Zeiss EVO User manual

Instruction Manual
ZEISS EVO
Scanning Electron Microscope

ZEISS EVO
Original Manual
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena
Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen
Germany
Document Name: Instruction Manual ZEISS EVO
Order Number: 354706-0780-006
Revision: 10
Language: en-US
Effective from: 11/2021
© 2021 Without the prior written consent of ZEISS, this document or any part of it must neither be translated nor reproduced or
transmitted in any form or by any means - including electronic or mechanic methods, by photocopying, recording or by any in-
formation or filing system. The right to make backup-copies for archiving purposes shall remain unaffected thereby. Any viola-
tions may be prosecuted as copyright infringements.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply that such names are
exempt from the relevant intellectual property laws and regulations and therefore free for general use. This shall also apply if
this is not specifically referred to. Software programs shall entirely remain the property of ZEISS. No program or subsequent up-
grade thereof may be disclosed to any third party, copied or reproduced in any other form without the prior written consent of
ZEISS, even if these copies or reproductions are destined for internal use at the customer's only, the only exception being one
single back-up copy for archiving purposes.
ZEISS reserves the right to make modifications to this document without notice.

ZEISS Table of Contents
Table of Contents
1 General Information........................................................................ 6
1.1 Text Conventions and Link Types ........................................................................ 6
1.2 Explanation of Warning Messages and Additional Information............................ 7
1.3 Further Applicable Documents ............................................................................ 8
1.4 Contact............................................................................................................... 8
2 Safety ............................................................................................. 9
2.1 Intended Use ...................................................................................................... 9
2.2 General Safety Information ................................................................................. 10
2.2.1 Requirements for Operators .................................................................. 10
2.2.2 Safe Operating Condition...................................................................... 10
2.3 Prevention of Hazards ......................................................................................... 11
2.3.1 Mechanical Hazards .............................................................................. 11
2.3.2 Electrical Hazards .................................................................................. 11
2.3.3 Hazards generated by Materials and Substances ................................... 12
2.3.4 Hazards generated by Radiation............................................................ 13
2.3.5 Thermal Hazards ................................................................................... 13
2.4 Warning Labels and Lights .................................................................................. 13
2.4.1 Warning Labels ..................................................................................... 14
2.5 Safety Devices and Interlocks .............................................................................. 18
2.5.1 Protective Cover Panels ......................................................................... 18
2.5.2 Main Disconnect Device ........................................................................ 19
2.5.3 Circuit Breaker ...................................................................................... 19
2.5.4 Locking Devices .................................................................................... 20
3 Product and Functional Description ................................................ 21
3.1 Vacuum System .................................................................................................. 22
3.1.1 Variable Pressure Modes ....................................................................... 23
3.2 Electron Optical Column...................................................................................... 27
3.2.1 Optibeam Modes .................................................................................. 29
3.3 Detectors ............................................................................................................ 29
3.3.1 Principle of Signal Detection.................................................................. 30
3.3.2 Detectors Overview............................................................................... 32
3.3.3 SE Detector ........................................................................................... 33
3.3.4 Chamber CCD Camera .......................................................................... 37
3.4 Specimen Stage .................................................................................................. 38
3.5 Optional Components and Accessories................................................................ 39
3.5.1 Optional Detectors................................................................................ 39
3.5.2 Dual Joystick ......................................................................................... 47
3.5.3 Control Panel ........................................................................................ 48
3.6 Software Description........................................................................................... 50
3.6.1 SmartSEM User Interface....................................................................... 50
3.6.2 Graphical Control Elements ................................................................... 51
3.6.3 User Access Levels and User Privileges................................................... 52
3.6.4 SmartSEM Program Suite ...................................................................... 53
4 Installation...................................................................................... 55
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 3

 Table of Contents ZEISS
5 First Operating Steps ...................................................................... 56
5.1 Prerequisites for Commissioning and Operation .................................................. 56
5.2 Switching On the Microscope System.................................................................. 56
5.2.1 Energizing the Microscope .................................................................... 56
5.2.2 Starting the Microscope ........................................................................ 58
5.3 Starting the Software.......................................................................................... 59
5.3.1 Calling up the Help................................................................................ 59
5.3.2 Keyboard Shortcuts............................................................................... 59
5.4 Acquiring an Image............................................................................................. 61
5.4.1 Preparing the Specimen Holder ............................................................. 61
5.4.2 Loading the Specimen Chamber............................................................ 63
5.4.3 Locating the Specimen.......................................................................... 67
5.4.4 Switching on the Gun | LaB₆ Filament ................................................... 68
5.4.5 Switching on the EHT | LaB₆ Filament.................................................... 68
