Agilent Technologies B1500A User manual

Agilent Technologies
Agilent B1500A
Semiconductor Device
Analyzer
User’s Guide

Notices
© Agilent Technologies, Inc. 2005 - 2010
No part of this manual may be reproduced in
any form or by any means (including elec-
tronic storage and retrieval or translation
into a foreign language) without prior agree-
ment and written consent from Agilent
Technologies, Inc. as governed by United
States and international copyright laws.
Manual Part Number
B1500-90000
Edition
Edition 1, July 2005
Edition 2, December 2005
Edition 3, April 2006
Edition 4, January 2007
Edition 5, June 2007
Edition 6, November 2007
Edition 7, October 2008
Edition 8, February 2009
Edition 9, June 2009
Edition 10, June 2010
Agilent Technologies, Inc.
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA
Warranty
The material contained in this docu-
ment is provided “as is,” and is sub-
ject to being changed, without notice,
in future editions. Further, to the max-
imum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a par-
ticular purpose. Agilent shall not be
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consequential damages in connec-
tion with the furnishing, use, or per-
formance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the sep-
arate agreement shall control.
Technol o g y Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accor-
dance with the terms of such license.
Restricted Rights Legend
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“Commercial computer software” as
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or as a “commercial item” as defined in FAR
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ware” as defined in FAR 52.227-19 (June
1987) or any equivalent agency regulation or
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sure of Software is subject to Agilent Tech-
nologies’ standard commercial license
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Agencies of the U.S. Government will
receive no greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will receive
no greater than Limited Rights as defined in
FAR 52.227-14 (June 1987) or DFAR
252.227-7015 (b)(2) (November 1995), as
applicable in any technical data.

DECLARATION OF CONFORMITY
According to EN ISO/IEC 17050-1:2004
Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.
Manufacturer’s Address: No. 1 Yishun Ave 7
SINGAPORE 768923
Singapore
Declares under sole responsibility that the product as originally delivered
Product Name: Semiconductor Device Analyzer
High Power Source/Monitor Unit Module,
Medium Power Source/Monitor Unit Module,
High Resolution Source/Monitor Unit Module,
Multi Frequency Capacitance Measurement Unit Module,
High Voltage Semiconductor Pulse Generator Unit Module,
Waveform Generator/Fast Measurement Unit Module
Model Number: Agilent B1500A
Agilent B1510A, Agilent B1511A, Agilent B1517A,
Agilent B1520A, Agilent B1525A, Agilent B1530A
Product Options: This declaration covers all options of the above product(s)
complies with the essential requirements of the following applicable European Directives, and carries
the CE marking accordingly:
Low Voltage Directive (2006/95/EC)
EMC Directive (2004/108/EC)
and conforms with the following product standards
EMC Standard
IEC 61326-1:2005 / EN 61326-1:2006
CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002
IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001
IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002
IEC 61000-4-4:2004 / EN 61000-4-4:2004
IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001
IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001
IEC 61000-4-11:2004 / EN 61000-4-11:2004
Canada: ICES/NMB-001:2004
Australia/New Zealand: AS/NZS CISPR 11:2004
Limit
Group 1 Class A
4 kV CD, 8 kV AD
3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz
0.5 kV signal lines, 1 kV power lines
0.5 kV line-line, 1 kV line-ground
3 V, 0.15-80 MHz
0 % for 1/0.5 cycle, 0 % for 250/300 cycles,
70 % for 25/30 cycles
Safety
IEC 61010-1:2001 / EN 61010-1:2001
Canada: CAN/CSA-C22.2 No. 1010.1-92, C/US
Supplementary Information:
The product was tested in a typical configuration with Agilent Technologies test systems.
This DoC applies to above-listed products placed on the EU market after:
March 20, 2010
Date
Toshiyuki Kawaji
QA Manager
Agilent Technologies
For further information, please contact your local Agilent Technologies sales office, agent or distributor,
or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T.19
•Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
NOTE This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme àla norme NMB-001 du Canada.

Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the instrument. In addition, it violates safety standards of
design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.
assumes no liability for customer’s failure to comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are
an option for many products. Manuals may also be available on the Web. Go to
www.agilent.com and type the product model number in the Search field at the top of
the page.
NOTE Do not use this instrument in any manner not specified by the manufacturer. The
protective features of this instrument may be impaired if it is used in a manner not
specified in the operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION
DEGREE 2 defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with
a measurement category, its inputs must not be connected to line-voltage mains.
•DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, shall be complied. Procedures throughout in
this manual prevent you from potentially hazard. Their instructions contained in the
warnings must be followed.
WARNING Hazardous voltage of up to the instrument’s maximum voltage may appear at Force,
Guard, and Sense terminals if Interlock terminal is closed. Open the Interlock
terminal when the Force, Guard, and Sense terminals are accessible. Voltage
applied to the terminals will be limited up to ±40 V or ±42 V.

•BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
•KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component replacement
and internal adjustments must be made by qualified maintenance personnel. Do
not replace components with power cable connected. Under certain conditions,
hazardous voltages may exist even with the power cable removed. To avoid
injuries, always disconnect power and discharge circuits before touching them.
•DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable of
rendering first aid and resuscitation, is present.
•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install substitute
parts or perform any unauthorized modification to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for services and
repair to ensure that safety features are maintained.
•IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified
service personnel.

Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Direct current.
Alternating current.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Instruction manual symbol. The equipment will be marked with this symbol when it is
necessary for the user to refer to the instruction manual.
IEC Measurement Category I
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the equipment.
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Power Supply and Measurement Safety
• Power Supply Safety
This instrument can output high currents and voltages. Make sure that the load or
device under test can safely handle the output current and voltage. Also, make sure
that the connection leads can safely withstand the expected currents and are
insulated for the expected voltages.
The instrument outputs may be connected so as to float relative to earth ground.
Isolation or floating voltage ratings are indicated on the instrument, near the
output terminal or the Circuit Common terminal.
• Voltage/Current Measurement Safety
Multimeters and other instruments capable of measuring high voltages and
currents are subject to specific safety concerns because of the circuits to which
they may be connected. To safely use these instruments, you need to understand
the markings on the instrument near the input terminals, which include the
Protection Limits and the IEC Measurement Category.
• Protection Limits
Agilent multimeters and other voltage measurement instruments provide
protection circuitry to prevent damage to the instrument and to protect against the
danger of electric shock, provided the Protection Limits are not exceeded. To
ensure safe operation of the instrument, do not exceed the Protection Limits
shown on the input terminals.

• Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current
output and measurement. Typical SMU has the Force, Guard, Sense, and Circuit
Common terminals as shown below. Normally the Force, Guard, and Sense
terminals are the same potential. Voltage marked around the terminals indicates
the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the
Kelvin connection which is effective for high current measurement and low
resistance measurement. For the non-Kelvin connection to ease the connections,
connect Force only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage
current caused by a coaxial cable used. Guard must be never connected to
anything at the device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of Agilent B1500A’s HPSMU.
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High Voltage Shock Hazard
Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for
MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Agilent B1500A.
• Use a three-conductor AC power cable to appliance coupler (inlet) and the
instrument to an electric ground (safety ground).
• Prepare shielding box which covers interface to a device under test and equipped
with interlock circuit that opens when the door is opened.
• Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
• Confirm periodically that the interlock function works normally.
• Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete “all” of the following items, regardless
of any instrument’s settings.
• Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
• Confirm that the High Voltage indicator is not lit.
• Open the shielding box access door (open the Interlock terminal).
• Discharge any capacitors if the capacitance is connected to an SMU.
• Warn workers in the vicinity of the instrument about hazardous conditions.