Ulvac PMB-040C User manual

YK10-0015-DI-002-03
INSTRUCTION MANUAL
MECHANICAL BOOSTER PUMP
PMB-040C
PMB-060C
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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i
0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is exactly
what you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the
product in safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations
relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and
region you use the product. Consequently you shall be requested to attend general safety lectures
officially effective in the area, such as electrical safety, cargo handling safety and so on. Note that
any person not attended such lectures shall be restricted from handling the product. Operators shall
need to attend such kind of training and have special knowledge, skill and title regarding the
electricity, machinery, cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together
did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to
guarantee performance and safety in such cases above. Any modification of the product by the user
is out of the scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before
installing or removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of the
shipment but shall not survive eternally. Any of the parts cannot, under any application supposed
under socially-accepted idea, help but inevitably deteriorate its performance and get easily result in
causing trouble of the product. You are kindly requested consequently to take your application
situation into consideration and help yourself to implement the protective maintenance so as to
avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble
due to wear and/or failure of the part and bring reducing the occurrence of the downtime caused by
the product trouble and fire as well as a risk of affecting the another process.
We would like to ask you again to establish the protective maintenance plan as well as conduct the
part replacement and overhaul in accordance with such a plan.
If you have any questions on handling the product, please contact the nearest sales office or
agency.

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IMPORTANT
● Author's copyright of this instruction manual belongs to
Components Division of ULVAC, Inc.
It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
● It is prohibited to use this instruction manual except for
explanation when using the PMB-040C and PMB-060C, and other
purpose Components Division of ULVAC, Inc. agreed.
● It is prohibited to hand over and disclose this instruction manual to
third parties without agreement by Components Division of ULVAC,
Inc.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
●If the user makes a mistake in handling, it indicates an imminent
possibility that the user is subject to death or heavy injury.
WARNING
●If the user makes a mistake in handling, it indicates a possibility that
the user is subject to death or heavy injury.
CAUTION
●If the user makes a mistake in handling, it indicates a possibility that
the user is subject to moderate injury or it leads to significant
damage of the machine. It indicates a possibility that damage of the
machine is caused and the normal operation is impaired.
IMPORTANT ●Description shall be given where there is particular information to
notice for the operation or maintenance work of the product.

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iii
●Training for the electrical safety is required as there is a risk of
electrical shock.
●Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be restricted
on the use of the product.
Use of this product and this Instruction Manual.
IMPORTANT
●Please read this Instruction Manual before starting installation,
operation check or maintenance of this product to use it in long term.
You are requested to fully understand the safety precautions,
specifications and operation methods of the product.
DANGER
●Toxic and combustible/combustion-supporting gases other than inert
gas cannot be used as they leak from the pump body when evacuated
by a vacuum pump.
DANGER
●Combustible/Combustion-supporting gases and materials other than
inert gas cannot be used as they ignite/explode in a vacuum pump
when evacuated by the vacuum pump.
DANGER
●Corrosive gas other than inert gas cannot be used as pump
components may be corroded and damaged when evacuated by a
vacuum pump.
DANGER
●Pump oil as well as the pump unit becomes toxic should the toxic gas
was sucked in the vacuum pump. Pay attention to execute
maintenance work.

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WARNING
●We would be obliged to refrain from handling and/or executing
maintenance of the product if the detail of used hazardous substance
was not disclosed or the product has exhausted such substance that
the detoxification process is hardly conducted.
WARNING
●This Instruction Manual shall absolutely need to be delivered to the
last user that uses the product.
WARNING
●You are kindly requested to acknowledge that specifications and/or
characteristics of the product and description of the Instruction
Manual are subject to change without prior notice for improvement.
●Any change shall update the version number at the top right of the
Instruction Manual cover and issue the revised version.
If you need the latest version, contact the nearest sales office or
agency.
CAUTION
●To export this product abroad, you have to clear the examination in
accordance with the Foreign Exchange law, Foreign Trade law and
relevant decree, ordinance and order.
●Contact the nearest sales office or agency.
If you would like the latest version, contact the nearest sales office or agency.

