Ametek TMC CleanBench Aktiv User manual

CleanBench™Aktiv
Everstill™Technology
Active Vibration Cancellation Lab Table
User Guide
96-44439-01 Rev A
10/24/18

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 Warnings
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com/ Page ii
Warnings
Power Supply (included)
The AC voltage requirement is 90-260 VAC, 50-60 Hz.
Power Cord (applicable cable included)
The main power cord has 0.75mm (18 AWG) wire and includes a PE ground.
US AC power cord is UL / CSA certified
Euro AC power cord is VDE certified
UK AC power cord is VDE certified
.
Ventilation
TMC recommends that system be installed in an unrestricted air
circulation environment.
Operating Temperature
If system is exposed to a 30°F (15°C) temperature variation, then ensure system power
is turned OFF and wait at least 3 hours before applying power to the system.
System Usage
The system internal controller and its components are only to
be used for its intended purposes as described in this manual.
Any other usage could jeopardize operator safety and possibly
void the warranty.
Certifications
Complies with European Union requirements
Compliant with Restriction of Hazardous Substances

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 Table of Contents
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page iii
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TABLE OF CONTENTS
1Introduction ..........................................................................1
2Unpacking & Moving System ..............................................3
Shipping Crate Content..........................................................3
Tools required........................................................................3
Unpacking System .................................................................4
Moving System.......................................................................9
3Setup and Operation..........................................................13
Controls and Connections....................................................13
Operation .............................................................................17
Troubleshooting Tips............................................................18
4Specifications.....................................................................19
5Dimensional Drawing.........................................................21

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 Figures & Tables
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page iv
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FIGURES &TABLES
Figure 2-1 Shipping crate delivery ...............................................................3
Figure 2-2 Remove banding straps..............................................................4
Figure 2-3 Remove ramp panel screws.......................................................4
Figure 2-4 Lower ramp panel.......................................................................5
Figure 2-5 Remove crate panel clips ...........................................................5
Figure 2-6 Remove metal bands securing system to crate..........................6
Figure 2-7 Lower two side casters...............................................................6
Figure 2-8 Lower center caster....................................................................7
Figure 2-9 Roll system off platform .............................................................7
Figure 2-10 Remove two metal shipping brackets........................................8
Figure 2-11 Remove protective top metal bands .......................................... 8
Figure 2-12 Minimum pathways space for moving system............................9
Figure 2-13 Raise all three casters...............................................................9
Figure 2-14 Rotate side casters 90 degrees toward narrow pathway......... 10
Figure 2-15 Rotate side casters back to locking position............................ 10
Figure 2-17 Raise all three casters............................................................. 11
Figure 3-1 Control panel functions............................................................13
Figure 3-2 AC power and air supply connections...................................... 13
Figure 4-1 Valve level adjust..................................................................... 15
Figure 5-2 Control panel operation............................................................ 17
Figure 6-1 Transfer Function Graph..........................................................19
Figure 7-1 CleanBench™ Aktiv Dimensional Drawing.............................. 21

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 1Introduction
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 1
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1Introduction
The CleanBench™Aktiv with Everstilltechnology is a two-stage vibration isolation table.
The first stage:The active stage which senses and cancels vibration originating from the floor
by incorporating TMC’s proven serial architecture originally developed for STACIS.
The second stage:Consists of the well proven Gimbal Piston®isolators. The two-stage
active/passive approach allows the system to isolate highly sensitive instrumentation from
both low and high frequency vibration in all six degrees of freedom. The combination of low
frequency active vibration cancellation and higher frequency passive cancellation make for a
unique and powerful combination.
Design concept: CleanBench™Aktiv is designed to support benchtop sized optical and
scanning probe microscopes, AFMs, optical profilers and other sensitive instruments. It is
intended to support those customers who have the most challenging and sensitive
instruments with respect to floor vibration. CleanBench™Aktiv reduces floor vibration across
the critical frequency range of 2 to 30 Hz by an order of magnitude (10X) compared to TMC’s
standard CleanBench with Gimbal Piston®isolators.
Everstilltechnology: The highly advanced patented Everstilltechnology delivers best-in-
class vibration cancellation starting at 0.7 Hz.
Installation: TMC’s CleanBench™Aktiv is easy to install. The only input requirements are from
a standard AC power outlet and 80 psi of compressed air.Once the hook up of the facility
requirements is completed, simply push the power ON/OFF button to initiate automatic
leveling/height adjustments of the Gimbal Piston®isolators. The floating height of the
isolators and the system is fully operational. No special tuning of the system is required.
Key Feature Highlights
•Superior low frequency performance
Starts to isolate at 0.7 Hz
Significant vibration cancellations in the critical 1-10 Hz range
•Accommodates a wide range of instrument weights
CleanBench™Aktiv can support a range of 0 to 580 lbs. on it’s top platform.
•Saturation and oscillation control
CleanBench™Aktiv automatically senses very large disturbances and automatically
responds to ensure optimal performance under these adverse conditions.
An example of this is a person leaning on the highly sensitive isolated platform or
bumping into the support frame
.