5.4.6 Choosing the LaB₆ Mode ...................................................................... 69
5.4.7 Setting up the LaB₆ Source.................................................................... 70
5.4.8 Switching on the Gun and EHT | Tungsten Filament .............................. 72
5.4.9 Acquiring an Image............................................................................... 73
5.4.10 Optimizing the Image............................................................................ 76
5.4.11 Saving the Image .................................................................................. 79
5.5 Modifying Gun Parameters and Optibeam Mode ................................................ 79
5.5.1 Using the Automatic Gun Alignment Functions ..................................... 79
5.5.2 Using the Auto Aperture Alignment Function........................................ 80
5.5.3 Setting the Probe Current...................................................................... 81
5.5.4 Measuring the Probe Current ................................................................ 81
5.5.5 Selecting the Optibeam Operation Mode .............................................. 81
5.6 Finding Appropriate Detector Settings................................................................. 82
5.6.1 Selecting a Detector.............................................................................. 82
5.6.2 Setting up the SE Detector .................................................................... 83
5.6.3 Setting up the C2D Detector ................................................................. 83
5.6.4 Setting up the C2DX Detector ............................................................... 84
5.6.5 Setting up the BSD Detector.................................................................. 85
5.6.6 Setting up the YAG BSD Detector.......................................................... 87
5.6.7 Using the Variable Stage Bias ................................................................ 88
5.7 Working with Specific Specimen Types................................................................ 91
5.7.1 Conductive Specimen............................................................................ 91
5.7.2 Non-conductive Specimen..................................................................... 93
5.7.3 Hydrated Specimen ............................................................................... 97
5.8 Switching Off the Microscope System .................................................................108
5.8.1 Finishing the Work Session | LaB₆ Filament............................................ 108
5.8.2 Finishing the Work Session | Tungsten Filament..................................... 108
5.8.3 Closing the SmartSEM User Interface .................................................... 109
5.9 De-energizing the Microscope.............................................................................110
5.10 Performing an Emergency Shutdown ..................................................................111
6 Care and Maintenance ....................................................................112
6.1 Safety During Cleaning and Maintenance............................................................112
6.2 Maintenance Schedule........................................................................................112
6.3 Maintenance Work .............................................................................................113
6.3.1 Change of Consumables and Chemicals ................................................ 113
6.4 Care and Cleaning Work .....................................................................................113
6.4.1 Cleaning the Microscope....................................................................... 113
4 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS Table of Contents
7 Troubleshooting .............................................................................114
7.1 Chamber.............................................................................................................115
7.1.1 Initializing the Stage.............................................................................. 115
7.1.2 Defining the Post Initialization Position of the Stage.............................. 116
7.1.3 Changing the Joystick TV Angle ............................................................ 116
7.1.4 Resetting the Touch Alarm .................................................................... 117
7.1.5 Checking the Temperature .................................................................... 117
7.1.6 Replacing the Chamber Door Seal ......................................................... 117
7.1.7 Adjusting the Isolation Mounts ............................................................. 119
7.2 Column...............................................................................................................120
7.2.1 Baking out the Gun Head...................................................................... 120
7.2.2 Replacing Filaments .............................................................................. 121
7.3 Power Circuit ......................................................................................................147
7.3.1 Checking the Position of the Circuit Breakers ........................................ 147
7.4 PC.......................................................................................................................147
7.4.1 Cleaning up the PC ............................................................................... 147
8 Decommissioning and Disposal.......................................................148
8.1 Decommissioning................................................................................................148
8.2 Transport and Storage ........................................................................................149
8.3 Disposal ..............................................................................................................151
8.4 Decontamination ................................................................................................151
9 Technical Data and Conformity.......................................................152
9.1 Layout and Connections......................................................................................152
9.2 System Layout.....................................................................................................153
9.3 Performance Data and Specifications | EVO 10....................................................153
9.4 Performance Data and Specifications | EVO 15....................................................159
9.5 Performance Data and Specifications | EVO 25....................................................164
9.6 Applicable Standards and Regulations.................................................................169
10 Parts and Tools...............................................................................171
10.1 Consumables ......................................................................................................171
10.2 Spare Parts..........................................................................................................171
10.3 Tools and Accessories .........................................................................................171
Glossary ..........................................................................................173
Index...............................................................................................176
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 5

1 General Information | 1.1 Text Conventions and Link Types ZEISS
1 General Information
This Instruction Manual (further called "Manual") is considered to be part of the EVO workstation.
