Aerotech PlanarDLA Series User manual

Revision: 1.03.00
PlanarDLA Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech, Inc. products. The
website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
United States (World Headquarters)
Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015-2020, Aerotech, Inc., All rights reserved.

PlanarDLA Hardware Manual Table of Contents
Table of Contents
PlanarDLA Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.1.1. Accuracy and Temperature Effects 12
1.2. Basic Specifications 13
1.3. Vacuum Operation 16
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 19
2.3. Securing the Stage to the Mounting Surface 22
2.4. Attaching the Payload to the Stage 24
Chapter 3: Electrical Specifications and Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 33
3.3. Motor and Feedback Specifications 34
3.4. Limits, Marker, and Machine Direction 40
3.5. Motor and Feedback Phasing 41
Chapter 4: Maintenance 43
4.1. Service and Inspection Schedule 43
4.2. Cleaning and Lubrication 44
4.3. Troubleshooting 46
Appendix A: Warranty and Field Service 47
Appendix B: Revision History 49
Index 51
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Table of Contents PlanarDLA Hardware Manual
List of Figures
Figure 2-1: Lifting Hardware and Shipping Brackets 18
Figure 2-2: PlanarDLA-150XY Dimensions 19
Figure 2-3: PlanarDLA-250XY Dimensions 20
Figure 2-4: PlanarDLA-330XY Dimensions 21
Figure 2-5: Mounting Hole Locations 23
Figure 2-6: PlanarDLA 150XY Cantilevered Load Capabilities 24
Figure 2-7: PlanarDLA 250XY Cantilevered Load Capabilities 25
Figure 2-8: PlanarDLA 330XY Cantilevered Load Capabilities 25
Figure 3-1: Motor and Feedback Wiring 33
Figure 3-2: Machine Direction 40
Figure 3-3: Hall Phasing 41
Figure 3-4: Analog Encoder Phasing Reference Diagram 42
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 42
Figure 4-1: Grease Nipple Locations 45
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PlanarDLA Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: PlanarDLA-150XY Series Specifications 13
Table 1-4: PlanarDLA-250XY Series Specifications 14
Table 1-5: PlanarDLA-330XY Series Specifications 15
Table 2-1: Stage to Mounting Surface Hardware 23
Table 3-1: Motor Connector Pinout 29
Table 3-2: Mating Connector Part Numbers for the Motor Connector 29
Table 3-3: Feedback Connector Pinout 30
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 30
Table 3-5: -CMS2 Third-Axis Motor Connector Pinout 31
Table 3-6: Mating Connector Part Numbers for the -CMS2 Third-Axis Motor Connector 31
Table 3-7: -CMS2 Third-Axis Feedback Connector Pinout 32
Table 3-8: Mating Connector Part Numbers for the -CMS2 Third-Axis Feedback Connector 32
Table 3-9: Feedback Specifications 34
Table 3-10: PlanarDLA-150XY (Upper Axis) Motor Specifications 35
Table 3-11: PlanarDLA-150XY (Lower Axis) and PlanarDLA-250XY (Upper Axis) Motor Spe-
cifications 36
Table 3-12: PlanarDLA-250XY (Lower Axis) Motor Specifications 37
Table 3-13: PlanarDLA-330XY (Upper Axis) Motor Specifications 38
Table 3-14: PlanarDLA-330XY (Lower Axis) Motor Specifications 39
Table 3-15: Encoder Specifications 39
Table 4-1: Grease Quantities 45
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Table of Contents PlanarDLA Hardware Manual
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PlanarDLA Hardware Manual Safety
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the PlanarDLA. Read all parts of this
manual before you install or operate the PlanarDLA or before you do maintenance to your system. To prevent
injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow
apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury
to you or damage to the equipment can occur. If you do not understand the information in this manual,
contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
D A N G E R : The precautions that follow must be obeyed to reduce the possibility of electrical
shock, bodily injury, or death.
1. This product contains potentially lethal voltages.
2. Access to the PlanarDLA and component parts must be restricted while connected to a
power source.
3. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
4. Disconnect electrical power before servicing equipment.
5. All components must be properly grounded in accordance with local electrical safety
requirements.
6. Operator safeguarding requirements must be addressed during final integration of the
product.
7. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
8. PINCHPOINT! Keep Hands Clear while the stage is in motion.
9. MAGNETS!Strong rare-earth magnets are present in the linear motor magnet track.
Attraction to metal objects (tools, watches, keys, etc.) may cause personal injury and/or
damage to the equipment.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
2. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
3. The PlanarDLA stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
4. Use care when moving the PlanarDLA stage. Lifting or transporting the PlanarDLA stage
improperly can result in injury or damage to the PlanarDLA.
5. The stage forcer temperature may exceed 75°C.
6. Operators must be trained before operating this equipment.
7. All service and maintenance must be performed by qualified personnel.
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Safety PlanarDLA Hardware Manual
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PlanarDLA Hardware Manual Declaration of Conformity
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PlanarDLA Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 3/5/2020
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Declaration of Conformity PlanarDLA Hardware Manual
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PlanarDLA Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: Model Options
PlanarDLA Two Axis Mechanical-Bearing Direct-Drive Stage with Aperture
PlanarDLA-150XY Linear motor XY table w/clear aperture; 150 mm x 150 mm travel
PlanarDLA-250XY Linear motor XY table w/clear aperture; 250 mm x 250 mm travel
PlanarDLA-330XY Linear motor XY table w/clear aperture; 330 mm x 330 mm travel
Motor (Required)
-M1 1 motor on lower axis; 1 motor on upper axis
-M2 1 motor on lower axis; 2 motors on upper axis
-M3 2 motors on lower axis; 1 motor on upper axis
-M4 2 motors on lower axis; 2 motors on upper axis
Feedback (Required)
-E1 Incremental encoders, 1 Vpp on upper and lower axes
-E2 Incremental encoders, 0.1 µm Digital RS422 on upper axis, 1 Vpp on lower axis
-E3 Incremental encoders, 1 Vpp on upper axis, 0.1 µm Digital RS422 on lower axis
-E4 Incremental encoders, 0.1 µm Digital RS422 on upper and lower axes
Cable Management (Optional)
-CMS1 Cable management for air/vacuum line
-CMS2 Cable management for air/vacuum line and 3rd axis motor/feedback
Performance Grade (Required)
-PL1 Base performance
-PL3 High-accuracy performance, PLUS
-PL4 Ultra-high accuracy 2D performance, ULTRA
Note: -PL3 and -PL4 performance grades require an Aerotech controller.
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Overview PlanarDLA Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any
time the operating temperature deviates from 20° C, degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low-vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The PlanarDLA has some protection from contamination due to the cutting process.
However, the stage is not sealed. Dust and chips from the cutting process should be
removed from the cut point with blow-off gas and a vacuum. Failure to control this
debris could result in damage to the stage. The ingress protection rating is IP00.
Use Indoor use only
1.1.1. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the PlanarDLA. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the PlanarDLA
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the PlanarDLA is
mounted. Contact the factory for more details.
The encoder scale in the PlanarDLA stage has a coefficient of thermal expansion (CTE) of 3.25x10-6 / °C.
As the stage deviates from 20°C, travel of the stage as seen by the encoder will change at that rate.
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PlanarDLA Hardware Manual Overview
1.2. Basic Specifications
Table 1-3: PlanarDLA-150XY Series Specifications
-PL1(2) -PL3(1,2) -PL4(1,2)
Travel 150 mm x 150 mm
Accuracy(2) Single Motor ±5.0 µm ±0.7 µm ±0.7 µm
Dual Motors ±4.0 µm ±0.4 µm ±0.4 µm
Bidirectional
Repeatability
Single Motor ±0.5 µm
Dual Motors ±0.25 µm
Resolution
(Minimum Incremental Motion)(3) 3.0 nm
Straightness
Upper Axis
-M1 or -M3
Motor ±1.5 µm ±1.5 µm 0.7 µm
-M2 or -M4
Motor ±1.0 µm ±1.0 µm ±0.5 µm
Lower Axis
-M1 or -M2
Motor ±2.5 µm ±2.5 µm ±0.7 µm
-M3 or -M4
Motor ±2.0 µm ±2.0 µm ±0.5 µm
Flatness ±1.25 µm
Pitch 39 µrad (8 arc sec)
Roll 39 µrad (8 arc sec)
Yaw Single Motor 39 µrad (8 arc sec)
Dual Motors 29 µrad (6 arc sec)
Orthogonality 97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
Max Speed(4) 1.5 m/s
Max Acceleration (No Load, Upper-Axis)(4) 1.0 g (-M1 or -M3 Motor)
2.0 g (-M2 or -M4 Motor)
Maximum Force -
Continuous, 1.4 bar
(20 psi) Air Cooling
Upper Axis 47 N (-M1 or -M3 Motor)
94 N (-M2 or -M4 Motor)
Lower Axis 120 N (-M1 or -M2 Motor)
240 N (-M3 or -M4 Motor)
Load Capacity(5) Horizontal 20 kg
Moving Mass
Upper Axis 4.3 kg (-M1 or -M3 Motor)
4.5 kg (-M2 or -M4 Motor)
Lower Axis
18.1 kg (-M1 Motor)
20.0 kg (-M2 Motor)
18.5 kg (-M3 Motor)
20.6 kg (-M4 Motor)
Stage Mass (6) 30 kg-36 kg
Material Black Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Requires the use of an Aerotech controller.
