BRONKHORST EL-FLOW Select Series User manual

Doc. no.: 9.17.099 rev. F Date: 17-02-2020
ATTENTION
Pleaseread this documentcarefully beforeinstalling and operating the product.
Not following the guidelines could resultin personalinjury and/or damage to theequipment.
EL-FLOW® Select series
Thermal Mass Flow Meters and Controllers
Instruction Manual

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F2
Copyright
© 2020 Bronkhorst High-Tech B.V.
All rights reserved. No part of this publication may be reproduced, distributed, or transmitted in any form or by any means,
without the prior written permission of the publisher.
Disclaimer
This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability for
errors, inaccuracies or absence of information. The material in this document merely serves information and illustration
purposes; no rights can be derived from its contents.
Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without informing
anyone. The information contained in this document is subject to change without notice. Device specifications and the
contents of the package may deviate from what is stated in this document.
Symbols in this document
Important information. Disregardingthisinformationcould increasetherisk ofdamageto theequipment, or theriskof
personal injuries.
Helpful information. Thisinformationwill facilitate theuse oftheinstrument and/or contributeto its optimal
performance.
Additional informationavailableontheinternet or from your Bronkhorst representative.
Receipt of equipment
Check the outside packaging box for damage incurred during shipment. If the box is damaged, then the local carrier must
be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Bronkhorst
representative.
Carefully remove the equipment from the box. Verify that the contents of the package was not damaged during shipment.
Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At
the same time a report should be submitted to your Bronkhorst representative.
·Checkthepackinglist to ensurethat youreceivedall oftheitemsincludedin thescopeofdelivery
·Do not discardspareor replacement partswiththepackagingmaterial
Refer to Removal and return instructions about return shipment procedures.
Equipment storage
The equipment should be stored in its original package in a cupboard warehouse or similar. Care should be taken not to
subject the equipment to excessive temperatures or humidity.

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 3
Warranty
Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date
of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
Seealsosection9 (Guarantee)oftheConditionsofsales:
www.bronkhorst.com/int/about/conditions-of-sales/
The warranty includes all initial and latent defects, random failures, and indeterminable internal causes. It excludes failures
and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand. The costs of unstamped returns are added to the
repair invoice. Import and/or export charges as well as costs of foreign shipping methods and/or carriers are paid by the
customer.
General safety precautions
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables for cracks or breaks before each use.
The equipment and accessories must be used in accordance with their specifications and operating instructions, otherwise
the safety of the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening the equipment is not allowed. There are no user serviceable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech B.V.
One or more warning signs may be present on different parts of the product. These signs have the following meaning:
Consult theinstructionmanual for handlinginstructions
Surfacemayget hot duringoperation
Shockhazard; electrical partsinside
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard
fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are
not safety related may be obtained from other suppliers, as long as they are equivalent to the original component. Selected
parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsure
about the relevance of a replacement component, contact your Bronkhorst representative for information.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F4

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 5
Table of contents
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Introduction1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this manual
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.3 Product description
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.4 Calibration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.5 Maintenance
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.6 Documentation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.7 Model key
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10EL-FLOW® Select1.7.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11EL-FLOW® Metal Sealed1.7.2
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Installation2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.1 Functional properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.2 Operating conditions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.3 Mounting
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.4 Piping requirements
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142.5 Fluid connection
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142.6 Electrical connection
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142.7 Fieldbus connection
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15FLOW-BUS2.7.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Modbus2.7.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15PROFIBUS DP2.7.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15DeviceNet™2.7.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15EtherCAT®2.7.5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15PROFINET2.7.6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162.8 Communication interface
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17RS232 communication2.8.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Fieldbus communication2.8.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18E-8000 power supply, readout and control2.8.3
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Operation3
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.2 First use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.3 Mass flow measurement and control
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Changing fluid set3.3.1
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213.5 Manual controls
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21LED indications3.5.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Interface status3.5.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23DeviceNet™ indications3.5.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Multifunctional switch3.5.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Normal operating functions3.5.2.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Power-up functions3.5.2.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Control mode - readout/change3.5.2.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Network settings - readout/change3.5.2.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Rotary switches3.5.3

