Zeiss 348247-9013-000 User manual

Instruction Manual
Carl Zeiss Microscopy - Electron and Ion Beam Microscopy
Enabling the Nano-Age World®
105-mm DC stage
Optional Stage for Field Emission
Scanning Electron Microscopes
105-mm DC stage
Optional stage for Field Emission
Scanning Electron Microscopes

105-mm DC stage
Optional airlock for eld emission scanning electron microscopes
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© by Carl Zeiss Microscopy GmbH
Document name: Instruction Manual 105-mm DC stage
Revision: en02
Effective from: June 2012
346000-8072-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore
free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured
to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-
up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make
modications of this document without notice.

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Table of Contents
1. About this manual ........................................................................................ 3
1.1. Definition of terms ........................................................................................... 4
2. Safety summary ........................................................................................... 5
2.1. Intended use ..................................................................................................... 5
2.2. Prevention of accidents and improper use ................................................... 5
2.3. Safety devices .................................................................................................. 7
2.3.1. Chamber door interlock ........................................................................................... 7
2.3.2. Touch alarm ............................................................................................................ 7
2.3.3. Stage safety function in SmartSEM®software ........................................................ 7
2.4. Safety labels ..................................................................................................... 8
3. Description ................................................................................................. 10
3.1. The 105-mm DC stage .................................................................................... 10
3.2. Principle of Operation .................................................................................... 11
3.3. Tool for specimen exchange ......................................................................... 13
3.4. Technical Data ................................................................................................ 14
3.5. Customer service ........................................................................................... 16
4. Installation .................................................................................................. 16
5. Operation .................................................................................................... 17
5.1. Preparing the specimen holder .................................................................... 18
5.2. Loading the specimen chamber via an airlock ........................................... 19
5.3. Loading the specimen chamber via open chamber door ........................... 19
5.4. Locating the specimen .................................................................................. 25
6. Maintenance and repair ............................................................................. 26
6.1. Cleaning the chamber door ........................................................................... 26
6.2. Troubleshooting ............................................................................................. 27
7. Deinstallation and disposal ....................................................................... 28
8. Index ............................................................................................................ 29

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1. About this manual
This instruction manual is considered to be part of the 105-mm DC stage.
Read the instructions carefully. Keep the instruction manual nearby the 105-mm DC stage and
hand it over to future owners of the instrument.
This instruction manual is designed for users who have been trained by an authorized Carl Zeiss
expert to operate the FESEM, the 105-mm DC stage is built in.
Operators of the 105-mm DC stage must not deviate from the instructions provided in this docu-
ment.
Safety
instructions The safety instructions in this manual are classified as follows:
CAUTION
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous situation.
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful
information.

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Typographical
conventions For the description of software, the following typographical conventions are used:
1.1. Definition of terms
The following terms are used in this instruction manual:
Typography Meaning
Push <ENTER>. Push the ENTER key on the keyboard.
Type <key1, key2> Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the High voltage icon.
Select Aperture size from the drop-down list.
Icons, buttons and menus are printed in bold.
Select Aperture size 30 µm.
Set FIB Fil V Target to zero.
Values to be selected are printed in italics.
Text Meaning
Click... Press the left mouse button.
Right-click... Press the right mouse button.
Double-click.... Press the left mouse button twice.
FESEM Field emission scanning electron microscope
105-mm DC stage 6-axes, super eucentric stage driven by a DC (Direct Current) motor
SmartSEM®software Operating software for Carl Zeiss field emission scanning electron
microscopes
Carl Zeiss service engineer,
Carl Zeiss service staff Specially trained service expert, either Carl Zeiss staff or authorised service partner of Carl Zeiss.
Operator Basic operator:
Person who has been trained to perform fundamental operation
sequences
Advanced operator:
Electrically skilled person who has been trained to perform basic main-
tenance tasks