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Installation and storage
WARNING
●This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use
appropriate tools such as pinch bar as they have a risk of cutting the
hand by nail or chip.
●Give the instruction them further to use the unloading machinery such
as crane to take out the product of the wooded frame, lift it up with its
top eyebolt and transfer it on lifting. Check the eyebolt whether it has
no error before use.
●Only the technically entitled person should be in charge of conducting
the unloading operation and operating the unloading machinery.
●There is a risk that the pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You
are strictly restricted to enter beneath the pump.
Transfer
WARNING
●You have a risk of giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
PMB-040C：970kg (Without Motor)
PMB-060C:1100kg (Without Motor)
Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it with Jack and run the Pallet
truck for its transfer.
●Never try to enter beneath the pump unit when lifted it up. Use the
accessory eyebolt to load/unload the unit.
●Do not put the folk of the fork lift or the like in the pump bottom
(exhaust outlet) to lift it.
●Note to purge the oil to transfer the pump. If forced to transfer
remaining the oil, be sure to keep the pump horizontal.
Do not tilt the pump 10 degree or more while you charge the oil. The oil
might run into the casing.
Countermeasure to the earthquake
WARNING
●There is a risk that the pump lays down or slides and breaks peripheral
units if it was not correctly fixed. Be sure to give allowances to the
vacuum piping, cooling water piping and electric cables so that they
absorber vibrations to prevent them from breaking and/or dismantling.

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Inlet / outlet port piping <Mounting>
●Check and ensure that any of hazardous energy is blocked before
starting the operation.
Coolant piping <Mounting>
WARNING
●Check and ensure that any of hazardous energy is blocked before
starting the operation.
Power Supply wiring <Mounting>
WARNING
●Check and ensure that any of hazardous energy is blocked before
starting the operation.
Entitled staff should conduct the wiring operation. Erroneous wiring
work might cause a fire.
●Conduct the wiring operation correctly in compliance with laws and
rules concerning the safety (e.g. Fire Defense Law, Electric Equipment
Technology standard, Internal line cord) in the country and region you
use the product.
●Ensure to have a correct grounding.
You have a risk of getting electrical shock in case of failure or electric
leakage.
●You are recommended further to install a dedicated Leak breaker.
●It is imperative to put the overload protection device.
Otherwise it would cause the motor burn out and/or fire.
●Decide the electric wire size in consideration of a voltage drop of the
electric wire.
Under normal conditions, use electric wires with a voltage drop within
2% of the motor rated voltage.
Voltage drop calculating formula
√3 × Electric wire resistance (Ω/km) × Wiring distance (m) × Motor
rated current (A) × 10-3
* For the motor rated current, see "Table 3."
WARNING

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Operation
WARNING
●Do not run the pump on blocking the exhaust outlet or putting any
device that might hamper gas passage onto the outlet. There is a risk
that the pressure inside the vacuum pump rises up to cause break or
oil leak of the casing or oil level gauge resulting in overload of the
motor.
●This product is not made as the withstand pressure structure. Ensured
pressure value of the pump shall be 0.03MPa G (0.3kg/cm2G) (Gauge
pressure).
WARNING
●Do not operate the pump in hazardous area (where there is a risk of
creating hazardous atmosphere by explosive gas). It might cause
injury and/or fire.
WARNING
●Be sure to turn OFF the Power Supply to execute check and repair.
You have a risk of getting electrical shock or injury by accidental
sudden move.
●Person other than repair technician should not be in charge of
dismantling, repairing or remodeling the product. You have a risk of
getting injured or electrical shock by a fire or erroneous move.
●Do not touch the motor, vacuum pump or piping during the pump
operation and just after stopped it while the pump unit keeps high
temperature. You have a risk of getting burned.
●Should you found any malfunction or error, just turn OFF the Power
Supply to prevent accident and ask the agency or closest Service
Center for check and repair.
WARNING
●Do not attempt to put your hand or article in the opening of the motor;
you have a risk of getting electrical shock, injury or casing a fire.
●Do not touch any rotary section such as the motor, main spindle or
spindle joint during operation of the Vacuum pump; it shall bring in
injuries.
●Strictly refrain from putting any combustible substance in and around
1m of the motor and vacuum pump; there is a risk of getting a fire.
●Do not put a wall or obstacle in and around 0.3m of the air outlet of the
motor (Motor edge face). You have a risk of getting burned or fire
caused by over heat.

