Ulvac G-101D User manual

No.1000500-2-01-7
Instruction Manual
for
Direct-Drive Oil Sealed Rotary Vacuum Pump
Model
G-101D
G-101S
Before using the product, be sure to read this manual.
Keep this manual in a place where it can be referred to at any time
and look after it carefully.
The contents of this instruction manual are subject to change
without prior notice due to improvements in performance and the
functions of the product.
ULVAC KIKO,Inc

- 01 -
0. Introduction
0.1 Before using the vacuum pump
Thank you for purchasing our vacuum pump (hereinafter called “pump”). When you have received
the pump, check that the delivered pump is as per your order and that it has not been damaged in
transportation, etc.
In order to use the pump for as long as possible, read this instruction manual
thoroughly before performing installation, operation, inspection and
maintenance, and sufficiently understand the cautions for safety, the
specifications and operation methods of the pump.
No part of this instruction manual may be copied for use by a third party
without our permission.
Warning
Note

- 02 -
0.2 Safety symbols
In this instruction manual and on warning labels attached to the pump, the following symbols
are used so that matters which must be strictly adhered to can be readily understood.
These symbols are divided as shown below.
When mishandled, there is an imminent danger of the operator suffering a fatal
accident or serious injury.
When mishandled, there is a possibility of the operator suffering a fatal
accident or serious injury.
When mishandled, there is a possibility of the operator suffering an injury
(light or medium injury) or of damage occurring to property.
When mishandled, there is a possibility of the pump being damaged or
malfunctioning.
Caution
Note
Warning
Danger

- 03 -
0.3 Cautions for safety
When toxic or flammable gases are exhausted from the pump, they m a y l e a k n o t
only from the pump outlet but also from the pump unit itself. Take proper
measures suitable for the type of gas.
After the pump has been used for exhausting toxic gasses, not only the pump
itself but also vacuum pump oil (hereinafter called “pump oil”) get toxic.
Keep this in mind when performing the maintenance.
Never allow people other than repair engineers to disassemble or repair the
pump. Failure to do so may result in ignition or malfunction, leading to injury
or electric shock.
Before performing inspection or repair, always turn off the power switch.
Failure to do so may result in electric shock or the unexpected start of the
pump, leading to injury.
Connect the earth wire correctly. It is recommended that a dedicated earth
leakage breaker should be installed. If the earth wire is not connected, there
is a possibility of electric shock occurring in the case of a malfunction
or electrical leakage.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas.
Otherwise, the internal pump pressure increases causing the pump to explode,
the oil level gauge to protrude or the motor to be overloaded.
This pump is not resistant to pressure. The internal pump pressure is limited
to 0.03 MPa (gauge pressure).
Warning
Danger
Danger
Warning
Warning
Warning

- 04 -
Do not use the pump in an explosive atmosphere. Failure to do so will result
in injury or fire.
Do not insert fingers or objects into the opening of the motor. Doing so may
result in electric shock, injury, or fire.
Never touch the rotating section of the motor, shaft or coupling while the
pump is in operation. Failure to do so will result in injury.
Never place combustible materials around the motor or pump. There is a risk
of fire.
Also, do not place objects which block ventilation around the motor. Abnormal
heat generation may result in burns or fire.
Do not touch the motor while the pump is in operation or when the pump is
still hot immediately after it stops. Touching it will result in burns.
Arrange wires correctly in accordance with the “Electrical Equipment
Technical Standard” and “Wiring Regulations.” Incorrect wiring may result
in fire.
If the pump ceases operation or malfunctions, turn off the power switch
immediately to prevent accidents, and ask the company from which you purchased
the pump or the manufacturer for inspection and repair.
Do not operate the pump without adding pump oil. If it is operated in an
oil-less condition, the pump will be damaged.
Caution
Warning
Caution
Caution
Caution
Caution
Note
Caution

