Ulvac MBS-053 User manual

No．1000800-2-01-２
Instruction Manual
For
Mechanical Booster Vacuum Pump
Model
MBS-053
MBS-053-01
Request to Users
When perform installation of the pump and operation, please read this
manual by all means.
Please keep this manual to be able to refer anytime.
Manual contents have a case to modify without advance notice to realize a
performance gain.
Original instructions
ULVAC KIKO, Inc.

Contents
0．Introduction ・・・・・・・・・・ 01
0.1 Before using the MBS-053/MBS-053-01 ・・・・・・・・・・ 01
0.2 Safety symbols ・・・・・・・・・・ 03
0.3 Cautions for safety ・・・・・・・・・・ 05
1．For Safe Operation ・・・・・・・・・・ 1
1.1 Hazards peculiar to the pump and safety measures ・・・・・・・・・・ 1
1.1.1 Danger
Leakage of hazardous gases and substances ・・・・・・・・・・ 1
1.1.2 Warning Electric shock ・・・・・・・・・・ 2
1.1.3 Caution High temperature ・・・・・・・・・・ 2
1.1.4 Warning Explosion ・・・・・・・・・・ 4
1.2 Safety Data Sheet (SDS) ・・・・・・・・・・ 4
2．Specification table ・・・・・・・・・・ 5
2.1 Specification ・・・・・・・・・・ 5
2.2 Dimensional drawing (for MBS-053/MBS-053-01) ・・・・・・・・・・ 6
3．Design of vacuum pumping system ・・・・・・・・・・ 7
3.1 Pumping system ・・・・・・・・・・ 7
3.2 Fore pump ・・・・・・・・・・ 9
3.3 Ultimate pressure ・・・・・・・・・・ 9
3.4 Pumping speed ・・・・・・・・・・ 9
4．Installation ・・・・・・・・・・ 10
4.1 Installation of a pump ・・・・・・・・・・ 10

4.2 Environmental conditions for storage , installation and operation ・・・・・ 10
4.3 Power supply voltage setting ・・・・・・・・・・ 11
4.4 Electric wiring ・・・・・・・・・・ 12
a-1) Unplug-preventive hardware(option) ・・・・・・・・・・ 13
a-2) How to install unplug-preventive hardware ・・・・・・・・・・ 14
4.5 Fluctuation in the power voltage and frequency ・・・・・・・・・・ 15
4.6 Oil charge ・・・・・・・・・・ 16
5．Operation ・・・・・・・・・・ 17
5.1 Structure of pump ・・・・・・・・・・ 17
5.2 Cautions for operation ・・・・・・・・・・ 18
5.3 Start of operation ・・・・・・・・・・ 18
5.4 Stopping the operation ・・・・・・・・・・ 18
5.5 Protection feature ・・・・・・・・・・ 20
5.6 External control and alarm output ・・・・・・・・・・ 21
6．Maintenance ・・・・・・・・・・ 22
6.1 Daily inspection ・・・・・・・・・・ 22
6.2 Long interval maintenance ・・・・・・・・・・ 22
6.3 Trouble check list ・・・・・・・・・・ 23
7．Support in trouble ・・・・・・・・・・ 25
8．Disposal ・・・・・・・・・・ 25
Warranty
Safety Data Sheet (SDS)
Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)
Contact address of sales and service departments

Figures and Tables
Fig.1 Dimensional drawing of MBS-053/MBS-053-01
mechanical booster vacuum pump ・・・・・・・・・・ 6
Fig.2 Driver Box Interior ・・・・・・・・・・ 6
Fig.3 Basic piping diagram to the vacuum chamber ・・・・・・・・・・ 8
Fig.4 Compression ratio property ・・・・・・・・・・ 9
Fig.5 Pumping speed curve ・・・・・・・・・・ 9
Fig.6 Driver circuit box position ・・・・・・・・・・ 11
Fig.7 Driver circuit box interior ・・・・・・・・・・ 11
Fig.8 Circuit protector wiring diagram ・・・・・・・・・・ 12
Fig.9 An Inlet (EN60320) ・・・・・・・・・・ 13
Fig.10 Change region of the voltage and frequency ・・・・・・・・・・ 15
Fig.11 Oil plug, oil level gauge position ・・・・・・・・・・ 16
Fig.12 Oil level gauge ・・・・・・・・・・ 16
Fig.13 Structure of pump ・・・・・・・・・・ 17
Fig.14 External control connector pin assignment ・・・・・・・・・・ 21
Fig.15 Alarm signal origination side circuitry ・・・・・・・・・・ 21
Table.1 Specification ・・・・・・・・・・ 5
Table.2 Power cable selection standards ・・・・・・・・・・ 12
Table.3 Protection feature ・・・・・・・・・・ 20
Table.4 External control connector ・・・・・・・・・・ 21
Table.5 Daily inspections ・・・・・・・・・・ 22
Table.6 Change parts long-term maintenance ・・・・・・・・・・ 22
Table.7 Trouble check list ・・・・・・・・・・ 23

