Ulvac PBL Series User manual

SK00-4813-DI-002-07(No.190628)

i
Before Using This Pump
Thank you for purchasing the oil diffusion ejector pump PBL series (hereafter, "this pump") made by ULVAC
(hereinafter, "we").
To ensure safety, upon receiving the pump, confirm that it matches the details of your order and has not
been damaged in transit or for another reason.
This instruction manual (hereinafter, "this document") describes appropriate handling and maintenance
procedures to safely use this pump and to maximize its performance. Read this document in advance to
properly use this pump.
Install and operate this pump according to the safety-related laws and regulations (such as fire prevention
laws and electrical wiring regulations) in your country or region. To this end, you must first attend a publicly
recognized general safety training (including on electrical and loading safety topics) in your country or
region. Never handle this pump without first undergoing safety training. The operator must attend such
training. The operator must have expertise, skills, and certifications related to electricity, machinery, loading,
vacuum usage, and other fields.
This pump has been designed to conform to the rules in place when this document was created. Conformity
is not guaranteed because the applicable standards may change in the future.
Performance and safety may not be ensured if equipment connected to this pump does not conform to the
same rules or if the pump is altered. In such cases, we cannot guarantee (take responsibility for)
performance or safety. Product alterations made by the customer are not covered by the warranty, and we
cannot take responsibility for them.
Before installing or removing this pump, separate all energy sources (including power and cooling water)
from the product.
None of this pump's parts may continue to be used permanently while maintaining the performance upon
delivery. Performance inevitably degrades after a certain amount of time elapses, thus increasing the
likelihood of product problems even in assumed common usage scenarios. We ask that our customers
perform preventive maintenance to avoid problems in accordance with their usage scenarios.
By performing preventive maintenance measures, you can lower the probability of problems with this pump
due to parts failures caused by parts becoming worn out as well as the probability of other risks, such as
downtime caused by pump problems, fire, or effects on other processes.
From the viewpoint of preventive maintenance, we also ask our customers to prepare maintenance and
inspection plans and to replace parts and perform overhauls according to such plans.
If you have any questions about handling or other matters, please contact our nearest sales office or dealer.

ii
Safety Indications
Signal words and symbol marks are in the warning indications contained in this document and on the
product so that the user can understand the matters to be observed. Their meanings are as follows.
■Meanings of signal words
Terms that indicate a safe warning level are called signal wards.
Indicates an imminent possibility that incorrect handling may
lead to the user’s death
or serious injury.
Indicates a possibility that incorrect handling may lead to the user's death or serious
injury.
Indicates a possibility that incorrect handling may lead to the user suffering a
medium-level injury.
Indicates important information not related to human injury.
■Meanings of symbol marks
Indicates potential risks related to human injury.
Indicates potential risks related to electrical shock.
Indicates potential risks related to high temperature.
Indicates what you must not do.
Indicates what you must do.
Indicates that the operator must wear protective gloves.
Indicates that the operator must wear protective goggles.
Indicates that the operator must read the instruction manual.

iii
Warning Label Types and Display Positions
Attach warning labels to the warning locations on this pump. Before operating this pump, be sure to
confirm the warning contents.
Parts with this warning label have a risk of electrical shock.
Turn off the primary power supply before starting wiring or maintenance.
Because it becomes very hot, do not touch any section during operation or for
some time after operation is stopped. Touching it may cause burns.
Before use, read through the instruction
manual and fully understand its
contents.

iv
■Warning label display positions
PBL-02
Fig.1 Warning label attachment position（PBL-02）
PBL-04
Fig.2 Warning label attachment position（PBL-04）
PBL-06
Fig.3 Warning label attachment position（PBL-06）

v
PBL-10
Fig.4 Warning label attachment position（PBL-10）
PBL-14
Fig.5 Warning label attachment position（PBL-14）
PBL-20
Fig.6 Warning label attachment position（PBL-20）

