Aerotech HexGen HEX150-140HL User manual

Revision: 1.00.00
HexGen®HEX150-140HL
Hexapod Hardware Manual

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Copyright © 2020-2021, Aerotech, Inc., All rights reserved.

Table of Contents
HexGen® HEX150-140HL Hexapod Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.1.1. Accuracy and Temperature Effects 10
1.2. Basic Specifications 11
1.3. Understanding Basic HEX150-140HL Operation 12
1.3.1. Hexapod Axes 12
1.3.2. Strut Limits and Hexapod Range 13
1.3.3. Homing 13
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Hexapod 15
2.2. Dimensions 16
2.3. Securing the Hexapod to the Mounting Surface 17
2.4. Attaching the Payload to the HEX150-140HL 19
Chapter 3: Electrical Specifications and Installation 21
3.1. Motor and Feedback Connectors 22
3.2. Motor and Feedback Wiring 24
3.3. Motor and Feedback Specifications 25
3.4. Machine Direction 27
3.5. Motor and Feedback Phasing 28
Chapter 4: Maintenance 29
4.1. Service and Inspection Schedule 29
4.2. Cleaning and Lubrication 30
4.3. Troubleshooting 31
Appendix A: Warranty and Field Service 33
Appendix B: Revision History 35
Index 37
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HEX150-140HL Hardware Manual Table of Contents

List of Figures
Figure 1-1: HEX150-140HL Callouts 9
Figure 1-2: Axis Orientation 12
Figure 2-1: HEX150-140HL Dimensions 16
Figure 2-2: Mounting Hole Locations 18
Figure 2-3: HEX150-140HL Vertical Load Capabilities 19
Figure 2-4: HEX150-140HL Horizontal Load Capabilities 20
Figure 3-1: Motor and Feedback Wiring 24
Figure 3-2: Machine Direction 27
Figure 3-3: Encoder Phasing Reference Diagram (Standard) 28
List of Figures HEX150-140HL Hardware Manual
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List of Tables
Table 1-1: Model Options 9
Table 1-2: Environmental Specifications 10
Table 1-3: HEX150-140HL Series Specifications 11
Table 2-1: Stage to Mounting Surface Hardware 18
Table 3-1: Motor and Feedback Pinout 23
Table 3-2: Feedback Specifications 25
Table 3-3: HEX150-140HL Motor Specifications 26
Table 3-4: HEX150-140HL Rotary Encoder Specifications 26
Table 4-1: Grease Specifications 30
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HEX150-140HL Hardware Manual List of Tables

Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not
understand the information contained herein, contact an Aerotech representative before proceeding.
Strictly adhere to the statements given in this section and other handling, use, and operational information
given throughout the manual to avoid injury to you and damage to the equipment.
This manual tells you how to carefully and correctly use and operate the HEX150-140HL.
lRead all parts of this manual before you install or operate the HEX150-140HL or
before you do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
If you do not understand the information in this manual, contact AerotechGlobal Technical
Support.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the HEX150-140HL and component parts must be restricted while
connected to a power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
D A N G E R : PINCHPOINT! Keep Hands Clear while the stage is in motion.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor
parts must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to
avoid potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage
to the equipment.
4. The HEX150-140HL must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the HEX150-140HL. Lifting or transporting the HEX150-140HL
improperly can result in injury or damage to the HEX150-140HL.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
Safety Procedures and Warnings HEX150-140HL Hardware Manual
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EU Declaration of Incorporation
Manufacturer: Aerotech
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
HEX150-140HL
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to be
in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to
in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable
requirements of the following Directive(s):
2011/65/EU RoHS 2 Directive
EU2015/863 Amendment RoHS 3 Directive
Authorized Representative:
/ Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 9/27/2021
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HEX150-140HL Hardware Manual EU Declaration of Incorporation

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EU Declaration of Incorporation HEX150-140HL Hardware Manual
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Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
The base of a hexapod has a flat mounting surface on the bottom and holds electronics for the hexapod.
The base should be mounted to a flat, rigid mounting surface (refer to Section 2.3.). The base joints allow
the attached strut to pivot from the base.
The platform is the moving plate of a hexapod. The threaded holes on the top surface are designed to
hold customer equipment (refer to Section 2.4.). The platform joints allow the attached strut to pivot from
the platform.
The six struts of a hexapod change length in order to control the position of the platform. The struts attach
only to the joints of the base and platform.
The cables exit out of the back of the base. These six cables connect the hexapod to the controller (refer
to the Section 3.2.).
Figure 1-1: HEX150-140HL Callouts
Table 1-1: Model Options
HexGen®HEX150-140HL Hexapod 6-DOF Positioning System
HEX150-140HL Six degree-of-freedom hexapod positioning system; 150 mm diameter base; 140
mm height at mid-travel; high-load capacity version
Customization
Contact Aerotech for details about additional customization options.
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HEX150-140HL Hardware Manual Chapter 1: Overview

