Aerotech ANT130LZ-035 User manual

Revision: 1.01.00
ANT130LZ Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech, Inc. products. The
website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
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Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015-2019, Aerotech, Inc., All rights reserved.

ANT130LZ Hardware Manual Table of Contents
Table of Contents
ANT130LZ Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Air Requirements 12
Chapter 2: Mechanical Specifications and Installation 13
2.1. Unpacking and Handling the Stage 13
2.2. Dimensions 14
2.3. Securing the Stage to the Mounting Surface 15
2.3.1. Setting up the Pneumatic Counterbalance 16
2.4. Attaching the Payload to the Stage 18
Chapter 3: Electrical Specifications and Installation 19
3.1. Motor and Feedback Connectors 20
3.2. Motor and Feedback Wiring 24
3.3. Motor and Feedback Specifications 26
3.4. Limits, Marker, and Machine Direction 28
3.5. Motor and Feedback Phasing 29
Chapter 4: Maintenance 31
4.1. Service and Inspection Schedule 31
4.2. Cleaning and Lubrication 32
4.3. Troubleshooting 33
Appendix A: Warranty and Field Service 35
Appendix B: Revision History 37
Index 39
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Table of Contents ANT130LZ Hardware Manual
List of Figures
Figure 1-1: ANT130LZ 9
Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure 12
Figure 2-1: Shipping Clamps 13
Figure 2-2: ANT130LZ Dimensions 14
Figure 2-3: Mounting Hole Pattern (and Pneumatics Cylinder Clearance) 15
Figure 2-4: Counterbalance Pressure vs. External Payload 16
Figure 3-1: Motor and Feedback Wiring [-CN1 option] 24
Figure 3-2: Motor and Feedback Wiring [-CN2option] 25
Figure 3-3: Machine Direction 28
Figure 3-4: Hall Phasing 29
Figure 3-5: Analog Encoder Phasing Reference Diagram 30
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 30
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ANT130LZ Hardware Manual Table of Contents
List of Tables
Table 1-1: ANT130LZ Model Numbering System 9
Table 1-2: Environmental Specifications 10
Table 1-3: ANT130LZ Series Specifications 11
Table 3-1: Motor and Feedback Pinouts (-CN1option) 21
Table 3-2: Motor Pinouts (-CN2 option) 22
Table 3-3: Feedback Pinouts (-CN2 option) 23
Table 3-4: Feedback Specifications 26
Table 3-5: Motor Specifications 27
Table 3-6: Encoder Specifications 27
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Table of Contents ANT130LZ Hardware Manual
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the ANT130LZ. Read all parts of this
manual before you install or operate the ANT130LZ or before you do maintenance to your system. To prevent
injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow
apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury
to you or damage to the equipment can occur. If you do not understand the information in this manual,
contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ANT130LZ and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ANT130LZ stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the ANT130LZ stage. Lifting or transporting the ANT130LZ stage
improperly can result in injury or damage to the ANT130LZ.
6. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
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ANT130LZ Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT130LZ
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 8/15/2019
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Table of Contents ANT130LZ Hardware Manual
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ANT130LZ Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT130LZ Model Numbering System
ANT Series Linear Motor Stage
Travel (Required)
-035 35 mm travel
-060 60 mm travel
Connectors (Required)
-CN1 Integral cable with a 25-pin D-style motor and feedback connector
-CN2 Integral Y cable with 4-pin high-powered D-style motor and 25-pin D-style
feedback connectors
Note: -CN1 option not valid for systems using bus voltages greater than 80 V
Performance Grade (Required)
-PL1 Base performance
-PL2 High-accuracy performance
Figure 1-1: ANT130LZ
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Overview ANT130LZ Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ANT130LZ stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ANT130LZ. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ANT130LZ
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ANT130LZ is
mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale is 3.25 ppm/°C. Travel will increase or decrease at
this rate as the temperature of the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of ANT130LZ series stages is measured 25 mm above the table with the stage in
an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
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ANT130LZ Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZ Series Specifications
-035 -060
Travel 35 mm 60 mm
Accuracy(1) -PL1 ±3 µm (±120 µin) ±3 µm (±120 µin)
-PL2 (4) ±300 nm (±12 µin) ±300 nm (±12 µin)
Resolution (Minimum Incremental
Motion) 2 nm (0.08 µin) 2 nm (0.08 µin)
Bidirectional
Repeatability(1)
-PL1 ±100 nm (±4 µin) ±100 nm (±4 µin)
-PL2 (4) ±75 nm (±3 µin) ±75 nm (±3 µin)
Unidirectional Repeatability ±50 nm (±2 µin) ±50 nm (±2 µin)
Straightness(1) ±2.0 µm (±80 µin) ±2.0 µm (±80 µin)
Flatness(1) ±2.0 µm (±80 µin) ±2.0 µm (±80 µin)
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 200 mm/s (8 in/s) 200 mm/s (8 in/s)
Maximum Acceleration (No Load) 1 g -10 m/s21 g -10 m/s2
In-Position Stability(2) <2 nm (<0.08µin) <2 nm (<0.08µin)
Maximum Force (Continuous) 23 N 23 N
Load Capacity (Vertical)(3) 10.0 kg (22 lb) 10.0 kg (22lb)
Moving Mass 1.2 kg (2.6 lb) 1.4 kg (3.1 lb)
Stage Mass 4.3 kg (9.6 lb) 5.2 kg (11.5 lb)
Material Aluminum Body/Black Hardcoat Finish
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed (refer to Section . for offset loading behavior).