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 1Introduction
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 2
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•Patented active vibration cancellation technology paired with passive isolation
two stages of vibration isolation. Active and passive cancellation working together for
ultra-precision instruments.
•Advanced vibration sensor technology
Incorporates geophone type velocity sensors for sub-1 Hz performance
Better low frequency sensitivity than accelerometers
•Active stage of isolation evolved from STACISserial achitecture
TMC’s vibration control technology proven on long time STACIStechnology
Easy to install and operate
•Shipping crate includes a built in hinged ramp for system easy roll off
•CleanBench™ Aktiv has integrated retractable casters
•Manually adjustable leveling of top platform
•Wrench included for raising and lowering casters
•Wrench included for removing shipping brackets
•Universal electrical input for use worldwide
•Single ON/OFF push button
•The system performs self-diagnostics at start-up

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 3
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2Unpacking & Moving System
Figure 2-1 Shipping crate delivery
Shipping Crate Content
CleanBench™ Aktiv
Applicable Power Cord
Air Line
15 feet of ¼” air line
Installation Operation Guide Unpacking Brief Tool Included
Table 2-1 Crate content
Tools required
•Hand and eye protection
•Metal shears to cut the metal banding
•Pry tool to remove metal clips along edges of crate
•Screw driver to remove top crate panel
CAUTION!
System weighs
approximately 450
lbs. (204 kg)

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 4
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Unpacking Instructions
Ensure that your wearing hand and eye protection gear
Step 1 Cut and remove the 5 metal bands around the crate using metal shears.
Figure 2-2 Remove banding straps
Step 2 Remove philips screws attaching RAMP panel to crate.
Figure 2-3 Remove ramp panel screws
Remove
panel screws

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 5
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Step 3 Swing open hinged RAMP panel to the floor
Lower RAMP panel hinged to the lower edge of crate platform
Swing open metal ramp.
Figure 2-4 Lower ramp panel
Step 4 Remove clips on crate three side panels
Once panels are removed, place panels in an area where they will not cause
disruption with the remainder of the unpacking process.
Figure 2-5 Remove crate panel clips

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 6
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Step 5 Remove two metal bands securing CleanBench™Aktiv to the base of the crate
Do not remove two metal bands that secures tabletop protective cover to the frame
Figure 2-6 Remove metal bands securing system to crate
Step 6 Lower two casters attached to each side of the frame to raise system off the
base of the crate.
Rotate casters so the arrow located near the adjustable hex is pointing
toward the center caster track.
Insert locking pin attached to the caster assembly via a cable lanyard to
prevent casters from rotating on retractable threaded rod.
Figure 2-7 Lower two side casters

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 7
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Step 7 Lower center caster wheel onto ramp’s metal track using supplied wrench
Ensure swivel caster is lowered into the ramp’s center track to allow system to
roll forward down the ramp
Figure 2-8 Lower center caster
Step 8 Using two people, carefully roll system down the ramp onto the floor.
Figure 2-9 Roll system off platform