1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the
listed specifications. Exceeding environmental or operating specifications can cause
damage to the equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
Deviation in temperature can result in performance degradation.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The machine
should be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibra-
tion can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
HexGen®hexapods have limited protection against particles. This equates to an
Ingress Protection rating of IP30.
Use Indoor use only
1.1.1. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C environment. Moderate temperature changes will
affect the accuracy while extreme temperature changes could cause damage to the machine. At a
minimum, the environmental temperature must be controlled to within 1°C per hour to ensure the safety of
the hexapod. The severity of temperature effects on all specifications depends on many different
environmental conditions, including how the hexapod is mounted. Contact the factory for more details.
1.1. Environmental Specifications HEX150-140HL Hardware Manual
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1.2. Basic Specifications
Table 1-3: HEX150-140HL Series Specifications
X Y Z A (θx) B (θy) C (θz)
Travel (1) 40 mm 40 mm 16 mm 16° 16° 40°
Resolution
(Minimum Incremental
Motion)
20 nm 0.2 μrad
(0.04 arc sec)
Bidirectional
Repeatability, pk-pk(2,3) ±1.5 μm ±1.5 μm ±0.4 μm ±15 μrad (±0.04 arc sec)
Unidirectional
Repeatability, pk-pk ±0.75 μm ±0.75 μm ±0.15 μm ±7.5 μrad (±1.5 arc sec)
Maximum Speed (4) 20 mm/s 20 mm/s 8 mm/s 10°/s 10°/s 30°/s
Load
Capacity,
All Positions
(5)
Vertical 7.5 kg
Horizontal 2 kg
Holding Capacity,
De-Energized (6) 10 kg
Stage Mass 2.3 kg
Material Anodized Aluminum Platform and Base;
Steel Used in Joints and Inside Struts
1. Travels are mutually-exclusive. Consult the HexGen®Hexapod Sizer on the Aerotech website for detailed workspace sizing.
2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint
dependent.
3. X, Y, Z performance certified as standard.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Centered loading (refer to Section 2.4.).
6. Horizontal base plate, centered loading (refer to Section 2.4.).
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HEX150-140HL Hardware Manual 1.2. Basic Specifications

1.3. Understanding Basic HEX150-140HL Operation
1.3.1. Hexapod Axes
The hexapod platform can be actuated in six degrees of freedom by changing the lengths of the six struts
that connect the platform to the base. Since the axes of motion are not obvious from the mechanics of the
hexapod, the axis convention is outlined below. These axes can be used to orient the hexapod in the
global workspace. Refer to the HexGen®Programming Guide for more information about controlling
hexapod motion. To get a copy of this guide, go to the Manuals, Help files, & Cable Drawings section of
www.aerotech.com. Select the Controllers tab. Then download User Guide for Hexapod
Programming.
The six axes include 3 translational axes, X, Y, and Z, and 3 rotational axes, A, B, and C. As shown in the
overview, the cables exit out of the back of the base. The positive direction of the X axis goes to the right
when looking at the front of the hexapod, and the Z axis goes up vertically. The Y axis goes toward the
back of the hexapod. Rotational axes are oriented in the same direction as the translational axes, and
positive rotation is clockwise when looking in the direction of the axis. The A axis rotates about the X axis,
B rotates about the Y axis, and C rotates about Z. The control software enables the user to customize the
coordinate system with certain restrictions. Please refer to the HexGen Programming guide for details
regarding coordinate system manipulation.
Figure 1-2: Axis Orientation
1.3. Understanding Basic HEX150-140HL Operation HEX150-140HL Hardware Manual
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1.3.2. Strut Limits and Hexapod Range
Limits on the strut keep the strut within the useable travel range. When any strut has reached the end of
travel in either direction, an error will occur in the controller. Because the ranges of the hexapod axes are
interdependent, the limits of the hexapod axes are not constant, and the range of motion of a hexapod
cannot be concisely described. Refer to Section 1.2. for the independent travel of each hexapod axis and
the strut travel. If a strut limit is triggered, the hexapod is out of range. In this case, follow the directions of
the controller to return the hexapod to a position within the range of motion. Refer to the HexGen®
Programming Guide for more information.
1.3.3. Homing
The struts must each be homed in order for the hexapod to be controlled. Knowledge of the initial condition
is necessary for the inverse kinematic calculations to be accurate. The home sequence involves moving
each strut to its shortest position and then returning to the center of travel. Be sure that there are no crash
conditions before homing. Refer to the HexGen®Programming Guide for more information about
initializing a hexapod.
W A R N I N G : When enabled, each strut will make a small move to perform the
commutation search. The motion is variable. Ensure that any fixturing is away from the
stage to avoid a crash.
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HEX150-140HL Hardware Manual 1.3.2. Strut Limits and Hexapod Range