Herein after referred to as Microscope System.
This document contains basic steps and safety information that must be observed during opera-
tion and maintenance. Therefore, the document must be read by the operator prior to commis-
sioning and must always be available at the place of use of the Microscope System.
This document is an essential part of the Microscope System and, if the Microscope System is
resold, the document must remain with the Microscope System or be handed over to the new
owner.
1.1 Text Conventions and Link Types
The following text conventions and link types are used:
Text convention Meaning
Click Start.
Press the STANDBY button.
Press [Enter] on the keyboard.
The names of controls and important infor-
mation are shown in bold letters.
Press <Ctrl+Alt+Del> Press several keys on the keyboard simultane-
ously.
Select Tools > Goto Control Panel > Air-
lock.
Follow a path in the software.
Text input Text to be entered by the user
Programming and Macros Anything typed in literally during program-
ming, including, for example, macro codes,
keywords, data types, method names, vari-
ables, class names, and interface names.
Tab.1: Text convention
Link type Meaning
See: Text Conventions and Link Types [
} 6].Link to further information for this topic.
https://www.zeiss.com/corporate/int/
home.html
Link to a website on the internet.
Tab.2: Link types
6 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 1 General Information | 1.2 Explanation of Warning Messages and Additional Information
1.2 Explanation of Warning Messages and Additional Information
DANGER, WARNING, CAUTION, and NOTICE are standard signal words used to determine the lev-
els of hazards and risks of personal injury and property damage. Not only the safety and warning
messages in the Safety chapter are to be considered also all safety and warning messages in
other chapters. Failure to comply with these instructions and warnings can result in both personal
injury and property damage and involve the loss of any claims for damages.
The following warning messages indicating dangerous situations and hazards are used in this doc-
ument.
DANGER
Type and source of danger
DANGER indicates an imminently hazardous situation which, if not avoided, will result in death
or serious injury.
WARNING
Type and source of danger
WARNING indicates a potentially hazardous situation which, if not avoided, may result in
death or serious injury.
CAUTION
Type and source of danger
CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor
or moderate injury.
NOTICE
Type and source of danger
NOTICE indicates a potentially harmful situation which, if not avoided, may result in property
damage.
Info
Provides additional information or explanations to help operator better understand the con-
tents of this manual.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 7

1 General Information | 1.3 Further Applicable Documents ZEISS
1.3 Further Applicable Documents
Please also take note of the following documents:
Brochures and
Certificates
For Brochures, ISO certificates, CSA certificates and EU declarations of conformity ask your ZEISS
Sales & Service Partner.
Installation
Requirements
For more details on technical data, refer to the corresponding Installation Requirements.
Local and National
health and safety
regulations
Local and national health and safety regulations should be adhered to for the site and the use of
the Microscope System.
Please consult with your ZEISS Sales & Service Partner in the event of these regulations conflicting
with the installation requirements of the Microscope System.
Safety data sheets Observe the enclosed safety data sheets. The instructions and guidelines given in the respective
safety data sheets must be complied with.
Software For detailed information on how to use SmartSEM, please refer to its Online Help or ask your
ZEISS Sales & Service Partner.
System and 3rd
Party Components,
Accessories
Information about the individual components, enhancements and accessories can be obtained
from your ZEISS Sales & Service Partner.
Also refer to the 3rd Party documentation of the manufacturer.
1.4 Contact
If you have any questions or problems, please contact your local ZEISS Sales & Service Partner or
one of the following addresses:
Headquarters
Phone: [phone]
Fax: [phone]
Email: [email protected]
Courses and training
Email: [email protected]
ZEISS Portal
The ZEISS Portal (https://portal.zeiss.com/) offers various services that simplify the daily work with
your ZEISS systems (machines and software). It is constantly improved and extended to meet your
needs and requirements better.
