Aerotech ANT180-160-L User manual

P/N:EDS153
Revision: 1.03.00
ANT180-L
Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website
provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and PC-
to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs and
spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your customer
order number available before you call or include it in your email.
United States (World Headquarters)
Phone: [phone]
Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2897
www.aerotech.com
United Kingdom Japan
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Email: [e-mail]
Germany China
Phone: [phone]
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2010-2015, Aerotech, Inc. All rights reserved.

ANT180-L Hardware Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures iv
List of Tables v
Safety Procedures and Warnings vi
EC Declaration of Incorporation vii
Chapter 1: Overview 1
1.1. Environmental Specifications 2
1.2. Accuracy and Temperature Effects 2
1.3. Basic Specifications 3
1.4. Vacuum Operation 4
Chapter 2: Mechanical Specifications and Installation 5
2.1. Unpacking and Handling the Stage 5
2.2. Dimensions 7
2.3. Securing the Stage to the Mounting Surface 8
2.4. Attaching the Payload to the Stage 10
Chapter 3: Electrical Specifications and Installation 13
3.1. Motor and Feedback Connectors 14
3.2. Motor and Feedback Wiring 16
3.3. Motor and Feedback Specifications 17
3.3.1. Limit Operation with -LNAS Encoder Option 20
3.4. Limits, Marker, and Machine Direction 21
3.5. Motor and Feedback Phasing 22
Chapter 4: Maintenance 25
4.1. Service and Inspection Schedule 25
4.2. Cleaning and Lubrication 26
4.3. Troubleshooting 27
Appendix A: Warranty and Field Service 29
Appendix B: Revision History 31
Index 33
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Table of Contents ANT180-L Hardware Manual
List of Figures
Figure 2-1: Shipping Clamps 6
Figure 2-2: ANT180-L Dimensions 7
Figure 2-3: Mounting Hole Pattern 9
Figure 2-4: End Cover Removal 9
Figure 2-5: Load Orientations 11
Figure 2-6: Cantilevered Load Capabilities 12
Figure 3-1: Motor and Feedback Wiring 16
Figure 3-2: -LNAS Encoder Option Limit Wiring 20
Figure 3-3: Machine Direction 21
Figure 3-4: Hall Phasing 22
Figure 3-5: Analog Encoder Phasing Reference Diagram 23
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 23
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ANT180-L Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbering System 1
Table 1-2: Environmental Specifications 2
Table 1-3: ANT180-L Series Specifications 3
Table 2-1: Stage to Mounting Surface Hardware 8
Table 3-1: Motor Pin Assignments 14
Table 3-2: Feedback Pin Assignments 15
Table 3-3: Feedback Specifications 17
Table 3-4: Motor Specifications 18
Table 3-5: Encoder Specifications (-LTAS) 19
Table 3-6: Encoder Specifications (-LNAS) 19
Table 3-7: -LNAS Encoder Option Limit Signals 20
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Table of Contents ANT180-L Hardware Manual
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ANT180-L and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. Make sure the ANT180-L and all components are properly grounded in accordance with
local electrical safety requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose the ANT180-Lto environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ANT180-L must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ANT180-L. Lifting or transporting the ANT180-L improperly can
result in injury or damage to the ANT180-L.
6. The ANT180-L is intended for light industrial manufacturing or laboratory use. Use of the
ANT180-L for unintended applications can result in injury and damage to the equipment.
7. If the ANT180-L is used in a manner not specified by the manufacturer, the protection
provided by the ANT180-L can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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ANT180-L Hardware Manual Table of Contents
EC Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2897
USA
herewith declares that the product:
ANT180-L Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
ISO 12100
Safety of machinery - General principles for design
- Risk assessment and risk reduction
EN 60204-1
Safety of machinery - Electrical equipment of machines
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it
is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e. as a whole, including the equipment
referred to in this Declaration.