- 05 -
0.4 Acceptance and storage of the pump
0.4.1 Acceptance of the pump
Although the pump is delivered with great care, check the following after unpacking.
①The delivered pump is in accordance with your request.
②The specified accessories (enough pump oil to use the pump once; optional equipment) have
been provided.
③No parts have been damaged in transportation.
④Neither screws nor nuts have become loose nor were lost in transportation.
If there are any problems, contact the company from which you purchased the pump or the sales
department of the manufacturer.
0.4.2 Environmental conditions for storage, installation and operation
Since this pump is precisely engineered, ensure that the following conditions be satisfied during
storage, installation and operation.
①Ambient temperature, relative humidity: 7℃~ 40℃, 85% RH or less
②Height above sea level during storage and installation: 1,000 m or less
③Other conditions for storage and operation
a) Free from corrosive and explosive gases
b) No condensation
c) Dust-free environment
d) Indoors
e) Do not place pumps on top of each other or place a pump on its side.
f) Not subject to direct sunlight
g) Far from heat sources
h) When you keep it for a long period of time, put pump oil into a pump and seal a inlet
port with a cap.
i) Don't keep it, where moisture is attracted.
Since the pump weighs as much as 20 kg, do not lift or transport it by yourself.
Doing so may cause an injury. Please wear safety shoes at the time of work.
Perform such work by two people as shown in 3.1 “Installation.” and wear
safety shoes.
Do not subject the pump to shocks or place the pump on its side. Doing so
may damage the pump.
For indoors use only.
Note
Caution
Note

- 06 -
When you keep it, without using a pump for a long period of time, please put
pump oil into a pump and seal a inlet port. Oil is not put into a pump, but
if it is kept where a inlet port is opened wide, water absorption may expand
vanes of a pump and a pump may stop rotating.
Please do not leave it, where moisture is sucked. If it is left with moisture
sucked, since water absorption expansion of vanes and the corrosion of pump
parts will be promoted, a pump may stop rotating.
0.5 Protective device
The pump is provided with a single-phase motor.
An overload protector (manually reset thermal protector) is incorporated.
The use of another protective device (such as an earth leakage breaker) in addition to the
overload protector is recommended.
Use the pump only at the rated voltage. Use at other than the rated voltage
will interfere with correct operation of the overload protector, and result
in the motor burning out, or fire.
Note
Note
Note

Contents - 1
Contents
0. Introduction ·························· 01
0.1 Before using the vacuum pump ·························· 01
0.2 Safety symbols ·························· 02
0.3 Cautions for safety ·························· 03
0.4 Acceptance and storage of the pump ·························· 05
0.4.1 Acceptance of the pump ·························· 05
0.4.2 Environmental conditions for storage, installation and operation ·· 05
0.5 Protective device ·························· 06
1. For Safe Operation ·························· 1
1.1 Hazards peculiar to the pump and safety measures ······················· 1
1.1.1 Danger Leakage of hazardous gases and substances ············ 1
1.1.2 Warning Electric shock ·························· 1
1.1.3 Warning Explosion ·························· 2
1.1.4 Caution High temperature ·························· 2
1.2 Safety Data Sheet (SDS) ·························· 2
2. Outline of the Pump ·························· 3
2.1 Specification ·························· 3
2.2 Dimensional drawing ·························· 5
3. Installation ·························· 6
3.1 Installation ·························· 6
3.2 Lubrication ·························· 6
3.3 Vacuum piping ·························· 8
3.4 Electric wiring ··························· 9
3.5 Fluctuation in the power voltage and frequency ·························· 11
4. Operation ·························· 13
4.1 Cautions for operation ·························· 13
4.2 Start of operation ·························· 14
4.3 Stopping the operation ·························· 14
4.4 Backflow preventer(G-101S) ·························· 15
4.5 Thermal protector ·························· 15
4.6 Gas ballast valve(G-101D) ·························· 15
4.7 Operation in cold climates ·························· 16
4.7.1 Operational method ·························· 16
4.7.2 Important points ·························· 16
4.8 An inlet port, exhaust port replacement (at option) ·················· 17
4.8.1 The switching method of the inlet port ·························· 17
4.8.2 The switching method of the exhaust port ·························· 17
4.9 Installation of the oil mist trap (Option) ·························· 17
4.10 Restriction on operation when the oil mist trap is installed ·········· 17