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viii
CAUTION
●Ensure to flow the cooling water during operation. Required Cooling
water shall be;
Cooling water volume : 10 L/min or more
Cooling water temperature : 5°C ~ 30°C
●It is recommended to use water with a low number of impurities (e.g.
industrial water; see the table below) as the cooling water for this
product. Depending on the water quality, the cooling water system of
this product may cause scale, such as calcium carbonate, inside it,
reducing the cooling water flow. In addition, it may be corroded from
the inner wall by chlorine ions, resulting in cooling water leakage. And
if pure water is used, metal may be eluted, resulting in cooling water
leakage. Note in advance that in such a case, repair may be borne by
you.
●Shortage of the cooling water might give damage on the bearing, gear
and rod sealing, which results in contact of the rotor and casing and
operation stop.
[For reference] The standard quality of water supply in the Japanese industrial water works
Turbidity
Mg/L
pH Alkalinity
CaCO3
Hardness
Mg. CaCO3
mg/L
Evaporation
residue
mg/L
Chlorine ion
Cl-
mg/L
Iron
Fe
mg/L
Manganese
Mn
mg/L
20 or less 6.5 – 8.0 75 max. 120 max. 250 max. 80 or less 0.3 or less 0.2 or less
Established by: Japan Industrial Water Association
(Industrial water quality standard setting committee)
CAUTION
●Be sure to lubricate the machine.
●If the lubrication oil came down lower than limit level during operation,
it might give damage on the bearing, gear and rod sealing and result in
leak, noise, motor overload and operation stop.
Power Supply wiring <Dismantling>
WARNING
●Be sure to cut off the electricity before starting install or dismantling
operation.

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Cooling water piping <Dismantling>
WARNING
●Should you remove the coolant joint immediately after having stopped
the pump, there is a risk that the cooling water remained inside the
pump comes to a boil and jets out. Keep flowing the cooling water as
far as the pump temperature cools down.
●The Pump is and remains very hot during and while after having
stopped operation. You have a risk of getting burned if a part of the
body touched it. Keep flowing the cooling water as far as the Pump
temperature cools down.
●Before removing the cooling water piping, check with a visible
flowmeter at the cooling water source of devices etc. that no water
flows.
Inlet / outlet port piping <Dismantling>
WARNING
●Take off the piping following the Install Manual of the system.
●The Inlet and outlet piping remains very hot wile after having stopped
the Pump. Be sure to take it off after the Pump has sufficiently cooled
down.
●Fully seal off the air intake and exhaust ports of the removed pump
with blind flange etc.
Transfer
WARNING
●You have a risk of giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
PMB-040C:970kg (Without Motor)
PMB-060C:1100kg (Without Motor)
●Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it with Jack and run the Pallet
truck for its transfer.
●Never try to enter beneath the pump unit when lifted it up. Use the
accessory eyebolt to load/unload the unit.
●Do not put the folk of the Fork lift or the like in the pump bottom
(exhaust outlet) to lift it.
●Note to purge the oil to transfer the pump. If forced to transfer
remaining the oil, be sure to keep the pump horizontal. Do not tilt the
pump 10 degree or more while you charge the oil. The oil might run
into the casing.

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0.4 Types and Descriptions of Warning Labels Displayed on This
Machine and Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・You may get an electric shock in the area around a portion
with this warning label. Before maintenance or wiring, be sure
to turn off the primary power supply.
・Be sure to close the lid of the terminal box before operating
this unit. Never open it during operation.
3
During operation or for a while after operation stops, do not
touch the unit as each portion is at a very high temperature. - If
a human body touches the unit, it may get burned.
4
・This product is not made as the withstand pressure
structure. Ensured pressure value of the Pump shall be
0.03MPaG (0.3kg/cm2G) (Gauge pressure).
・Do not run the Pump on blocking the Exhaust outlet or
putting any device that might hamper gas passage onto the
outlet. There is a risk that the pressure inside the vacuum
pump rises up to cause break the casing or Oil level gauge
resulting in overload of the motor.
・Following gases cannot be evacuated because these gases
may cause the
pump inner pressure to increase due to internal combustion.
1) explosive gas
2) flammable gas
3) gas which increases the susceptibility of substances to
burn.
Long term storage of the Vacuum pump without operation
might possibly cause trouble in operation caused by rust if
you kept the Pump long time without operating it, ask a
closest Service Center for the check.
Indoor Use Only
Mount at least 100mm from side walls.
5
・There is a moving part around the section that this warning
label is put.
・Do not open a panel or a safety cover during operation.
・You should turn off the power line of the moving part If the
power of this Pump doesn’t supply, the moving part may have
a possible to move the moving part. Be sure to be caught in
this Pump.