ZEISS Sales & Service Partner
You can find a ZEISS Sales & Service Partner in your area under https://www.zeiss.de/mikroskopie/
website/forms/sales-and-service-contacts.html.
Service Germany
Phone: [phone]
Fax: [phone]
Email: [email protected]
8 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.1 Intended Use
2 Safety
This chapter contains general requirements for safe working practices. Any person using the Mi-
croscope System or commissioned with installation or maintenance must read and observe these
general safety instructions. Knowledge of basic safety instructions and requirements is a precondi-
tion for safe and fault-free operation. Operational safety of the supplied Microscope System is
only ensured if it is operated according to its intended use.
If any work is associated with residual risks, this is mentioned in the relevant parts of this docu-
ment in a specific note. When components must be handled with special caution, they are
marked with a warning label. These warnings must always be observed.
2.1 Intended Use
The microscope has been designed to generate an image or to analyze appropriate specimens,
which is achieved by scanning a focused electron beam across the specimen (SEM Imaging).
This application allows for the imaging and analysis of surface structures and near-surface struc-
tures of appropriate specimens. For this purpose, the specimen is placed in the evacuated speci-
men chamber.
Info
Not for therapeutic, treatment, or medical diagnostic evidence.
Info
Not all products are available in every country. Contact your local ZEISS representative for
more information.
PC The Zeiss SEM PC is supplied “as is” and is untested with any third-part software. It is not recom-
mended to install any third-part software on the Zeiss SEM PC as this might cause instabilities
and/or break Carl Zeiss software installations.
SmartSEM
Software
The SmartSEM software is intended for the operation of scanning electron microscopes (SEMs).
The SmartSEM software has to be run exclusively on a personal computer delivered by ZEISS. Any
other application is not allowed.
Regarding the operation of the microscope, the following regulations must be met:
§Only operate the microscope according to the operating conditions after correct installation
by a ZEISS service representative.
§The microscope is only to be used by operators who have been trained by a ZEISS service rep-
resentative. Basic operator training and safety instructions will be provided within the scope
of the initial start-up by ZEISS. Make sure that everyone who operates the microscope only
performs the tasks for which he/she is trained.
§Operators of the microscope must not deviate from the instructions provided in this manual.
§Only perform preventive maintenance tasks described in this manual. All tasks of mainte-
nance, service, and repair not described in this manual have to be performed by an authorized
ZEISS service representative.
§The microscope is to be used in a laboratory environment for commercial and scientific pur-
poses only.
Using the microscope for any other purpose is not allowed and can be hazardous.
Improper use of the Microscope System can easily lead to impairment of its function or even dam-
age to the Microscope System. Damage caused by incorrect operation, negligence or unautho-
rized intervention, in particular by removing, modifying or replacing parts of the Microscope Sys-
tem, cannot be held liable by the device manufacturer. Third-party devices or components that
are not expressly approved by ZEISS may not be used.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 9

2 Safety | 2.2 General Safety Information ZEISS
2.2 General Safety Information
This document must be read before commissioning in order to ensure safe and uninterrupted op-
eration. Pay particular attention to all listed safety notes. Make sure, that
§the operating personnel has read and understood this manual, associated documents and
particularly all safety regulations and instructions, and applies them.
§the local and national safety and accident prevention regulations must be observed, as well as
the applicable laws and regulations in your country.
§this document is always available with/together with the Microscope System.
§the Microscope System is always in perfect condition.
§the Microscope System is secured against access by unauthorized persons.
§maintenance and repair work, retrofitting, removal or replacement of components, as well as
any other intervention in the Microscope System not described in this document, may only be
carried out by the manufacturer ZEISS or persons expressly authorized by ZEISS to do so.
2.2.1 Requirements for Operators
The Microscope System, components and accessories may only be operated and maintained by
authorized and trained personnel. The Microscope System may only be used in accordance this
document. If the Microscope System is not used as described, the safety of the user may be im-
paired and/or the Microscope System may be damaged.
Any unauthorized intervention or use other than within the scope of the intended use shall void
all rights to warranty claims. The regional regulations on health protection and accident preven-
tion must be observed at all times and during all work on and with the Microscope System.
Training Authorized ZEISS personnel will provide basic training in operating the Microscope System. As
well as information on equipment safety and maintenance work that can be conducted by the op-
erator. The training will be documented by ZEISS and its completion is to be confirmed by the op-
erator.
