・・・・・・・ 3
2.2 Dimension drawings ・・・・・・・・・・ 4
3．Installation ・・・・・・・・・・ 5
3.1 Installation ・・・・・・・・・・ 5
3.2 Establishing an exhaust ・・・・・・・・・・ 6
3.3 Vacuum piping ・・・・・・・・・・ 7
3.4 Wiring ・・・・・・・・・・ 8
3.5 Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
DANGER
WARNING
WARNING
CAUTION

Contents-2
4．Operation ・・・・・・・・・・ 12
4.1 Safety cautions ・・・・・・・・・・ 12
4.2 Starting ・・・・・・・・・・ 13
4.3 Operating when it is cold ・・・・・・・・・・ 13
4.4 Stopping ・・・・・・・・・・ 14
4.5 Backflow prevention device ・・・・・・・・・・ 14
4.6 Thermal protector ・・・・・・・・・・ 14
4.7 Gas ballast valve ・・・・・・・・・・ 15
4.8 Attaching the oil mist trap (option) element ・・・・・・・・・・ 16
4.9 Operation restrictions when attaching the oil mist trap (option) element ・・・・・・・・・・ 16
4.10 Magnetic coupling ・・・・・・・・・・ 17
5．Pump performance ・・・・・・・・・・ 18
5.1 Ultimate pressure ・・・・・・・・・・ 18
5.2 Exhaust velocity ・・・・・・・・・・ 18
5.3 Required power ・・・・・・・・・・ 18
6．Maintenance, inspection and repair ・・・・・・・・・・ 20
6.1 Maintenance ・・・・・・・・・・ 20
6.2 Periodic inspection ・・・・・・・・・・ 20
6.3 Pump oil change ・・・・・・・・・・ 23
6.4 Trouble checklist ・・・・・・・・・・ 25
7．Disposal ・・・・・・・・・・ 27

Contents-3
8．Maintenance parts ・・・・・・・・・・ 28
8.1 Maintenance parts list ・・・・・・・・・・ 28
8.2 Disassembly drawings ・・・・・・・・・・ 29
Warranty
Safety data sheet (SDS)
Conditions of Use Check Sheet (disassembly repair)
Sales and Service Contact Addresses
Tables and figures
Fig. 1 GHD-101 Sealed rotary vacuum pump dimension drawings ・・・・・・・・・・ 4
Fig. 2 How to move the sealed rotary vacuum pump ・・・・・・・・・・ 5
Fig. 3 Establishing an exhaust ・・・・・・・・・・ 6
Fig. 4 Vacuum chamber and basic piping connections ・・・・・・・・・・ 7
Fig. 5 Wiring drawings ・・・・・・・・・・ 8
Fig. 6 Power cord consent (Inlet EN60320-1) ・・・・・・・・・・ 8
Fig. 7 How to attach the fastener and electric cord ・・・・・・・・・・ 9
Fig. 8 Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
Fig. 9 Exhaust velocity curve ・・・・・・・・・・ 19
Fig. 10 Adding oil to the sealed rotary vacuum pump ・・・・・・・・・・ 24
Fig. 11 GHD-101 Sealed rotary vacuum pump disassembly drawings ・・・・・・・・・・ 29
Table 1 Pump performance ・・・・・・・・・・ 3
Table 2 Motor performance ・・・・・・・・・・ 4
Table 3 Electric cord selection criteria ・・・・・・・・・・ 9
Table 4 Thermal protector characteristics ・・・・・・・・・・ 14
Table 5 Periodic inspection table ・・・・・・・・・・ 22
Table 6 Trouble checklist ・・・・・・・・・・ 25
Table 7 GHD-101 Maintenance parts list ・・・・・・・・・・ 28
Annex. Safety data sheet (SDS)