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6
This indicates the rotation direction of the belt.
In this machine, the motor pulley becomes different when
moving at 60Hz and when moving at 50Hz.
Confirm the description of frequency on the label.
Fig. 1 Warning Label

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0.5 Acceptance and Storage of the Pump
0.5.1 Unpacking/Acceptance of the Pump
WARNING
●This product is packed with the wooden frame. Please ask the special
agency for dismantling it.
Advise the dismantling agent to wear leather gloves and use
appropriate tools such as pinch bar as they have a risk of cutting the
hand by nail or chip.
●Give the instruction them further to use the unloading machinery such
as crane to take out the product of the wooded frame, lift it up with its
top eyebolt and transfer it on lifting. Check the eyebolt whether it has
no error before use.
●Only the technically entitled person should be in charge of conducting
the unloading operation and operating the unloading machinery.
●There is a risk that the pump might drop or lay down when attempted
unreasonable operation or machinery setup was not sufficient. You
are strictly restricted to enter beneath the pump.
Upon delivery of the product, check first that the delivered is exactly what you have ordered and
there is no break or damage through transport or the like. Claim after use of the product might be
resolved with a charge.
Although we pay full attention on shipping, you are kindly requested to check the following upon
unpacked the product.
IMPORTANT
●Whether the delivered is exactly the one you have ordered.
●Whether accessories (standard accessories, optional parts) are
attached or not.
●Whether there is no break or damage through transport or not.
●Whether any bolt or nut got loose or taken off through transport or not.
Should you found any trouble, please do not hesitate to contact our
Sales division or your agency.

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Table. 1 Standard accessories
Part name Specification Quantity Remarks
Oil one time portion ULVOIL R-72 1 set For the consumed amount, refer
to the specification table.
V belt 5V-1120 2 pcs -
Belt cover (Bolt for mounting) - 1 set -
Anchor bolt Pump, motor base, belt
cover
12 pcs -
Motor (with key) - 1pce Attached only when the motor is
placed an order.
Motor base (with bolt for motor
fixation)
- 1pce Attached only when the motor is
placed an order.
Motor pulley 50Hz spec. 1pce Either of them only
60Hz spec. 1pce
Instruction manual English 1 copy
Nylon tube 1/4B 1 set For connecting oil pot
Oil pot With joint 1pce -
0.5.2 Transfer
WARNING
●You have a risk of giving damage to your back as the load larger than
safety standard shall be required to transfer the product.
PMB-040C:970kg (Without Motor)
PMB-060C:1100kg (Without Motor)
Be sure to use the loading machinery (such as mobile crane) to lift up
the Pump or load it on the pallet and fix it with Jack and run the Pallet
truck for its transfer.
●Never try to enter beneath the pump unit when lifted it up. Use the
accessory eyebolt to load/unload the unit.
●Do not put the folk of the Fork lift or the like in the pump bottom
(exhaust outlet) to lift it.
●Note to purge the oil to transfer the pump. If forced to transfer
remaining the oil, be sure to keep the pump horizontal. Do not tilt the
pump 10 degree or more while you charge the oil. The oil might run
into the casing.

