Agilent Technologies FRG-700 User manual

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702
User Manual

2 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Notices
Manual Part Number
TQMa74e1
Edition A.00, January 2024
Copyright
© Agilent Technologies, Inc. 2024
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subject to being changed, without
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Safety Notices
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or death.
Do not proceed beyond a WARNING
notice until the indicated conditions
are fully understood and met.
WARNING
CAUTION

Contents
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 3
Contents
1Instructions for Use 5
About this manual 6
Validity 6
Definitions and terminology 7
Definition of Caution, Warning and Note 7
Warning Symbols 8
Safety 10
Proper use 10
Improper use 11
Safety guideline for FRG-700 and FRG-702 12
Disposal 13
Service 14
2Technical Information 15
Product Description 16
Technical Specifications 17
FRG-700 and FRG-702 Outline 20
Installation 24
Vacuum Connection 24
Removing the Magnet Unit (only for Gauges with CF Flanges) 27
Electrical Connection 28
Use With an Agilent Controller 28
Use With Another Control Device 28

Contents
4 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Operation 29
Adjusting the Gauge 32
Deinstallation 34
Cleaning FRG-700 35
Replacing the Pirani element 36
Cleaning FRG-700, Replacing Parts 36
Disassembling FRG-700 37
Reassembling FRG-700 38
Cleaning FRG-702 39
Cleaning FRG-702, Replacing Parts 40
Disassembling FRG-702 41
Reassembling FRG-702 42
Troubleshooting 44
Spare Parts 45

Instructions for Use
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 5
1 Instructions for Use
About this manual 6
Validity 6
Definitions and terminology 7
Definition of Caution, Warning and Note 7
Warning Symbols 8
Safety 10
Proper use 10
Improper use 11
Safety guideline for FRG-700 and FRG-702 12
Disposal 13
Service 14

Instructions for Use
6 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
About this manual
Validity
This manual lists the instructions for the users of the FRG-700 and FRG-702, with
particular reference to the notions relating to safety, operation and first level
maintenance, limited to maintenance operations for which the user is responsible.
The maintenance operations, illustrated in the specific sections, with specific
provisions relating to the higher level of maintenance (personnel specifically trained
for maintenance operations) must not be carried out by the user.
For a correct installation and start/stop, please refer to "Installation" chapter.
For more detailed technical use, please refer to "Operations" chapter.
NOTE 1 This manual contains useful information so that all personnel using the
FRG-700 and FRG-702 can operate it safely and guarantee perfect efficiency,
for its entire life span.
2 Keep this manual, together with all the related publications, in an accessible
place known to all operators/maintenance personnel.

Instructions for Use
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 7
Definitions and terminology
Definition of Caution, Warning and Note
Some important references of this manual are highlighted and framed in
contrasting color.
CAUTION Caution messages are displayed before procedures which, if not observed, could
cause damage to the equipment.
WARNING
Warning messages draw the operator's attention to a specific procedure or
practice which, if not performed correctly, could result in serious personal
injury.
NOTE Notes are intended to call attention to important information and provide more
detail regarding specific steps.

Instructions for Use
8 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Warning Symbols
The following is a list of symbols that appear in conjunction with warnings on the
FRG-700 and FRG-702. The hazard they describe is also shown.
A triangular symbol indicates a warning. The meanings of the symbols that may
appear alongside warnings in the documentation are as follows:
Generic hazard
ETL (Electrical Testing
Laboratories)
European Declaration
of Conformity
No access to pacemaker carriers
Magnetic Field
Waste Electrical and Electronic Equipment

Instructions for Use
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 9
The following symbol may be used on warning labels attached to the instrument.
When you see this symbol, refer to the relevant operation or service manual for the
correct procedure referred to by that warning label.
The following symbols appear on the instrument for your information.
CE certification
Waste Electrical and Electronic Equipment
Generic Hazard
No access to pacemaker carriers
Magnetic Field
ETL (Electrical Testing Laboratories)