Contents - 2
5. Pump Performance ·························· 18
5.1 Ultimate pressure ·························· 18
5.2 Pumping speed ·························· 18
5.3 Power requirement ·························· 18
6. Maintenance, Inspection and Repair ·························· 20
6.1 Maintenance ·························· 20
6.2 Periodic inspection ·························· 20
6.3 Replacement of the pump oil ·························· 22
6.4 Replacement of the coupling ·························· 24
6.5 Trouble check list ·························· 25
7. Disposal ·························· 27
8. Maintenance parts ·························· 28
8.1 Maintenance parts list ·························· 28
8.2 Disassembly drawing ·························· 30
Warranty
Safety Data Sheet (SDS)
Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)
Contact address of sales and service departments

Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of G-101D oil sealed rotary vacuum pump ·········· 5
Fig. 2 Dimensional drawing of G-101S oil sealed rotary vacuum pump ·········· 5
Fig. 3 Transportation method of the oil sealed rotary vacuum pump ············ 6
Fig. 4 Lubrication of the oil sealed rotary vacuum pump ······················ 7
Fig. 5 Basic piping diagram to the vacuum chamber ·························· 8
Fig. 6 Electric wiring diagram ··························· 9
Fig. 7 Change region of the voltage and frequency ·························· 11
Fig. 8 Pumping speed curve ·························· 19
Fig. 9 Replacement of the coupling ·························· 24
Fig.10 Disassembly drawing of G-101D oil sealed rotary vacuum pump ·········· 30
Fig.11 Disassembly drawing of G-101S oil sealed rotary vacuum pump ·········· 31
Table 1 Pump specification ·························· 3
Table 2 Motor specification ·························· 4
Table 3 Characteristics of the thermal protector ·························· 15
Table 4 Periodic inspection table ·························· 21
Table 5 Trouble check list ·························· 25
Table 6 G-101D Maintenance parts list ·························· 28
Table 7 G-101S Maintenance parts list ·························· 29
Attached table: Safety Data Sheet (SDS)

-1-
1. For Safe Operation
1.1 Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully understand potential
hazards and prevention methods.
1.1.1 Danger Leakage of hazardous gases and substances
Cause Prevention method and measures
Leakage of toxic and
flammable gases
⇒Dilute hazardous gases to a safe concentration before they
enter the pump inlet.
Injury due to touching toxic
pump oil in the pump or
harmful substances attached
to the pump during
inspection or disposal
⇒ ① Wear protective equipment suitable for toxic substances
when carrying out inspection.
②Before overhauling and disposing of the pump, ask a
waste disposal specialist to make it safe.
③Ask an authorized waste disposal specialist to carry out
disposal.
1.1.2 Warning Electric shock
Cause Prevention method and measures
The energized part of the
motor was touched.
⇒ ① When connecting electric wires, always turn off the
power and be sure to connect the earth wire.
②When inspecting and transferring the pump, always turn
off the power.
③Never insert hands, fingers, or thin objects through the
motor opening.

-2-
1.1.3 Warning Explosion
Cause Prevention method and measures
The pressure in the pump
increased causing the pump
to explode.
⇒The maximum internal pump pressure is 0.03 MPa (gauge
pressure).
Measure the pressure at the outlet side and, if the pressure
is 0.03 MPa or more (gauge pressure), remove objects
which block the passage of gas from the outlet side. When
an oil mist trap is adopted, replace or clean it so that it will
not block the passage of gas.
1.1.4 Caution High temperature
Cause Prevention method and measures
High temperatures caused
burns.
⇒ ① The pump reaches a high temperature during operation.
pump body →70 ～80 ℃
motor →70 ～80 ℃
②Since the surface temperature is hot, touching the
surface accidentally may result in burns. Never touch
the pump during operation. When carrying out
inspection, wait until the pump has cooled down
completely after it stops.
1.2 Safety Data Sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be used or
touched when operating the pump. Read the SDS carefully in order to understand the harmful
properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those mentioned in
this instruction manual.
SDS is submitted as reference information to ensure safe handling of hazardous and
harmful materials. Personnel handling the pump oil should be aware that proper
measures must be taken depending on the conditions of use as their responsibility.
Keep in mind that the SDS itself is not a warranty for safety.
Caution