2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY
measured 25 mm above the tabletop.
3. Specified for dual motors. Contact factory for single motor arrangement.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. On-axis loading is listed.
6. Stage mass is a function of motor configuration.
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Overview PlanarDLA Hardware Manual
Table 1-4: PlanarDLA-250XY Series Specifications
-PL1(2) -PL3(1,2) -PL4(1,2)
Travel 250 mm x 250 mm
Accuracy(2) Single Motor ±6.0 µm ±0.8 µm ±0.8 µm
Dual Motors ±5.0 µm ±0.5 µm ±0.5 µm
Bidirectional
Repeatability
Single Motor ±0.5 µm
Dual Motors ±0.25 µm
Resolution
(Minimum Incremental Motion)(3) 3.0 nm
Straightness
Upper
Axis
-M1 or -M3
Motor ±2.0 µm ±2.0 µm ±0.7 µm
-M2 or -M4
Motor ±1.5 µm ±1.5 µm ±0.5 µm
Lower
Axis
-M1 or -M2
Motor ±3.25 µm ±3.25 µm ±0.7 µm
-M3 or -M4
Motor ±2.75 µm ±2.75 µm ±0.5 µm
Flatness ±1.75 µm
Pitch 58 µrad (12 arc sec)
Roll 58 µrad (12 arc sec)
Yaw Single Motor 49 µrad (10 arc sec)
Dual Motors 39 µrad (8 arc sec)
Orthogonality 97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
Max Speed(4) 2.0 m/s
Max Acceleration (No Load, Upper-Axis)(4) 1.0 g (-M1 or -M3 Motor)
2.0 g (-M2 or -M4 Motor)
Maximum Force -
Continuous, 1.4 bar
(20 psi) Air Cooling
Upper Axis 120 N (-M1 or -M3 Motor)
240 N (-M2 or -M4 Motor)
Lower Axis 250 N (-M1 or -M2 Motor)
500 N (-M3 or -M4 Motor)
Load Capacity(5) Horizontal 30 kg
Moving Mass
Upper Axis 6.9 kg (-M1 or -M3 Motor)
7.2 kg (-M2 or -M4 Motor)
Lower Axis
33.7 kg (-M1 Motor)
38.1 kg (-M2 Motor)
34.6 kg (-M3 Motor)
39.0 kg (-M4 Motor)
Stage Mass (6) 60 kg-67 kg
Material Black Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Requires the use of an Aerotech controller.
2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY
measured 25 mm above the tabletop.
3. Specified for dual motors. Contact factory for single motor arrangement.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. On-axis loading is listed.
