Aerotech ABL1500 Series User manual

Revision: 1.03.00
ABL1500 Hardware Manual

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Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
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Copyright © 2008-2018, Aerotech, Inc., All rights reserved.

ABL1500 Hardware Manual Table of Contents
Table of Contents
ABL1500 Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Air Requirements 15
Chapter 2: Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 19
2.3. Securing the Stage to the Mounting Surface 20
2.4. Attaching the Payload to the Stage 22
Load Capability 22
Chapter 3: Electrical Specifications and Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 29
3.3. Motor and Feedback Specifications 30
3.4. Limits, Marker, and Machine Direction 32
3.5. Motor and Feedback Phasing 33
Chapter 4: Maintenance 35
4.1. Service and Inspection Schedule 35
4.2. Cleaning and Lubrication 35
4.2.1. Cleaning Process 36
4.3. Troubleshooting 37
Appendix A: Warranty and Field Service 39
Appendix B: Revision History 41
Index 43
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Table of Contents ABL1500 Hardware Manual
List of Figures
Figure 1-1: Air Fitting Locations 15
Figure 2-1: Lifting Features and Shipping Clamps 18
Figure 2-2: ABL1500 Dimensions 19
Figure 2-3: Surface Mounting Screws 21
Figure 2-4: Cantilevered Load Capability 22
Figure 2-5: Cantilever Length Diagram 23
Figure 2-6: Pitch Offsets 24
Figure 2-7: Yaw Offsets 24
Figure 3-1: Connector Locations 25
Figure 3-2: Motor and Feedback Wiring 29
Figure 3-3: Machine Direction 32
Figure 3-4: Hall Phasing 33
Figure 3-5: Analog Encoder Phasing Reference Diagram 34
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 34
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 36
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ABL1500 Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: ABL1500 Series Specifications 13
Table 1-4: Air Specifications 15
Table 3-1: Motor Connector Pinouts 27
Table 3-2: Feedback Connector Pinouts 28
Table 3-3: Feedback Specifications 30
Table 3-4: Encoder Specifications 31
Table 3-5: BLMC-192 Motor Specifications 31
Table 4-1: Recommended Cleaning Solvents 35
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Table of Contents ABL1500 Hardware Manual
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ABL1500 Hardware Manual Safety
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ABL1500 and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
6. PINCHPOINT! Keep Hands Clear while the stage is in motion.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ABL1500 stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ABL1500 stage. Lifting or transporting the ABL1500 stage
improperly can result in injury or damage to the ABL1500.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. The stage forcer temperature may exceed 75°C.
9. Operators must be trained before operating this equipment.
10. All service and maintenance must be performed by qualified personnel.
11. Eye protection must be worn when in the proximity of compressed air components.
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Safety ABL1500 Hardware Manual
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ABL1500 Hardware Manual Declaration of Conformity
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ABL1500 Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended; and that the following harmonized European standards have been
applied:
EN ISO 12100:2010 Safety of machinery - Basic concepts, general principles for
design
EN 60204-1:2010 Safety of machinery - Electrical equipment of machines - Part
1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in con-
formity with the provisions of the Directive 2006/42/EC and with national implementing
legislation, i.e., as a whole, including the equipment referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the fol-
lowing Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 12/18/2018
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Declaration of Conformity ABL1500 Hardware Manual
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ABL1500 Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: Model Numbers and Ordering Options
ABL1500 Series Linear Air-Bearing Stage
-050 50 mm travel
-100 100 mm travel
-200 200 mm travel
-300 300 mm travel
-400 400 mm travel
-500 500 mm travel
Feedback (Required)
-E1 Incremental linear encoder, 1 Vpp amplified sine output
-E2 Incremental linear encoder, 0.1 µm TTL line driver output
-E3 High-accuracy incremental linear encoder, 1 Vpp amplified sine output
Cable Management (Required)
-CMS1 Single axis cable management system
-CMS2 Cable management system for XY assembly
-CMS3 Cable management system for Y axis, upper axis only
-CMS4 Cable management system for YZ assembly, upper axis only
Metrology (Required)
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
Accessories (to be ordered as separate line item)
ALIGN-NPA Non-precision XY assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for
short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for
short travel stages.
ABF Air-bearing filtration kit
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Overview ABL1500 Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 16° to 25° C (61° to 77° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
ABL1500 stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Due to the small clearances in the air bearing design, extreme temperature environments could cause a
decrease in performance or permanent damage to the stage. Standard Aerotech air-bearing stages are
designed for and built in a 20°C (68°F) environment. The environmental temperature must be controlled to
within 0.25°C per 24 hours to ensure that the ABL1500 specifications are repeatable over an extended period
of time. The severity of temperature effects on all specifications depends on many different environmental
conditions, including how the ABL1500 is mounted. Contact the factory for more details.