－01－
0. Introduction
0.1 Before using the MBS-053/MBS-053-01
Thank you for purchase of mechanical booster vacuum pump model
MBS -053/MBS-053-01.
This pump is only for vacuum pumping, and may malfunction or cause accidents if
not handled appropriately. Please use instruction manuals after attention enough
for check / maintenance / security sides after a reading well.
Personnel Handling the Equipment
The handling of this product has you read this instruction manual, and a
person understood enough shall perform attention in the security, the
specifications of this pump and a matter about operation method.
Read the Manual Thoroughly
This product please uses instruction manuals after a reading before use
definitely well. Please read the [to have you use it safely] [instructions in the
security] in particular by all means.
Keep This Manual in a Safe Place
Please keep the instruction manual carefully. Please keep it by all means in
the place that used one can read after having read.
Copying This Manual Is Prohibited
No part of this instruction manual may be copied for use by a third party
without our permission.
Statutory Requirements for Disposal
Follow state law and local government regulations for disposal of the pump.

－02－
Safety During Repair
When it is asked us for repair, please inform the use situation of having
hazardous substance or not in particular for the safe management of the
repair worker.
The use situation declines repair in the case of lack of foresight.
Confirmation at the time of the unpacking
Although the pump is delivered with great care, check the following after
unpacking.
(1) The delivered pump is in accordance with your request.
(2) The specified accessories (enough pump oil to use the pump once; optional
equipment) have been provided.
A normal accessory is vacuum-pump oil and a connector of power supply
voltage change use and a power cable is an option parts.
(3) No parts have been damaged in transportation.
(4) Neither screws nor nuts have become loose nor were lost in transportation.
If there are any problems, contact the company from which you purchased the
pump or the sales department of the manufacturer.

－03－
0.2 Safety symbols
In this instruction manual and on warning labels attached to the pump, the
following symbols are used so that matters which must be strictly adhered to can
be readily understood.
These symbols are divided as shown below.
Danger
When mishandled, there is an imminent danger of the operator suffering a
fatal accident or serious injury.
Warning
When mishandled, there is a possibility of the operator suffering a fatal
accident or serious injury.
Caution
When mishandled, there is a possibility of the operator suffering an injury
(light or medium injury) or of damage occurring to property.
Note
When mishandled, there is a possibility of the pump being damaged or
malfunctioning.
High temperature Caution
Some parts of the pump may reach temperatures of 90°C or more during
operation. Touching such components may result in burns.

－04－
Electric Shock Caution
The Inlet pipe of the pump
The Outlet pipe of the pump
Always switch off the main power supply before installing electrical wiring or
performing any electrical work on the pump. Failure to do so may result in
electric shock.

－05－
0.3 Cautions for safety
Never allow people other than repair engineers to disassemble or repair the
pump. Failure to do so may result in ignition or malfunction, leading to
injury or electric shock.
Connect the earth wire correctly. It is recommended that a dedicated earth
leakage breaker should be installed. If the earth wire is not connected, there
is a possibility of electric shock occurring in the case of a malfunction or
electrical leakage.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas.
Otherwise, the internal pump pressure increases causing the pump to
explode, the oil level gauge to protrude or the motor to be overloaded.
This pump is not resistant to pressure. The internal pump pressure is
limited to 0.03 MPa (gauge pressure).
The Vacuum Pump Unit is device a built-in device. Do not install it without
adequate protection against heat hazard. The surface temperature of the
vacuum Pump Unit can exceed 90 degrees in case it is operated under high
pressure (atmospheric to 10kPa).
It gets an electric shock touching the motor energizing part. Please work
after pulling out the power plug without fail when wires electricity is
connected, it checks, and it transfers it.
Do not run with opening a cover of the driver box. It causes electric shock
and the ignition.
Do not use the pump in an explosive atmosphere. Failure to do so will
result in injury or fire.
Warning
Warning
Warning
Warning
Warning
Warning
Warning

