Ulvac CRYO-U12H User manual

CRYOPUMP
CRYO-U® SERIES
Instruction Manual
ＣＲＹＯ－Ｕ®１２Ｈ
ＣＲＹＯ－Ｕ®１２ＨＳＰ
ＣＲＹＯ－Ｕ®１２ＨＬ
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or
more fall under row 2(35) of appended table 1 of Japan’s Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan’s
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MA12X00E, 2017NR17 ULVAC CRYOGENICS INCORPORATED

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Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

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Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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CRYO-U®Cryopump Instruction Manual
TABLE OF CONTENTS
Safety Instructions･･････････････････････････････････････････ S-1
Disposal Consideration･･････････････････････････････････････ IW-1
SECTION 1 Cryopump Description
1.1 The General･･････････････････････････････････････････ 1-1
1.2 Specifications･････････････････････････････････････････ 1-2
1.3 Environmental Requirements･･････････････････････････ 1-3
SECTION 2 Inspection
2.1 Shipping List･･････････････････････････････････････････2-1
2.2 First Inspection of Cryopump･･･････････････････････････ 2-2
SECTION 3 Quick Installation･･･････････････････････････････････ 3-1
SECTION 4 Installation
4.1 Auxiliary Equipments Required･････････････････････････4-1
4.2 Mounting the Cryopump to the Vacuum System･･････････ 4-3
4.3 Connecting Roughing Pump････････････････････････････ 4-5
4.4 Connecting Purge Gas Line･････････････････････････････4-5
4.5 Connecting Exhaust Pipe･･･････････････････････････････4-6
4.6 Connecting Cooling Water Pipe･････････････････････････ 4-7
4.7 Connecting the Cryopump to the Compressor Unit
(Connecting Flexible Hoses)････････････････････････････ 4-7
4.8 Connecting Remote Wiring･････････････････････････････ 4-8
4.9 Connecting Electrical Cables･･････････････････････････ 4-8
SECTION 5 Operation
5.1 Prior to Startup･･･････････････････････････････････････ 5-1
5.2 Rough Pumping･･･････････････････････････････････････ 5-1
5.3 Pressure Buildup Test･･････････････････････････････････5-2
5.4 Startup and Cooldown･････････････････････････････････ 5-2
5.5 Normal Operation･････････････････････････････････････ 5-3
5.6 Crossover･････････････････････････････････････････････ 5-4
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Table of Contents
ⅡULVAC CRYOGENICS INCORPORATED
5.7 Shutdown Procedures･･････････････････････････････････ 5-6
5.8 Handling of Hazardous Materials･･･････････････････････ 5-6
SECTION 6 Regeneration
6.1 The General･･･････････････････････････････････････････6-1
6.2 Regeneration Time････････････････････････････････････ 6-2
6.3 Warm-up Method･･････････････････････････････････････ 6-2
6.4 Regeneration Flow Chart･･･････････････････････････････6-4
SECTION 7 Disconnecting and Storage
7.1 Disconnecting Flexible Hose････････････････････････････7-1
7.2 Storage･･･････････････････････････････････････････････7-2
SECTION 8 Maintenance
8.1 Scheduled and Unscheduled Maintenance･･･････････････ 8-1
8.2 Consumables･･････････････････････････････････････････8-3
8.3 Cleaning the Cryopump････････････････････････････････ 8-4
8.4 Charging Helium Gas･･････････････････････････････････ 8-5
8.5 Helium Circuit Decontamination････････････････････････8-8
APPENDICES
A Troubleshooting････････････････････････････････････････ A-1
B Flexible Hose･･････････････････････････････････････････ B-1
C Conversion of Thermometer Readings････････････････････ C-1
D Principle of Cryopump Operation････････････････････････D-1
E Principle of Refrigerator Operation･･････････････････････ E-1
F Dew Condensation･････････････････････････････････････ F-1
Service Network･･･････････････････････････････････････････････CS-1