The -E1 and -E2 encoder scale in the ABL1500 stage has a coefficient of thermal expansion (CTE) of
3.25 x 10-6 / °C. The -E3 encoder scale has a CTE of 7.5 x 10-6 / C. As the stage deviates from 20°C, travel
of the stage as seen by the encoder will change per the appropriate thermal expansion rate.
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ABL1500 Hardware Manual Overview
1.3. Basic Specifications
Table 1-3: ABL1500 Series Specifications
Basic Model ABL1500-050 ABL1500-010 ABL1500-020
Travel 50 mm 100 mm 200 mm
Accuracy (1)
E1 Calibrated ±0.3 µm ±0.3 µm ±0.5 µm
Standard ±2.0 µm ±4.0 µm ±8.0 µm
E3 Calibrated ±0.2 µm ±0.2 µm ±0.4 µm
Standard ±1.0 µm ±2.0 µm ±5.0 µm
Repeatability (Bi-
Directional) (1)
E1 ±0.1 µm ±0.2 µm ±0.2 µm
E3 ±0.05 µm ±0.05 µm ±0.1 µm
Straightness (1) ±0.25 µm ±0.4 µm ±0.5 µm
Flatness (1) ±0.25 µm ±0.4 µm ±0.5 µm
Pitch ±0.5 arc sec ±1.0 arc sec ±2.0 arc sec
Roll ±0.5 arc sec ±1.0 arc sec ±2.0 arc sec
Yaw ±0.5 arc sec ±1.0 arc sec ±2.0 arc sec
Maximum Speed (1) 2.0 m/s
Maximum Acceleration 2 g (no load)
Maximum Force (Continuous) 93.6 N
Load Capacity (2) Horizontal 35.0 kg
Side 25.0 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa
Moving Mass (no load) 5.1 kg
Stage Mass 14.7 kg 16.0 kg 18.6 kg
Material Aluminum
Mean Time Between Failure 30,000 Hours
(1) Certified with each stage.
(2) Axis orientation for on-axis loading is listed (refer to Section 2.4. for offset loading behavior).
NOTES:
lSpecifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis
system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard
applications.
lTo protect air bearing against under-pressure, an in-line pressure switch tied to the motion
controller/amplifier E-Stop is recommended.
lAir supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at
99.9% purity.
lFor XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200
mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
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Overview ABL1500 Hardware Manual
Basic Model ABL1500-300 ABL1500-400 ABL1500-500
Travel 300 mm 400 mm 500 mm
Accuracy (1)
E1 Calibrated ±0.5 µm ±0.6 µm ±0.6 µm
Standard ±12.0 µm ±16.0 µm ±20.0 µm
E3 Calibrated ±0.4 µm ±0.5 µm ±0.5 µm
Standard ±5.0 µm ±5.0 µm ±5.0 µm
Repeatability (Bi-
Directional) (1)
E1 ±0.2 µm ±0.3 µm ±0.3 µm
E3 ±0.15 µm ±0.2 µm ±0.2 µm
Straightness (1) ±0.75 µm ±1.5 µm ±2.0 µm
Flatness (1) ±0.75 µm ±1.5 µm ±2.0 µm
Pitch ±3 arc sec ±4 arc sec ±5 arc sec
Roll ±3 arc sec ±4 arc sec ±5 arc sec
Yaw ±3 arc sec ±4 arc sec ±5 arc sec
Maximum Speed 2.0 m/s
Maximum Acceleration 2 g (no load)
Maximum Force (Continuous) 93.6 N
Load Capacity (2) Horizontal 35.0 kg
Side 25.0 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa
Moving Mass (no load) 5.1 kg
Stage Mass 21.3 kg 23.9 kg 26.5 kg
Material Aluminum
Mean Time Between Failure 30,000 Hours
(1) Certified with each stage.
(2) Axis orientation for on-axis loading is listed (refer to Section 2.4. for offset loading behavior).
NOTES:
lSpecifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis
system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard
applications.
lTo protect air bearing against under-pressure, an in-line pressure switch tied to the motion
controller/amplifier E-Stop is recommended.
lAir supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at
99.9% purity.
lFor XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200
mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
ABL1500 Series Specifications (continued)
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ABL1500 Hardware Manual Overview
1.4. Air Requirements
The quality of the air that you supply to the stage is important to the operation of the stage. Aerotech
recommends that you connect the air supply to the air inlet with a polyurethane air hose.
