Agilent Technologies B1500A User manual

Agilent Technologies
Agilent B1500A
Semiconductor Device
Analyzer
User’s Guide

Notices
© Agilent Technologies, Inc. 2005 - 2010
No part of this manual may be reproduced in
any form or by any means (including elec-
tronic storage and retrieval or translation
into a foreign language) without prior agree-
ment and written consent from Agilent
Technologies, Inc. as governed by United
States and international copyright laws.
Manual Part Number
B1500-90000
Edition
Edition 1, July 2005
Edition 2, December 2005
Edition 3, April 2006
Edition 4, January 2007
Edition 5, June 2007
Edition 6, November 2007
Edition 7, October 2008
Edition 8, February 2009
Edition 9, June 2009
Edition 10, June 2010
Agilent Technologies, Inc.
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA
Warranty
The material contained in this docu-
ment is provided “as is,” and is sub-
ject to being changed, without notice,
in future editions. Further, to the max-
imum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a par-
ticular purpose. Agilent shall not be
liable for errors or for incidental or
consequential damages in connec-
tion with the furnishing, use, or per-
formance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the sep-
arate agreement shall control.
Technol o g y Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accor-
dance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcon-
tract, Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June 1995),
or as a “commercial item” as defined in FAR
2.101(a) or as “Restricted computer soft-
ware” as defined in FAR 52.227-19 (June
1987) or any equivalent agency regulation or
contract clause. Use, duplication or disclo-
sure of Software is subject to Agilent Tech-
nologies’ standard commercial license
terms, and non-DOD Departments and
Agencies of the U.S. Government will
receive no greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will receive
no greater than Limited Rights as defined in
FAR 52.227-14 (June 1987) or DFAR
252.227-7015 (b)(2) (November 1995), as
applicable in any technical data.

DECLARATION OF CONFORMITY
According to EN ISO/IEC 17050-1:2004
Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.
Manufacturer’s Address: No. 1 Yishun Ave 7
SINGAPORE 768923
Singapore
Declares under sole responsibility that the product as originally delivered
Product Name: Semiconductor Device Analyzer
High Power Source/Monitor Unit Module,
Medium Power Source/Monitor Unit Module,
High Resolution Source/Monitor Unit Module,
Multi Frequency Capacitance Measurement Unit Module,
High Voltage Semiconductor Pulse Generator Unit Module,
Waveform Generator/Fast Measurement Unit Module
Model Number: Agilent B1500A
Agilent B1510A, Agilent B1511A, Agilent B1517A,
Agilent B1520A, Agilent B1525A, Agilent B1530A
Product Options: This declaration covers all options of the above product(s)
complies with the essential requirements of the following applicable European Directives, and carries
the CE marking accordingly:
Low Voltage Directive (2006/95/EC)
EMC Directive (2004/108/EC)
and conforms with the following product standards
EMC Standard
IEC 61326-1:2005 / EN 61326-1:2006
CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002
IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001
IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002
IEC 61000-4-4:2004 / EN 61000-4-4:2004
IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001
IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001
IEC 61000-4-11:2004 / EN 61000-4-11:2004
Canada: ICES/NMB-001:2004
Australia/New Zealand: AS/NZS CISPR 11:2004
Limit
Group 1 Class A
4 kV CD, 8 kV AD
3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz
0.5 kV signal lines, 1 kV power lines
0.5 kV line-line, 1 kV line-ground
3 V, 0.15-80 MHz
0 % for 1/0.5 cycle, 0 % for 250/300 cycles,
70 % for 25/30 cycles
Safety
IEC 61010-1:2001 / EN 61010-1:2001
Canada: CAN/CSA-C22.2 No. 1010.1-92, C/US
Supplementary Information:
The product was tested in a typical configuration with Agilent Technologies test systems.
This DoC applies to above-listed products placed on the EU market after:
March 20, 2010
Date
Toshiyuki Kawaji
QA Manager
Agilent Technologies
For further information, please contact your local Agilent Technologies sales office, agent or distributor,
or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T.19
•Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
NOTE This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme àla norme NMB-001 du Canada.

Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the instrument. In addition, it violates safety standards of
design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.
assumes no liability for customer’s failure to comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are
an option for many products. Manuals may also be available on the Web. Go to
www.agilent.com and type the product model number in the Search field at the top of
the page.
NOTE Do not use this instrument in any manner not specified by the manufacturer. The
protective features of this instrument may be impaired if it is used in a manner not
specified in the operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION
DEGREE 2 defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with
a measurement category, its inputs must not be connected to line-voltage mains.
•DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, shall be complied. Procedures throughout in
this manual prevent you from potentially hazard. Their instructions contained in the
warnings must be followed.
WARNING Hazardous voltage of up to the instrument’s maximum voltage may appear at Force,
Guard, and Sense terminals if Interlock terminal is closed. Open the Interlock
terminal when the Force, Guard, and Sense terminals are accessible. Voltage
applied to the terminals will be limited up to ±40 V or ±42 V.

•BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
•KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component replacement
and internal adjustments must be made by qualified maintenance personnel. Do
not replace components with power cable connected. Under certain conditions,
hazardous voltages may exist even with the power cable removed. To avoid
injuries, always disconnect power and discharge circuits before touching them.
•DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable of
rendering first aid and resuscitation, is present.
•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install substitute
parts or perform any unauthorized modification to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for services and
repair to ensure that safety features are maintained.
•IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified
service personnel.

Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Direct current.
Alternating current.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Instruction manual symbol. The equipment will be marked with this symbol when it is
necessary for the user to refer to the instruction manual.
IEC Measurement Category I
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the equipment.
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Power Supply and Measurement Safety
• Power Supply Safety
This instrument can output high currents and voltages. Make sure that the load or
device under test can safely handle the output current and voltage. Also, make sure
that the connection leads can safely withstand the expected currents and are
insulated for the expected voltages.
The instrument outputs may be connected so as to float relative to earth ground.
Isolation or floating voltage ratings are indicated on the instrument, near the
output terminal or the Circuit Common terminal.
• Voltage/Current Measurement Safety
Multimeters and other instruments capable of measuring high voltages and
currents are subject to specific safety concerns because of the circuits to which
they may be connected. To safely use these instruments, you need to understand
the markings on the instrument near the input terminals, which include the
Protection Limits and the IEC Measurement Category.
• Protection Limits
Agilent multimeters and other voltage measurement instruments provide
protection circuitry to prevent damage to the instrument and to protect against the
danger of electric shock, provided the Protection Limits are not exceeded. To
ensure safe operation of the instrument, do not exceed the Protection Limits
shown on the input terminals.

• Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current
output and measurement. Typical SMU has the Force, Guard, Sense, and Circuit
Common terminals as shown below. Normally the Force, Guard, and Sense
terminals are the same potential. Voltage marked around the terminals indicates
the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the
Kelvin connection which is effective for high current measurement and low
resistance measurement. For the non-Kelvin connection to ease the connections,
connect Force only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage
current caused by a coaxial cable used. Guard must be never connected to
anything at the device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of Agilent B1500A’s HPSMU.
¨O] +]«] ½;¨W v¨O½v¶´
½;¨W

High Voltage Shock Hazard
Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for
MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Agilent B1500A.
• Use a three-conductor AC power cable to appliance coupler (inlet) and the
instrument to an electric ground (safety ground).
• Prepare shielding box which covers interface to a device under test and equipped
with interlock circuit that opens when the door is opened.
• Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
• Confirm periodically that the interlock function works normally.
• Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete “all” of the following items, regardless
of any instrument’s settings.
• Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
• Confirm that the High Voltage indicator is not lit.
• Open the shielding box access door (open the Interlock terminal).
• Discharge any capacitors if the capacitance is connected to an SMU.
• Warn workers in the vicinity of the instrument about hazardous conditions.