－06－
At the time of shipping, set electric voltage by request in an order. Do not
run by 200-240V line source as 100-120V system connection. Power supply
circuit is damaged when you install wrong power supply voltage selection
connector and in addition of ignition might. In order to operate with
200-240V class, the changeover connector in the terminal box must be
changed into 200-240V class as shown in fig.4.3“Changing the voltage
class.”
Never touch the rotating section of the motor, shaft or coupling while the
pump is in operation. Failure to do so will result in injury.
Never place combustible materials around the motor or pump. There is a
risk of fire.
Also, do not place objects which block ventilation around the motor.
Abnormal heat generation may result in burns or fire.
Do not touch the motor while the pump is in operation or when the pump is
still hot immediately after it stops. Touching it will result in burns.
Arrange wires correctly in accordance with the “Electrical Equipment
Technical Standard” and “Wiring Regulations.” Incorrect wiring may result
in fire.
If the pump ceases operation or malfunctions, turn off the power switch
immediately to prevent accidents, and ask the company from which you
purchased the pump or the manufacturer for inspection and repair.
Do not operate the pump without adding pump oil. If it is operated in an
oil-less condition, the pump will be damaged.
Note
Caution
Caution
Caution
Caution
Caution
Warning

－1－
１．For Safe Operation
1.1 Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully
understand potential hazards and prevention methods.
The pump is not to be used with toxic of flammable gases.
1.1.1 Danger Leakage of hazardous gases and substances
Cause Prevention method and measures
Injury due to touching toxic
pump oil in the pump or harmful
substances attached to the
pump during inspection or
disposal
⇒①Before overhauling and disposing of the
pump, ask a waste disposal specialist to
make it safe.
②Ask an authorized waste disposal
specialist to carry out disposal.
Danger
This pump is for dry air or the dry nitrogen suck only.
MBS-053-01 has surface treatment to MBS-053 and it is increasing resistance
to corrosive gases.
・Periodic check of sealing material and exchange of it.
・Before starting operation, leak check shall be performed.
・When pump is in the abnormal condition, pull off the power plug.
・A risk assessment has to be performed for the location of use.
・When replace the pump, suction gas shall be purged.
・Don’t use for other suction gas without over whole the pump.
・Cleaning after suction gas is purged.
・Prior to use with corrosive gases, install a system removing the toxicity.
Or dilute it in nitrogen or air to become the concentration which you can
discharge outdoors, and exhaust it.

－2－
1.1.2 Warning Electric shock
Cause Prevention method and measures
The energized part of the motor
was touched.
⇒①When connecting electric wires, always
turn off the power and be sure to
connect the earth wire. It is feared that
get an electric shock in an electrical
leak.
②When remove a cover of the driver
circuit box, remove a power cable by all
means.
In addition, open the box after remove
an electrical cable, and passing more
than 10 seconds
There might be electrical shock hazard
before capacitors of driver discharges
electricity.
③Never insert hands, fingers, or thin
objects through the motor operating.
Caution
Arrange wires correctly in accordance with the “Electrical Equipment Technical
Standard” and “Wiring Regulations”. Incorrect wiring may result in fire.
1.1.3 Caution High temperature
Cause Prevention method and measures
Power supply circuit is damaged
when you install wrong power
supply voltage selection
connector and in addition of
ignition might.
⇒ ① At the time of shipping, set electric
voltage by request in an order however
confirm setting just to make sure.
For AC 100-120V →Red wiring
For AC 200-240V →Blue wiring
② Power supply circuit is damaged when
you install wrong power supply voltage
selection connector and in addition of
ignition might.

－3－
Caution High temperature
Cause Prevention method and measures
High temperatures caused burns. ⇒ ① The pump reaches a high temperature
during operation.
(Temperature increasing)
Pump main unit during non-load operation
→ 10[K]
Motor during non-load operation
→ 10[K]
Pump main unit during high-load operation
→ 50[K]
Motor during high-load operation
→ 25[K]
(High-load operation: Operation at a pressure
of 5[kPa]- 10[kPa])
② If you use the pump in a high ambient
temperature and have a high gas
throughput, the temperature of the
pump-body may exceed 90℃and you must
fit suitable guards to prevent contact with
hot surfaces.
③ Please be sure to protect and cool surface
of vacuum pump and away from human
body. Use this pump as built-in type.
④ Since the surface temperature is hot,
touching the surface accidentally may
result in burns. Never touch the pump
during operation. When carrying out
inspection, wait for 10 minutes until the
pump has cooled down completely after it
stops.
Caution
Never place combustible materials around the motor or pump. There is a risk of
fire. Also, do not place objects which block ventilation around the motor.
Abnormal heat generation may result in burns or fire.