Table 1-4: Air Specifications
Description
Air Quality
Nitrogen(1) l99.99% pure
lfiltered(2) to 0.25 microns
Compressed Air
lfiltered(2) to 0.25 microns
ldry to 0º F dew point
loil free
Operating Air Pressure 80 psi ± 5 psi (517 to 551 kPa)
Air Consumption 24-30 SLPM @ 551 kPa
Air Inlet Fitting(3) 4 mm or 5/32" OD Hose
(1) Recommended
(2) The filtration requirement is to prevent particles from clogging the air bearing orifices.
(3) Aerotech recommends using a polyurethane air hose
Aerotech also recommends that you install a pressure switch (P/N: MCA03094) tied to the motion
controller's emergency stop (ESTOP)that will remove power to the air bearing if pressure drops below 40 psi
(a drop in pressure could result in contact between bearing surfaces which could cause damage to the
surfaces). For easier air-supply setup, you can purchase pneumatic kits and filter/filter-dryer kits from
Aerotech. Aerotech’s ABF Air Filtration Unit incorporates air filtration plus a pressure monitoring switch.
Figure 1-1: Air Fitting Locations
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Overview ABL1500 Hardware Manual
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ABL1500 Hardware Manual Mechanical Specifications and Installation
Chapter 2: Installation
W A R N I N G : ABL1500 installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Do not attempt to manually lift the ABL1500. Refer to for stage mass
specifications.
lLift only with the supplied lifting hardware and lifting straps.
lUse the eyebolts in conjunction with lifting straps.
lThe lifting straps should be configured to pull on the eyebolts in the vertical direction only.
lDo not use the tabletop or cable as lifting points.
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ABL1500. Unsecured moving
parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ABL1500. Use care when
moving the ABL1500.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ABL1500from its protective shipping container. Use the lifting equipment to gently set
the ABL1500 on a smooth, flat, and clean surface.
Before operating the ABL1500, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Lifting Hardware
ABL1500 stages come equipped with lifting bars and eyebolts attached to the stage as shown in Figure 2-1.
For multi-axis assemblies, always lift the system by the lower axis. Lifting by the upper axis may disturb
precision alignments on the system.
Each ABL1500 has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Clamps
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion and potential
damage from occurring during shipment. The brackets must be removed before the ABL1500 can be
operated. Retain the brackets and hardware for future use.
W A R N I N G : Do not attempt to move the carriage (or table top) of the ABL1500 until the
shipping brackets have been removed. Moving the carriage with the shipping brackets installed
can cause permanent damage to the ABL1500.
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Mechanical Specifications and Installation ABL1500 Hardware Manual
Figure 2-1: Lifting Features and Shipping Clamps
N O T E : After removing the lifting features or shipping brackets, retain them for future use. Do not
transport or ship the ABL1500 without the lifting features or shipping brackets attached.
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ABL1500 Hardware Manual Mechanical Specifications and Installation
2.2. Dimensions
Figure 2-2: ABL1500 Dimensions
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Mechanical Specifications and Installation ABL1500 Hardware Manual
2.3. Securing the Stage to the Mounting Surface
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ABL1500 stage. When it is mounted to a non-flat surface, the stage can be distorted
as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
W A R N I N G : Make sure that all moving parts are secure before moving the ABL1500.
Unsecured moving parts may shift and cause bodily injury.
D A N G E R : Strong rare-earth magnets are present in the linear motor magnet track. Loose
metal objects (tools, watches, keys, etc.) may cause personal injury and/or damage to the
equipment.
W A R N I N G : The ABL1500 must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
N O T E : To maintain accuracy, the mounting surface must be flat to within 2.5 µm per 300 mm.
N O T E : The stage base is precision machined and verified for flatness prior to stage assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the stage base. Shimming should be avoided if possible. If shimming is required, it
should be minimized to improve the rigidity of the system.
Procedure for ABL1500 mounting:
W A R N I N G : Do not attempt to move the carriage of the ABL1500 until the air supply, detailed
in Section 1.4., has been installed. Moving the stage table without air supplied can cause
permanent damage to the stage.
1. Prepare the mounting surface and bottom of the stage base with precision flatstones to remove any
burrs or high spots.
2. Clean the mounting surface and bottom of the stage with the appropriate cleaners (acetone or isopropyl
alcohol for the stage bottom) and a lint free cloth.
3. Place the stage on the mounting surface.
4. Remove the lifting equipment and shipping clamps (Figure 2-1). Save the brackets for future use.
5. Turn on the air supply to the air bearing.
6. Slide the air bearing carriage to one end of travel. Insert M6 socket head cap screws with flat washers
into the exposed mounting locations. Do not fully tighten at this time, but bring within 1/4 turn of screw
head engagement.
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