Burkert 8006 Series User manual

Type 8006 / 8702
MFM, Mass Flow Meter IP65
Type 8626 / 8712
MFC, Mass Flow Controller IP65
Operating Instructions
Bedienungsanleitung
Manuel d‘utilisation

We reserve the right to make technical changes without notice.
Technische Änderungen vorbehalten.
Sous réserve de modifications techniques.
© Bürkert SAS, 2013-2015
Operating Instructions 1505/03_EU-ML 00563581

3
1. ABOUT THIS MANUAL .................................................................................4
1.1. Symbols used ..........................................................................................4
1.2. Definition of the word "device" .......................................................4
2. INTENDED USE ................................................................................................5
3. BASIC SAFETY INSTRUCTIONS .............................................................5
4. GENERAL INFORMATION ...........................................................................7
4.1. Manufacturer's address and international contacts ............7
4.2. Warranty conditions ..............................................................................7
4.3. Information on the Internet ...............................................................7
5. DESCRIPTION OF THE SYSTEM ............................................................7
5.1. General description ..............................................................................7
5.2. Operation of an MFM or MFC sensor ..........................................8
5.3. Detailed operation of an MFC .........................................................8
6. TECHNICAL DATA ........................................................................................ 11
6.1. Markings on the device.................................................................... 11
6.2. Conditions of use ................................................................................ 12
6.3. Compliance to standards and directives ................................ 13
6.4. Mechanical data ................................................................................... 13
6.5. Fluidic data .............................................................................................13
6.6. Electrical data, devices with an 8 pin M16 female fixed
connector ..........................................................................................................16
6.7. Electrical data, devices with a 9 pin Sub-D male fixed
connector, with RS485 interface ..........................................................17
7. INSTALLATION AND COMMISSIONING ...........................................18
7.1. Safety instructions .............................................................................. 18
7.2. Prior to installation .............................................................................18
7.3. Description of the MFM / MFC .................................................... 19
7.4. Sequence of the steps to be performed ................................20
7.5. Setting the parameters .................................................................... 20
7.6. Mechanical installation ..................................................................... 23
7.7. Fluid installation ................................................................................... 23
7.8. Electrical installation .........................................................................25
8. OPERATION AND FUNCTION ................................................................ 26
8.1. Safety instructions .............................................................................. 26
8.2. Operation .................................................................................................26
8.3. MFC operating modes ......................................................................32
9. MAINTENANCE, TROUBLESHOOTING ............................................ 36
9.1. Safety instructions .............................................................................. 36
9.2. Maintenance ........................................................................................... 36
9.3. Troubleshooting ...................................................................................38
10. ACCESSORIES / SPARE PARTS ...................................................... 41
10.1. Accessories .........................................................................................41
10.2. Spare part .............................................................................................44
11. SHUTDOWN ..................................................................................................44
11.1. Safety instructions ........................................................................... 44
11.2. Dismounting of the MFM / MFC ............................................... 45
12. PACKAGING, STORAGE, TRANSPORT .......................................... 45
12.1. Packaging, Transport ......................................................................45
12.2. Storage ...................................................................................................45
13. RETURNING THE DEVICE ..................................................................... 46
14. DISPOSAL OF THE PRODUCT ...........................................................46
Type 8006, 8702 / 8626, 8712
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About this manual
Type 8006, 8702 / 8626, 8712
note
Warns against material damage.
• Failure to observe this warning may result in damage to the
device or system.
Indicates additional information, advice or important
recommendations.
Refers to information contained in this manual or in
other documents.
→Indicates a procedure to be carried out.
1.2. Definition of the word "device"
The word "device" used within this manual refers to a Mass Flow
Meter (MFM) type 8006 or 8702, or a Mass Flow Controller (MFC)
type 8626 or 8712.
1. ABOUT THIS MANUAL
This manual describes the entire life cycle of the device. Please keep
this manual in a safe place, accessible to all users and any new owners.
This manual contains important safety information.
Failure to comply with these instructions can lead to hazardous
situations.
• This manual must be read and understood.
1.1. Symbols used
danger
Warns against an imminent danger.
• Failure to observe this warning can result in death or in
serious injury.
Warning
Warns against a potentially dangerous situation.
• Failure to observe this warning can result in serious injury
or even death.
attention
Warns against a possible risk.
• Failure to observe this warning can result in substantial
or minor injuries.
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Intended use
Type 8626, 8712
2. INTENDED USE
Nonconforming use of the MFM / MFC types 8006,
8702 / 8626, 8712 may pose a danger to people, nearby
equipment and the environment.
• Mass flow meter types 8006, 8702 are designed exclusively for
measuring the mass flow rate of clean, dry gases.
• Mass flow controller types 8626, 8712 are designed for
controlling the mass flow rate of clean, dry gases.
• Only use the fluids stated on the name plate and the calibration
protocol.
• Protect this device against electromagnetic interference,
ultraviolet rays and, when installed outdoors, the effects of the
climatic conditions.
