Ulvac GHD-101A User manual

No. 1000902-2-01-2
Instruction Manual
Direct drive oil-sealed rotary vacuum pump
Model
GHD-101A
GHD-101B
GHD-101C
GHD-101D
Read this manual before using the product.
Keep it in a safe place ready for use as necessary.
The content of this manual is liable to change without prior notice in
the event of improvements in performance and capabilities.
ULVAC KIKO, Inc.

-01-
０．Introduction
0.1 Before using the vacuum pump
Thank you for your purchase of the vacuum pump.
After receiving the pump, check it against the details of the order, and verify that
there has been no damage in transit.
Always read this manual thoroughly before installation, operation, inspection, and
maintenance to ensure that the pump retains its performance over the long-term, and
ensure that you understand the safety cautions, pump specifications, and method of
operation.
Copying of any part of this manual for use by a third party is prohibited without
permission of Ulvac.
Warning
Attention

-02-
0.2 Safety icons
This manual and the pump warnings include safety icons to assist in understanding
points to be followed.
The meanings of these icons are as described below.
There is a very real danger of death or serious injury to the operator if the equipment
is used incorrectly.
There is a danger of death or serious injury to the operator if the equipment is used
incorrectly.
There is a danger of moderate injury or disability to the operator, or physical damage,
if the equipment is used incorrectly.
There is a possibility of damage to the equipment, or problems with operation, if the
equipment is used incorrectly.
The surface of the pump may be very hot (40-80ºC). Use appropriate protection to
avoid direct contact with these surfaces. Incorporate the pump into equipment for
use.
Contact with the motor will result in electric shock. When connected to a power
supply, disconnect the power supply plug, and check that power is no longer
supplied.
Pump intake
Pump exhaust
Danger
Warning
Caution
Attention
Warning
Warning

-03-
0.3 Safety cautions
Ensure that only dry air or dry nitrogen enters this pump.
If the pump has been used to exhaust toxic gases, the pump itself, and the vacuum
pump oil (pump oil) will also be toxic. Be aware of this when performing maintenance.
Ensure that this pump is dismantled and repaired only by a repair technician. Failure
to follow this requirements may result in abnormal operation or electric shock.
Always ensure that the main power supply has been disconnected before inspecting
or repairing. Failure to do this may result in electric chocks or injuries due to the
pump suddenly starting.
Ensure that the equipment is earthed correctly. Installation of an earth leakage
breaker is recommended. Failure to earth the equipment correctly may result in
electric shock in the event of a malfunction or earth leakage.
Do not operate the pump with the exhaust blocked, or with the passage of gas on the
exhaust side obstructed. Under these conditions, the pump pressure increases, and
this may cause it to burst, oil to spray out of the oil level gauge, or the motor to
become overloaded.
The pump is not pressure-resistant, and has an internal pressure limit of 0.03 MPa
(gauge pressure).
Danger
Danger
Warning
Warning
Warning
Warning

-04-
Do not use the pump in an explosive atmosphere. Use under such conditions may
result in fire.
Do not put your fingers or anything else in the motor openings. Failure to follow this
requirement may result in electric shocks, injuries, or fire.
Do not touch the rotating parts such as the motor, shaft or joints while the pump is
operating. Failure to do so may result in injury or fire.
Ensure that the vicinity of the motor and pump is completely free of inflammable
material. Failure to follow this requirement may result in fire.
Ensure that the vicinity of the motor is free of obstacles which may obstruct
ventilation. Obstructed ventilation may result in fire.
The pump becomes very hot during operation, and it should therefore not be
touched, either in operation or immediately after it has stopped. Contact with the hot
pump may result in burns.
Ensure that all wiring work is performed in accordance with electrical equipment
standards and internal wiring regulations. Incorrect wiring work may result in fire.
If the pump ceases to operate, or a fault occurs, switch the main power supply off
immediately to prevent any accidents, and contact your dealer or Ulvac, for
inspection and repair.
Do not operate the pump when it doesn’t have any pump oil in it. It will break the
pump.
Warning
Caution
Caution
Caution
Caution
Caution
Caution
Attention

-05-
0.4 Receiving and storing the pump
0.4.1 Receiving the pump
The pump has been shipped with great care, however the following
procedure is recommended once the packing has been removed.
(1) Check that the product is as ordered.
(2) Check that all the accessories are there.
(3) Check that no damage has occurred in transit.
(4) Check that no nuts or bolts have become loose in transit. Have any nuts
come off?
Contact your dealer or Ulvac if a problem has occurred.
0.4.2 Surroundings during storage, mounting, and operation
This pump is designed with very tight tolerances, and the following conditions
must therefore be satisfied during storage, mounting, and operation.
(1) Temperature and humidity in operation: humidity at 7ºC – 40ºC, 85% or
less RH
(2) Maximum height above sea level during storage and operation: 1,000 m
(3) Other (during storage and operation)
a) No corrosive or explosive gas.
b) No condensation.
c) No dust.
d) Installed indoors.
e) Not stacked on other items, or likely to fall.
f) Not in direct sunlight.
g) Not near a heat source.
h) Pump oil put in the pump and inlet port sealed with a cap if stored for a
long period of time.
i) Not stored with moisture inside pump.
The pump weighs 20kg or more, and lifting or moving it alone may therefore result in
injury. Failure to do so may result in injury. Always ensure that at least two people
perform the installation as shown in 3.1 Installation.
Caution

