Aerotech HexGen HEX150-140HL User manual

Revision 2.00
HexGen®HEX150-140HL Miniature Hexapod
Six-DOF Positioning System
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2020-2021, Aerotech, Inc., All rights reserved.

Table of Contents
HexGen® HEX150-140HL Miniature Hexapod Six-DOF Positioning System 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.1.1. Accuracy and Temperature Effects 12
1.2. Basic Specifications 13
1.3. Understanding Basic HEX150-140HL Operation 14
1.3.1. Hexapod Axes 14
1.3.2. Strut Limits and Hexapod Range 14
1.3.3. Homing 15
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Hexapod 17
2.2. Dimensions 18
2.3. Securing the Hexapod to the Mounting Surface 19
2.4. Attaching the Payload to the HEX150-140HL 21
Chapter 3: Electrical Specifications and Installation 23
3.1. Motor and Feedback Connectors 24
3.2. Motor and Feedback Wiring 26
3.3. Motor and Feedback Specifications 27
3.4. Machine Direction 29
3.5. Feedback Phasing 30
Chapter 4: Maintenance 31
4.1. Service and Inspection Schedule 31
4.2. Cleaning and Lubrication 31
4.3. Troubleshooting 32
Appendix A: Warranty and Field Service 33
Appendix B: Revision History 35
Index 37
HEX150-140HL Hardware Manual Table of Contents
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List of Figures
Figure 1-1: HEX150-140HL Callouts 11
Figure 1-2: Axis Orientation 14
Figure 2-1: HEX150-140HL Dimensions 18
Figure 2-2: Mounting Hole Locations 20
Figure 2-3: HEX150-140HL Vertical Load Capabilities 21
Figure 2-4: HEX150-140HL Horizontal Load Capabilities 22
Figure 3-1: Motor and Feedback Wiring 26
Figure 3-2: Machine Direction 29
Figure 3-3: Encoder Phasing Reference Diagram (Standard) 30
List of Figures HEX150-140HL Hardware Manual
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List of Tables
Table 1-1: Model Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: HEX150-140HL Series Specifications 13
Table 2-1: Stage to Mounting Surface Hardware 20
Table 3-1: Motor and Feedback Connector Pinout 25
Table 3-2: Mating Connector Part Numbers 25
Table 3-3: Encoder Specifications 27
Table 3-4: Limit Switch Specifications 27
Table 3-5: HEX150-140HL Motor Specifications 28
Table 3-6: HEX150-140HL Rotary Encoder Specifications 28
Table 4-1: Grease Specifications 31
Table 4-2: Troubleshooting 32
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
HEX150-140HL.
lRead all parts of this manual before you install or operate the hexapod or before you
do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
The voltage can cause shock, burn, or death.
You are at risk of physical injury.
You could damage the hexapod.
A surface can be hot enough to burn you.
Strong magnets and electromagnetic fields are present.
While the stage is in motion, you are in danger of receiving pinch, shear, or crush
injuries.
You could receive an injury if you do not lift the product safely.
You could damage the product if you do not lift and move the product safely.
Unsecured cables could cause you to:
ltrip and fall
ldrag the product off of its mounting location
ldamage the cable connections.
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
lIf applicable, do not lift unassisted
HEX150-140HL Hardware Manual Safety Procedures and Warnings
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DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the hexapod when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the HEX150-140HL
into a completed system.
DANGER:PINCHPOINT! Keep Hands Clear while the stage is in motion.
WARNING: To prevent damage to the equipment and decrease the risk of electrical
shock and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved in
this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
WARNING: Securely mount and position all system cables.
IMPORTANT: Carefully lift, move, and transport this product.
Safety Procedures and Warnings HEX150-140HL Hardware Manual
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
HEX150-140HL
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 12/21/2021
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Chapter 1: Overview
The base of a hexapod has a flat mounting surface on the bottom and holds electronics for the
hexapod. The base should be mounted to a flat, rigid mounting surface (refer to Section 2.3.). The
base joints allow the attached strut to pivot from the base.
The platform is the moving plate of a hexapod. The threaded holes on the top surface are designed
to hold customer equipment (refer to Section 2.4.). The platform joints allow the attached strut to
pivot from the platform.
The six struts of a hexapod change length in order to control the position of the platform. The struts
attach only to the joints of the base and platform.