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F6
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Analog operation3.6.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29Digital operation (RS232)3.6.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29FlowDDE3.6.2.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Software (DDE applications)3.6.2.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Digital fieldbus operation (RS485)3.6.3
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Using multifunctional switch3.7.1
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Digital parameters4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334.1 General
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344.2 Special parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Default control mode4.2.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354.3 Measurement and control
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36Advanced measurement and control4.3.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 374.4 Device identification
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384.5 Alarms
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404.6 Counter
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 414.7 Network configuration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 424.8 Fluid set
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44Advanced fluid set parameters4.8.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454.9 Master/slave configuration (FLOW-BUS)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Troubleshooting and service5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465.1 Errors and warnings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465.2 Restoring factory settings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 475.3 Common issues
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495.4 Service
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Returns6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 506.1 Removal and return instructions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 506.2 Disposal (end of lifetime)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Parameter index

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 7
1Introduction
1.1 Scope of this manual
This manual covers the EL-FLOW® Select (including the EL-FLOW® Metal Sealed) series mass flow meters/controllers for
gases. It contains general product information, installation and operating instructions and troubleshooting tips.
Standard
Metal sealed
1.2 Intended use
The EL-FLOW® Select is designed to accurately measure and/or control gas flow rates in a fluid system using the media and
operating conditions (e.g. temperature, pressure) that were specified at ordering time.
The gas(es) in the pressurized system in which the instrument is mounted must be clean and dry. The equipment is suited
for general purpose indoor (dry) applications, like laboratories and machine enclosures.
EL-FLOW® Select instruments are suitable for use at temperatures conditions between -10 and +70 °C and a relative
humidity of 10 to 90% RH, unless specified otherwise. The instruments have an ingress protection of IP-40, implying that the
electronics housing and electrical connection do not offer any protection against moist environments.
EL-FLOW® MetalSealed instruments are designed for high purity applications.
Thewetted materialsincorporatedintheEL-FLOW® Select arecompatiblewith media andconditions(e.g. pressure,
temperature)asspecifiedat orderingtime. Ifyouareplanningto usetheproduct (includingany third partycomponents
suppliedbyBronkhorst, such aspumpsor valves)with other media and/or other conditions, alwayscheckthewetted
materials(includingseals)for compatibility. Seethetechnical specificationsoftheproduct andconsult third party
documentation(ifapplicable)to checktheincorporatedmaterials.
Responsibility for theuseofthe equipment withregardto suitability, intended use, cleaningand corrosionresistanceofthe
appliedmaterialsagainst theprocessed media liessolely with theenduser.
Whereappropriate, thisdocument recommendsor prescribessafetymeasures to betakenwithrespect tomedia usageor
workingwith thedescribed equipment under thespecifiedconditions. Theenduser isresponsiblefor takingthenecessary
safety precautionsandproper use of appropriate(personal)protective equipment, evenifsuchisnot explicitly
recommendedor requiredin thisdocument.
Theend user isconsideredto befamiliar withthenecessarysafetyprecautions, andtocomply withtheappropriate
protectivemeasuresasdescribed in theMaterial Safety DataSheetsofthemediato beusedinthesystem (if applicable).
Bronkhorst High-TechB.V. cannot beheld liablefor anydamageresultingfrom improper or unsafeuse, usefor other than
theintendedpurpose or usewithother mediaand/or under other conditionsthanspecifiedonthepurchaseorder.
SeealsosectionSealingmaterial compatibility.
1.3 Product description
EL-FLOW® Select series Mass Flow Meters/Controllers are based on the thermal bypass measuring principle. The instruments
are of modular construction with a 'laboratory style' printed circuit board housing. Control valves can either be integrally or