• This device must be used in compliance with the specifications
and commissioning and use conditions specified in the
contractual documents and in the user manual.
• Requirements for the safe and proper operation of the device
are proper transport, storage and installation, as well as careful
operation and maintenance.
• Only use the device as intended.
• Observe any existing restrictions when the device is exported.
3. BASIC SAFETY
INSTRUCTIONS
These safety instructions do not take into account:
• any contingencies or occurrences that may arise during
installation, use and maintenance of the devices.
• the local safety regulations, which the operating company is
responsible for ensuring the staff in charge of installation and
maintenance adhere to.
Danger from the heated surfaces when used for prolonged
periods.
• The device must be kept away from any highly flammable
materials or fluids.
• Wear protective gloves to handle the device.
Danger due to high pressure in the installation.
• Shut off the gas flow, relief the pressure and drain the pipe
before loosening the process connections.
Danger due to electrical voltage.
• Shut down and isolate the electrical power supply before
carrying out work on the system.
• Observe all applicable accident protection and safety
regulations for electrical equipment.
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Basic safety instructions
Type 8006, 8702
Danger from the outflow of operating fluid
Respect the prevailing regulations on accident prevention and
safety relating to the operating fluids used.
Various dangerous situations
To avoid injury take care:
• to prevent unintentionally switching on the power supply.
• to ensure that installation and maintenance work is carried out
by qualified, authorized personnel in possession of the
appropriate tools,
• to keep the device away from any highly flammable materials or
fluids and avoid any contact with bare hands,
• to guarantee a defined or controlled restarting of the process,
after an interruption to the power supply or medium supply,
• to use the device only if in perfect working order and in compliance
with the instructions provided in the instruction manual,
• to observe best industry practice for the installation and use of
these devices,
• not to use MFM / MFC types 8006, 8702 / 8626, 8712 for
controlling and/or measuring the flow rate of fluids which contain
particles (particle size > 25 µm),
• not to operate the device without the stainless steel mesh filter
disc installed at the factory,
• not to operate the device in a mounting position which deviates
from the calibration conditions,
• not to operate the device with higher pressures than the
specified tightness pressure (MFC) respectively calibration
pressure (MFM),
• not to subject the device to mechanical loads (e.g. by placing
objects on top of it or by using it as a step).
• not to make any external modifications to the device. Do not
paint or varnish any part of the device. Do not feed any other
fluids into the system other than the designated operating
fluid indicated on the device name plate. Exception: agent for
cleaning and decontaminating the device (see also section
„9.2.1“). In doing so, observe the compatibility of the materials
used for the device. You will find a chemical compatibility chart
on our website, under:
www.burkert.com Documentation Brochures Chemical
Resistance Chart
If in doubt, contact the manufacturer.
note
Elements / Components sensitive to electrostatic discharges
• This device contains electronic components sensitive to
electrostatic discharges. They may be damaged if they are
touched by an electrostatically charged person or object. During
electrostatic discharge, they will become defective immediately
or will fail when energized.
• To minimize or even avoid all damage due to an electrostatic
discharge, take all the precautions described in the standard
EN 61340-5-1.
• Also ensure that you do not touch any of the live electrical
components.
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General information
Type 8626, 8712
4. GENERAL INFORMATION
4.1. Manufacturer's address and
international contacts
To contact the device manufacturer, use the following address:
Bürkert SAS
Rue du Giessen
F-67220 TRIEMBACH-AU VAL
The addresses of the international subsidiaries are available on the
web page at: www.burkert.com
4.2. Warranty conditions
The condition governing the legal warranty is the conforming use of
the MFM / MFC in observance of the operating conditions specified
in this manual.
4.3. Information on the Internet
You can find the user manuals and technical data sheets regarding the
MFM / MFC at: www.burkert.com
5. DESCRIPTION OF THE
SYSTEM
5.1. General description
• Mass flow meter MFM types 8006, 8702 are devices designed for
measuring the mass flow rate of clean, dry gases.
• Mass flow controller MFC types 8626, 8712 are devices designed
for controlling the mass flow rate of clean, dry gases.
Type of device Type of sensor
MFM 8006 Inline
8702 MEMS
MFC 8626 Inline
8712 MEMS
5.1.1. General operation of the Mass Flow
Meter (MFM)
The MFM integrates a sensor for measuring the flow rate. The measured
value for the mass flow rate is transmitted to a remote device via an
analogue or a digital output (fieldbus).
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Description of the system
Type 8006, 8702
5.1.2. General operation of the Mass Flow
Controller (MFC)
The MFC comprises:
• a sensor for measuring the mass flow rate,
• a control electronics,
• a control valve with low-friction and high sensitivity.
5.2. Operation of an MFM or MFC
sensor
• The integrated flow rate sensors use the thermal measurement
principle (anemometric and calorimetric) to measure the mass
flow rate. The main components are a heating resistor and a
temperature probe. The gas which passes through the device
modifies the temperature difference measured between
both resistors.