-1-
１．Using the pump safely
1.1 Dangers unique to the pump, and safety measures
Read this section thoroughly before operating or inspecting the pump. Understand
the potential dangers and methods of avoiding these dangers, before commencing
operation.
1.1.1 Leakage of dangerous gases and substances
Primary causes Avoidance and actions to be taken
⇒(1) Wear protective gear suitable for the toxic
substances when inspecting.
(2) Employ a specialist waste disposal
contractor to ensure that hazardous materials
are properly detoxified when dismantling, or
disposing of hazardous materials.
Injury due to contact with toxic
pump oil in the pump, or with
hazardous materials adhering to
the pump, during inspection and
disposal.
(3) Employ a properly licensed waste disposal
contractor.
1.1.2 Electric shock
Primary causes Avoidance and actions to be taken
⇒(1) Always ensure that the power supply has
been disconnected before commencing
wiring work. Always earth the pump.
(2) Always ensure that the power supply has
been disconnected before inspecting or
moving the pump.
Electric shock resulting from
contact with conducting parts of the
motor.
(3) Do not put your fingers or any thin objects
in the motor openings.
DANGER
WARNING

-2-
1.1.3 Bursting
Primary causes Avoidance and actions to be taken
Increased internal pressure, with
consequent bursting of the pump.
⇒Internal pressure limit is 0.03 MPa (gauge
pressure).
If measurement of the pump exhaust
pressure shows a value of 0.03 MPa (gauge
pressure), check and remove obstructions to
the passage of gas in the exhaust. When
using an oil mist trap, ensure that the
passage is clear by replacing or cleaning it.
1.1.4 High temperature
Primary causes Avoidance and actions to be taken
Burns due to high temperatures. ⇒(1) The pump becomes hot during operation.
Pump body → 40-80ºC
Motor → 40-80ºC
(2) High temperatures of the pump surfaces
bring a danger of burns if the pump is
touched by accident. Do not touch the
pump while it is in operation. Ensure that
the pump is stopped, and wait until it has
cooled, before commencing inspection.
1.2 Safety data sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be
used or touched when operating the pump. Read the SDS carefully in order to
understand the harmful properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those
mentioned in this instruction manual.
The SDS is provided as reference information for safe use of dangerous and toxic
chemicals. Persons handling pump oil are, on their own responsibility, required to
implement the necessary safety measures in use. The SDS is therefore not to be
considered as a guarantee of safety.
Warning
Caution
Caution

-3-
２．Pump description
2.1 Performance details
Table 1 Pump performance
MODEL GHD-101A GHD-101B GHD-101C GHD-101D
Voltage V 100 115-120 200 220-240
Frequency Hz 50/60Hz
TYPE Gaede type，2-stage, direct-drive
Exhaust velocity
L/minute
100（50Hz）/120（60Hz）
G.V. 6.7×10-1
Ultimate
pressure G.V. open 6.7
Standard R-2
Oil Amount
mL 1000
Ambient temperature
range 7～40
Location of use Indoors
Noise level dB(A) 70
Inlet KF-25 (NW-25)
Inlet/exhaust
port diameter Exhaust Standard-type (G1-size screw exhaust can be attached)
Overall dimensions
mm
155(W) x 413.5(L) x 234.5(H)
Weight
kg 22
Leakage
Pa・m3/sec 1×10-6
Note 1) G.V. stands for gas ballast valve.
Note 2) The “ultimate pressure” in the above table is that shown on a Pirani vacuum gauge.
Note 3) The vapor pressure, viscosity, and oiliness, etc. of the pump oil varies with the type,
and this may affect the pump performance. Please use the sealed rotary vacuum
pump oil specified by us.
Specified oil ：R-2
Note 4) It may be difficult to start the pump of the ambient temperature is below the
minimum value.
Note 5) The “noise level” in the above table is the maximum value (the value when a
standard exhaust port is attached to the pump exhaust and the pump is operated
under a high load). The noise level can be lowered by attaching an oil mist trap.