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F8
separately mounted, to measure and control gas flows from 0,014…0,7 mln/min up to 8…1670 ln/min N2-equivalent.
The standard control valves on Bronkhorst® mass flow controllers are suited for max. 64 or 100 bar pressure ratings. These
valves are normally closed and available up to Kv-values of 1.5. Normally open valves can also be supplied. Various other
valve constructions enable the controlling of flow rates at very low differential pressure or at high pressure (max. 200 or 400
bar).
All models of the EL-FLOW® Select series are equipped with a digital printed circuit board, featuring diagnostics, alarm and
counter functions, digital communication (RS232) and remotely adjustable control settings. These digital instruments offer
great flexibility thanks to the "multibus" concept, whereby the instruments can be equipped with an on-board interface
with DeviceNet™, PROFIBUS DP, PROFINET, Modbus, EtherCAT® or FLOW-BUS protocol.
EL-FLOW® Select instruments can be offered with optional Multi Fluid / Multi Range (MF/MR) functionality (to be specified
at the moment of ordering). This option offers greater flexibility for user selection of both flow ranges and gas types,
maintaining high accuracy and turndown range for measurement and control. Thanks hereto, users of these instruments
can rescale their instruments on site, saving time (and money) for mounting and dismounting. For the convenience of the
user, Bronkhorst has developed an easy-to-use software tool called FlowTune for changing the configuration of
instruments with activated Multi Fluid / Multi Range option.
This document also applies to EL-FLOW® Metal Sealed series mass flow meters/controllers. These instruments are
characterized by their unique, patented, metal-to-metal sealing construction with excellent resealing capability.
Furthermore, the instruments distinguish themselves by a high surface quality and are therefore especially suitable for
meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks
of the mass flow meters and controllers have 1/4" face seal male (VCR) connections. EL-FLOW® MetalSealed series are
available for ranges from 0.12…6 mln/min up to 1…50 ln/min N2-equivalent and are suited for max. 64 or 100 bar pressure
ratings. The digital features of the EL-FLOW® Select series are also applicable for all metal sealed models.
1.4 Calibration
The EL-FLOW® Select is factory calibrated. Periodical inspection, recalibration or verification of the accuracy may be subject
to individual requirements of the end user.
Bronkhorst certifies that the instrument meets the rated accuracy. Calibration has been performed using measurement
standards traceable to the Dutch Metrology Institute (VSL).
Unlessspecifiedotherwise, EL-FLOW® SelectinstrumentsareAir or N2calibrated. Thecalibrationisconvertedto the
customer’sfluid andconditionsusinga detailedconversionmodel. Thisconversionmodel providesall thefluiddataand
calculationsfor theapplicableprocessconditionsandisalsousedfor theoptional Multi FLuid/Multi Rangefunctionality of
theinstrument.
1.5 Maintenance
The EL-FLOW® Select needs no regular maintenance if operated properly, with clean media, compatible with the wetted
materials, avoiding pressure and thermal shocks and vibrations. Units may be purged with a clean, dry and inert gas.
In case of severe contamination, cleaning the inside of the device may be required. After cleaning, recalibration of the
instrument is recommended.
Inexpertly servicinginstrumentscanlead toseriouspersonal injuryand/or damage totheinstrument or thesystem it is
usedin. Servicingmust thereforebeperformedbytrained andqualifiedpersonnel. Contact your Bronkhorst representative
for informationabout cleaningand calibration. Bronkhorst hasatrainedstaffavailable.

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 9
1.6 Documentation
The EL-FLOW® Select comes with all necessary documentation for basic operation and maintenance. Some parts of this
manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration certificates,
test certificates and material certificates are included in the scope of delivery or can be provided on request.
Thedocumentationlistedin thefollowingtableisavailableontheEL-FLOW® Selectproduct pagesunder
www.bronkhorst.com/products :
Type
Document name
Document no.
Brochures
EL-FLOW® Select Brochure
9.60.006
Metal Sealed Brochure
9.60.013
Manuals
Instruction Manual EL-FLOW® Select (this document)
9.17.099
Quick Installation Guide EL-FLOW® Select
9.17.098
Technical documentation
Hook-up diagram Analog/RS232
9.16.119
Hook-up diagram CANopen
9.16.217
Hook-up diagram DeviceNet™
9.16.122
Hook-up diagram EtherCAT®
9.16.124
Hook-up diagram FLOW-BUS
9.16.120
Hook-up diagram Modbus
9.16.123
Hook-up diagram PROFIBUS DP
9.16.121
Hook-up diagram PROFINET
9.16.147
Hook-up diagram custom bus & I/O configurations
9.16.118
Dimensional drawings
model specific
Thedocumentationlistedin thefollowingtablecanbedownloadedfrom www.bronkhorst.com/downloads :
Type
Document
Document no.
General documentation
EU Declaration of Conformity
9.06.021
Instruction manuals
Manual CANopen interface
9.17.131
Manual DeviceNet™ interface
9.17.026
Manual EtherCAT® interface
9.17.063
Manual FLOW-BUS interface
9.17.024
Manual Modbus interface
9.17.035
Manual PROFIBUS DP interface
9.17.025
Manual PROFINET interface
9.17.095
Manual RS232 interface
9.17.027
1.7 Model key
The model key on the serial number label contains information about the technical properties of the instrument as ordered.
The specific properties can be retrieved with the diagrams below.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F10
1.7.1 EL-FLOW® Select

