Aerotech PRO190SV Series User manual

Revision: 1.01.00
PRO190SV Hardware Manual

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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2019-2020, Aerotech, Inc., All rights reserved.

Table of Contents
PRO190SV Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 14
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 17
2.3. Securing the Stage to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 20
Chapter 3: Electrical Specifications and Installation 23
3.1. Motor and Feedback Connectors 24
3.2. Motor and Feedback Wiring 28
3.3. Motor and Feedback Specifications 31
3.4. Limits, Marker, and Machine Direction 33
3.5. Motor and Feedback Phasing 34
Chapter 4: Maintenance 37
4.1. Service and Inspection Schedule 37
4.2. Cleaning and Lubrication 38
4.3. Troubleshooting 40
Appendix A: Warranty and Field Service 41
Appendix B: Revision History 43
Index 45
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PRO190SV Hardware Manual Table of Contents

List of Figures
Figure 2-1: Lifting Features (PRO225SV shown) 16
Figure 2-2: PRO190SV Dimensions 17
Figure 2-3: Mounting Holes [QTY. 4] (PRO165SV shown) 19
Figure 2-4: Cantilevered Load Capability 20
Figure 2-5: Load Curve (PRO165SV shown) 21
Figure 2-6: Load Torque Equation 21
Figure 3-1: Motor and Feedback Wiring [25-Pin Connector] 28
Figure 3-2: Motor and Feedback Wiring [15-Pin Connector for -E3, -E4, -E5, and -E6] 29
Figure 3-3: Motor and Feedback Wiring [15-Pin Connector for -E7] 30
Figure 3-4: Machine Direction 33
Figure 3-5: Hall Phasing 34
Figure 3-6: Analog Encoder Phasing Reference Diagram 35
Figure 3-7: Encoder Phasing Reference Diagram (Standard) 35
Figure 4-1: Hardcover Removal (PRO165SV shown) 39
List of Figures PRO190SV Hardware Manual
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List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: PRO190SV Series Specifications 13
Table 2-1: Stage to Mounting Surface Hardware 18
Table 3-1: Motor Connector Pinout 25
Table 3-2: Mating Connector Part Numbers for the Motor Connector 25
Table 3-3: 25-Pin Feedback Connector Pinout 26
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 26
Table 3-5: 15-Pin Direct Feedback Connector Pinout [-E3, -E4, -E5, -E6] 27
Table 3-6: 15-Pin Direct Feedback Connector Pinout [-E7] 27
Table 3-7: Mating Connector Part Numbers for the Direct Feedback Connector 27
Table 3-8: Feedback Specifications 31
Table 3-9: Motor Specifications 32
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PRO190SV Hardware Manual List of Tables

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List of Tables PRO190SV Hardware Manual
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Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the PRO190SV.
lRead all parts of this manual before you install or operate the PRO190SV or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAerotech continually improves its product offerings; listed options may be superseded at
any time. All drawings and illustrations are for reference only and were complete and
accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date
information.
If you do not understand the information in this manual, contact Aerotech Global Technical
Support.
N O T E : This product is intended for light industrial manufacturing or laboratory use.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the PRO190SV and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The PRO190SV must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the PRO190SV. Lifting or transporting the PRO190SV improperly
can result in injury or damage to the PRO190SV.
6. The motor case temperature may exceed 75°C.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
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PRO190SV Hardware Manual Safety Procedures and Warnings

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Safety Procedures and Warnings PRO190SV Hardware Manual
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO190SV Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 Directive, Restricted Substances (RoHS3)
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 11/19/2020
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PRO190SV Hardware Manual EU Declaration of Incorporation

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EU Declaration of Incorporation PRO190SV Hardware Manual
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Chapter 1: Overview
Table 1-1: Model Numbers and Ordering Options
PRO190SV Long-Travel Lift Stage
Feedback (Required)
-E1 Rotary incremental encoder, 1 Vpp
-E2 Rotary incremental encoder, digital RS-422
-E3 Direct linear encoder, 1 Vpp + rotary encoder, 1 Vpp (dual-loop)
-E4 Direct linear encoder, 1 Vpp + rotary encoder, digital RS-422 (dual-loop)
-E5 Direct linear encoder, digital RS-422 + rotary encoder, 1 Vpp (dual-loop)
-E6 Direct linear encoder, digital RS-422 +rotary encoder, digital RS-422 (dual-loop)
-E7 Absolute linear encoder + rotary encoder, 1 Vpp (dual-loop)
Tabletop (Optional)
-TT3 Accessory tabletop with mounting for select rotary stages
Brake (Optional)
-BK Holding Brake
ThermoComp (Optional)
-TCMP ThermoComp integrated thermal compensation
Lifting Hardware (Optional)
-LF Hoist rings
Metrology (Required)
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
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PRO190SV Hardware Manual Chapter 1: Overview