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2. Safety summary
2.1. Intended use
The 105-mm DC (Direct Current) stage is an option for the following Carl Zeiss field emission
scanning electron microscopes:
The 105-mm DC stage is a 6-axes, super eucentric stage. It is used for precise positioning of
samples in the specimen chamber of an electron microscope. The sample weight must not ex-
ceed 500 g. The 105-mm DC stage can be controlled via dual joystick or SmartSEM®software.
Using the 105-mm DC stage for any other purpose is not allowed and could be hazardous.
2.2. Prevention of accidents and improper use
CAUTION
Risk of injury or damage due to improper operation of the 105-mm DC stage.
Read the user documentation carefully.
Do not operate the 105-mm DC stage until you have completely read and understood this
instruction manual.
CAUTION
There are moving parts at the specimen stage.
Loose clothes, jewellery or long hair can be caught in moving parts.
Wear suitable cloth and a protective hair covering when working at the specimen stage.
Option Part no. Compatible Carl Zeiss FESEM
105-mm DC stage 348247-9013-000 SUPRA®40/40VP
SUPRA®55/55VP
ULTRA 55,
ULTRA plus
1540 XB
1540EsB®
105-mm DC stage 349347-9013-000 NVision 40
NEON®40
NEON®40EsB®

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CAUTION
There are moving parts at the specimen stage.
Fingers could be trapped.
Do not touch the specimen stage when the specimen chamber is open.
CAUTION
The specimen might have a weight of 500g.
Risk of injury when specimen falls down.
Wear personal protective equipment, i.e. protective shoes.
CAUTION
Risk of property damage
FESEM or specimen could be damaged, if specimen stage is at short working distance
when opening the chamber door.
Always move the specimen stage to a large working distance before opening the chamber
door.
CAUTION
Opening the chamber door with stage tilted.
Detectors and the motor of the stage could be damaged.
Set the tilt angle of the stage to 0° before opening the chamber door.
CAUTION
Risk of property damage
FESEM or specimen could be damaged, if a detector is in the travel of the 105-mm DC
stage.
Retract the detectors before opening the chamber door.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.

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IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised Carl Zeiss service staff only.
IMPORTANT
Fingerprints can cause virtual vacuum leaks.
Always wear lint-free gloves when touching the specimen or inner parts of the chamber.
2.3. Safety devices
In order to prevent any risk of hazard to human health or to property, the 105-mm DC stage is
equipped with several safety and protective devices.
2.3.1. Chamber door interlock
The chamber door interlock is located at the inner
bottom front side of the specimen chamber.
It ensures that the door of the specimen chamber
is closed properly.
When this interlock is activated (i.e. no electrical
contact) ’EHT Vac ready = no’ is indicated in the
SmartSEM®user interface.
EHT and SE2 detector voltages are blocked.
2.3.2. Touch alarm
To prevent damages caused by accidental touch of a conductive sample or the specimen holder
withparts ofthespecimenchamberorthe objective lens, there isa touch alarm.If the touchalarm
is triggered off, the stage stops and an on-screen message is shown.
2.3.3. Stage safety function in SmartSEM®software
When the chamber door is opened, the Z-, M-, and T-axis cannot be moved anymore.
The X-,Y-, and R-axis can only be moved with reduced velocity.

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2.4. Safety labels
Appropriate safety labels on the 105-mm DC stage warn users of possible hazards.
Each safety label is affixed to the point where a particular hazard exists.
Fig. 1.1: Safety labels at the chamber door
Position Subject Label
A Safety information
B Safety information
CType plate for SUPRA®
and ULTRA series
A
B
C

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C Type plate for Cross-
Beam®series
Position Subject Label

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3. Description
3.1. The 105-mm DC stage
The 105-mm DC stage is a 6-axes, super eucentric stage. It is used for precise positioning of
samples up to 500 g in the electron microscope.
The following overview shows the arrangement of the six axes.
Fig. 1.2: Axes arrangement of the 105-mm DC stage
5
Z
T
MR
X
Y
MT
Z+
+
X
Y
R
+
+

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3.2. Principle of operation
Axis
movements To position the specimens in the electron microscope, the six axes of the 105-mm DC stage can
be tilted, rotated and moved in linear direction.
The following overview shows the movement of the X-, Y-, and R-axis.
Axis Movement
direction Initial position of axis Axis travel
X-axis Back-, and
forwards
Y-axis Sidewards
R-axis Rotates 360°
continuously
Table 1.1: Top view on axis travel of X-, Y-, and R-axis
chamber door
chamber door
chamber door

