Aerotech PlanarDLA Series User manual

Revision: 1.03.00
PlanarDLA Hardware Manual

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PlanarDLA Hardware Manual Table of Contents
Table of Contents
PlanarDLA Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.1.1. Accuracy and Temperature Effects 12
1.2. Basic Specifications 13
1.3. Vacuum Operation 16
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 19
2.3. Securing the Stage to the Mounting Surface 22
2.4. Attaching the Payload to the Stage 24
Chapter 3: Electrical Specifications and Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 33
3.3. Motor and Feedback Specifications 34
3.4. Limits, Marker, and Machine Direction 40
3.5. Motor and Feedback Phasing 41
Chapter 4: Maintenance 43
4.1. Service and Inspection Schedule 43
4.2. Cleaning and Lubrication 44
4.3. Troubleshooting 46
Appendix A: Warranty and Field Service 47
Appendix B: Revision History 49
Index 51
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Table of Contents PlanarDLA Hardware Manual
List of Figures
Figure 2-1: Lifting Hardware and Shipping Brackets 18
Figure 2-2: PlanarDLA-150XY Dimensions 19
Figure 2-3: PlanarDLA-250XY Dimensions 20
Figure 2-4: PlanarDLA-330XY Dimensions 21
Figure 2-5: Mounting Hole Locations 23
Figure 2-6: PlanarDLA 150XY Cantilevered Load Capabilities 24
Figure 2-7: PlanarDLA 250XY Cantilevered Load Capabilities 25
Figure 2-8: PlanarDLA 330XY Cantilevered Load Capabilities 25
Figure 3-1: Motor and Feedback Wiring 33
Figure 3-2: Machine Direction 40
Figure 3-3: Hall Phasing 41
Figure 3-4: Analog Encoder Phasing Reference Diagram 42
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 42
Figure 4-1: Grease Nipple Locations 45
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PlanarDLA Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: PlanarDLA-150XY Series Specifications 13
Table 1-4: PlanarDLA-250XY Series Specifications 14
Table 1-5: PlanarDLA-330XY Series Specifications 15
Table 2-1: Stage to Mounting Surface Hardware 23
Table 3-1: Motor Connector Pinout 29
Table 3-2: Mating Connector Part Numbers for the Motor Connector 29
Table 3-3: Feedback Connector Pinout 30
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 30
Table 3-5: -CMS2 Third-Axis Motor Connector Pinout 31
Table 3-6: Mating Connector Part Numbers for the -CMS2 Third-Axis Motor Connector 31
Table 3-7: -CMS2 Third-Axis Feedback Connector Pinout 32
Table 3-8: Mating Connector Part Numbers for the -CMS2 Third-Axis Feedback Connector 32
Table 3-9: Feedback Specifications 34
Table 3-10: PlanarDLA-150XY (Upper Axis) Motor Specifications 35
Table 3-11: PlanarDLA-150XY (Lower Axis) and PlanarDLA-250XY (Upper Axis) Motor Spe-
cifications 36
Table 3-12: PlanarDLA-250XY (Lower Axis) Motor Specifications 37
Table 3-13: PlanarDLA-330XY (Upper Axis) Motor Specifications 38
Table 3-14: PlanarDLA-330XY (Lower Axis) Motor Specifications 39
Table 3-15: Encoder Specifications 39
Table 4-1: Grease Quantities 45
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