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xiv
0.5.3 Ambient Condition for Storage, Install and Operation
As precise clearances are provided with this machine, be sure to fulfill the following for its storage,
install and operation;
(1) Ambient temperature and humidity for
storage
: -10°C to 60°C, less than 95%RH
(No freeze/condensation)
(2) Ambient temperature and humidity for
operation
: 5°C to 40°C, less than 80%RH
(No condensation)
(3) Height (for both storage and operation) : Lower than 1,000 meters altitude
(4) External vibration (for both storage and
operation)
: Vibration acceleration less than114dB (0.5G)
(5) Miscellaneous (for both storage and
operation)
a. There shall be no corrosion behavior or explosive gas.
b. There shall be no freeze or dew formation.
c. There shall be no dust.
d. It shall be in house.
e. Another pump shall not be put on the pump.
The Pump shall not be laid down nor put touching its pulley edge face or oil gauge edge
face with the ground.
f. There shall be no direct sun beam.
g. Heat source shall be put away from the pump.
CAUTION
●Do not give an impact to nor topple over the pump. It causes a
failure in the pump.
●Never place combustible substances within 1m from the motor or
the vacuum pump in all directions. There is a risk of a fire.
●Do not place walls or obstacles within 0.3m from the ventilation
opening (at the end of) the motor. There is a risk of burn injury and a
fire due to abnormal overheat.
●Use indoors.
Securely fix this machine with bolts.

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0.6 Protective Device
This machine has a three-phase current motor.
This motor is not equipped with the protective device. Put an overload protective device to connect
through the motor with the Power Supply.
Refer to “3.5 Electrical Connection” to select the overload protective device.
It is recommended to put together another protective device such as a leakage breaker.
WARNING
●It is imperative to put the Overload protection device.
●Otherwise it would cause the motor burn out and/or fire.
CAUTION
●This pump adopts an IE3 motor.
●An IE3 motor has achieved efficiency higher than conventional
motors, and its striking current tends to be higher. Due to the
influence, an instantaneous action may occur by the striking current
of the motor // at the selected rating of the present MCCB (molded
case circuit breaker), ELCB (earth leakage circuit breaker), MC
(magnetic contactor), and THR (thermal relay).
●In order to avoid any unnecessary instantaneous action, it is
necessary to take another look at the selection of MCCB, ELCB, and
THR.
For the motor protection (thermal) of PMB-040C and -060C, a
time-lagged type is recommended.
Example: Fuji Electric FA Components & Systems Co., Ltd.
Time-lagged type thermal relay TR-L series
●In order to avoid an excessive decrease in opening and closing life
of the magnetic contactor and fused contacts, it is necessary to take
another look at the selection so that striking current of the motor
does not exceed 10 times the rating (Class AC-3) of the magnetic
contactor. For the striking current of each pump, see "Table 3:
Electric capacity of standard motor and selection criteria for
protection circuit."

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Contents-1
Table of Contents
0. Before Using This Product .......................................................................................................................i
0.1 Safety Symbol Marks.........................................................................................................................ii
0.2 Meanings of Safety Symbol Marks....................................................................................................ii
0.3 Safety Precautions............................................................................................................................iii
0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions ..x
0.5 Acceptance and Storage of the Pump.............................................................................................xii
0.5.1 Unpacking/Acceptance of the Pump.........................................................................................xii
0.5.2 Transfer .................................................................................................................................... xiii
0.5.3 Ambient Condition for Storage, Install and Operation..............................................................xiv
0.6 Protective Device.............................................................................................................................xv
1. For Your Safety Use ............................................................................................................................... 1
1.1 This Product Intrinsic Hazardous Nature and Safety Measures ...................................................... 1
1.1.1 Danger Injuries by dangerous gas and dangerous materials. .......................................... 1
1.1.2 Warning Transfer of heavy material .................................................................................. 1
1.1.3 Warning Electric shock .................................................................................................... 2
1.1.4 Warning Explosion............................................................................................................. 2
1.1.5 Caution High temperature ................................................................................................. 3
1.1.6 Caution Leakage of hot cooling water............................................................................... 3
1.2 Chemical Material Safety Data Sheet（SDS）................................................................................... 4
2. Pump Outline.......................................................................................................................................... 5
2.1 Total configuration............................................................................................................................. 5
2.2 Performance Specifications.............................................................................................................. 6
2.3 Dimensional drawing ........................................................................................................................ 7
2.4 Pump Performance..........................................................................................................................11
2.4.1 Ultimate pressure ......................................................................................................................11
2.4.2 Pumping speed .........................................................................................................................11
2.4.3 Power Requirements................................................................................................................ 12
3. Mounting............................................................................................................................................... 13
3.1 Installation/Storage Conditions....................................................................................................... 13
3.2 Installation....................................................................................................................................... 13
3.3 Inlet port Piping/ Outlet port Piping................................................................................................. 14
3.3.1 Inlet port Piping ........................................................................................................................ 14
3.3.2 Outlet port Piping...................................................................................................................... 14
3.4 Cooling Water Piping...................................................................................................................... 16
3.5 Electrical Connection...................................................................................................................... 18
3.6 Lubrication ...................................................................................................................................... 22
3.6.1 Lubrication to the lubrication chamber. .................................................................................... 22
3.6.2 Lubrication to the mechanical seal........................................................................................... 24
3.7 Oil Pot ............................................................................................................................................. 25
3.8 Check and Replace V-belt.............................................................................................................. 26
4. Operation.............................................................................................................................................. 28
4.1 Precautions for Operation............................................................................................................... 28
4.2 Startup............................................................................................................................................. 29