Instructions for Use
10 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Safety
This section contains the information, prescribed by the Low Voltage Directive
2014/35/EU, which is essential for the compliance and observance of the safety
regulations both generally and in relation to the specific use of the product.
Failure to comply with these instructions and the other instructions contained in this
manual may render the safety conditions envisaged in the design phase inefficient and
cause accidents to those operating the product.
Agilent Technologies declines all responsibility for damage to the product or for the
physical safety of the operator or third parties deriving from the non-observance of the
safety rules indicated in the technical documentation.
Proper use
This manual contains important warnings and safety instructions to be observed in
order for the unit to work safely.
The product described in this manual is intended exclusively for the area of
application specified in the instructions. The manual also provides indications
regarding the essential requirements for the application and operation of the
product as well as the safety measures that can be adopted to guarantee regular
operation. Agilent Technologies does not provide any guarantee or assume any
responsibility for applications other than those described in this manual or in which
the essential requirements and safety measures are not respected.
The product must only be used by qualified personnel who are able to take the
necessary safety measures under conditions that do not cause damage or injury.
Any accessories and equipment used with the product must be supplied or
approved by Agilent Technologies. Any adjustment or maintenance operation must
be performed by a professional technician informed about the risks.
Repairs on the product must be carried out exclusively by Agilent authorized
personnel.

Instructions for Use
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 11
Improper use
Agilent Technologies declines all responsibility, deriving from the improper use of
the FRG-700 AND FRG-702.
Agilent assumes no liability and the warranty becomes null and void if the end-user
or third parties:
 disregard the information in this document
 use the product in a non-conforming manner
 make any kind of interventions (modifications, alterations etc.) on the product
 use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination or wear and tear as well as expendable parts
(e.g. filament) are not covered by the warranty.

Instructions for Use
12 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Safety guideline for FRG-700 and FRG-702
 Adhere to the applicable regulations and take the necessary precautions for the
process media used.
 Consider possible reactions between the materials and the process media.
 Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.
 Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
 Before beginning to work, find out whether any vacuum components are
contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
WARNING
DANGER: magnetic fields
Strong magnetic fields can disturb electronic devices like heart pacemakers
or impair their function.
Maintain a safety distance of ≥10 cm between the magnet and the heart
pacemaker or prevent the influence of strong magnetic fields by
antimagnetic shielding.
CAUTION
Vacuum component
Dirt and damages impair the function of the vacuum component. When handling
vacuum components, take appropriate measures to ensure cleanliness and
prevent damages.
CAUTION
Dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate. Always wear clean, lint-free gloves and use clean tools
when working in this area.

Instructions for Use
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 13
Disposal
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE (Waste Electrical
and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community) indicates that the
product it applies to must NOT be disposed of together with ordinary domestic or
industrial waste but must be sent to a differentiated waste collection system. The
end user is therefore invited to contact the supplier of the device, whether the
Parent Company or a retailer, to initiate the collection and disposal process after
checking the contractual terms and conditions of sale.
Figure 1 Logo "WEEE"
For more information refer to:
http://www.agilent.com/environment/product/index.shtml
Separating the components After disassembling the product, separate its
components according to the following criteria:
Contaminated components Contaminated components (radioactive, toxic,
caustic or biological hazard etc.) must be
decontaminated in accordance with the relevant
national regulations, separated according to
their materials, and disposed o
f
.
Other components Such components must be separated according
to their materials and recycled.

Instructions for Use
14 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Service
Should a customer need support, please contact local distributor
or directly e-mail to:
vpt-customerca[email protected]
[email protected]
Completion of the “Request for Return” form is required to return your product to
Agilent for service (provided at the end of this manual).

Technical Information
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 15
2 Technical Information
Product Description 16
Technical Specifications 17
FRG-700 and FRG-702 Outline 20
Installation 24
Vacuum Connection 24
Removing the Magnet Unit (only for Gauges with CF Flanges) 27
Electrical Connection 28
Use With an Agilent Controller 28
Use With Another Control Device 28
Operation 29
Adjusting the Gauge 32
Deinstallation 34
Cleaning FRG-700 35
Replacing the Pirani element 36
Cleaning FRG-700, Replacing Parts 36
Disassembling FRG-700 37
Reassembling FRG-700 38
Cleaning FRG-702 39
Cleaning FRG-702, Replacing Parts 40
Disassembling FRG-702 41
Reassembling FRG-702 42
Troubleshooting 44
Spare Parts 45

Technical Information
16 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Product Description
The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702 have been designed
for vacuum measurement in the pressure range of 5×10-9 ... 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauges can be operated in connection with an Agilent AGC-100 Vacuum Gauge
Controller, an Agilent Turbo AG Rack Controller, or with another controller.
Over the whole measuring range, the measuring signal is output as a logarithm of
the pressure. The gauge consists of two separate measurement systems (Pirani
and cold cathode system) the signals of which are combined in such a way that
one measurement signal is output. The Pirani measurement circuit is always on.
This document applies to products with part numbers:
FRG-700 (FPM sealed) FRG-702 (all-metal)
FRG700KF25 (DN 25 ISO-KF) FRG702KF25 (DN 25 ISO-KF)
FRG700CF35 (DN 40 CF-C) FRG702KF40 (DN 40 ISO-KF)
FRG702CF35 (DN 40 CF-C)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to the product with part number FRG700KF25.
They apply to the other products by analogy. We reserve the right to make technical
changes without prior notice. All dimensions in mm.
In all communications with Agilent, please specify the information given on the
product nameplate. For convenient reference copy that information into the space
provided below.