-3-
2. Outline of the Pump
2.1 Specification
This oil sealed rotary vacuum pump is a rotary vane pump (hereinafter called Gaede type pump)
in which the pump is directly driven by the motor. Since the pump is small, light, and quite
simply constructed, it is easily maintained and repaired.
Table 1 Pump specification
Model G-101D G-101S
Type Sliding vane 2stage Sliding vane 1stage
50Hz 100
Pumping speed
(L/min) 60Hz 120
G. V. C l o s e 6.7×10-1 9.3
Ultimate pressure
(Pa) G.V. Open 6.7 -
Standard oil SMR-100
Oil Oil amount
(mL) 800 1,200
Inlet port diameter φ27(Inlet port of 40□Flange can be installed in pump)
Exhaust port
diameter Mushroom type (Exhaust port of G1size screw can be installed in pump)
Weight
(Kg) Single phase 23 22
Note 1: The ultimate pressure values in the above table are indicated by a Pirani gauge.
Note 2: Vacuum pump oils have different steam pressures, viscosities, and oil properties depending
on the type. Always use the oil sealed rotary vacuum pump oil specified by us. The use of
other oils will affect the pump’s performance.
Specified oil: SMR-100
Note 3: “G.V.” is an abbreviation for gas ballast valve.

-4-
Table 2 Motor specification
Model G-101D G-101S
W(Poles) 400(4)
100/100(50/60Hz)
Motor Single
phase V
200/200(50/60Hz)
100/100V 6.4/5.9(50/60Hz)
Full load current
(A)
Single
phase
200/200V 3.2/2.8(50/60Hz)
100/100V 1,425/1,710(50/60Hz)
Motor speed
(r/min)
Single
phase 200/200V 1,450/1,745(50/60Hz)
Do not touch the motor while the pump is in operation or when the pump is
still hot immediately after it stops. Touching it will result in burns.
Use the pump only at the rated voltage. Use at other than the rated voltage
will interfere with correct operation of the overload protector, and result
in the motor burning out, or fire.
Note
Caution

-5-
2.2 Dimensional drawing
Motor ; Single phase, 50/60Hz, 400W, 4Poles, Capacitor start & run,
fully-closedexternalfan
Weight ; 23kg
Fig. 1 Dimensional drawing of G-101D oil sealed rotary vacuum pump
Motor ; Single phase, 50/60Hz, 400W, 4Poles, Capacitor start & run,
fully-closedexternalfan
Weight ; 22kg
Fig. 2 Dimensional drawing of G-101S oil sealed rotary vacuum pump

-6-
3. Installation
3.1 Installation
The pump should be installed on a level surface in a location with minimal dust, dirt and
humidity and be arranged with consideration given to ease of installation, removal, inspection
and cleaning.
Particular attention should be paid to the ambient temperature when building the pump into
equipment. Use a rubber vibration isolator to separate the pump from other equipment and to
isolate the pump from the vibrations of other equipment. See “0.4.2 Environmental conditions
for installation, storage and operation” for details.
Fig. 3 Transportation method of the oil sealed rotary vacuum pump
Since the pump weighs as much as 20 kg, do not lift or transport it by yourself.
Doing so may cause an injury. Always carry out work with two people as shown
in Fig. 3.
If the pump is operated whilst it is tilted, placed on its side or upside-down,
the pump will be damaged. Install the pump level with the inlet facing up
as shown in Fig. 1,Fig. 2.
3.2 Lubrication
Remove the lubrication plug from the lubrication port, and add the pump oil which has been
delivered together with the pump or the pump oil specified by us (SMR-100) up to the range
marked with the red line on the oil level gauge. When making the first lubrication, add oil near
to the upper oil level limit shown on the oil level gauge. After lubrication, mount the lubrication
plug to the pump (see Fig. 4).
Always keep the oil level of the pump within the oil limit range shown on the oil level gauge
during operation. If the amount of oil is incorrect, the performance of the pump will deteriorate
resulting in the malfunctioning of the pump. When the amount of oil has reduced and the oil
level has reached an area below the lower red line which shows the lower limit on the oil level
gauge such that the level cannot be seen, the ultimate pressure increases and exhausting sound
may not cease.
Note
Caution