Special application training is offered for a fee. Current training dates, additional information and
the registration form can be found at https://www.zeiss.com/microscopy/int/service-support/train-
ing-and-education.html.
2.2.2 Safe Operating Condition
If circumstances occur which impair safety and cause changes in operating behavior, the Micro-
scope System must be shut down immediately and a ZEISS service representative should be in-
formed. The Microscope System can only be operated after proper installation by a ZEISS service
representative and in compliance with the operating conditions. The Microscope System may only
be operated after correct installation by a ZEISS service representative and if the operating condi-
tions are adhered to.
§Do not operate the Microscope System until you have completely read and understood the
entire documentation delivered with the Microscope System.
§Make sure that all protective cover panels are installed and all warning labels are available and
legible.
§Ensure conditions and take measures to prevent the build up of electrostatic charge on the
workplace.
10 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.3 Prevention of Hazards
2.3 Prevention of Hazards
This section summarizes potential hazards and recommended safety precautions. Failure to follow
the safety instructions and instructions may result in personal injury and property damage.
2.3.1 Mechanical Hazards
Specimen Stage Fingers can be trapped by the moving specimen stage.
§Always close the chamber door before moving the specimen stage.
§To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your fin-
gers.
Chamber Door Fingers can be pinched when closing the chamber door.
§Use the recessed grip or door handle to close the chamber door.
§Ensure not to get your fingers caught in the chamber door gap.
Gas Cylinders Gas cylinders containing, for example, nitrogen or compressed air have a high internal pressure of
approximately 200bar. If not properly handled, the contained gas can abruptly escape and cause
the gas cylinder to move in an uncontrollable manner.
§Observe all safety labels on the gas cylinders and all safety instructions given by the gas cylin-
der manufacturer.
§Always operate gas cylinders in an upright position and secure them so they will not tip over.
§Before transporting gas cylinders, place protective caps on them.
Short Working
Distance
When opening the chamber door, the microscope or specimen can be damaged if the specimen
stage is at a short working distance. If a BSD detector is inserted, it can be damaged as well.
§Always move the specimen stage to a long working distance before opening the chamber
door.
Isolation Mounts The isolation mounts are specified only up to 4.5 bar. If you pump up the isolation mounts above
4.5 bar, then the isolation mounts could be destroyed.
§When pumping up the isolation mounts, avoid pressures above 4.5 bar.
2.3.2 Electrical Hazards
Hazardous Voltage
inside the
Microscope
High voltages are present inside the microscope. Contact may cause burn or electrical shock.
§Ensure proper grounding. For more information, refer to the Installation Requirements docu-
ment.
§Only authorized ZEISS service representatives are allowed to service the microscope.
§Do not try to service the microscope yourself.
High Leakage
Currents
High leakage currents are present in the microscope. Contact may cause burn or electrical shock.
§Ensure proper grounding. For more information, refer to the Installation Requirements docu-
ment.
§Do not operate the microscope without the separate ground connection.
Opening the Gun If you open the gun while the mains power is connected to the microscope, then contact may
cause electrical shock.
§Always disconnected the mains power from the microscope before you open the gun.
Residual Voltage
at the Mains Plug
After unplugging the mains plug residual voltage is present at the pins of the plug which may
cause electrical shock.
§After unplugging the mains plug wait at least 5 s before touching the pins of the mains plug.
Stage on Bias
Voltage
If you open the chamber door while the stage is still on bias voltage, then contact may cause elec-
trical shock.
§Always switch off the beam deceleration before you open the chamber door.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 11

2 Safety | 2.3 Prevention of Hazards ZEISS
Malfunction of
Medical Devices
near Ion Getter
Pumps
Magnetic fields present at the ion getter pumps may disturb the function of medical devices. The
magnetic fields are also present if the microscope is switched off.
If you wear medical implants that are susceptible to magnetic fields (e.g. cardiac pacemakers), do
the following:
§Keep a distance of at least 30cm from the ion getter pumps.
§Follow the safety instructions provided by the pump manufacturer.
2.3.3 Hazards generated by Materials and Substances
Biological
Substances
Biological substances may pose a threat to the health of humans and other living organisms.
§Keep a logbook of the biological substances loaded into the microscope and show it to the
ZEISS service representatives before they perform any work on the microscope.
Lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange and parts
exchange. Inhaling nitrogen may cause unconsciousness.
§During specimen exchange, keep the chamber door open as short as possible.
§Do not inhale the air from within the specimen chamber.
§Ensure that the area around the microscope is sufficiently ventilated.
§If you begin to experience symptoms of asphyxia (for example: rapid breathing, loss of mental
alertness and/or muscular coordination, depression of sensations, emotional instability, fa-
tigue) leave the room immediately and inform the facility’s safety officer.
Concerning the hazards of nitrogen installations and associated safety precautions refer to the
current version of the guideline IGC Doc 44/18: Hazards of Oxygen-Deficient Atmospheres, pub-
lished by EIGA (European Industrial Gases Association).
To download the document:
1. Go to EIGA homepage www.eiga.eu.
2. Select Publications > EIGA Documents.
3. From the list, select Doc. 44/18.
4. Click Download.
Aggressive or
Toxic Chemicals
Aggressive or toxic chemicals can cause chemical burns.
§When handling aggressive or toxic chemicals, wear suitable protective clothing, gloves, and
eye/face protection.
§Do not eat, drink, or smoke while handling toxic chemicals.
§Refer to local safety regulations.
§Read and follow the instructions in the material safety data sheet of the chemical. The mate-
rial safety data sheet can be obtained from the supplier of the chemicals.
Oil Mist around
the Rotary Pump
The rotary pump RV12 may emit oil mist especially at high gas load (e.g. door accidently open).
Inhaled oil mist is harmful to health.
§Regularly service the oil mist filter (refer to pump manual and material safety data sheets).
Recommended is the connection to an exhaust line.
Environmental
risk: Disposal of
aggressive or toxic
chemicals
When disposing of aggressive or toxic chemicals, there is a threat of damage to the environment.
§When disposing of waste that has been generated during a service operation (e.g. used rotary
pump oil), comply with all national and local safety and environmental protection regulations.
12 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.4 Warning Labels and Lights
2.3.4 Hazards generated by Radiation
X-rays X-rays are generated inside the microscope during operation. This is unavoidable because elec-
trons are accelerated by voltages up to 30kV.
§Do not remove any parts around the column and chamber that are essential for radiation pro-
tection.
§Use genuine ZEISS parts exclusively.
§Ensure that all local safety and X-ray protection regulations are met.
§Only authorized ZEISS service representatives are allowed to service the microscope.
An electron microscope is a radiation source in the sense of the German regulations Strahlen-
schutzgesetz (StrlSchG) and Strahlenschutzverordnung (StrlSchV). This also applies if the X-ray ra-
diation generated is evaluated by detectors (WDX, EDX). The operation of an interfering emitter is
subject to the regulations of StrlSchG and StrlSchV.
The design of the scanning electron microscope ensures that the acceleration voltage of 30 kV
and a local dose rate of 1 µSv / h at a distance of 0.1 m from the outer surfaces of the device are
not exceeded. The operation of these devices does not require a permit in Germany according to
StrlSchG and StrlSchV.
Every single device is subjected to a routine test at Carl Zeiss Microscopy GmbH in Oberkochen. A
certificate of this test is enclosed with the device (test certificate). The routine test refers to the
device in the delivered configuration.
The following points must be observed:
§A notice is attached to the device, which indicates that X-rays are generated inside the micro-
scope.
§Subsequent changes to the device by the user usually result in a new assessment of the de-
vice's classification with regard to the StrlSchG and StrlSchV. The user is responsible for com-
plying with the limit values prescribed in the StrlSchG and StrlSchV and the necessary check-
ing of the local dose rate after modifications.
Outside Germany, the user of the microscope has to comply with the local regulations of the
country where the microscope is operated.
Contact Radiation
Protection
For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss
AG, 73447 Oberkochen, Germany
phone: [phone]
2.3.5 Thermal Hazards
Bakeout Parts of the enclosure in the upper range of the column may become hot during bakeout, particu-
larly after a long bakeout cycle.
§Do not place any combustible objects on the grids of the electron optical column during bake-
out.
§After the bakeout procedure, let surfaces cool down before working around the column.
§Only advanced operators are allowed to perform the bakeout procedure.