-4-
Table 2 Motor performance
MODEL GHD-101A GHD-101B GHD-101C GHD-101D
Voltage V 100 115-120 200 220-240
Frequency Hz 50/60
TYPE Single-phase, 300W，2-pole, condenser operation
Full-load
current value A
5.5 (50Hz)
6.3 (60Hz)
4.5 (50Hz)
5.3 (60Hz)
2.5 (50Hz)
2.9 (60Hz)
2.5 (50Hz)
2.7 (60Hz)
Rotation speed
r/min 2800 (50Hz) / 3300 (60Hz)
The pump becomes very hot during operation, and it should therefore not be
touched, either in operation or immediately after it has stopped. Contact with the hot
pump may result in burns.
Select a motor that is appropriate for the power supply. Use the motor only at the
rated voltage. Use at a different voltage may result in the overload protection not
operating correctly, motor burnout, or fire.
Do not use the motor at a voltage below the minimum rated voltage. It will not start
correctly.
2.2 Dimension drawings
Fig. 1 GHD-101 Sealed rotary vacuum pump dimension drawings
Caution
Attention

-5-
３．Installation
3.1 Installation
Select a location with as little dust and humidity as possible for the installation, and
ensure that the pump is installed level. Select a location that will enable installation,
removal, inspection, and cleaning operations.
Pay attention to the ambient temperature, especially when installing the pump inside
another device. Place the pump on anti-vibration rubber, etc. to ensure that
vibrations do not reach the pump.
Refer to “0.4.2 surroundings during storage, mounting, and operation” regarding the
ambient conditions.
Fig. 2 How to move the sealed rotary vacuum pump
The pump weighs 20kg or more, and lifting or moving it alone may therefore result in
injury. Failure to do so may result in injury or fire.
Always ensure that at least two people perform the installation as shown in Fig. 2.
The pump will break if operated on an incline, on its side, or upside down. Ensure
that the intake is on the top, and that the pump is level.
Do not use the pump in an explosive atmosphere. Use under such conditions may
result in fire.
Attention
Caution
Warning

-6-
3.2 Establishing an exhaust
As this pump is shipped with the correct amount of pump oil inside, ensure that it is
transported with the exhaust sealed with an oil cap. Remove this oil cap before
starting the pump, and fit either a standard exhaust port or an oil mist trap. (Refer to
Fig. 3.)
Fig. 3 Establishing an exhaust
An oil mist trap is effective when the pump is operated under conditions with a large
amount of oil mist (when used for a long time under high pressures).
The pump is not pressure-resistant, and has an internal pressure limit of 0.03 MPa
(gauge pressure). If the pump is operated while the exhaust is blocked or when a
device that inhibits the passage of gas at the exhaust side is fitted, the pressure
inside the pump rises, and oil may spray from the oil level gauge, the cover may be
broken, and the motor may be overloaded.
Attention
Warning

-7-
3.3 Vacuum piping
(1) Remove any powder, dust, or rust from the internal walls of the vacuum chamber,
piping, and vacuum valve etc. before connection to the pump.
The metal mesh in the inlrt port prevents introduction of foreign matter into the pump.
Do not remove it during use. Introduction of powder and dust into the pump will result
in a malfunction. If moisture is introduced to the pump, not only will the ultimate
pressure increase, but the inside of the pump will rust and may lead to the pump
malfunctioning.
(2) Install the vacuum valve (A) and leak valve (B) between the vacuum chamber and
pump as shown in Fig. 4.
Fig. 4 Vacuum chamber and basic piping connections
(3) This pump is fitted with an oil backflow prevention device. It is effective for preventing
the oil from back flowing when the pump is stopped. (It is not a gas backflow
prevention device.)
The backflow prevention device uses the oil pressure inside the pump to return the
internal pressure to atmospheric pressure when the pump is stopped and to close
the valve directly below the intake.
The backflow prevention device does not guarantee to do this 100%. In the case that the
internal pressure is not returned to atmospheric pressure when the pump is stopped,
approximately 400 ml of oil will enter the vacuum chamber in a short time. Also, even if
the internal pressure is returned to atmospheric pressure when the pump is stopped, the
pressure in the vacuum chamber will return to atmospheric pressure in a short time.
In addition to installing the vacuum valve (A) and leak valve (B) between the vacuum
chamber and pump as shown in Fig. 4., ensure that there is more capacity between the
pump and vacuum chamber that the amount of the oil backflow.
Vacuum
(A)
Vacuum valve
Leak valve
(B)
Pump
Attention
Warning