vi
Warranty Terms
Although this pump undergoes our stringent internal inspection before shipment, if there are any
failures attributable to us such as a manufacturing defect during shipping, contact our nearest sales
office or dealer. We will repair or replace it free of charge。
■Warranty target
Oil diffusion ejector pimp PBL series （PBL-02, PBL-04, PBL-06, PBL-10, PBL-14, PBL-20）
■Warranty period
(a) Transactions in Japan: One year from the shipment date.
(b) Direct export transaction: One year from the B/L date.
■Warranty scope
The warranty applies only to this pump. If a failure or accident occurs during air or nitrogen exhaust
due to our design or a manufacturing defect, we will repair the pump free of charge if within one year
of delivery.
■Disclaimer
The warranty does not cover the product failures listed below or those due to one of the following
causes; we will charge for such repairs even during the warranty period.
- Failures or defects caused by exhaust of gas or a substance other than air or nitrogen
- Failures or defects caused by consumables
- When the power voltage or frequency of the power supply used differs from what was
specified at the time of order
- Failures or defects caused by natural disasters such as fires, floods, earthquakes, or lightning,
or force majeure such as war
- Failures or defects caused by handling errors or incorrect usage
- When the product has been altered, disassembled, or repaired without our permission
- Failures or defects caused by use in an abnormal environment (including strong
electromagnetic fields, radioactive environments, high temperatures, high humidity,
flammable gas atmospheres, corrosive gas atmospheres, and dust)
- Failures or defects due to noise
- Secondary damage incurred by the customer caused by product defects or claims from third
parties that we have infringed on patents
- When our engineer determines that the failure or defect occurred because the pump's usage
requirements were not satisfied
- Products for which the warranty period has elapsed

vii
■Response
(a) Transactions in Japan:
We will send a substitute product, or repair the product returned to us or our nearest ULVAC
TECHNO office.
If on-site action is required, contact our nearest sales office or dealer separately.
(b) Direct export transactions:
We will send a substitute product, or repair the product returned to us or our nearest service
center.
The customer must bear the cost of shipping the returned product.
■Miscellaneous (warranty terms)
(a) If there are any individual contracts, memoranda on the specifications, or other agreements
in addition to this document, handling will conform to their contents.
(b) Before exporting this pump from Japan, contact us and perform the necessary procedures
according to the provisions of export-related laws such as the Foreign Exchange and Foreign
Trade Law.
(c) If you have any questions about this pump or want to consult with us regarding it, confirm the
model and manufacturing number and then contact our nearest sales office or dealer.
https://www.ulvac.co.jp/support_info/
(d) Note that this document's contents are subject to change without notice.

viii
About This Document
To ensure this pump remains usable for a long time, before installing, operating, inspecting, or
maintaining it, be sure to read this document and fully understand the safety notes as well as the
pump's specifications and operating procedures.
Note that the specifications, prices, and other contents in this document are subject to change
without notice for improvement or other reasons. Changes are released as a revision that
updates the document number listed on the top-right corner of the instruction manual's cover.
Be sure to give this document to the end user who uses the product.
Copying this instruction manual in whole or in part for third parties without our permission is
strictly prohibited.
This document is intended for users whose native language is Japanese. If users whose native
language is not Japanese perform work related to this pump, thoroughly provide safety training
and handling instructions under your own responsibility.
Target Models
This document applies to PBL-02, PBL-04, PBL-06, PBL-10, PBL-14, and PBL-20.

TOC-1
Contents
Before Using This Pump ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅰ
Safety Indications ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅱ
Meanings of signal words ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅱ
Meanings of symbol marks ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅱ
Warning Label Types and Display Positions ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅲ
Warning Label Display Positions ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅳ
Warranty Terms ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅵ
Warranty Target ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅵ
Warranty Period ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅵ
Warranty Scope ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅵ
Disclaimer ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅵ
Response ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅶ
Miscellaneous (warranty terms) ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅷ
About This Document ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅷ
Target Models ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ⅷ
1. To Ensure Safe Use ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ １
1.1 Handling of This Pump ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・1
1.2 Acceptance, Transport, and Storage ……………………………………………… 2
1.2.1 Acceptance …………………………………………………………………………………… 2
1.2.2 Transport ………………………………………………………………………………………… 2
1.2.3 Storage …………………………………………………………………………………………… 3
1.3 Installation and Operation ………………………………………………………… 3
1.4 Disposal ………………………………………………………………………………… 4
1.5 Protective device ……………………………………………………………………… 4
1.6 Risks and Safety Measures Specific to This pump ……………………………… 4
1.6.1 Vacuum pumping and exhaust of hazardous gases or substances …………………… 4
1.6.2 Transport of heavy objects ………………………………………………………………………. 5
1.6.3 Electrical shock …………………………………………………………………………………… 5
1.6.4 High temperature ……………………………………………………………………………… 5
1.6.5 Ruptures …………………………………………………………………………………………… 5
1.6.6 Leakage of hot cooling water ……………………………………………………………… 6
1.7 Safety Data Sheet ………………………………………………………………… 6
2. Product Overview ……………………………………………………… 7
2.1 Features ………………………………………………………………………………. 7
2.2 Performance Curves ………………………………………………………………… 7
2.3 Part Names ……………………………………………………………………… 8