-7-
Fig. 4 Lubrication of the oil sealed rotary vacuum pump
① Wear protective equipment such as rubber gloves and safety goggles.
② Be sure to read the attached “Safety Data Sheet” before adding oil. If
the oil accidentally comes into contact with your hands or enters your
eyes, take proper measures in accordance with the section “First-aid
treatment” shown in “Safety Data Sheet.”
Use only oils specified by us. If other oils are used, the pump performance
will deteriorate or its life will be shortened.
Caution
Note

-8-
3.3 Vacuum piping
(1) Before connecting the pipe to the pump, clean the inner walls of the vacuum chamber,
piping and vacuum valve to completely eliminate moisture, fine particles, dust, dirt and rust.
If fine particles, dust or dirt, etc are evacuated, the pump may malfunction.
If moisture is evacuated, not only does the ultimate pressure increase but
also the inside of the pump becomes rusty causing the pump to malfunction.
(2) Mount vacuum valve (A) and leak valve (B) between the vacuum chamber and pump as
shown in Fig. 5
Fig. 5 Basic piping diagram to the vacuum chamber
(3) Vacuum tubing between inlet port and another port is provided with vacuum rubber hose.
The wire mesh in the inlet port has been adopted to prevent foreign matter
from entering the pump. Do not remove the wire mesh.
Note
Vacuum chamber
Vacuum valve
(A)
Leak valve (B)
Pump
Note

-9-
3.4 Electric wiring
(1) This pump has performed beforehand electric wiring by the side of a pump.
When wiring, open the terminal box of the motor and connect the wires as shown in Fig. 6.
(2)
Confirm that use power supply voltage accords with a working voltage of the motor.
(3) The pump rotates in the clockwise direction as seen from the front of the pump (level gauge
side).
(4)Fault load protection equipment (manual return type thermal protector) is built in this motor.
(5) The use of another protective device (such as an earth leakage breaker) in addition to the
overload protector is recommended.
(6) This motor can pick up the operation of the thermal protector as signaling.
A lead wire for thermal sign takeoff is connected to a terminal block in the terminal box.
When I take out thermal sign, I open terminal box of the motor, and please connect
it like fig. 6.
Fig. 6 Electric wiring diagram
A start mode of this motor is condenser start / operating method.The switching
of the start / operation reaches by electronic governor switch.When I apply
voltage of the inverter control because I use an electron element for electronic
governor switch, malfunction of the electronic governor switch occurs and causes
the motor stumbling-block. Please never apply voltage of the inverter control.
Warning

-10-
Before connecting wires, turn off the power switch. Never perform wiring with
the power supplied as an electric shock will occur. Connect the earth wire
correctly. Failure to do so may result in electric shock if a failure or earth
leakage occurs. Installation of a dedicated earth leakage breaker is also
recommended.
Perform electric wiring correctly in accordance with the “Electric Equipment
Technical Standard” and “Internal Wiring Regulation.” Incorrect wiring
will result in fire.
If the pump is directly (and permanently) connected to the host equipment
then the end-user has to provide adequate disconnection device.
GROUNDING INSTRUCTIONS
In the event of an electrical short circuit, grounding reduces the risk of
electric shock by providing an escape wire for the electric current. This
pump is equipped with a cord having a grounding wire with an appropriate
grounding plug. The plug must be plugged into an outlet that is properly
installed and grounded in accordance with all local codes and ordinances.
If power code is not equipped (option) then appropriate grounding shall be
provided upon installation.
Improper installation of the grounding plug is able to result in a risk of
electric shock. When repair or replacement of the cord or plug is required,
do not connect the grounding wire to either flat blade terminal. The wire
with insulation having an outer surface that is green with or without yellow
stripes is the grounding wire.
Check with a qualified electrician or serviceman when the grounding
instructions are not completely understood, or when in doubt as to whether
the product is properly grounded. Do not modify the plug provided; if it does
not fit the outlet, have the proper outlet installed by a qualified
electrician.
This pump must be connected to a grounded, metallic, permanent wiring system,
or an equipment-grounding terminal or lead on the product.
Note
Note
Warning
Warning
Caution
Warning
Note