Gefahr durch Hochspannung
Von den Geräten Agilent B1500A können Spannungen an den Anschlüssen “Force,
Guard und Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag
vorzubeugen, ist bei der Benützung der Geräte Agilent B1500A folgendes zu
beachten.
• Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung
(Eingang) und schließen Sie das Instrument an eine Erdung an
(Sicherheitserdung).
• Bereiten Sie das Abschirmungsgehäuse vor, dass die Oberfläche eines zu
testenden Geräts abdeckt und mit einem Verriegelungsstromkreis ausgestattet
ist, der bei geöffneter Tür unterbrochen wird.
• Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem
Interlock-Anschluss dieses Instruments.
• Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion
ordnungsgemäß funktioniert.
• Bevor Sie die Verbindungen zu den Anschlüssen Force, Guard und Sense
berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des
Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig
von den Instrumenteinstellungen, alle folgenden Schritte durch.
• Beenden Sie die Messung, indem Sie auf die Taste “Stop” drücken. Stellen
Sie sicher, dass die Statusanzeige “Measurement” nicht leuchtet.
• Stellen Sie sicher, dass die Anzeige “High V
oltage” nicht leuchtet.
• Öffnen Sie die Tür des Abschirmungsgehäuses (öffnen des
Interlock-Anschlusses).
• Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU
verbunden ist.
• Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.

Danger de choc dû à une haute tension
Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/
HRSMU; 100 Vdc) émanant du dispositif Agilent B1500A peut être sortie aux
bornes de force, d'appareil de protection ou de détection. Les précautions suivantes
doivent être obserées contre commotion électrique accidentelle.
• Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur
(entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre
de sécurité).
• Préparez le boîtier de protection qui couvre l’interface avec le dispositif à tester
et équipez-le d’un circuit de sécurité qui s’ouvre lors de l’ouverture d’une porte.
• Avant de procéder aux mesures, connectez le circuit de sécurité à la borne
Interlock de l’instrument.
• Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité.
• Avant de toucher les connexions des bornes Force, Guard et Sense, mettez
l’instrument hors tension et déchargez tout condensateur du chemin de mesure.
Si vous ne mettez pas l’instrument hors tension, effectuez « toutes » les
opérations ci-dessous, quels que soient les paramètres de l’instrument.
• Terminez les mesures en appuyant sur la touche Stop ; vérifiez que
l’indicateur d’état Measurement est éteint.
• Vérifiez que le témoin High Voltage est éteint.
• Ouvrez la trappe d’accès au boîtier de protection (ouvrez la borne Interlock).
• Déchargez les éventuels condensateurssi la capacité est connectée à une
unité SMU.
• Informez les personnes travaillant à proximité de l’instrument des conditions.

高電圧感電注意
Agilent B1500A のフォース、ガード、センス端子には、危険電圧が出力されること
があります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100
Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。
•3極電源ケーブルを使用して本器を接地してください。
•ドアを開くことによって開放されるインターロック回路を装備し、被測定デバ
イスとのインタフェースを覆うことのできるシールド・ボックスを用意してく
ださい。
•測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく
ださい。
•インターロック機能が正常であることを定期的に確認してください。
•Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源を切断し
てください。また、測定系のキャパシタを放電してください。電源を切らない
場合は、以下の事項を全て実施してください。
•Stop キーを押して Measurement インジケータが消灯したことを確認してくだ
さい。
•高電圧警告（High Voltage）インジケータが消灯していることを確認してく
ださい。
•シールド・ボックスのドアを開けてください（Interlock 端子を開放してくだ
さい）。
•キャパシタが SMU に接続されているならば、キャパシタを放電してくださ
い。
•周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底してください。