4. Requires the use of an Aerotech controller.
Specifications are for single-axis systems ; performance of multi-axis system is payload and workpoint dependent. Consult the
Aerotech factory for multi-axis or non-standard applications.
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Overview ANT130LZ Hardware Manual
1.4. Air Requirements
It is important to the operation of the ANT130LZ that the air supply meets Aerotech specifications. The air
must be filtered to 0.25 microns, dry to 0°F dew point, and oil free (nitrogen at 99.99% purity is
recommended). Filtration is required to prevent particles from clogging internal components of the
ANT130LZ.
The low friction air cylinder consumes air as described in Figure 1-2.
Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure
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ANT130LZ Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ANT130LZ installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ANT130LZ. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ANT130LZ. Use care
when moving the ANT130LZ.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ANT130LZfrom its protective shipping container. Gently set the ANT130LZ on a
smooth, flat, and clean surface.
Before operating the ANT130LZ, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each ANT130LZ has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Figure 2-1: Shipping Clamps
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Mechanical Specifications and Installation ANT130LZ Hardware Manual
2.2. Dimensions
Figure 2-2: ANT130LZ Dimensions
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ANT130LZ Hardware Manual Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ANT130LZ must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ANT130LZ stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
N O T E : The ANT130LZ is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT130LZ. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
1. Verify that the shipping clamps are secure.
2. Remove the pneumatics cover. It is attached to the vertical angle bracket with four M3 button head
screws.
3. Mount the Z-Axis assembly using one of the available customer mounting patterns shown in Section
2.2. You can manually, but gently, move the base of the pneumatics cylinder to the left or right to gain
access to mounting holes in the vertical angle bracket. A long ball end T-handle is recommended.
a. Tightening torque values are dependent on the properties of the surface on which the stage is being
mounted. Typical tightening torque for an M4 x 0.7 socket head cap screw is 2.0 N·m.
b. NOTE:Do not use the two mounting holes located directly below the pneumatics cylinder.
4. Reattach the pneumatics cover by reversing steps used to remove it.
Figure 2-3: Mounting Hole Pattern (and Pneumatics Cylinder Clearance)
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Mechanical Specifications and Installation ANT130LZ Hardware Manual
2.3.1. Setting up the Pneumatic Counterbalance
W A R N I N G : Failure to adjust the counterbalance per the following instructions could result in
bodily injury as well as stage and payload damage.
W A R N I N G : Sudden loss of pressure to the pneumatic counterbalance will cause the
carriage to drop rapidly. This could result in bodily injury as well as stage and payload damage.
By default, the ANT130LZ pneumatic counterbalance is factory set to operate in the as-shipped condition.
For stages that are shipped unloaded, the counterbalance is set for the mass of the carriage only. For stages
that ship with payloads or other axes attached, the counterbalance is set for the mass of the carriage plus
the additional mass. Any adjustment to the mass that is carried by the counterbalance cylinder, either adding
or subtracting payload, necessitates an adjustment to the counterbalance pressure supplied to the
pneumatic cylinder.
A standard ANT130LZ stage has one counterbalance cylinder with a piston area of =4.53x10-4 m2, and the
moving mass of a standard ANT130LZ carriage assembly is 1.3 kg (2.9 lb) for 35 mm travel and 1.5 kg (3.3
lb) for 60 mm travel. An estimate of the counterbalance pressure required to support additional load is given
by the following:
where
Pc = Required counterbalance pressure in MPa (maximum 0.6 MPa allowed)
mp = mass of external payload in kg.
This relationship is shown graphically in Figure 2-4.
Figure 2-4: Counterbalance Pressure vs. External Payload
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ANT130LZ Hardware Manual Mechanical Specifications and Installation
Procedure for initial pneumatic counterbalance setup:
N O T E : Refer to Section 1.4. for air requirements. Make sure that the air supply meets specifications
before you continue.