2.4 Warning Labels and Lights
All parts of the Microscope System that may pose specific hazards are marked with additional
warning labels (pictograms) on the Microscope System. These warning labels indicate potential
hazards and form part of this document. They are to be kept in clean and easily legible condition.
Check all the mandatory warning labels for: Availability, Legibility, Correctness. Damaged or illegi-
ble warning labels must be replaced immediately. Always observe all warning labels!
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 13

2 Safety | 2.4 Warning Labels and Lights ZEISS
2.4.1 Warning Labels
Appropriate safety labels on the microscope warn operators of hazards. Each safety label is af-
fixed close to the point where a particular hazard exists. Several labels also provide legal informa-
tion.
Front Side of
Microscope
1
4
2
3
5
Rear Side of
Microscope
6
7
14 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.4 Warning Labels and Lights
Gun Head
underneath
Cladding
8
9
Rear Side of Plinth
10
11
12
13
15
14
CEE Connector
16
The safety labels always need to be attached to the correct spots at the microscope. If a safety la-
bel is lost or unreadable, it needs to be reordered via the following reorder numbers:
Position and Figure of the Safety La-
bel
Description
1
At the front of the chamber door.
CAUTION
Risk ofinjury
347800-0033-000-02en
Fingers could be trapped.
Always close the chamber door
before you move the stage.
Risk of injury
Fingers could be trapped. Always close the cham-
ber door before you move the stage.
Reorder no. 347800-0033-000-02en
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 15

2 Safety | 2.4 Warning Labels and Lights ZEISS
Position and Figure of the Safety La-
bel
Description
2
At the front of the chamber door.
WARNING
Suffocation hazard
347800-0033-000-08en
The specimen chamber is
ventilated with gaseous nitrogen.
Ensure that the area around the
electron microscope is sufficiently
ventilated.
Suffocation hazard
The specimen chamber is ventilated with gaseous
nitrogen.
Ensure that the area around the electron micro-
scope is sufficiently ventilated.
Reorder no. 347800-0033-000-08en
3
At the front of the chamber door. Damage by collision
Collision of internal parts possible at short work-
ing distances.
Move the stage to a long working distance be-
fore opening the chamber door.
Reorder no. 344700-0033-000-06en
4
At the front of the chamber door. Risk of electrical shock by stage on bias volt-
age
Make sure the beam deceleration is switched off
before opening the chamber door.
Reorder no. 344700-0033-000-05en
5
At the front of the plinth
Avoid injury
CAUTION
347800-0033-000-01en
Make sure you have read and
understood the instruction
manual before operating this
product.
Avoid injury
Make sure you have read and understood the in-
struction manual before operating this product.
Reorder no. 347800-0033-000-01en
6
At the rear of the microscope
Magnetic field
WARNING
Can be harmful to pacemaker
wearers.
Pacemaker wearers stay back
30cm (12 in.).
H6048/6063-NCWHPU
Magnetic field
Can be harmful to pacemaker wearers.
Pacemaker wearers stay back 30cm (12in.).
Reorder no. 360735-0000-034en
7
At the rear of the microscope
Contact may cause burn or electric
shock. Only authorised service
Staff is allowed to service the
equipment.
Disconnect power before opening.
Hazardous voltage inside
WARNING
347800-0033-000-03en
Hazardous voltage inside
Contact may cause burn or electric shock. Only
authorized service Staff is allowed to service the
equipment.
Disconnect power before opening.
Reorder no. 347800-0033-000-03en
8
At the gun head Risk of electrical shock
Before opening the gun make sure mains power
is disconnected from the microscope.
Reorder no. 360400-0000-215
16 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.4 Warning Labels and Lights
Position and Figure of the Safety La-
bel
Description
9
At the gun head Risk of burn
Before opening the gun leave the gun and fila-
ment cool down for 15 minutes after switching
off the microscope.
10
At the rear side of the plinth Radiation hazard
Do not remove any parts.
Observe local safety and X-ray protection regula-
tions.
Service only through authorized personnel.
Reorder no. 347800-0033-000-06en
11
At the rear side of the plinth Caution
X-rays are produced in this Scanning Electron Mi-
croscope!
The acceleration voltage is limited to 30kV.
Observe local safety and X-ray protection regula-
tions.
Order no. 346000-0088-000
12
At the rear side of the plinth
Contact may cause burn or electric
shock. Only authorised service
Staff is allowed to service the
equipment.