－4－
1.1.4 Warning Explosion
Cause Prevention method and measures
The pressure in the pump
increased causing the pump to
explode.
⇒The maximum internal pump pressure is
0.03[MPa](gauge pressure).Measure the
pressure at the outlet side and, if the
pressure is 0.03[MPa]or more (gauge
pressure); remove objects which block the
passage of gas from the outlet side.
Warning
This pump does not become the withstand pressure structure. The limit value
of the inside pressure of the pump is 0.03 MPa (gauge pressure). Pressure in
the pump rises when the pump is driven with the equipment that obstructed the
street of the gas to blockage and the exhaust entrance side of the exhaust vent
put up，and there is a thing that the motor becomes an overloaded.
1.2 Safety Data Sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may
be used or touched when operating the pump. Read the SDS carefully in order
to understand the harmful properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than
those mentioned in this instruction manual.
Caution
SDS is submitted as reference information to ensure safe handling of
hazardous and harmful materials. Personnel handling the pump oil should be
aware that proper measures must be taken depending on the conditions of
use as their responsibility. Keep in mind that the SDS itself is not a warranty
for safety. Newest SDS shall be used when the safety of material is
investigated

－5－
2. Specification table
2.1Specification
Table 1 Specification
Item Contents Remarks
1 Pumping speed 50m3/Hr at 1×10
2Pa See Fig 3
Change by a fore pump.
2 Ultimate
pressure 4×10-2Pa
When used GLD-136 or
GLD-201 for a fore pump.
Different by an ultimate
pressure of the fore pump.
Refer to 3.3 .
3 Recommended
fore pumps
Pumping speed 130～240L/min
Two stage oil-sealed rotary vacuum pump
4 Maximum
suction
Pressure Atmospheric pressure Refer to 3.4
5 Maximum
compression
ratio 25
6 Temperature
range 0-40℃
7 Power supply
specifications
AC 100-120V 1φ 50Hz or 60Hz
AC 200-240V 1φ 50Hz or 60Hz
Setting of a driver circuit is
necessary in 100V system and
200V system.
Refer to 4.3
Type DC brushless motor
Out put 200W
Nominal speed 3500min-1
8 Motor
Maximum power
consumption 250W Have to power supply when
take external control.
Refer to 5.6
9 speed control
voltage External rotating speed control voltage DC 1-5V
10 Intake flange
size JIS VG-40
11 Outlet flange
size JIS VF-40
12 Lubricating oil vacuum-pump oil SMR-200
13 Oil quantity 70ml
14 Weight 11kg
15 Noise level Less then 65 dB(A)
Fore pump is set in the
outside of the measurement
room when the measurement.
Note 1:The ultimate pressure values in the above table are indicated by an Ionization gauge.
Note 2: Vacuum pump oils have different steam pressures, viscosities, and oil properties depending on the type.
Always use the oil sealed rotary vacuum pump oil specified by us. The use of other oils will affect the
pump’s performance．
(Specified oil: SMR-200)
Note 3:MBS-053-01 has surface treatment to MBS-053 and it is increasing resistance to corrosive gases.

－6－
2.2 Outside drawing
Fig.1 Dimensional drawing of MBS-053/MBS-053-01 mechanical booster vacuum pump.
Fig.2 Driver Box Interior
Connecter for external control
SAIE-M12B-4-0.5U-FP-M16
AC Power inlet
AC100～120V
OR
AC200～240V
Internal control/external control
Changeover switch
Internal
External
AC power 100/200V
Change jumper
connector ※The pair of SAIE-M12B-4-0.5U-FP-M16
is SAIL-M12G-4-1.5U.

－7－
3 .Design of vacuum pumping system
3.1 Pumping system．
Cannot use mechanical booster vacuum pump with a unit, and combine it with a
backing vacuum pump (Fore Pump) by all means.
Note
Please do not take evacuation with only mechanical booster pump. A
protection feature of a motor works when you perform evacuation only with a
mechanical booster pump, and there is it when step out of magnet coupling
occurs and, in addition, gives a pump damage of a mechanism.
Before connecting the pipe to the pump, clean the inner walls of the vacuum
chamber, piping and vacuum valve to completely eliminate moisture, fine particles,
dust, dirt and rust.
Note
If fine particles, dust or dirt, etc are evacuated, the pump may malfunction.
If moisture is evacuated, not only does the ultimate pressure increase but also
the inside of the pump becomes rusty causing the pump to malfunction.
Note
The inlet filter of the inlet prevents foreign matter from getting into the pump
inside. Please use it without taking it off.