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 11
1.7.2 EL-FLOW® Metal Sealed

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F12
1.8 Sealing material compatibility
EL-FLOW® Select instruments are fitted from factory with internal seals compatible with the specified gas type. Before using
other media, always check their compatibility with the applied sealing materials. Check the corresponding indication in the
model key on the serial number label to see which sealing materials have been incorporated in your specific instrument.
When in doubt, do not hesitate to contact your Bronkhorst representative for more information.
The table below lists compatibility with some commonly used gases:
Gas
Sealing material
Viton®
EPDM
Kalrez®/FFKM
Air
ü
ü
ü
Ar (Argon)
ü
ü
ü
CH4 (Methane)
ü
û
ü
CO (Carbonmonoxide)
ü
ü
ü
CO2 (Carbondioxide)
max 10 bar(g), 50°C
ü
max 10 bar(g), 50°C
(ED compound1max 30 bar(g))
C2F6 (Freon-116)
ü
ü
ü
C2H2 (Acetylene)
ü/û2
ü
ü
C2H4 (Ethylene)
max 10 bar(g)3
max 10 bar(g)
max 10 bar(g)
C2H6 (Ethane)
ü
û
ü
C3H6 #2 (Propylene)
max 10 bar(g)
û
max 58 bar(g)3
C3H8 (Propane)
ü
û
ü
Cl2 (Chlorine)
ü
û
ü
He (Helium)
ü
ü
ü
H2 (Hydrogen)
ü
ü
ü
H2S (Hydrogensulfide)
û
ü
ü
Kr (Krypton)
ü
ü
ü
NF3 (Nitrogen trifluoride)
û
û
ü
NH3 (Ammonia)
û
ü
ü
NO (Nitric oxide)
û
û
ü
N2 (Nitrogen)
ü
ü
ü
N2O (Nitrous oxide)
max 20 bar(g), 50°C
ü
ü
O2 (Oxygen)
ü
ü
ü
SF6 (Sulfur hexafluoride)
û
ü
ü
SiH4 (Silane)
ü/û2
û
ü
Xe (Xenon)
ü
ü
ü
1) ED: Explosive Decompression resistant
2) Only O-ring seals, not suitable for control valve plunger
3) For higher pressures ED compounds are used
·Do not useprocessgases/mixturesthat areincompatible with thesealing materialstheinstrument isequippedwith
·Do not exceedtheindicatedmaximum operating pressure/temperature. Usingtheinstrument outsidethegiven
operatinglimitsmayleadtoseriousdamagetotheinstrument
·Thegas(es)usedin thefluidsystem in whichtheinstrument ismounted must becleananddry