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln
Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
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Table of Contents ANT180-L Hardware Manual
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ANT180-L Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: Model Numbering System
ANT Series Linear Motor Stage
ANT180-160-L 160 mm travel stage with linear motor and limits
ANT180-160-L-PLUS 160 mm travel stage with linear motor and limits (high accuracy version)
ANT180-210-L 210 mm travel stage with linear motor and limits
ANT180-210-L-PLUS 210 mm travel stage with linear motor and limits (high accuracy version)
ANT180-260-L 260 mm travel stage with linear motor and limits
ANT180-260-L-PLUS 260 mm travel stage with linear motor and limits (high accuracy version)
ANT180-360-L 360 mm travel stage with linear motor and limits
ANT180-360-L-PLUS 360 mm travel stage with linear motor and limits (high accuracy version)
Linear Encoders
-LTAS Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier
-LTX50 0.1 micron line driver output
-LNAS High-accuracy amplified sine output 1 Vpp (4 μm signal period) requires signal
multiplier
CMS Options
-XY Cable management system for X-Y assembly (only order with X axis)
-XYZ Cable management system for X-Y-Z assembly (only order with X axis)
-Y Cable management system for X-Y assembly (only order with Y axis)
-YZ Cable management system for Y-Z assembly (only order with Y axis)
-AIR Adds a 6 mm air line to the -XY, -XYZ, -Y, and -YZ assembly option
Example:-XYZ-AIR
Accessories
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10 XY assembly; 5 arc sec orthogonal
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Overview ANT180-L Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose the ANT180-Lto environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ANT180-L stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ANT180-L. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ANT180-L
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ANT180-L is
mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale depends on the option purchased. For LT stages, this
value is 3.25 ppm/°C. For LN stages, this value is 7.5 ppm/°C. Travel will increase or decrease at this rate
as the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of ANT180-L series stages is measured 25 mm above the table with the stage in
a horizontal position. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
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ANT180-L Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT180-L Series Specifications
-160-L -210-L -260-L -360-L
Travel 160 mm 210 mm 260 mm 360 mm
Accuracy [1]
LNAS (PLUS [4]) ±150 nm ±150 nm ±200 nm ±200 nm
LNAS(Std) ±2.0 µm ±2.5 µm ±3.0 µm ±3.5 µm
LTAS (PLUS [4]) ±300 nm ±300 nm ±350 nm ±350 nm
LTAS(Std) ±4.0 µm ±5.0 µm ±6.0 µm ±7.0 µm
Resolution LNAS 1 nm 1 nm 1 nm 1 nm
LTAS 3 nm 3 nm 3 nm 3 nm
Repeatability (Bi-
Directional)[1] LNAS ±100 nm ±100 nm ±125 nm ±125 nm
LTAS ±150 nm ±150 nm ±175 nm ±175 nm
Straightness [1] ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Flatness [1] ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Pitch 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Roll 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Yaw 10 arc sec 10 arc sec 12 arc sec 12 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration (no load) 2 g 2 g 2 g 2 g
Maximum Force (Continuous) 110.5 N 110.5 N 110.5 N 110.5 N
Load Capacity [2] Horizontal 30 kg 30 kg 30 kg 30 kg
Side 20 kg 20 kg 20 kg 20 kg
Moving Mass 6.6 kg 7.8 kg 9.2 kg 11.7 kg
Stage Mass 12.8 kg 14.9 kg 17.6 kg 22.4 kg
Material Aluminum Body/Black Hardcoat Finish
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. Axis orientation for on-axis loading is listed (refer to Section 2.4. for offset loading behavior).
3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis system is payload and
workpoint dependent. Consult factory for multi-axis or non-standard applications.
4. Requires the use of an Aerotech controller.
5. Specifications are LNAS and LTAS only. Consult factory for specifications regarding the LTX50 option.
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Overview ANT180-L Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the ANT180-L for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
To ensure that the ANT180-L will continue to perform well in the vacuum environment, follow the guidelines
listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
1. Do not remove the ANT180-L from the sealed bag until it is ready for use.
2. Always handle the ANT180-L in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the ANT180-L.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the ANT180-L.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease
or a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers
bake out vacuum systems when first installing them in the vacuum chamber.
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ANT180-L Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ANT180-L installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Manually lifting and moving the stage requires a minimum of two
people on either side of the stage. Refer to Section 1.3. for stage mass specifications.
lDo not attempt to lift heavy loads single handed.
lFollow the lifting instructions and only manually lift from the specified surfaces (if lifting
hardware hasn't been supplied).
lDo not use any of the cables as lifting points.
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ANT180-L. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the ANT180-L’s performance. Use care when
moving the ANT180-L.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ANT180-L from its protective shipping container. Gently set the ANT180-L on a
smooth, flat, and clean surface.