Technical Information
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 17
Technical Specifications
Table 1 Technical Specifications
Specifications Value
Measuring range (air, N
2
) 5×10
-9
... 1000 mbar
Accuracy (N
2
) ≈±30%
in the range 1×10
-8
... 100 mbar
Reproducibility ≈±5%
in the range 1×10
-8
... 100 mbar
Gas type dependence See page 21
Output signal (measuring signal)
Voltage range 0 ... +10.5 V
Measuring range 1.82 ... 8.6 V
Voltage vs. pressure logarithmic, 0.6 V / decade
Error signal <0.5 V no supply
>9.5 V Pirani measurement element
defective (filament rupture)
Output impedance 2×10 Ω
Minimum loaded impedance 10 kΩ, short-circuit proof
Response time (pressure dependent)
p > 10
-6
mbar
p = 10
-8
mbar
<10 ms
≈1000 ms
Gauge identification 85 kΩ referenced to supply common
Status
p > 10
-2
mbar
Pirani-only mode
p < 10
-2
mbar
Cold cathode not ignited
Pirani-only mode
p < 10
-2
mbar
Cold cathode ignited
Combined Pirani /
cold cathode mode
Lamp
Pin 6
Low = 0 V
Low = 0 V
High = 15 ... 30 VDC
High voltage on (LED on)

Technical Information
18 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
Table 1 Technical Specifications (continued)
Specifications Value
Su
pp
l
y
WARNING
The gauge may only be connected to power supplies, instruments or control devices
that conform to the requirements of a grounded extra-low voltage (SELV). The
connection to the gauge has to be fused1).
Supply voltage at the gauge 15.0 ... 30.0 VDC (ripple ≤1 Vpp)
Power consumption ≤2 W
Fuse1) ≤1 AT
The minimum voltage of the power supply must be increased proportionally to the length of the sensor cable.
Voltage at the supply unit
with maximum line length
16.0 ... 30.0 VDC (ripple ≤1 Vpp)
Adjustment
<HV> potentiometer
<ATM> potentiometer
at <10-4 mbar
at atmospheric pressure
Electrical connection
Sensor cable
Line length
FCC68 female, 8 poles
8 conductors plus shielding
≤50 m (8x0.14 mm²)
Operating voltage
Operating current
≤3.3 kV
≤500 µA
Grounding concept
Vacuum connection-signal
common
Supply common-signal
common
see paragraoh Electrical Connection (page 28)
connected via 10 kΩ(max. voltage differential
with respect to safety ±50 V
with respect to accuracy ±10 V)
conducted separately
Materials exposed to vacuum
Vacuum connection
Measuring chamber
Feedthrough
Internal seals
FRG-700
FRG-702
Anode
Ignition aid
Pirani measuring tube
Pirani filament
stainless steel
stainless steel
ceramic
FPM 75
Ag, Cu, soft solder (Sn, Ag)
Mo
stainless steel
Ni, Au
W
1) Agilent controller fulfill these requirements.

Technical Information
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 19
Table 1 Technical Specifications (continued)
Specifications Value
Mounting orientation any
Internal volume ≈20 cm³
Pressure ≤10 bar (absolute)
limited to inert gases
Temperatures
Operation
FRG-700
FRG-702
Bakeout
Pirani filament
Storage
+5 ... +55 °C
+5 ... +150 °C
(at flange in horizontal mounting orientation, without magnetic shielding)
+150 °C
(without magnetic shielding and electronics unit)
+120 °C
–40 °C ... +65 °C
Relative humidity
Use
Degree of protection
≤80% at temperatures up to +31 °C decreasing to 50% at +40 °C
indoors only
altitude up to 2000 m
IP 40

Technical Information
20 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
FRG-700 and FRG-702 Outline
Dimensions [mm]
Weight
FRG700KF25 ≈700 g FRG702KF25 ≈730 g
FRG700KF25 ≈980 g FRG702KF40 ≈750 g
FRG702CF35
≈1010 g
Figure 2 FRG-700 and FRG-702 Outline
FRG-700 FRG-702