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Axis
movements The following overview shows the movement of the Z-, T-, and M-axis.
Axis stacking The six axes of the 105-mm DC stage are stacked on each other in the following order: Z, T, M,
X,Y,R.ThatmeansallaxesarestackedontheZ-axis.Whenthe Z-axisismoved thewhole stage
is moving. Only the M-axis can be moved without changing the position of the other axes. This
characteristic is used to adjust the eucentricity of the stage.
Eucentricity A stage is eucentric when the selected sample feature stays in the centre of the screen during
stage tilt. In that case, the specimen detail is exactly in the tilt axis.
Axis Movement
direction Initial position of axis Axis travel
Z-axis Up and down
T-axis Tilts
M-axis Up and down
in tilted state
Table 1.2: Front view on axis travel of Z-, T-, and M-axis

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3.3. Tool for specimen exchange
The tool for specimen exchange is included in delivery. It must be used both, when you mount
the specimen holder to the specimen stage and when you remove it. The use of the tool ensures
that contamination is kept low during specimen exchange and that no dirt particles can fall on the
glas scales. The glas scales are used as position measurement system. They are very sensitive
to dirt.
Fig. 1.3: Tool for specimen exchange
1 Threaded pins 3 Knob
2Rod
12
3

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3.4. Technical data
Environmental requirements
Ambient Temperature approx. 21°C +/-4°C
Stability 0.5°C/h
Relative humidity Less than 65 %
Altitude Maximum 2000 m above sea level.
Floor vibrations Less than 0.2 mm/s² at > 10 Hz
Less than 0.1 mm/s² at < 10 Hz
Noise level Less than 40 dBA at < 100 Hz
Less than 55 dBA at 100 Hz
Degree of pollution 2
Travel
Axis Travel Travel speed Counter resolution
X-axis 105mm 15mm/s 10nm
Y-axis 105mm 15mm/s 10nm
Z-axis SEM 50 mm 2 mm/s 78 nm
NVision 40 45 mm 2 mm/s 78 nm
T-axis -15° to 70° 5°/s 0.0003°
R-axis 360° 15°/s 0.0001°
M-axis -5 to 15 mm 2 mm/s 5 nm
Dimensions
625 x 362 x 374 mm (LxBxH)
72 kg

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Technical data of the stage board
Nominal voltage ±21VDC / max 5A
+5VDC / max 3.15A
Cooling water max 3bar
Dimensions ((LxBxH) 470 x 230 x 90mm
Weight 2 kg
Degree of protection IP20
Protection class I

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3.5. Customer service
For customer service contact your local Carl Zeiss service engineer.
A list of Carl Zeiss locations and authorised service partners can be found at:
http://www.zeiss.com/microscopy
4. Installation
The 105-mm DC stage is either factory-installed or retrofitted by authorised Carl Zeiss service
staff.

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5. Operation
The following section summarises basic sequences how to locate the specimen with the
105-mm DC stage.
Prerequisite:
•SmartSEM®software has been started and is ready to control the FESEM.
Parts required No.
Allen wrench, 1.5 mm delivered with the FESEM
Stub delivered with the FESEM
Tweezers for specimen delivered with the FESEM
Specimen holder delivered with the FESEM
If necessary: carbon tape, conductive carbon, adhesive metal tape or
similar -
Appropriate specimen (with conducting properties e.g. gold on carbon) -
Lint-free gloves -
Tool for specimen exchange 348247-8001-000

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5.1. Preparing the specimen holder
IMPORTANT
Fingerprints can lead to vacuum deterioration or prolonged pumping times. Further, the
specimen might be contaminated. Always wear lint-free gloves when touching specimen,
specimen holder or stage.
1 Attach the specimen to the stub by using con-
ductivecarbon,adhesivemetalorcarbontape
etc.
2 Ensure that the specimen area to be analysed
is in proper contact with the stub.
3 Ensure that the specimen lies flat on the stub.
4 Use the tweezers to insert the stub into the
specimen holder.
5 Properly fix the stub to the specimen holder.
Use the Allen wrench to tighten the location
screw.