Before operating the ANT180-L, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each ANT180-L has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Clamps
All ANT180-L series stages are packaged with shipping brackets installed to prevent unwanted stage motion
and potential damage from occurring during shipment. The brackets are red anodized aluminum (the only red
anodized pieces Aerotech uses) that bolt the stage table to the base and they must be removed from the
stage before the stage can be operated. Retain the brackets for future use.
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Mechanical Specifications and Installation ANT180-L Hardware Manual
Figure 2-1: Shipping Clamps
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ANT180-L Hardware Manual Mechanical Specifications and Installation
2.2. Dimensions
90
100
125
100
1.
50
1.
75
100
1.
50 120
75150
C
L
C
L
M6X1.0
6
23X - ANT180-160/-210
31X - ANT180-260/-360
ANT180-260-L AND ANT180-360-L ONLY
A
150 [6.0]
2.
D
2.
B/2
C/2
B/2
C/2
M6 [1/4-20]
STAGE MOUNTING
180
75
2.
100 [4.0]
12.5
TYP.
C
L
DIMENSIONS: MILLIMETERS
C
L
FEEDBACK AND
MOTOR POWER
CONNECTORS
STAGE HAS SLOTTED COUNTERBORED HOLES
TO ACCOMODATE BOTH METRIC AND ENGLISH
MOUNTING PATTERNS
STAGE MODEL
A = STAGE
LENGTH
B = NOMINAL
TRAVEL
C = HARDSTOP
TRAVEL
D = MOUNTING
PATTERN
LENGTH (mm [in])
ANT180-160-L 325 160 174 -
ANT180-210-L 375 210 224 225 [9.0]
ANT180-260-L 450 260 274 275 [11.0]
ANT180-360-L 575 360 374 350 [14.0]
1.
2.
Figure 2-2: ANT180-L Dimensions
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Mechanical Specifications and Installation ANT180-L Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : Do not attempt to manually move the ANT180-L if it is connected to a power
source.
W A R N I N G : The ANT180-L must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
W A R N I N G : Mounting the stage requires passing the screws near the magnetic tracks
mounted to the carriage. Use caution when mounting with magnetic hardware, or use non-
magnetic hardware that will not be attracted to the tracks.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ANT180-L stage. When it is mounted to a non-flat surface, the stage can be distorted
as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
N O T E : The ANT180-L is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT180-L. Shimming should be avoided if possible. If shimming is required, it
should be minimized to improve the rigidity of the system.
Tightening torque values are dependent on the properties of the surface on which the stage is being
mounted. Values provided in Table 2-1 are typical values and may not be accurate for your mounting surface.
Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M6 x 25 mm (1/4-20 x 1 in) SHCS 5.4 N·m
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ANT180-L Hardware Manual Mechanical Specifications and Installation
Figure 2-3: Mounting Hole Pattern
Figure 2-4: End Cover Removal
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Mechanical Specifications and Installation ANT180-L Hardware Manual
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
To prevent damage to the payload or stage, test the operation of the stage before the payload is attached.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3 and the documentation delivered with the stage.
N O T E : Stages that ship with Aerotech controls are often tuned with a representative payload based on
the information provided at the time of order. If the stage is started up without a payload, the servo gains
provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to
the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 1 µm per 50 mm.
W A R N I N G : Refer to the dimensions in Section 2.2.for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage. Do not let mounting screws project more than 7 mm (.276") into the stage table top.
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ANT180-L Hardware Manual Mechanical Specifications and Installation
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to Figure 2-5 to find the loading condition. Refer to Figure 2-6 to find
the maximum allowable load.
Figure 2-5: Load Orientations
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Mechanical Specifications and Installation ANT180-L Hardware Manual
Distance of load C.G. from tabletop center (mm)
35
30
25
20
15
10
5
00 50 100 150 200 250 300 350 400
Load (kg)
Distance of load C.G. from tabletop center (mm)
35
30
25
20
15
10
5
00 50 100 150 200 250 300 350 400
Load (kg)
Distance of load C.G. from tabletop center (mm)
35
30
25
20
15
10
5
00 50 100 150 200 250 300 350 400
Load (kg)
Distance of load C.G. from tabletop center (mm)
35
30
25
20
15
10
5
00 50 100 150 200
ANT180-260-L ANT180-360-L
ANT180-160-L ANT180-210-L
250 300 350 400
Load (kg)
Lhp
Lhr
Ls
Lhp
Lhr
Ls
Lhp
Lhr
Ls
Lhp
Lhr
Ls
Figure 2-6: Cantilevered Load Capabilities
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