Product Stewardship
• Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC
This product complies with the WEEE Directive (2002/96/EC) marking
requirements. The affixed label indicates that you must not discard this electrical/
electronic product in domestic household waste.
Product Category: With reference to the equipment types in the WEEE directive
Annex 1, this product is classified as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Agilent office or visit the
following website for more information.
www.agilent.com/environment/product/
•LCDFluorescentLamp
Certain products sold by Agilent contain a liquid crystal display (LCD); backlighting
for the LCD is provided by a fluorescent lamp which contains mercury, and must
be managed, recycled, and/or disposed in accordance with all applicable laws,
ordinances and regulations.
For information on how to recycle or dispose of the fluorescent lamp contained in
your own product, visit the following website.
http://www.agilent.com/environment/mercury.shtml
If you live in the U.S., also visit the following websites.
http://www.lamprecycle.org
http://www.eiae.org
If you have additional questions, please visit the following website.
http://www.agilent.com/go/contactus
• Perchlorate Information
Perchlorate Material - special handling may apply. Visit the following website.
http://www.dtsc.ca.gov/hazardouswaste/perchlorate/
Equipment's real-time clock battery or coin cell battery may contain perchlorate
and may require special handling when recycled or disposed of in California.

Precautionary Statement
Agilent B1500A Semiconductor Device Analyzer operates in the Microsoft Windows
XP Professional environment. Agilent B1500A requires Agilent EasyEXPERT software,
a specially-designed Windows XP application program.
•About guarantee and support for Agilent B1500A
Agilent Technologies guarantees and supports the performance of Agilent B1500A
for the same condition as the preload condition when shipped from the factory.
• About updating Agilent EasyEXPERT and the Windows Update
Agilent Technologies confirms the operation of Agilent EasyEXPERT patch
programs and important Windows security patches, and provides recommended
update information. Visit Agilent B1500A support site, download the patches, and
perform the software update.
• About Windows XP application programs and peripherals (including driver)
Using commercial products on Agilent B1500A is your responsibility. Agilent
T
echnologies cannot provide compatibility information for commercial products. If
problems arise, perform Agilent B1500A system recovery.
•Aboutservicing
Bench repair service is available at your nearest Agilent Technologies service
center. Be aware that the B1500A configuration might be updated to the latest
one without notice because of support issues.
The internal hard disk drive (HDD) might be initialized during servicing. If
peripherals are connected, they will be removed.
When Agilent B1500A is returned, the internal HDD might be initialized.
Peripherals will be returned separately.
•Othernotes
• Back up the internal HDD to prevent loss of data by accident or failure.
• Protect Agilent B1500A from computer viruses.
•If you connect Agilent B1500A to the network, take care to protect it from
computer virus.

Working in Comfort
To optimize your comfort and productivity, it is important that you set up your work area
correctly and use your instrument properly. With that in mind, we have developed some
set-up and use recommendations for you to follow based on established ergonomic
principles. Improper and prolonged use of keyboards and input devices are among
those tasks that have been associated with repetitive strain injury (RSI) to soft tissues
in the hands and arms. If you experience discomfort or pain while using the instrument,
discontinue use immediately and consult your physician as soon as possible. For more
information on RSI you may wish to consult the About Repetitive Strain Injury section.
Please study the recommendations described below. Included there are references to
relevant parts of international standards, regulations and guidelines, such as ISO 9241
and the European Community Display Screen Equipment directive. You may also wish
to consult your employer’s human resources department or other relevant departments
for guidance specific to your company.
About Repetitive Strain Injury
Because your comfort and safety are our primary concern, we strongly recommend
that you use the instrument in accordance with established ergonomic principles and
recommendations. Scientific literature suggests that there may be a relationship
between injury to soft tissues -especially in the hands and arms- and prolonged
improper use of keyboards or other equipment requiring repeated motions of the
hands and forearms. This literature also suggests that there are many other risk
factors that may increase the chance of such injury, commonly called Repetitive Strain
Injury.
What is RSI?
Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive
motion injury) is a type of injury where soft tissues in the body, such as muscles,
nerves, or tendons, become irritated or inflamed. RSI has been a reported problem for
those who perform repetitive tasks such as assembly line work, meatpacking, sewing,
playing musical instruments, and computer work. RSI also has been observed in those
who frequently engage in activities such as carpentry, knitting, housework, gardening,
tennis, windsurfing and lifting children.
What causes RSI?
The specific causes of RSI have not been established. Nevertheless, the incidence of
RSI has been associated with a variety of risk factors, including:
• Too many uninterrupted repetitions of an activity or motion.