-8-
3.4 Wiring
(1) Check that the power supply voltage and the voltage that the motor uses are the
same.
(2) This pump rotates clockwise as seen from the front of the pump (level gauge side).
(3) An overload protection device (automatic-recovery type thermal protector) is built-in
to prevent damage to the motor from over current.
(4) Other protective equipment (e.g. earth leakage breaker) is also recommended to be
fitted.
Fig. 5 Wiring drawings
(5) The power cord consent (inlet) is suitable for EN60320-1.
Fig. 6 Power cord consent (Inlet EN60320-1)
(6) Insert the power cord into the power cord consent (inlet). If the power cord is not
included with the pump, it is available as an option.
a) Electric cord selection criteria
There are four types of motor that can be used with this pump: single-phase 100V,
115-120V, 200V, and 220-240V. The electric cord selection criteria are shown in
Table 3. Ensure that the selection is made according to these criteria. Select an
EN60320-1 plug to be inserted into the power cord consent (inlet).

-9-
Table 3 Electric cord selection criteria
Power supply
voltage
Voltage
standard Current standard Temperature standard
100-120V 125V or more 10A or more, instantaneous (5sec)
10A or more
200-240V 250V or more 10A or more, instantaneous (5sec)
10A or more
70ºC or
more
Install the fuse of 10A - 15A or circuit breaker in the branch circuit of the equipment
side.
b) Fastener
When using the pump with an electric cord, use a fastener. It prevents the
electric cord from coming out of the consent. Select a fastener that fits the
shape of the electric cord.
c) How to attach the fastener and electric cord
Attach the fastener according to the following steps 1-5. (Refer to Fig. 7.)
(1) Insert one side of the fastener into one of the holes to the side of the electric
cord consent.
(2) While squeezing the other side of the fastener, insert it into the hole on the
other side of the consent.
(3) Lift the fastener.
(4) Firmly insert the electric cord.
(5) Lower the fastener.
Fig. 7 How to attach the fastener and electric cord
③
①
②
⑤
④

-10-
Commence wiring work only after removing the power plug or turning it off. Do not
carry out wiring work while the wiring is live under any circumstances. Working under
such conditions may result in electric shock.
Ensure that all wiring work is performed in accordance with electrical equipment
standards and internal wiring regulations. Incorrect wiring work may result in fire.
When the pump is directly connected to the user’s device (plug is not the main
disconnection), connect a suitable circuit breaker to the pump at the end user’s side.
Passing current through the earth wire in the event of a short reduces the danger of
electric shock.
Use a power cord with the appropriate plug and earth wire with the pump.
Besides the power cord, There is a place that can connect the ground wire to the
pump. Ground wire attachment point the (M4 tap) has been provided on the base
side of the pump. (Refer to fig. 1.) Therefore, in case of installing the pump in the
housing, etc., it can also be connected to housing and the pump in the ground wire.
Ensure that wiring and earthing work is done in accordance with local regulations
and safety requirements.
Unsuitable earthing brings the danger of electric shock.
When repairing or changing the plug or electric cord, ensure that it is not connected
to anything other than the earth.
Irrespective of the presence or absence of yellow stripes, the green insulated
covering indicates the earth wire.
If the appropriate wiring method is unclear, or if there are any questions, check with
an electrical technician or the service division.
Do not change the supplied plug. If it is unsuitable for the power supply, have the
wiring work done by an electrical technician.
The pump must be earthed to the wiring or through a metal surface connected to
earthed equipment.
WARNING
Warning
Warning
Caution
Caution
Caution
Caution