Agilent Technologies TPS-mobile User manual

Agilent TPS-mobile
User Manual

2 Agilent TPS-mobile User Manual
Notices
Manual Part Number
87-901-005-01
Edition G.00, November 2021
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© Agilent Technologies, Inc. 2021
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CAUTION

Contents
Agilent TPS-mobile User Manual 3
Contents
1Istruzioni per l’uso 13
Informazioni su questo manuale 14
Validità 14
Definizioni e terminologia 15
Definizione di Attenzione, Avvertenza e Nota 15
Simboli di avvertenza 16
Sicurezza 18
Uso corretto 18
Uso improprio 19
Attrezzatura di protezione 20
Linee guida di sicurezza per pompe turbomolecolari 21
Trasporto & Immagazzinamento 22
Descrizione del prodotto 23
Installazione 24
Preparazione per l’installazione 24
Set-up 26
Fissaggio del TPS-mobile 27
Collegamento della flangia per alto vuoto 30
Installazione della flangia ISO-K 31
Installazione della flangia ConFlat 32
Avvio e funzionamento del TPS-mobile 33
Soft Start 37
Arresto del TPS-mobile 40
Arresto di emergenza 40

Contents
4 Agilent TPS-mobile User Manual
Unità Speciali 40
Manutenzione 41
Vita del rotore 41
Pulizia 41
Smaltimento 42
Servizio Post Vendita 43
2Betriebsanleitung 44
Informationen über diese Betriebsanleitung 45
Gültigkeit 45
Definitionen und Terminologie 46
Definition von Vorsicht, Warnung und Hinweis 46
Warnsymbole 47
Sicherheit 49
Sachgemäße Verwendung 49
Unsachgemäße Anwendung 50
Schutzausrüstung 51
Sicherheitsrichtlinie für Turbomolekularpumpen 52
Transport und Lagerung 53
Produktbeschreibung 54
Installation 55
Vorbereitung zum Einbau 55
Einrichten 57
Montage von TPS-mobile 58
Anschluss des Hochvakuumflansches 61
Installation des ISO-K-Flansches 62
Installation des ConFlat-Flansches 63

Contents
Agilent TPS-mobile User Manual 5
Inbetriebnahme und Betrieb des TPS-mobile 64
Sanftanlauf 68
Stoppen von Modell TPS-mobile 71
Not-Aus 71
Spezialeinheiten 71
Wartung 72
Rotordauer 72
Reinigung 72
Entsorgung 73
Service 74
3Mode d’emploi 75
À propos de ce manuel 76
Validité 76
Définitions et terminologie 77
Signification des messages d’attention, d’avertissement et des notes 77
Symboles d'avertissement 78
Sécurité 80
Utilisation appropriée 80
Utilisation inappropriée 81
Équipements de protection individuelle 82
Consignes de sécurité pour les pompes turbomoléculaires 83
Transport et entreposage 84
Description du produit 85
Installation 86
Préparation pour l’installation 86
Configuration 88

Contents
6 Agilent TPS-mobile User Manual
Montage du TPS-mobile 89
Raccordement de la bride à vide élevé 92
Installation de la bride ISO-K 93
Installation de la bride ConFlat 94
Démarrage et utilisation du TPS-mobile 95
Démarrage progressif 99
Arrêt du TPS-mobile 102
Arrêt d’urgence 102
Unités spéciales 102
Entretien 103
Durée de vie du rotor 103
Nettoyage 103
Élimination 104
Service 105
4Instrucciones de uso 106
Acerca del manual 107
Validez 107
Definiciones y terminología 108
Definición de Precaución, Advertencia y Nota 108
Símbolos de advertencia 109
Seguridad 111
Uso correcto 111
Uso incorrecto 112
Equipo de protección 113
Pautas de seguridad para bombas turbomoleculares 114
Transporte y almacenamiento 115

Contents
Agilent TPS-mobile User Manual 7
Descripción del producto 116
Instalación 117
Preparación para instalación 117
Puesta en marcha 119
Montaje de la TPS-mobile 120
Conexión de la brida de alto vaciado 123
Instalación de la brida ISO-K 124
Instalación de la brida ConFlat 125
Puesta en marcha y funcionamiento de TPS-mobile 126
Arranque suave (Soft Start) 130
Parada del TPS-mobile 133
Parada de emergencia 133
Unidades especiales 133
Mantenimiento 134
Vida del rotor 134
Limpieza 134
Eliminación 135
Servicio 136
5使用说明137
关于本手册 138
有效性 138
定义与术语 139
小心、警告和注意的定义139
警告符号 140
安全 142

Contents
8 Agilent TPS-mobile User Manual
正确使用 142
使用不当 143
防护设备 144
涡轮分子泵安全指南 145
运输及存储146
产品描述 147
安装 148
安装准备148
设置150
TPS-mobile 的安装 151
高真空法兰的连接155
ISO-K 法兰的安装 156
ConFlat 法兰的安装 157
TPS-mobile 的启动和运行 158
慢启动162
停止 TPS-mobile 165
紧急停止 165
修改的标准165
维护 166
转子寿命 166
清洁166
处置167
服务168

Contents
Agilent TPS-mobile User Manual 9
6取扱説明書 169
この説明書について 170
有効期 170
定義と用語 171
警告・注意・注の定義 171
警告の記号 172
安全性 174
適切な使用 174
不適切な使用 175
保護用装備 176
ターボ分子ポンプ用安全ガイドライン 177
輸送と保管 178
製品説明 179
取り付け 180
取り付けの準備 180
セットアップ 182
TPS-mobile 実装 183
高真空フランジの接続 186
ISO-K フランジの取り付け 187
ConFlat フランジの取り付け 188
TPS-mobile コンパクトの起動と操作 189
ソフトスタート 193
TPS-mobile コンパクトを停止する 196
非常停止 196
修正された標準 196
メンテナンス 197
ローターの寿命 197
クリーニング 197
処分 198
サービス 199

Contents
10 Agilent TPS-mobile User Manual
7Instructions for Use 200
About this manual 201
Validity 201
Definitions and terminology 202
Definition of Caution, Warning and Note 202
Warning Symbols 203
Safety 205
Proper use 205
Improper use 206
Protective equipment 207
Safety guideline for Turbomolecular Pumps 208
Transport & Storage 209
Product description 210
Installation 211
Preparation for installation 211
Set-up 213
TPS-mobile Mounting 214
Connection of the High Vacuum Flange 217
Installation of ISO-K Flange 218
Installation of ConFlat Flange 219
Startup and Operation of the TPS-mobile 220
Soft Start 224
Stopping the TPS-mobile 227
Emergency stop 227
Modified Standard 227
Maintenance 228
Rotor life 228
Cleaning 228
Disposal 229
Service 230