TOC-2
3. Installation ………………………………………………………………… 10
3.1 Before Installation …………………………………………………………………… 10
3.1.1 Division of roles from shipment to startup ……………………………………………… 10
3.1.2 Storage environment requirements ………………………………………………………… 11
3.1.3 Environment requirements for installation and operation ……………………………… 11
3.2 Unpacking ………………………………………………………………………… 12
3.2.1 Notes on unpacking …………………………………………………………………… 12
3.2.2 Confirmation after unpacking ……………………………………………………… 12
3.3 Transport …………………………………………………………………… 13
3.3.1 How to hoist this pump using a crane ……………………………………………………… 13
3.3.2 How to transport this pump via pallet truck ……………………………………………… 14
3.4 Installation and Piping ………………………………………………………………. 14
3.4.1 Preparations before installation……………………………………………………………… 14
3.4.2 Piping for the pump inlet …………………………………………………………………… 14
3.5 Cooling water piping ………………………………………………………………… 15
3.6 Power Wiring ……………………………………………………………………… 17
3.7 Pump fluid installation……………………………………………………………… 20
3.8 Vacuum test ……………………………………………………………………. 20
4. Operation …………………………………………………………… 21
4.1 Precautions for operation …………………………………………………… 21
4.2 Preparation for operation ……………………………………………………………. 23
4.3 Leak test ……………………………………………………………………………… 24
4.4 How to Stop the Pump ……………………………………………………………. 24
5. Maintenance and Inspections …………………………………… 24
5.1 Regular Inspections ………………………………………………………………… 24
5.2 Renew of heater ………………………………………… ……………… 24
5.3 Exchange the fluid …………………………………………………………………… 26
6. Troubleshooting ………………………………………………………… 27
7. Specifications ……………………………………………………… 28
7.1 Performance Specifications ………………………………………………… 28
7.2 Dimensional Drawings …………………………………………………… 29
Appendix
Replacement Parts
(1) Heater list
(2) Oil value list
(3) Packing list
Certificate of Contamination

1
１． To Ensure Safe Use
This chapter describes how to reduce risks as well as which dangerous behaviors must be
avoided for each work item.
1.1 Handling of This Pump
If you need an overhaul or repair or if you have a problem, contact our nearest service center.
This pump can exhaust inert gas (air, nitrogen, or argon).
If the pump
exhausts other gas (toxic, combustible, corrosive, or explosive gas, or
gas that increases the susceptibility of substances), such gas may leak from the
pump's main unit or ignite or explode inside the pump. Therefore, do not use this
pump to exhaust such gases.
Install this pump in a ventilated room indoors.
If nitrogen or argon leaks, the lack of oxygen may cause suffocation.
Before installing or removing this pump, separate all energy sources (including
power and cooling water) from it.
If
this pump sucks in toxic gas, both the pump's main unit and the lubricant will
become toxic. Keep this in mind during maintenance.
Install an appropriate filter, separator, and trap so that this pump does not suck in
liquid or solid particles.
This pump has been designed to conform to the rules in place when this document was created.
Conformity is not guaranteed because the applicable standards may change in the future.
Performance and safety may not be ensured if equipment connected to this pump does not
conform to the same rules or if the pump is altered. In such cases, we cannot guarantee (take
responsibility for) performance or safety.
Do not handle this pump if you have not undergone publicly recognized general safety training
(including on electrical and loading safety) in your country. The operator must attend such training.
Install and operate this pump according to the safety-related laws and regulations (such as fire
prevention laws and electrical wiring regulations) in your country.
If you do not inform us of the details of hazardous substances you have used or that the pump
exhausted a substance that is difficult to detoxify, we may refuse to maintain or otherwise handle
the pump. When requesting overhaul, maintenance, repair, or other work, fill out the Declaration
of Contamination attached to this document and submit it to the service center.