The cables exit out of the back of the base. These six cables connect the hexapod to the controller
(refer to the Section 3.2.).
Figure 1-1: HEX150-140HL Callouts
Table 1-1: Model Options
HexGen®HEX150-140HL Hexapod 6-DOF Positioning System
HEX150-140HL Six degree-of-freedom hexapod positioning system; 150 mm diameter base;
140 mm height at mid-travel; high-load capacity version
Customization
Contact Aerotech for details about additional customization options.
HEX150-140HL Hardware Manual Chapter 1: Overview
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1.1. Environmental Specifications
WARNING: Use this product only in environments and operating conditions that are
approved in this manual.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
Deviation in temperature can result in performance degradation.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The machine
should be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
Not suited for dusty or wet environments (IP30 equivalent ingress protection
rating).
Use Indoor use only.
1.1.1. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C environment. Moderate temperature
changes will affect the accuracy while extreme temperature changes could cause damage to the
machine. At a minimum, the environmental temperature must be controlled to within 1°C per hour
to ensure the safety of the hexapod. The severity of temperature effects on all specifications
depends on many different environmental conditions, including how the hexapod is mounted.
Contact the factory for more details.
1.1. Environmental Specifications HEX150-140HL Hardware Manual
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1.2. Basic Specifications
Table 1-3: HEX150-140HL Series Specifications
X Y Z A (θx) B (θy) C (θz)
Travel (1) 40 mm 40 mm 16 mm 16° 16° 40°
Resolution
(Minimum Incremental Motion) 20 nm 0.2 μrad (0.04 arc sec)
Bidirectional
Repeatability, pk-pk(2,3) ±1.5 μm ±1.5 μm ±0.4 μm ±15 μrad (±0.04 arc sec)
Unidirectional
Repeatability, pk-pk ±0.75 μm ±0.75 μm ±0.15 μm ±7.5 μrad (±1.5 arc sec)
Maximum Speed (4) 20 mm/s 20 mm/s 8 mm/s 10°/s 10°/s 30°/s
Load Capacity,
All Positions (5)
Vertical 7.5 kg
Horizontal 2 kg
Holding Capacity,
De-Energized (6) 10 kg
Stage Mass 2.3 kg
Material Anodized Aluminum Platform and Base;
Steel Used in Joints and Inside Struts
1. Travels are mutually-exclusive. Consult the HexGen®Hexapod Sizer on the Aerotech website for detailed workspace
sizing.
2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint
dependent.
3. X, Y, Z performance certified as standard.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Centered loading (refer to Section 2.4.).
6. Horizontal base plate, centered loading (refer to Section 2.4.).
HEX150-140HL Hardware Manual 1.2. Basic Specifications
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1.3. Understanding Basic HEX150-140HL Operation
1.3.1. Hexapod Axes
The hexapod platform can be actuated in six degrees of freedom by changing the lengths of the six
struts that connect the platform to the base. Since the axes of motion are not obvious from the
mechanics of the hexapod, the axis convention is outlined below. These axes can be used to orient
the hexapod in the global workspace. Refer to the HexGen®Programming Guide for more
information about controlling hexapod motion. To get a copy of this guide, go to the Resources
section of www.aerotech.com. Select the Manuals and Help Files tab. Then download Hexapod
Programming User Guide from the User Guides category.
The six axes include 3 translational axes, X, Y, and Z, and 3 rotational axes, A, B, and C. As shown in
the overview, the cables exit out of the back of the base. The positive direction of the X axis goes to
the right when looking at the front of the hexapod, and the Z axis goes up vertically. The Y axis goes
toward the back of the hexapod. Rotational axes are oriented in the same direction as the
translational axes, and positive rotation is clockwise when looking in the direction of the axis. The A
axis rotates about the X axis, B rotates about the Y axis, and C rotates about Z. The control software
enables the user to customize the coordinate system with certain restrictions. Please refer to the
HexGen Programming guide for details regarding coordinate system manipulation.
Figure 1-2: Axis Orientation
1.3.2. Strut Limits and Hexapod Range
Limits on the strut keep the strut within the useable travel range. When any strut has reached the
end of travel in either direction, an error will occur in the controller. Because the ranges of the
hexapod axes are interdependent, the limits of the hexapod axes are not constant, and the range of
motion of a hexapod cannot be concisely described. Refer to Section 1.2. for the independent travel
of each hexapod axis and the strut travel. If a strut limit is triggered, the hexapod is out of range. In
this case, follow the directions of the controller to return the hexapod to a position within the range
of motion. Refer to the HexGen®Programming Guide for more information.