1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The PRO190SV stages have limited protection against dust, but not water. This
equates to an ingress protection rating of IP50.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of PRO190SV series stages is measured 35 mm above the table with the stage
in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy specifications in Section 1.3. assume a 20 °C operating environment.
If the temperature of the ball screw in the stage is not 20 °C, a scale error will occur. The speed and duty
cycle of the stage have an effect on the temperature of the screw. Faster movement and higher duty cycle
increase heat and change the accuracy of the stage. The thermal expansion coefficient of the screw is 11.7
ppm for each degree Celsius. For stages with a linear encoder, the scale will expand or contract at a rate of
10.1 ppm for each degree Celsius.
The ThermoComp™ option uses the A3200 controller to sense and compensate for thermal changes.
ThermoComp™ compensates for self-heating and environmental temperature changes.
1.1. Environmental Specifications PRO190SV Hardware Manual
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1.3. Basic Specifications
Resolution is dependent on pitch, encoder resolution, and controller interpolation.
Table 1-3: PRO190SV Series Specifications
PRO190SV-035
Travel 35 mm
Accuracy(1)
Standard ±5 µm
Calibrated ±0.75 µm
Calibrated, Linear Encoder ±0.5 µm
Resolution (Min. Incremental
Motion)
Rotary Encoder(2) 0.025 µm
Linear Encoder(3) 0.010 µm
Bidirectional Repeatability(1) Rotary Encoder(2) ±0.5 µm
Linear Encoder(3) ±0.15 µm
Straightness ±4 µm
Pitch 50 µrad (10 arc sec)
Roll 50 µrad (10 arc sec)
Yaw 25 µrad (5 arc sec)
Maximum Speed(4) 10 mm/s
Load Capacity(5,6) 40 kg
Stage Mass(7) 10.2 kg
Material Anodized Aluminum
NOTE:Specifications are for single-axis systems measured 35 mm above the tabletop. Performance of multi-axis systems depends
on payload and workpoint. Consult factory for details.
1. Certified with -PL1/-PL2 options.
2. With 1 Vpp amplified sine rotary encoder (-E1 feedback option) and linear amplifier.
3. With 1 Vpp amplified sine linear encoder (-E3, -E4 feedback options) and linear amplifier.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. A holding brake (-BK option) is recommended when the payload exceeds 75% of the load capacity as a precaution in the event
that power to the stage is unexpectedly lost.
7. Excludes tabletop and brake options.
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PRO190SV Hardware Manual 1.3. Basic Specifications

1.4. Vacuum Operation
Aerotech can specially prepare the PRO190SV for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 Torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 Torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
To make sure that the PRO190SV will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this
manual).
lDo not remove the PRO190SV from its sealed bag until it is ready to use.
lAlways handle the PRO190SV in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the PRO190SV.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the PRO190SV.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
1.4. Vacuum Operation PRO190SV Hardware Manual
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Chapter 2: Mechanical Specifications and Installation
W A R N I N G : PRO190SV installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift and move the
PRO190SV.
lSecure all moving parts before lifting or moving the PRO190SV to a new location.
Unsecured moving parts could shift and cause bodily injury.
lImproper handling could adversely affect the performance of the PRO190SV. Use care
when moving the PRO190SV.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the PRO190SVfrom its protective shipping container.
lLift only by the base.
lUse lifting hardware if it has been provided (refer to Figure 2-1).
lDo not use the tabletop or cables as lifting points.
lFor multi-axis assemblies, always lift the system by the lower axis.
Gently set the PRO190SV on a smooth, flat, and clean surface.
Before operating the PRO190SV, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to
remove any dust or debris that has collected during shipping.
Each PRO190SV has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Lifting Equipment
N O T E : After you remove the hoist rings, retain them for future use. In the event that the product requires
service at the factory, the hoist rings should be reattached to ensure that the PRO190SV ships safely.
The lifting kit includes two hoist rings. If the stage is equipped with the optional tabletop (-TT3), the tabletop
must be remove before you install the hoist rings. To install, thread hoist rings into the designated holes
(refer to Figure 2-1). If the stage is part of a multi-axis system, attach the lifting hardware to the lower axis.
The lifting hardware must be removed before you operate the stage.
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PRO190SV Hardware Manual Chapter 2: Mechanical Specifications and Installation

Figure 2-1: Lifting Features (PRO225SV shown)
2.1. Unpacking and Handling the Stage PRO190SV Hardware Manual
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2.2. Dimensions
Figure 2-2: PRO190SV Dimensions
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PRO190SV Hardware Manual 2.2. Dimensions

2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The PRO190SV must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the PRO190SV.
Unsecured moving parts may shift and cause bodily injury.
D A N G E R : PINCHPOINT! Keep Hands Clear while the stage is in motion.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the PRO190SV stage. When it is mounted to a non-flat surface, the stage can be distorted while the
mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting
surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 7.5 µm.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw
Torque
M6 x 25 mm [1/4-20 x 1 in] SHCS 7 N·m
2.3. Securing the Stage to the Mounting Surface PRO190SV Hardware Manual
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Figure 2-3: Mounting Holes [QTY. 4] (PRO165SV shown)
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PRO190SV Hardware Manual 2.3. Securing the Stage to the Mounting Surface

2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3 and the documentation delivered with the stage.
N O T E : If your PRO190SV was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the PRO190SV is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
N O T E : For valid system performance, the mounting interface should be flat within 12 µm.
For a cantilevered load, measure the cantilever length and then find the corresponding load value in Figure 2-
4.
Figure 2-4: Cantilevered Load Capability
2.4. Attaching the Payload to the Stage PRO190SV Hardware Manual
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