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 13
2Installation
2.1 Functional properties
Before installing the EL-FLOW® Select, check the serial number label to see if the functional
properties match your requirements:
·Flow rate
·Media to be used in the instrument
·Upstream and downstream pressure(s)
·Operating temperature
·Valve type (N.C. - Normally Closed / N.O. - Normally Open)
·Input and output signal
2.2 Operating conditions
Testpressure
Bronkhorst® instrumentsarepressuretestedtoat least 1.5 timesthespecifiedoperatingpressureand
outboard leak testedto at least 2 * 10-9 mbar l/s Helium.
The operating pressure must neverexceed the test pressure.
·Thetest pressureisspecifiedonthedevicewith ared label; if thislabel ismissingor ifthetest pressureisinsufficient, the
devicemust not beusedandshould bereturned tothefactory.
·Beforeinstallation, makesurethat the test pressureisinaccordancewith thesafety factor ofyour application.
·Disassembling thedeviceand/or replacing partswill invalidatethetest pressureand leaktest specification.
Rapid gasdecompression / explosivedecompression
For instrumentsusedabove 10 barg:
Bronkhorst recommendsa maximum decompressionrate of70 bar/min, accordingNACE TM0297.
Exceedingthisratecanhave negativeinfluence onthe lifetimeofthesealing materials.
Ambientconditions
Makesurethat processgasesdonot condensateinthe instrument dueto (changing)ambient conditions, asthismay
seriously harm theinstrument'sfunctionality! Do not usemoist air asprocessgasat lowtemperatures.
2.3 Mounting
For optimal performance, observethefollowingguidelines:
·Preferably, mount theEL-FLOW® Select in anupright position, especially iftheoperatingpressureishigher than 10 bar.
·If theinstrument ismountedinapositionwheretheflowisdirectedupwardsor downwards, adjustingthezeropoint is
recommended.
·Avoidinstallationincloseproximityofmechanical vibrationand/or heat sources.
For stablefixation, thebottom oftheinstrument base isfittedwiththreadedmountingholes. Consult thedimensional
drawingfor the exact sizeand locations.
2.4 Piping requirements
For reliableperformance, makesurethefluidstream isuncontaminated. Ifnecessary, usefiltersto ensurea moisture, oil
and particlefreegas stream. Ifbackflowcanoccur, theuse ofa downstream filter and checkvalveis alsorecommended.
Select asuitablefilter size, to prevent atoohighpressuredrop.
·Usepipingor tubingthat issuitable for theoperatingconditionsoftheapplication(media, maximum temperature,
maximum operatingpressure).
·Do not install small diameter piping/tubing onhighflowrates andavoid abrupt anglesor other disturbanceswithina
distanceof10 timesthe (inside)pipediameter from theinlet or outlet ofthe device.
·Do not install pressureregulatorswithina distanceof25 timesthe(inside)pipediameter.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F14
2.5 Fluid connection
Install the EL-FLOW® Selectmeter/controller in the line, in accordance with the
direction of the FLOW arrow on the body of the instrument. Tighten connections
according to the instructions of the supplier of the fittings. The use of Swagelok RS-
type stainless steel adapters is recommended, in combination with Bronkhorst®
elastomer O-rings.
Checkthefluidsystem for leaksbeforeapplyingfull operating pressure, especially whenusinghazardousmedia(e.g. toxic
or flammable).
2.6 Electrical connection
Electrical connections must be made with standard cables or according to the applicable hook-up diagram. The factory
installed 9-pin D-sub settings are indicated in the hook-up diagram. Make sure that the power supply is suitable for the
power ratings as indicated in the hook-up diagram and that double or reinforced insulation is used for the power supply.
EL-FLOW® Select instruments are powered with 15…24 Vdc, depending on the fieldbus system (if applicable).
To prevent damage asaresult ofreversedpolarity, theuseofa2A fuse inthedirect +Uslineisrecommended.
Thedevicedescribed inthisdocument containselectronic componentsthat aresusceptibletoelectrostaticdischarge. In
order to prevent damage, proper handlingproceduresmust befollowedduringinstallation, (dis)connectingand removing
theelectronics.
ThedevicecarriestheCE-markand iscompliant with the concerning EMC requirements. However, compliancewith
theEMC requirementsis not possible without theuseofproper cablesandconnector/glandassemblies. Bronkhorst
recommendstheuseoftheir standardcables. Thesecableshavetheright connectorsand looseends(ifany)aremarked to
help prevent wrong connection. Whenusingother cables, cablewirediametersmust besufficient to carrythesupply
current, and voltagelossmust bekept aslowaspossible. Whenindoubt, contact your Bronkhorst representative.
Whenconnectingtheproduct to other devices, besurethat theintegrityofthe shieldingisnot affected; always use
shielded cabling forsignalsand communication and do not use unshielded wireterminals.
Alwaysisolatetheelectrical power beforeconnectingor disconnectingequipment.
2.7 Fieldbusconnection
If the instrument is provided with a dedicated fieldbus interface, it can be operated digitally in a fieldbus system, using
RS485 communication. In FLOW-BUS, Modbus and DeviceNet™ systems, the fieldbus connector can also be used to power
the instrument. In other fieldbus systems, the instrument is always powered through the 9-pin D-sub power connector on
the side.
Neverpower theinstrument simultaneouslyfrom two different power sources (e.g. fieldbusandPlug-inPower Supply).
Doingsowill damage theprintedcircuit boardirreparably.
Alwayscheckthetotal power consumptionofyour instrumentsbeforeconnectingthem to afieldbussystem. Do not exceed
themaximum power ofthepower supplyunit.
If youneed assistancewith settingupa busconfiguration, contact your Bronkhorst representativefor information.