2
Before exporting this pump from Japan, it must undergo screening according to the Foreign
Exchange and Foreign Trade Law as well as government ordinances, ministerial ordinances,
notices, and other orders based on said law. Contact our nearest sales office or dealer.
[List of sales offices]
https://www.ulvac.co.jp/support_info/sales_office/
1.2 Acceptance, Transport, and Storage
1.2.1 Acceptance
Never get under this pump.
The pump may fall or topple if a forcible operation is performed or if the equipment is
not sufficiently maintained. Never get under this pump.
Ask a specialist company to perform disassembly.
This pump comes packaged
in a wooden crate, cardboard box, or other material. Ask
a specialist company to perform disassembly. Workers may cut their hands on nails or
wooden chips during work. Instruct those who disassemble the pump to wear leather
gloves and to use an appropriate bar or other disassembly tool.
Use a crane or other cargo
-
handling equipment.
When taking this pump out of the package or lifting it, instruct workers to lift it while
holding the eyebolts on the upper part using a crane or other cargo-handling
equipment
and to transport it. Before using the eyebolts, confirm that there are no abnormalities.
Certified persons must perform loading work and operate the cargo
-
handling
machine.
Never perform loading work or operate the cargo-handling machine if
you do not have
the appropriate certifications.
After unpacking, check for any missing items or damage.
Check for any missing items, damage, part abnormalities, or other problems after
unpacking. It you find any defects, do not install the pump.
1.2.2 Transport
For transport, use cargo
-
handling equipment or a pallet truck.
To transport this pump, a load higher than the safety standards is required. Therefore,
manually transporting it may cause lower back pain or injury. For transport, hang
this
pump with cargo-
handling equipment (such as a mobile crane) or fix it on a pallet and
then transport it by pallet truck.

3
1.2.3 Storage
Respect the environment requirements.
This pump is a machine with a precise clearance. Confirm that the
storage location
satisfies the requirements listed in "3.1.2 Storage environment requirements."
1.3 Installation and Operation
Before installing or removing this pump, separate all energy sources (including
power and cooling water) from it.
This pump is not designed for pressurization. It explodes when you
pressurize it,
and a piece might be scattered. Only at the time of operating
, prevent you from
pressurizing it at any time.
Don’t fix the pump base.
It becomes the high temperature during pump operating, and heat is
prolonged, and
a pump does it.
Please do not fix both inlet and pump footstool and pump base.
Excessive power depends on a pump by a heat spread and might be damaged.
Do not apply
shock to this pump or put in at an incline, position it sideways,
or stand it up or reverse it.
Doing so will degrade the pump's operation. Install this pump so that it is level.
Operate the pump after the main unit's temperature reaches the operable
ambient temperature.
When this pump has been stored outside the operable ambient temperature range,
operate it after the main unit's temperature has returned to the operable ambient
temperature.
Install this pump's main unit so that it is level.
After
moving this pump to the installation location, adjust the four adjusters within
the range of 0 to 10 mm, and install this pump's main unit so that it is level. If you
operate this pump on the casters, vibrations will travel to the floor. Alternately, this
pump may travel by itself and collide with the surrounding equipment.
Respect the environment requirements.
This pump is a machine with a precise clearance. Confirm that the installation
location satisfies the requirements in "3.1.3 Environment
requirements for
installation and operation."

4
1.4 Disposal
Ask a waste disposal specialist to dispose of this pump if you have used it to
exhaust harmful gas that may endanger human health.
Ask a waste disposal specialist to dispose of this pump
if you have used it to exhaust
harmful gas that may endanger human health.
Dispose of this pump according to the laws and ordinances issued by your local government.
Particularly if you have used this pump to exhaust harmful gas, ask a waste disposal specialist
to dispose of this pump.
The customer must incur any disposal-related costs.
1.5 Protective device
Be sure to install an earth leakage circuit breaker.
If no earth leakage circuit breaker is installed, then equipment burnout, fire, or
electrical
shock may occur.
This pump is not equipped with a power interrupter and leak detector.
When selecting a ground-fault interrupter, refer to "3.6 Wiring."
1.6 Risks and Safety Measures Specific to This Pump
1.6.1 Vacuum pumping and exhaust of hazardous gases or substances
Do not use this pump to exhaust toxic, combustible, corrosive, or explosive
gas, or gas that increases the susceptibility of substances.
It is very dangerous to exhaust toxic, combustible, corrosive or explosive gas, or gas
that increases the susceptibility of substances. It is very dangerous if this pump sucks
in such gas because ignition or an explosion may occur due to residue gas or product;
this may occur during operation or even after operation stops. Do not exhaust gas
that has these characteristics.
Wear protective equipment.
During work such as inspections, wear protective equipment suitable for handling the
toxic substance to be used.
Ask a waste disposal specialist to dispose of this pump.
To dispose of this pump, ask a waste disposal specialist authorized by the
government.
To detoxify this pump, ask a specialist.
To detoxify this pump before overhaul or disposal, ask a waste disposal specialist.