Disconnect power before opening.
Hazardous voltage inside
WARNING
347800-0033-000-03en
Hazardous voltage inside
Contact may cause burn or electric shock. Only
authorized service Staff is allowed to service the
equipment.
Disconnect power before opening.
Reorder no. 347800-0033-000-03en
14
At the rear side of the plinth
WARNING
High leakage current
347800-0033-000-07en
Ensure proper grounding.
Do not operate the electron
microscope without a separate
ground connection.
High leakage current
Ensure proper grounding.
Do not operate the electron microscope without
a separate ground connection.
Reorder no. 347800-0033-000-07en
15
At the rear side of the plinth Risk of electrical shock
Residual voltage at the mains plug after unplug-
ging.
Wait at least 5 s after unplugging the mains plug
before touching the pins of the mains plug.
Reorder no. 344700-0033-000-11en
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 17

2 Safety | 2.5 Safety Devices and Interlocks ZEISS
Position and Figure of the Safety La-
bel
Description
16
At the CEE connector Risk of electrical shock
Residual voltage at the mains plug after unplug-
ging.
Wait at least 5 s after unplugging the mains plug
before touching the pins of the mains plug.
Position and Figure of the Type Plate Description
13
At the rear of the microscope
Carl Zeiss Microscopy GmbH
73447 Oberkochen, Germany
Serial number
50 - 60 Hz max. 16 A
EVO15
354900-9041-000
1/N/PE
Made in UK/GB
230 VAC
Manufactured in year 2017
The Type plate contains a unique serial number,
the EVO model designation with the according
part number, the manufacturing year, and the
mains voltage for which the EVO is configured,
either 230 VAC or 120 VAC.
Order no. 354900-9040-000 (EVO10)
Order no. 354900-9041-000 (EVO15)
Order no. 354900-9042-000 (EVO25)
2.5 Safety Devices and Interlocks
In order to prevent injuries and/or property damage, the Microscope System is equipped with sev-
eral safety devices and interlocks. In case of defect or damage, the affected parts and the Micro-
scope System must be taken out of operation immediately and must be secured against uninten-
tional use.
To verifying the safety of the Microscope System, please contact your ZEISS service representative.
Please keep the service logs and logbooks.
2.5.1 Protective Cover Panels
Due to hazardous voltages and X-rays inside the microscope, the microscope is equipped with
protective cover panels.
18 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

ZEISS 2 Safety | 2.5 Safety Devices and Interlocks
1
2
3
Fig.1: Protective cover panels
1Electron optical column protective cover
panels
2Specimen chamber protective cover
panels
3Plinth protective cover panels
Operation of the microscope is only allowed with attached protective cover panels.
2.5.2 Main Disconnect Device
To disconnect the microscope with all its components from the mains supply, unplug the CEE con-
nector (blue for 230VAC, yellow for 120VAC).
Fig.2: CEE connector
If the Emergency Off (EMO) Option is installed, the Main Switch of the EMO Option may be used
as Main Disconnect Device for the microscope and its components, refer to Emergency Off (EMO)
Option External.
2.5.3 Circuit Breaker
The circuit breaker (F10) at the rear of the plinth will disconnect the mains power from the elec-
tronics in the plinth in case of an over-current (including the first pre-vacuum pump and PC). The
other circuit breaker (F11) disconnects mains power from the heaters and the second pre-vacuum
pump.
However, some other components will still be connected to mains power.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 19

2 Safety | 2.5 Safety Devices and Interlocks ZEISS
Fig.3: Circuit breaker
The circuit breaker does not completely isolate the plinth from the mains power. This can only be
done using the Main Disconnect Device.
2.5.4 Locking Devices
The microscope is equipped with several locking devices.
2.5.4.1 Column Interlock Device
The column interlock device switches off the EHT.
This interlock device was introduced at the end of 2010 and is not optionally available for older
EVO models.
Fig.4: Column interlock device
2.5.4.2 Vacuum Locking Device
The vacuum locking device ensures that gun vacuum and system vacuum are better than the re-
quired thresholds.
2.5.4.3 Beam Deceleration Kit Interlock
Several hardware and firmware measures ensure a safe operation of the beam deceleration kit.
Before a stage bias potential can be applied, a vacuum switch is checked, the turbo pump signal is
checked and the CAN bus communication is checked.
20 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006