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 15
2.7.1 FLOW-BUS
FLOW-BUS is a Bronkhorst® designed fieldbus, based on RS485 technology, for digital communication between devices,
offering the possibility of host-control by a Windows computer.
Characteristics:
·Baud rate 187500 (default) or 400000 Baud
·+15…24 Vdc supply voltage
·Easy installation and communication with other Bronkhorst® devices
·Automatic node search and bus optimization (gap fixing)
·RS232 communication (ProPar) with Windows computer (local host)
·Connection of up to 120 instruments on a single bus
·Maximum bus length: 600 m
Consult Instruction manual FLOW-BUS interface (document no. 9.17.024)for moreinformationabout settingupa
FLOW-BUS network.
2.7.2 Modbus
Modbus is a 3-wire, RS485-based fieldbus communication system for parameter value exchange. In this system each
instrument/device is equipped with a micro-controller for its own dedicated task. The instrument behaves as a slave, which
means all communication (instructions and readout) is initiated by a master device on the Modbus system.
Characteristics:
·Baud rate selectable between 9600 and 256000 Baud (default: 19200 Baud)
·+15…24 Vdc supply voltage
·Connection of up to 247 instruments on a single bus
·Supports RTU and ASCII protocols
Consult Instruction manual Modbus interface (document no. 9.17.035)for moreinformationabout settingupa
Modbusnetwork.
2.7.3 PROFIBUS DP
PROFIBUS DP is a 2-wire, RS485-based industrial data communication standard (fieldbus) which allows automation
components (e.g. sensors, actuators and controllers) to exchange information.
Consult Instruction manual PROFIBUS DP interface (document no. 9.17.025)for moreinformationabout settingupa
PROFIBUS DP network.
2.7.4 DeviceNet™
The DeviceNet™ interface offers a direct connection to a DeviceNet™ network, according to the mass flow controller profile
specified by the ODVA. The Bronkhorst® DeviceNet™ instrument is a Group 2 Only Server device whose messages comply
with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNet™ protocol.
Consult Instruction manual DeviceNet™ interface (document no. 9.17.026)for moreinformationabout settingupa
DeviceNet™ network.
2.7.5 EtherCAT®
Ethernet for Control Automation Technology (EtherCAT®) is an open high performance Ethernet based fieldbus system.
Consult Instruction manual EtherCAT® interface (document no. 9.17.063)for moreinformationabout settingupan
EtherCAT® network.
2.7.6 PROFINET
The PROFINET interface is 100% Ethernet compatible and is used for data exchange between I/O controllers (PLC, etc.) and
I/O devices (slaves, field devices). PROFINET uses the proven communication model and application view of PROFIBUS DP.
Consult Instruction manual PROFINET interface (document no. 9.17.095)for moreinformationabout settingupa
PROFINET network.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F16
2.8 Communication interface
The standard 9-pin D-sub connector provides the following communication interfaces:
·Analog (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA)
·Digital RS232 (ProPar) or RS485 (FLOW-BUS or Modbus)
Additionally, the instrument can be provided with one of the following optional digital fieldbus interfaces:
·FLOW-BUS
·Modbus (RTU or ASCII)
·PROFIBUS DP
·CANopen
·DeviceNet™
·EtherCAT®
·PROFINET
The default communication protocol of the instrument (analog, digital RS232 or fieldbus) is specified at ordering time.