-06-
The pump will be damaged if it is subjected to shock it is overturned.
Always use the pump indoors.
Pump oil must be put in the pump and the inlet port sealed if storing it unused for a
long period of time.
Do not leave the pump unused with moisture inside it. Corrosion of pump
components is accelerated if it is left in this condition, and the pump may seize and
no longer rotate.
0.5 Protective Equipment
A single-phase motor is connected to this pump.
An overload protection device (automatic-recovery type thermal protector) is built-in
to the single-phase motor.
Other protective equipment (e.g. earth leakage breaker) is also recommended to be
fitted.
Use the motor only at the rated voltage. Use at a different voltage may result in the
overload protection not operating correctly, motor burnout, or fire.
Attention
Attention
Attention
Attention
Attention

Contents-1
Contents
0．Introduction ・・・・・・・・・・ 01
0.1 Before using the vacuum pump ・・・・・・・・・・ 01
0.2 Safety icons ・・・・・・・・・・ 02
0.3 Safety cautions ・・・・・・・・・・ 03
0.4 Receiving and storing the pump ・・・・・・・・・・ 05
0.4.1 Receiving the pump ・・・・・・・・・・ 05
0.4.2 Surroundings during storage, mounting, and operation ・・・・・・・ 05
0.5 Protective Equipment ・・・・・・・・・・ 06
1．Using the pump safely ・・・・・・・・・・ 1
1.1 Dangers unique to the pump, and safety measures ・・・・・・・ 1
1.1.1 Leakage of dangerous gases and substances・・・ 1
1.1.2 Electric shock ・・・・・・・・・・ 1
1.1.3 Bursting ・・・・・・・・・・ 2
1.1.4 High temperature ・・・・・・・・・・ 2
1.2 Safety data sheet (SDS) ・・・・・・・・・・ 2
2．Pump description ・・・・・・・・・・ 3
2.1 Performance details ・・・・・・・・・・ 3
2.2 Dimension drawings ・・・・・・・・・・ 4
3．Installation ・・・・・・・・・・ 5
3.1 Installation ・・・・・・・・・・ 5
3.2 Establishing an exhaust ・・・・・・・・・・ 6
3.3 Vacuum piping ・・・・・・・・・・ 7
3.4 Wiring ・・・・・・・・・・ 8
3.5 Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
DANGER
WARNING
WARNING
CAUTION

Contents-2
4．Operation ・・・・・・・・・・ 12
4.1 Safety cautions ・・・・・・・・・・ 12
4.2 Starting ・・・・・・・・・・ 13
4.3 Operating when it is cold ・・・・・・・・・・ 13
4.4 Stopping ・・・・・・・・・・ 14
4.5 Backflow prevention device ・・・・・・・・・・ 14
4.6 Thermal protector ・・・・・・・・・・ 14
4.7 Gas ballast valve ・・・・・・・・・・ 15
4.8 Attaching the oil mist trap (option) element ・・・・・・・・・・ 16
4.9 Operation restrictions when attaching the oil mist trap (option) element ・・・・・・・・・・ 16
4.10 Magnetic coupling ・・・・・・・・・・ 17
5．Pump performance ・・・・・・・・・・ 18
5.1 Ultimate pressure ・・・・・・・・・・ 18
5.2 Exhaust velocity ・・・・・・・・・・ 18
5.3 Required power ・・・・・・・・・・ 18
6．Maintenance, inspection and repair ・・・・・・・・・・ 20
6.1 Maintenance ・・・・・・・・・・ 20
6.2 Periodic inspection ・・・・・・・・・・ 20
6.3 Pump oil change ・・・・・・・・・・ 23
6.4 Trouble checklist ・・・・・・・・・・ 25
7．Disposal ・・・・・・・・・・ 27

Contents-3
8．Maintenance parts ・・・・・・・・・・ 28
8.1 Maintenance parts list ・・・・・・・・・・ 28
8.2 Disassembly drawings ・・・・・・・・・・ 29
Warranty
Safety data sheet (SDS)
Conditions of Use Check Sheet (disassembly repair)
Sales and Service Contact Addresses
Tables and figures
Fig. 1 GHD-101 Sealed rotary vacuum pump dimension drawings ・・・・・・・・・・ 4
Fig. 2 How to move the sealed rotary vacuum pump ・・・・・・・・・・ 5
Fig. 3 Establishing an exhaust ・・・・・・・・・・ 6
Fig. 4 Vacuum chamber and basic piping connections ・・・・・・・・・・ 7
Fig. 5 Wiring drawings ・・・・・・・・・・ 8
Fig. 6 Power cord consent (Inlet EN60320-1) ・・・・・・・・・・ 8
Fig. 7 How to attach the fastener and electric cord ・・・・・・・・・・ 9
Fig. 8 Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
Fig. 9 Exhaust velocity curve ・・・・・・・・・・ 19
Fig. 10 Adding oil to the sealed rotary vacuum pump ・・・・・・・・・・ 24
Fig. 11 GHD-101 Sealed rotary vacuum pump disassembly drawings ・・・・・・・・・・ 29
Table 1 Pump performance ・・・・・・・・・・ 3
Table 2 Motor performance ・・・・・・・・・・ 4
Table 3 Electric cord selection criteria ・・・・・・・・・・ 9
Table 4 Thermal protector characteristics ・・・・・・・・・・ 14
Table 5 Periodic inspection table ・・・・・・・・・・ 22
Table 6 Trouble checklist ・・・・・・・・・・ 25
Table 7 GHD-101 Maintenance parts list ・・・・・・・・・・ 28
Annex. Safety data sheet (SDS)