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 8
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Step 9 Remove two metal shipping brackets from the two front legs of the frame using
supplied wrench.
Figure 2-10 Remove two metal shipping brackets
Step 10 Cut and remove two metal bands that secures protective top cover to frame
using cuttng shears.Remove and discard protective cover.
Figure 2-11 Remove protective top metal bands

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 9
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Moving System
Moving system normally requires a minimum pathway of 48 inches (1219 mm)wide or greater
with casters locked in position as system was uncrated. The casters can be adjusted to allow
passing through narrow pathways with a minimum width of 35.5 inches (902 mm).
•48 inches (1219 mm)Minumum space allowed for moving system with casters
oriented and locked in forward position as system was uncrated.
•35.5 inches (902 mm)Minumum space allowed when casters are unlocked and rotated
90 degrees in direction of forward movement. Casters cannot be locked in this position.
Before continuing to move system forward through 48 inch pathways or greater, casters
must first be repositioned and locked back in there original position.
Figure 2-12 Minimum pathways space for moving system
Step 1 48 inches; If pathway ahead is 48 inches or greater, then move system to final
destination; otherwise skip to Step 3.
Step 2 Lower system to the floor by raising all three casters.
Remove locking pin on two side swivel casters
Raise all three casters using wrench supplied by TMC
Figure 2-13 Raise all three casters

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 10
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Step 3 35.5 inches; If pathway ahead is less than 48 inches and a minimum of 35.5
inches, then casters need to be adjusted for narrow pathway
Rotate system so narrow end is pointing toward narrow pathway
Remove locking pin on two side swivel casters
Rotate two side casters 90 degrees so they are pointing in forward
direction using wrench supplied by TMC
Figure 2-14 Rotate side casters 90 degrees toward narrow pathway
Step 4 48 inches If you intend to continue moving system through a wider pathway with
a minimum width of 48 inches; then the two non-swivel side casters first need to
be rotated back into their locked position.
Rotate system so wide end is pointing forward
Rotate two side casters 90 degrees to align locking pin hole using wrench
supplied by TMC. Insert pins to lock casters from rotating.
Proceed to final destination
Figure 2-15 Rotate side casters back to locking position

CleanBench™ Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 2Unpacking & Moving System
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 11
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Step 5 Lower system to the floor by raising all three casters.
Remove locking pin on two side swivel casters
Raise all three casters using wrench supplied by TMC
Figure 2-16 Raise all three casters

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 12
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CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 3Controls and Connections
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 13
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3Controls and Connections
Control Panel
Figure 3-1 Control panel functions
Connections
Step 1 Connect external AC power source to input power connector on rear connection
panel
Step 2 Connect 1/4-inch O.D. air-supply line to air input fitting.
-
Figure 3-2 AC power and air supply connections
Main air supply pressure
Isolator air pressure
Push-push power
ON/ OFF switch
Blue power indicator
illuminates once self-diagnostic
has completed indicating
system is functional

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 14
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CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18 4System Setup
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 15
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4System Setup
Note: System tabletop does not include a payload during first time initial setup procedure
Step 1 Ensure power is OFF.
Step 2 Turn on air and adjust facility input air pressure gauge to read 15 to 20 psi
greater than the isolator pressure gauge. The maximum input air pressure must
not exceed 100 psi.
System is designed to support 0 to 580 lb payload above the weight of the
Tabletop platform.
0 lb payload – Isolator pressure is 12 psi each. Incoming pressure should
be set at 27 psi or greater.
580 lb payload - Isolator pressure is 40 psi each if perfectly distributed.
This changes as the center of mass is moved from the center. It is expected
that the pressure in any one isolator will not exceed 80 psi.
If an isolator reaches the max. 80 psi, then the input pressure should be 95 psi
minimum.
Step 3 Adjust two leveling valves to ensure the floating height of each isolator is
between 0.28” to 0.375”. Measure between the top ring to the bottom of the load disc
Figure 4-1 Valve level adjust
Min.= 0.28”
Max.= 0.375”

CleanBench™Aktiv ▪ User Guide ▪ 96-44439-01 Rev A ▪ 10/24/18
TMC 15 Centennial Drive Peabody, MA 01960 [phone] www.techmfg.com Page 16
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