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 17
2.8.1 RS232 communication
Using a Windows computer, the instrument can
be monitored and operated via RS232. For
operation, the free Bronkhorst FlowWare tools
can be used, providing a comprehensive user
interface to the digital instrument functions.
This example uses the following components:
·EL-FLOW® Select
·RS232 T-part cable (art no. 7.03.366)
·RS232-USB converter (art no. 9.09.122)
·Windows computer (for readout and control)
·Plug-in Power Supply (PiPS, art no. 7.03.422)
Connect the T-part cable with the 9-pin D-sub connector on the side of the instrument and use the RS232/USB converter to
connect the other end of the cable with a free USB port of the computer.
For communicationwith aPLC orothercontrollingdevice, a 9-pinD-sub cablewitha looseend (part no. 7.03.004,
7.03.536 or 7.03.537) can be used. Consult theRS232hook-up diagram toconnect therequiredsignals.
For RS232 communicationat baudratesupto 38400 Baud themaximum allowablecable length is10 m. For higher baud
rates, usea maximum cable length of 3 m.
·For moreinformationabout communicationthrough theRS232 interface, consult the RS232manual (document no.
9.17.027).
·TheFlowWaretoolsand accompanyingdocumentationcan bedownloadedfrom theAccessories and software
sectionontheBronkhorst® product pages(www.bronkhorst.com/products).
2.8.2 Fieldbus communication
The instrument can be connected to a fieldbus
system with the optional fieldbus connector on
top. At the same time, RS232 communication
with a Windows computer is possible through
the 9-pin D-sub connector on the side of the
instrument.
This example uses the following components:
·EL-FLOW® Select with DeviceNet™ interface
·DeviceNet™ M12 cable (art no. 7.03.323)
·DeviceNet™ M12 Y adapter (art no. 7.03.319)
·RS232 cable (art no. 7.03.367)
·RS232-USB converter (art no. 9.09.122)
·Windows computer (for readout and control)
Note that the used fieldbus components in this
example are specific to DeviceNet™. For connecting with other fieldbus systems, other cables and adapters are needed.
Alwayscheckthetotal power consumptionofyour instrumentsbeforeconnectingthem to afieldbussystem. Do not exceed
themaximum power ofthepower supplyunit.
For all availablefieldbustypesexcept PROFIBUS DP, thefieldbusconnectiononisusedto power and operatethe
instrument. For PROFIBUS DP, theinstrument needsto bepoweredthroughthe9-pinD-sub connector onthesideofthe
instrument asshown inRS232 communication.
Consult theaccordingfieldbusmanual for moreinformationabout settingupa fieldbusnetworkwithBronkhorst®
instruments.
If youneed assistancewith settingupa fieldbussystem, contactyour Bronkhorst representative for information.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F18
2.8.3 E-8000 power supply, readout and control
Using an E-8000 module, instruments can be
powered (100…240 Vac) and operated via RS232.
Most digital parameters and functions are
accessible via the display interface and the
control buttons.
This example uses the following components:
·2x EL-FLOW® Select
·2x RS232/power supply cable (art no.
7.03.016/7.03.538/7.03.539)
·E-8000 power supply, readout and control
module
Consult theE-8000manual (document 9.17.076)for moreinformation. Thismanual canbedownloadedfrom the
Accessories and software sectionontheBronkhorst® product pages(www.bronkhorst.com/products).
2.8.4 BRIGHT readout and control
Most digital parameters and functions are
accessible via the display interface and control
buttons of a BRIGHT readout and control
module (type B1 or B2). When a BRIGHT module
is installed, no other RS232 connection can be
established with the instrument.
This example uses the following components:
·EL-FLOW® Select
·BRIGHT readout and control module
·Plug-in Power Supply (PiPS, art no. 7.03.422)
Use the 9-pin D-sub connector on the side of the instrument to plug in the T-part that comes with the BRIGHT module.
Consult theBRIGHT manual(document 9.17.048) for moreinformation. Thismanual canbedownloadedfrom the
Accessories and software sectionontheBronkhorst® product pages(www.bronkhorst.com/products).