1.3. Understanding Basic HEX150-140HL
Operation
HEX150-140HL Hardware
Manual
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1.3.3. Homing
The struts must each be homed in order for the hexapod to be controlled. Knowledge of the initial
condition is necessary for the inverse kinematic calculations to be accurate. The home sequence
involves moving each strut to its shortest position and then returning to the center of travel. Be sure
that there are no crash conditions before homing. Refer to the HexGen®Programming User Guide
for more information about how to initialize a hexapod.
WARNING: When enabled, each strut will make a small move to perform the
commutation search. The motion is variable. Ensure that any fixturing is away from the
stage to avoid a crash.
HEX150-140HL Hardware Manual 1.3.3. Homing
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Chapter 2: Mechanical Specifications and Installation
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
HEX150-140HL.
lRead all parts of this manual before you install or operate the hexapod or before you
do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
2.1. Unpacking and Handling the Hexapod
If any damage has occurred during shipping, report it immediately.
WARNING: It is the responsibility of the customer to safely and carefully lift and move
the hexapod. If you are not careful, you could adversely affect the performance of the
HEX150-140HL.
lRefer to Section 1.2. for mass specifications.
lBe careful if or when you touch the struts and joints, Do not apply force or torque dir-
ectly to these components.
lDo NOT use the struts or joints as lift points.
lLift only by the platform or base. NEVER lift by the struts or joints.
lMake sure that all moving parts are secure before you move the HEX150-140HL.
Unsecured moving parts may shift and cause bodily injury.
Carefully remove the HEX150-140HLfrom its protective shipping container. Gently set the hexapod
on a smooth, flat, and clean surface. Use compressed nitrogen or clean, dry, oil-free air to remove
any dust or debris that has collected during shipping.
Before you operate the hexapod, it is important to let it stabilize at room temperature for at least 12
hours. This will make sure that all of the alignments, preloads, and tolerances are the same as they
were when tested at Aerotech.
IMPORTANT: Each HEX150-140HL has a label that lists the system part number and
serial number. These numbers are necessary to maintain or update system hardware
and software. Locate this label and record the information for later reference.
HEX150-140HL Hardware
Manual
Chapter 2: Mechanical Specifications and
Installation
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2.2. Dimensions
Figure 2-1: HEX150-140HL Dimensions
2.2. Dimensions HEX150-140HL Hardware Manual
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2.3. Securing the Hexapod to the Mounting Surface
WARNING: It is the responsibility of the customer to safely and carefully move and
mount the hexapod. If you are not careful, you could adversely affect the performance
of the HEX150-140HL.
The mounting surface must be flat and have adequate stiffness to achieve the maximum
performance from the HEX150-140HL stage. When it is mounted to a non-flat surface, the stage can
get distorted while the mounting screws are tightened. This distortion will decrease overall accuracy.
Adjustments to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision
flatstones on the mounting surface to remove any burrs or high spots. Clean the mounting surface
with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry. Gently place the stage on the mounting surface.
WARNING: The HEX150-140HL is precision machined and verified for flatness at the
factory.
lDo not machine the HEX150-140HL housing. If you must machine a surface to
achieve a required flatness, machine the mounting surface.
lKeep the use of shims to a minimum when you mount the HEX150-140HL to the
mounting surface. The use of shims could reduce the rigidity of the system.
IMPORTANT: To maintain accuracy, the mounting surface must be flat to within 10 µm
per 100 mm.
Three M4 mounting screws are required to mount the hexapod to the mounting surface. Refer to
Figure 2-2 or Section 2.2. Dimensions for mounting locations and Table 2-1 for tightening torque
values.
HEX150-140HL Hardware
Manual
2.3. Securing the Hexapod to the Mounting
Surface
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Tightening torque values for the mounting hardware are dependent on the properties of the surface
to which the stage is being mounted. Values provided in Table 2-1 are typical values and may not be
accurate for your mounting surface. Refer to Section 2.2. for specific model mounting locations and
dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M4 or 8-32 SHCS (3 places) 2 N·m
Figure 2-2: Mounting Hole Locations
2.3. Securing the Hexapod to the Mounting
Surface
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