6. Stage mass is a function of motor configuration.
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PlanarDLA Hardware Manual Overview
Table 1-5: PlanarDLA-330XY Series Specifications
-PL1(2) -PL3(1,2) -PL4(1,2)
Travel 330 mm x 330 mm
Accuracy(2) Single Motor ±8.0 µm ±1.0 µm ±1.0 µm
Dual Motors ±6.0 µm ±0.7 µm ±0.7 µm
Bidirectional
Repeatability
Single Motor ±0.5 µm
Dual Motors ±0.25 µm
Resolution
(Minimum Incremental Motion)(3) 3 nm
Straightness
Upper
Axis
-M1 or -M3
Motor ±2.5 µm ±2.5 µm 0.8 µm
-M2 or M4
Motor ±2.0 µm ±2.0 µm ±0.6 µm
Lower
Axis
-M1 or -M2
Motor ±4.0 µm ±4.0 µm ±0.8 µm
-M3 or -M4
Motor ±3.5 µm ±3.5 µm ±0.6 µm
Flatness ±2.5 µm
Pitch 68 µrad (14 arc sec)
Roll 68 µrad (14 arc sec)
Yaw Single Motor 58 µrad (12 arc sec)
Dual Motors 49 µrad (10 arc sec)
Orthogonality 97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
Max Speed(4) 2.0 m/s
Max Acceleration (No Load, Upper-Axis)(4) 1.0 g (-M1 or -M3 Motor)
2.0 g (-M2 or -M4 Motor)
Maximum Force -
Continuous, 1.4 bar
(20 psi) Air Cooling
Upper Axis 173 N (-M1 or -M3 Motor)
346 N (-M2 or -M4 Motor)
Lower Axis 302 N (-M1 or -M2 Motor)
604 N (-M3 or -M4 Motor)
Load Capacity(5) Horizontal 50 kg
Moving Mass
Upper Axis 13.4 kg (-M1 or -M3 Motor)
14.0 kg (-M2 or -M4 Motor)
Lower Axis
57.0 kg (-M1 Motor)
65.3 kg (-M2 Motor)
58.1 kg (-M3 Motor)
66.5 kg (-M4 Motor)
Stage Mass (6) 93 kg-109 kg
Material Black Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Requires the use of an Aerotech controller.
2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY
measured 25 mm above the tabletop.
3. Specified for dual motors. Contact factory for single motor arrangement.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. On-axis loading is listed.
6. Stage mass is a function of motor configuration.
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Overview PlanarDLA Hardware Manual
1.3. Vacuum Operation
Aerotech can specially prepare the PlanarDLA for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 Torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 Torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
To make sure that the PlanarDLA will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this
manual).
lDo not remove the PlanarDLA from its sealed bag until it is ready to use.
lAlways handle the PlanarDLA in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the PlanarDLA.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the PlanarDLA.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
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PlanarDLA Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : PlanarDLA installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Manually lifting and moving the stage is not recommended. Aerotech
strongly recommends lifting the stage with lifting hardware (refer to Figure 2-1). Refer to Section
1.2. for stage mass specifications.
If the stage must be moved manually:
lA minimum of two people is required.
lLift by the middle carriage with extreme caution.
lLifting from the base is difficult and not advised.
lDo not use the cable as a lifting point.
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lOnly lift the PlanarDLA with the shipping clamps attached.
lMake sure that all moving parts are secure before moving the PlanarDLA. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the PlanarDLA. Use care
when moving the PlanarDLA.
Carefully remove the PlanarDLAfrom its protective shipping container. Gently set the PlanarDLA on a
smooth, flat, and clean surface.
The PlanarDLA has four M8x1.25 x 12 mm deep holes for attaching hoist rings (shown in Figure 2-1).
Before operating the PlanarDLA, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to
remove any dust or debris that has collected during shipping.
Each PlanarDLA has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Brackets
Four discrete red, anodized aluminum shipping clamps have been installed on each axis to prevent
unwanted motion and potential damage from occurring during shipment. Each clamp uses two socket head
cap screws for attachment and each clamp has a rubber pad adhered to its face that must compress slightly
during installation to properly constrain the moving carriages. Before transporting the stage, ensure that all
eight clamps are properly seated with their mounting screws and that the rubber pads are engaged with the
outer faces of the moving carriages as intended. The clamps must be removed before the PlanarDLA can be
operated. Retain the clamps and hardware for future use.
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Mechanical Specifications and Installation PlanarDLA Hardware Manual
Figure 2-1: Lifting Hardware and Shipping Brackets
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PlanarDLA Hardware Manual Mechanical Specifications and Installation
2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Figure 2-2: PlanarDLA-150XY Dimensions
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Mechanical Specifications and Installation PlanarDLA Hardware Manual
Figure 2-3: PlanarDLA-250XY Dimensions
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