Bronkhorst®
Instruction Manual EL-FLOW® Select9.17.099F 19
3Operation
After correct installation of the EL-FLOW® Select and when all safety precautions have been taken into account, the
instrument can be used for measuring and/or controlling mass flow in the system.
3.1 Powering up andpowering down
·It isrecommended to turnonpower beforeapplyingfluidpressureandtoswitchoffpower only after relievingfluid
pressure.
·For best performance, allowthedeviceto warm upand stabilizefor at least 30 minutes beforestartingmeasurement
and/or control. Thismaybedonewith or without mediaflow.
Whenapplyingpressure, avoid pressureshocksand bringthefluid system gradually up tothelevel of thespecified
operatingconditions; openand closethefluidsupply gently.
3.2 First use
Insystemsfor usewithcorrosiveor reactivemedia, purgingfor at least 30 minuteswitha dry, inert gas(like Nitrogenor
Argon)isabsolutelynecessarybeforeuse. After usewithcorrosive, reactiveor hazardousmedia(e.g. toxic or flammable),
purgingisalso necessarybeforethefluidsystem isexposedto air.
If theinstrument ismountedina positionwithupward or downwardflow, adjustingthezero point isadvisedbeforeusing
theinstrument for thefirst time. SeeAdjustingzeropoint for backgroundinformationand instructions.
3.3 Mass flow measurement and control
When powering up, the instrument needs a couple of seconds
to start up the electronics. As soon as the start-up sequence
has finished (green LED glows continuously), the instrument is
ready to measure mass flows, however, optimal accuracy is
only reached after warming up (see Powering up and
powering down).
After powering up, the control valve closes (normally open) or
stays closed (normally closed). The valve stays closed until the
instrument receives a setpoint from the active setpoint source.
The internal PID controller then immediately opens the control
valve, until the measured flow rate matches the setpoint. It
maintains the resulting flow rate until another setpoint is
given.
EL-FLOW® Select instrumentsaremost accurateat thespecifiedinlet/outlet pressure, temperatureandprocessgas
conditions. However, theinstrument will functionproperly in awiderangeofvaryingconditions. It isstronglyadvisedto
usethe FlowTune™softwareavailablewiththeinstrument toset thecorrect processconditionsif theactual process
conditionsdiffer from theconditionsfor whichtheinstrument isset (seeChangingfluidset).
AlthoughEL-FLOW® Selectinstrumentshaveexcellent temperaturestability, thebest accuracyisachievedwhen
temperaturegradientsacross theinstrumentsareavoided. Make surethat thegas temperaturematchestheambient
temperatureasgoodaspossibleand mount theinstrumentsona rigid(heat conducting)surface.
EL-FLOW® Select instrumentshandlepressureshocksinthesystem well, but arenot insensitivetopressurefluctuations.
For optimum control stability, providea stable(pressurecontrolled)inlet pressurewith sufficient buffer volumebetween
thepressureregulator andtheinstrument andavoid installingmultiple instrumentsor control valvesincloseproximityto
another withsmall volume pipinginbetween.

Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F20
3.3.1 Changing fluid set
Optionally, EL-FLOW® Select instruments can provide Multi Fluid/Multi Range functionality (MFMR;
available if and as specified at ordering time). If MFMR is enabled, this is indicated in the lower left
corner of the serial number label.
MFMR enabled instruments are calibrated ex factory for a number of standard measuring ranges, which can be configured
for use with different fluids. Defining fluids and ranges and selecting the active fluid can be done via RS232 with
FlowTune™.
FlowTune™ provides the following key functionality:
·Definition and storage of up to eight different fluids in the instrument
·Storing fluid properties for any gas
·Changing inlet- and/or outlet pressure based on actual process
conditions
·Re-ranging the full scale (FS) flow rate within the instrument's
supported flow range
·Changing control speed per fluid set for faster or slower (smoother)
flow control
MFMR functionality is available for the full temperature and pressure range of the instrument. FlowTune™ checks the
changes for the following limitations:
·Rangeability of the flow sensor for the selected fluid
·Rangeability of the control valve for the selected fluid
·Accuracy indication for the given flow range
·Compatibility of selected gases with the used sealing materials (see Sealing material compatibility)
·Limitations to the operating conditions
After all limitation checks are passed, the entered properties are stored in the instrument, including the required controller
settings. When switching to another fluid set, controller settings are automatically adjusted to the new process conditions,
so there is no need to change PID controller settings manually.
TheFlowTune™ softwareand theassociated documentationcanbedownloaded from theproduct pages ontheBronkhorst
website: www.bronkhorst.com/products
To connect withFlowTune™, useRS232 communicationviathe9-pinD-subconnector. In case aconnectioncannot be
established, use thepower-upfunctionality ofthemultifunctional switchtoswitchto configurationmodeand enable
RS232 communication.
After configuringtherequiredparameters, remember to returntheinstrument totheoriginal communicationmode.
It is advised to useFlowTune™ only ina non-operational environment. FlowTune™ will forcetheinstrument to ValveSafe
Stateassoon astheconnectionismade. Be sureto close communicationbetweenFlowTune™ and theinstrument
properly, to restorethenormal operatingmode.