1. Verify that the stage is mounted and the shipping brackets are secure.
2. Loosen all shipping bracket mounting screws (M3 BHCS) by one or two turns, but do not remove the
screws. This will allow a small amount of travel for counterbalance setup.
3. Connect the airline to the air supply, and slowly turn on the supply pressure to the counterbalance. The
pressure supply should exceed the pressure determined by Figure 2-4.
a. The tabletop should still be hanging from the loose shipping brackets. If the tabletop starts to
slowly rise, gradually lower the air supply pressure using the stage’s regulator knob (refer to Figure
1-1) until the carriage hangs from the shipping brackets. Counterclockwise rotation of the knob
decreases the pressure to the counterbalance cylinder.
4. Slowly increase pressure to the cylinder (clockwise rotation of the regulator knob) until the carriage just
starts to rise. Adjust the pressure with the regulator such that when you move the carriage to a new
position by hand, the carriage neither rises nor falls.
5. The system is now balanced.
6. Remove the shipping brackets from the base. Retain the shipping brackets for future use.
7. Proceed with the electrical installation and test the motion control system in accordance with the
system documentation. For information on electrical connections, refer to Chapter 3.
To turn off the air supply to the stage after the shipping brackets are removed:
1. Make sure the stage is not under servo control.
2. Gently push the carriage down to the bottom of travel until the mechanical shock engages.
3. Turn off the counterbalance pressure. Once the counterbalance pressure has completely bled out,
release the hand pressure on the carriage.
To change the payload on the stage (add or remove mass),refer to Section 2.4.
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Mechanical Specifications and Installation ANT130LZ Hardware Manual
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Electrical Specifications and Installation and the documentation
delivered with the stage.
Applied loads should be symmetrically distributed whenever possible. For example, the payload should be
centered on the stage table and the entire stage should be centered on the support structure.
N O T E : If your ANT130LZ was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ANT130LZ is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 1 µm per 50 mm.
W A R N I N G : Refer to the counterbalance setup instructions if the payload on the stage is
changed.
W A R N I N G : Refer to the dimensions in Section 2.2. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage.
ANT130LZ Payload MountingSteps:
1. Secure the ANT130LZ to the mounting surface (outlined in Section 2.3.).
2. Confirm that all electrical power is disconnected prior to making any mechanical adjustments. Do not
turn off air supply to system. Adjustments to the pneumatic pressure will be required in later steps.
3. Manually center the tabletop and reattach the shipping bracket using four M3 button head socket cap
screws.
4. Break free the two M3 button head screws that secure the shipping clamp to the tabletop. This will
allow the tabletop to fall a small amount.
5. Increase the air supply pressure until the tabletop starts to rise. Dial back the air supply pressure until
the tabletop is in equilibrium.
6. Remove the shipping bracket and verify that the tabletop is still in equilibrium. Adjust the air supply
pressure as required.
7. The system is now in balance.
8. Reconnect electrical power.
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ANT130LZ Hardware Manual Electrical Specifications and Installation
Chapter 3: Electrical Specifications and Installation
W A R N I N G : Electrical installation must be performed by properly qualified personnel.
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT130LZ
is part of a complete Aerotech motion control system, setup usually involves connecting the ANT130LZ to
the appropriate drive chassis with the cables provided. Labels on the system components usually indicate
the appropriate connections.
If system level integration was purchased, an electrical drawing showing system interconnects has been
supplied with the system (separate from this documentation).
The electrical wiring from the motor and encoder are integrated at the factory. Refer to the sections that
follow for standard motor wiring and connector pinouts.
D A N G E R : Remove power before connecting or disconnecting electrical components or
cables. Failure to do so may cause electric shock or damage to the equipment.
W A R N I N G : Operator access to the base and tabletop must be restricted while connected to
a power source. Failure to do so may cause electric shock.
N O T E : Refer to the controller documentation to adjust servo gains for optimum velocity and position
stability.
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Electrical Specifications and Installation ANT130LZ Hardware Manual
3.1. Motor and Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and
assembled.
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech
representative if there are any questions on system configuration.
The protective ground connection of the ANT130LZ provides motor frame ground protection only. Additional
grounding and safety precautions are required for applications requiring access to the stage while it is
energized. The System Integrator or qualified installer is responsible for determining and meeting all safety
and compliance requirements necessary for the integration of this stage into the final application.
D A N G E R : Remove power before connecting or disconnecting electrical components or
cables. Failure to do so may cause electric shock or damage to the equipment.
W A R N I N G : The protective ground connection must be properly installed to minimize the
possibility of electric shock.
W A R N I N G : Operator access to the base and tabletop must be restricted while connected to
a power source. Failure to do so may cause electric shock.
C A U TI O N : The stage controller must provide over-current and over-speed protection. Failure
to do so may result in permanent damage to the motor and stage components.
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