• Performing an activity in an awkward or unnatural posture.
• Maintaining static posture for prolonged periods.
• Failing to take frequent short breaks.
• Other environmental and psychosocial factors.
In addition, there have been reports associating the occurrence of RSI with the use of
keyboards, mice, and other input devices. Also, certain medical conditions, such as
rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of
injury.
What if I experience discomfort?
If you are experiencing any discomfort, seek professional medical advice immediately.
T
ypically, the earlier a problem is diagnosed and treated, the easier it is to resolve.
Mice and Other Input Devices
Various aspects of using mice and other input devices may increase your risk of
discomfort or injury. Observing the following recommendations may reduce that risk.
• Try to keep your hand, wrist, and forearm in a neutral position while using your
mouse or other input device.
• If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a
relaxed, natural shape, and maintain a neutral posture in your hand, wrist, and
forearm.
• Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and
fingers loose. Do not grip the mouse tightly.
• It takes very little pressure or force from your fingers to activate the buttons or
scroll wheel on your mouse, scrolling mouse, trackball, or other input device.
Using too much force can place unnecessary stress on the tendons and muscles
in your hands, wrists, and forearms.
• If you are using a scrolling mouse, be sure to keep your fingers and hand in a
relaxed, neutral position when activating the scroll wheel. Also, this type of mouse
features software that can minimize the number of mouse movements or button
clicks.
• When using a mouse, trackball, or other input device, position it as close to the
keyboard as possible, and keep it at the same level as you do not have to stretch
while using it.
•Be sure to keep your mouse and trackball clean. Regular removal of accumulated
dust and dirt helps ensure proper tracking and reduces unnecessary hand and
wrist motions.

In This Manual
This manual describes the product overview and installation information of Agilent
Technologies B1500A. This manual consists of the following chapters:
•Chapter 1, “Getting Started”
This chapter describes basic operations of Agilent B1500A.
•Chapter 2, “Introduction”
This chapter describes basic features of Agilent B1500A.
•Chapter 3, “Installation”
This chapter describes installation, device connection, and maintenance.
•Chapter 4, “Specifications”
This chapter describes specifications of Agilent B1500A.
•Chapter 5, “Accessories and Options”
This chapter describes accessories and options of Agilent B1500A.
NOTE To get the latest firmware/software/electronic manuals/support information, visit
Agilent Technologies support site (http://www.home.agilent.com), and click
Oscilloscopes, Analyzers, Meters > Parametric & Device Analyzers, Curve Tracers. You
can reach the support site for the Agilent B1500A, B1505A, and EasyEXPERT.
Intel and Celeron are trademarks of Intel Corporation in the U.S. and other countries. Microsoft, Windows, and Windows
Vista are either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries.

Contents
Agilent B1500A User’s Guide, Edition 10
1. Getting Started
To Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
To Turn B1500A On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
To Turn B1500A Off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
To Launch EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
If Only One Workspace Exists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
To Create Workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
To Select Workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
To Use Tracer Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
To Use Application Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
To Use Classic Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
To Perform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
To Use Test Result Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
To Use Analysis Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
2. Introduction
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Agilent EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-16
Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Agilent B1500A User’s Guide, Edition 10
Contents
GNDU - Ground Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
HPSMU - High Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
MPSMU - Medium Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
HRSMU - High Resolution SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
MFCMU - Multi Frequency CMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
HVSPGU - High Voltage SPGU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32
WGFMU - Waveform Generator/Fast Measurement Unit . . . . . . . . . . . . . . . . . . . 2-33
3. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Inspection and Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
To Inspect B1500 and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
To Perform Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
To Change Windows Logon Setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Installing Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
To Connect 16442B Test Fixture (B1500A-A5F). . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
To Connect Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Connecting the interlock terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
To Connect ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
To Connect SCUU/GSWU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
To Connect GNDU Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25