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Contents-2
4.2.1 Test run..................................................................................................................................... 29
4.2.2 Exhaust start............................................................................................................................. 30
4.3 Exhaust stop/Operation Stop.......................................................................................................... 30
5. Maintenance and Check ...................................................................................................................... 32
5.1 Maintenance ................................................................................................................................... 32
5.2 Regular Check ................................................................................................................................ 32
5.2.1 Pump oil level check................................................................................................................. 33
5.2.2 Pump oil check ......................................................................................................................... 33
5.2.3 Replacement of pump oil ......................................................................................................... 33
5.2.4 Oil leakage check..................................................................................................................... 35
5.2.5 Checking mechanical seal for oil leakage................................................................................ 35
5.2.6 Checking cooling water ............................................................................................................ 35
5.2.7 Checking wire net at air intake................................................................................................. 35
5.2.8 Checking abnormal noise/vibration.......................................................................................... 35
5.2.9 Checking inside of casing ........................................................................................................ 36
5.3 Checkup after Storage for a Long Period....................................................................................... 36
5.4 Overhaul ......................................................................................................................................... 36
5.5 Trouble shooting ............................................................................................................................. 37
6. Removal / Transport............................................................................................................................. 41
6.1 Operation Procedure ...................................................................................................................... 41
7. Disposal................................................................................................................................................ 42
8. Warranty Clauses................................................................................................................................. 43
8.1 Warrantable Items........................................................................................................................... 43
8.2 Duration of Guarantee.................................................................................................................... 43
8.3 Warrantee Scope............................................................................................................................ 43
8.4 Response Procedure...................................................................................................................... 43
8.5 Disclaimer ....................................................................................................................................... 44
8.6 Others ............................................................................................................................................. 44
9. Main Displacement Parts ..................................................................................................................... 45
APPENDIX 1 TECHNICAL NOTE............................................................................................................ 46
APPENDIX 1.1 Designing Pumping System........................................................................................ 46
APPENDIX 1.2 Automatic Operation.................................................................................................... 47
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER

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Contents-3
Tables and Illustrations
Fig. 1 Warning Label ..................................................................................................................................xi
Fig. 2 Pumping mechanism of mechanical booster pump......................................................................... 5
Fig. 3 Dimensional drawing PMB-040C ..................................................................................................... 7
Fig. 4 Dimensional drawing PMB-060C ..................................................................................................... 8
Fig. 5 Foundation Drawing Model PMB-040C ........................................................................................... 9
Fig. 6 Foundation Drawing Model PMB-060C ......................................................................................... 10
Fig. 7 Pumping speed curves....................................................................................................................11
Fig. 8 Recommended circuit diagram ...................................................................................................... 19
Fig. 9 Lubrication to mechanical seal....................................................................................................... 24
Fig. 10 Oil pot ........................................................................................................................................... 25
Fig. 11 Belt tension measurement............................................................................................................ 26
Fig. 12 Evacuation by mechanical booster pump (example)................................................................... 46
Table. 1 Standard accessories......................................................................................................................... xiii
Table. 2 Specifications ....................................................................................................................................... 6
Table. 3 Electric capacity of standard motor and selection criteria for protector ............................................. 20
Table. 4 Oil level gauge ................................................................................................................................... 22
Table. 5 Flexible volume, deflection load of the belt........................................................................................ 27
Table. 6 Troubleshooting.................................................................................................................................. 37
Table. 7 Main displacement parts list............................................................................................................... 45