5
1.6.2 Transport of heavy objects
Never get under this pump.
The pump may fall or topple if a forcible operation is performed or if the equipment is
not sufficiently maintained. Never get under this pump.
Never perform loading work or operate the cargo-handling machine if you do
not have the appropriate certifications.
Failure to observe this instruction may lead to accident or injury.
1.6.3 Electrical shock
Before connecting the power, turn off the primary power supply.
Before inspection or relocation, turn off the primary power supply.
Be sure to connect the ground terminal.
A certified electrical worker must embed grounding or connect the ground line.
Incomplete grounding incurs the risk of electrical shock.
1.6.4 High temperature
Do not touch the pump's main unit, motor, or piping during operation.
Do not touch the pump's main unit, motor, or piping during operation because they
are very hot. Failure to observe this instruction may lead to burns.
Wait until the pump temperature drops.
The pump is hot immediately after operation stops. Wait a while until the pump
temperature drops and then perform inspection. Failure to observe this instruction
may lead to burns.
1.6.5 Ruptures
Do not increase the pressure on the pump's exhaust side to 0.03 MPaG or
higher.
Measure the pressure on the pump's exhaust side. If the pressure is 0.03 MPaG
(gauge pressure) or higher, remove any objects that prevent gas on the exhaust port
side from passing.
If the pump's internal pressure exceeds 0.03 MPaG, the pump may rupture.

6
1.6.6 Leakage of hot cooling water
If you inadvertently operate this pump without flowing water, stop the pump
immediately and keep away from it.
If you inadvertently operate this pump without flowing water, stop the pump
immediately and keep away from it.
Hot steam may blast out of the pump's cooling water port.
Install an interlock on the cooling water pathway.
If you operate this pump without flowing cooling water, hot steam may blast out of
the pump's cooling water port.
Wait until the pump temperature drops.
After stopping this pump and confirming that the pump temperature has dropped,
remove and inspect the pump.
1.7 Safety Data Sheet
Carefully read the safety data sheet.
Obtain and carefully read the safety data sheet (SDS) before using this pump.
If lubricant adheres to the skin or enters the eyes, follow the first aid procedure
described on the SDS.
Use the specified lubricant.
Use of a non-specified lubricant will affect the pump's performance and service life
as well as void the pump's warranty coverage.
Do not use a chemical substance (lubricant) not specified in this document.
Pump fluid ULVOIL B-6 (ULVAC)
The SDS describes the chemical substances that may be used or touched to operate this pump. To
understand the characteristics of hazards, carefully read the SDS. Obtain the latest version of the SDS
from our nearest sales office or dealer.
The SDS provides reference information to ensure safe handling of dangerous or hazardous chemical
substances.
Anyone handling lubricant must always obtain the latest SDS and understand that measures suitable
for the actual handling and other situations in question must be taken under their own responsibility
by referring to the SDS before using the lubricant. The SDS itself does not guarantee safety

7
2. Product Overview
The exhaust principles of the oil diffusion vacuum pump are as follows.
Diffusion pumps use a high speed jet of vapor to direct gas molecules in the pump throat
down into the bottom of the pump and out the exhaust.
The diffusion ejector pumps are designed to operate with the ULVOIL B-6 diffusion ejector
pump oil. It is metal pump and make up the pump body, jets, heater and baffle.
2.1 Features
6 models are available PBL-02, PBL-04, PBL-06, PBL-10, PBL-14, PBL-20. This series has
maximum pumping speed at 10-1 Pa range, where pumping speed of oil rotary pump or
mechanical booster pump decreases.
2.2 Performance Curves
Fig 7. Performance curves
Performance curve
s
ULVOIL B-6
with cooling baffle
Pressure (Pa)
Pumping speed (L/s)

8
2.3 Part Names
PBL-02
PBL-04
PBL-06
Heater case
Boiler
Inlet
Outlet
Inside of heater case
Cooling
water outlet
Cooling water inlet
Terminal
Outlet
Inlet
Cooling water inlet
Cooling
water outlet
Nameplate
Boiler
Nichrome wire heater
Inside of Nichrome wire heater
Cartridge heater
Plug type code inlet
Nichrome wire
Nameplate
Cooling water inlet
Cooling
water outlet
Nameplate
Inlet
Outlet
Boiler
Pipe Heater
Oil level gauge
Oil drain port