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1.3.3. Homing HEX150-140HL Hardware Manual
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Chapter 2: Mechanical Specifications and Installation
W A R N I N G : HEX150-140HL installation must be in accordance to instructions provided
by this manual and any accompanying documentation. Failure to follow these instructions
could result in injury or damage to the equipment.
2.1. Unpacking and Handling the Hexapod
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the HEX150-140HL.
Unsecured moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the HEX150-140HL’s performance. Use care
when moving the HEX150-140HL.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the HEX150-140HLfrom its protective shipping container. Gently set the HEX150-
140HL on a smooth, flat, and clean surface.
Before operating the HEX150-140HL, it is important to let it stabilize at room temperature for at least 12
hours. Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and
tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry,
oil-free air to remove any dust or debris that has collected during shipping.
Each HEX150-140HL has a label listing the system part number and serial number. These numbers
contain information necessary for maintaining or updating system hardware and software. Locate this
label and record the information for later reference.
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HEX150-140HL Hardware Manual Chapter 2: Mechanical Specifications and Installation

2.2. Dimensions
Figure 2-1: HEX150-140HL Dimensions
2.2. Dimensions HEX150-140HL Hardware Manual
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2.3. Securing the Hexapod to the Mounting Surface
W A R N I N G : The HEX150-140HL must be mounted securely. Improper mounting can
result in injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the HEX150-
140HL. Unsecured moving parts may shift and cause bodily injury.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance
from the HEX150-140HL stage. When it is mounted to a non-flat surface, the stage can get distorted while
the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free
cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the
stage on the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 10 µm per 100 mm.
N O T E : The HEX150-140HL is precision machined and verified for flatness prior to product assembly
at the factory. If machining is required to achieve the desired flatness, it should be performed on the
mounting surface rather than the HEX150-140HL. Shimming should be avoided if possible. If shimming
is required, it should be minimized to retain maximum rigidity of the system.
Three M4 mounting screws are required to mount the hexapod to the mounting surface. Refer to Figure 2-
2or Section 2.2. Dimensions for mounting locations and Table 2-1 for tightening torque values.
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HEX150-140HL Hardware Manual 2.3. Securing the Hexapod to the Mounting Surface

Tightening torque values for the mounting hardware are dependent on the properties of the surface to
which the stage is being mounted. Values provided in Table 2-1 are typical values and may not be
accurate for your mounting surface. Refer to Section 2.2. for specific model mounting locations and
dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M4 or 8-32 SHCS (3 places) 2 N·m
Figure 2-2: Mounting Hole Locations
2.3. Securing the Hexapod to the Mounting Surface HEX150-140HL Hardware Manual
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2.4. Attaching the Payload to the HEX150-140HL
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint free cloth and isopropyl alcohol and allow the cleaning solvent to completely dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3 and the documentation delivered with the stage.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 10 µm over the
contact area.
Loads should be mounted close to the center of the hexapod, if possible, to reduce offset loading. The
maximum load is based on the distance from the payload’s center of mass to the center of the platform’s
mounting surface. External forces to the payload or hexapod platform should be considered when
determining the maximum payload. Add process forces to the mass of the payload when determining the
total applied force.
HexGen®hexapods can be mounted to a horizontal surface or a vertical surface. The orientation will also
be critical in determining the load capacity. A horizontal mounting surface is recommended for maximum
payload capabilities. Refer to the load curves that follow for allowable loading as a function of orientation
and load offset.
Figure 2-3: HEX150-140HL Vertical Load Capabilities
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HEX150-140HL Hardware Manual 2.4. Attaching the Payload to the HEX150-140HL

Figure 2-4: HEX150-140HL Horizontal Load Capabilities
2.4. Attaching the Payload to the HEX150-140HL HEX150-140HL Hardware Manual
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