－8－
Fig.3 Basic piping diagram
to the vacuum chamber
Show a normal exhaust system drawing in Fig.3.
(1). Connect a fore pump to a downstream side of a
mechanical booster pump.
(2). Install main valve between a mechanical booster
pump and vacuum vessel.
(3). Vent valve2 is a thing to prevent vacuum-pump
oil of an oil-sealed rotary vacuum pump of a fore
pump from flowing upstream to a mechanical
booster pump.
Close main valve, and open vent valve after
having stopped a mechanical booster pump and
a fore pump.
Can omit it in the case of a fore pump
comprising a backflow prevention facility.
When you exhaust an active gas, toxic gas, use a
nitrogen gas for vent.
Note
When open velocity of main valve is early, there are the cases that step out of
magnet coupling comes, and please adjust speed control valve so that in this
case open velocity becomes late.
Caution
Because this pump is complete seal structure. But this pump is for dry air or
the dry nitrogen suck only. (MBS-053-01 has surface treatment to MBS-053 and
it is increasing resistance to corrosive gases.)Please confirm whether a fore
pump supports these gases. It is feared that explosion of a fore pump, When
you design an evacuation system, confirm a type of an exhaust-gas, and
please execute appropriate plans.
Booster Pump
MBS-053
MBS-053-01

－9－
0
5
10
15
20
25
30
1.E-01 1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05
Outret Pressure-P2[Pa]
Compression Ratio K=P2/P1(Q1=0)
1×10
2
1×10
4
1×10
3
1×10
0
1×10
1
1×10
5
1×10
-1
0
10
20
30
40
50
60
70
1.E-02 1.E-01 1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05
Suction Pressure-P1[Pa]
Pumping Speed [L/min]
1×10
1
1×10
4
1×10
3
1×10
2
1×10
0
1×10
-1
1×10
-2
1×10
5
3.2 Fore pump．
A normal fore pump to combine to this mechanical booster pump is model
GLD-202(201) or GLD-137(136). 130～240L/min is most suitable for pumping speed.
Less than 10kPa are necessary for an ultimate pressure. A normal fore pump is oil
rotary vacuum pump, but can use a diaphragm pump or a scroll pump, too. However,
when outlet pressure runs in about 10kPa in succession, as for the gas temperature, it
is necessary to be pumps of structure to bear this high-temperature gas because it is
it with about 80 degrees Celsius.
3.3 Ultimate pressure．
A mechanical booster pump ultimate pressure is decided on by pressure of a fore
pump.For example, become P=100/25=4.0Pa with a diaphragm pump of an ultimate
pressure of 100Pa than compression ratio property of Fig.4.
Also, the actual ultimate pressure of the vacuum device becomes higher than that
noted in the catalogue for the following reasons.
➀The vacuum gauge is installed at a distance from the pump, and the steam and a
variety of gases are generated by water droplets and rust on the inside walls of
the pump and piping.
➁Gasifying of volatile components which have dissolved in the pump oil.
(Deterioration of pump oil)
➂Existence of a gas supply source including vacuum leakage in the vacuum path
3.4 Pumping speed．
As for the pumping speed, be decided with fore pump pumping speed property and
compression ratio property. Show a pumping speed curve of GLD-202(201) in Fig.5.
Fig.4 Compression ratio property Fig.5 Pumping speed curve

－10－
4.Installation
4.1 Installation of a pump
MBS -053/MBS-053-01 becomes design to use in an inline.
Fix flange of the outlet side, and install a pump in this flange.
Note
Install a pump horizontally. Horizontal admissible value of a pump longer
direction is ± 0.5 degrees. Must not install a pump diagonally. Be inverted,
and must not install it. There is the case that lubricating failure and inflow of
lubricating oil to rotor cylinder come unless a pump is installed horizontally.
4.2 Environmental conditions for storage, installation and operation
Since this pump is precisely engineered, ensure that the following conditions
be satisfied during storage, installation and operation.
① Ambient temperature, relative humidity: 0°C-40°C, 85% RH or less
②Height above sea level during storage and installation: 1,000 m or less
③Minimum required distances from the wall, 100mm
④Other conditions for storage and operation
ａ．Free from corrosive and explosive gases
ｂ．No condensation
ｃ．Dust-free environment
ｄ．Indoors
ｅ．Do not place pumps on top of each other or place a pump on its side.
ｆ．Not subject to direct sunlight
ｇ．Far from heat sources
ｈ．When you keep it for a long period of time, put pump oil into a pump
and block up inlet port and outlet port.
ｉ．Don't keep it, where moisture is attracted.
Warning
Do not use the pump in an explosive atmosphere. Failure to do so will result in
injury or fire.
Note
Minimum required distances from the wall, 100mm.