• The thermal measurement principle allows the MFC to control the
required mass flow rate completely independently of the pressure
and temperature fluctuations in the application concerned.
To obtain an output signal for the effective, dynamic
or uniform value, the damping of the output signal can
be changed with the "Mass Flow Communicator" software
(see section „10.1.4“).
On the MFMs and MFCs types 8712 and 8702, the
integrated sensor technology requires filters to be fitted
upstream of the product when highly soiled fluids are present.
5.3. Detailed operation of an MFC
w
xout
y
x
xd = w-x
Control
electronics
Sensor Actuating element
(solenoid valve)
Gas
inlet
Gas
outlet
Fig. 1: Operating principle for the Mass Flow Controller
The control electronics compare the mass flow rate (x) measured
by the integrated flow sensor with the mass flow rate setpoint value
(w) supplied to the MFC. The control electronics then calculate the
actuating variable (y) to be supplied to the solenoid valve to control
its opening. The flow rate is either maintained at a constant value,
or modified to a predefined profile.
The control operates independently of fluctuations in pressure or
increases in the flow resistance which may be caused by soiling of the
filter. The rapidly responding solenoid valve and the sensor dynamics
define the overall response time.
The measured value for the mass flow rate is also transmitted (xout) to
a remote device via an analogue output or a digital output (fieldbus).
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Description of the system
Type 8626, 8712
5.3.1. Control electronics
The control electronics:
• process the mass flow rate setpoint values and measured values,
• control the solenoid valve.
Setpoint value
The setpoint value (w) is transmitted either by an analogue input signal
or digitally via the serial or the fieldbus interface. If the setpoint value
is supplied by analogue transmission, the following assignments are
applied:
Signal
range
Setpoint associated
with the range min.
Setpoint associated
with the range max.
4...20 mA 4 mA, w = 0 % 20 mA, w = 100 %
0...20 mA 0 mA, w = 0 % 20 mA, w = 100 %
0...5 V 0 V, w = 0 % 5 V, w = 100 %
0...10 V 0 V, w = 0 % 10 V, w = 100 %
For the control of a system where quick flow rate changes are not
permitted, a ramp function can be activated. The settings for a raising
and a falling setpoint value can be set separately.
More detailed information on the ramp function and on all
other functions can be found in the software documentation
for the MFM / MFC.
Control settings
The initial control settings are set at the factory.
• Amplification factors:
After start-up, the controller operates with amplification factors
dependent on the loop properties. When the autotune function runs,
these are determined automatically. This function enables the control
settings to be optimized for the system's actual conditions.
• Control dynamics setting:
The device has a setting which can change the control dynamics
with the aid of the "Mass Flow Communicator" software
(see section „10.1.4“). Its extreme effects are:
1. a very quick adjustment in which overshoots are possible.
This enables the controller to respond immediately to very low
control deviations; which causes the control to be very turbulent,
2. a slower adjustment to the required flow rate. If the system is less
dynamic, the behaviour of the controller may be damped so that
minor fluctuations in the measured value or setpoint value are only
adjusted slowly.
Zero point shut-off
A zero point shut-off is integrated to ensure the sealing function of the
valve. This is activated if the following conditions occur at the same time:
Setpoint value < 2 % of
nominal flow rate Qnom
(with control range 1:50)
and
Measured value < 2 % of
nominal flow rate Qnom
(with control range 1:50)
If the zero point shut-off is active, the PWM signal is set to
0 % so that the valve is completely closed.
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Description of the system
Type 8006, 8702
5.3.2. MFC solenoid control valve
The solenoid valve used for an MFC is a direct-acting, normally closed
solenoid control valve.
The orifice size of the solenoid valve is determined by the required
nominal flow rate Qnom, the pressure and temperature conditions in
the process and the density of the operating fluid.
If the device is operated within the specified pressure range,
the solenoid valve also takes over the sealing function
together with the control function. Limitation: in the case
of special hard seal materials, the sealing function cannot
be ensured. In this case an additional shut-off valve may
be required.
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Technical data
Type 8626, 8712
6. TECHNICAL DATA
attention
Risk of injury from pressure and outflow of fluid.
Important device-specific technical data is indicated on the name plate and the calibration plate (see section „6.1“).
• Observe the permitted fluid according to the name plate (depending on seal material).
• Observe the permitted pressure range on the calibration plate of the device.
6.1. Markings on the device
Examples:
8006 35.0 Nm3/h
Made in France
00182381 W49MM
24V DC 13W DP
CH4
S/N 1004
FKM
Name plate
Calibration data 00182381
QC passed: 25.11.2011
P1 : 0,800 barg
Medium 1
Mounting: horizontal upright
Calibration plate
Fig. 2: Name plate, calibration plate
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Technical data
Type 8006, 8702
8006 35.0 Nm3/h
Made in France
00182381 W49MM
24V DC 13W DP
CH4
S/N 1004
FKM
Type of the
device
Nominal flow rate
(Qnom) and unit Operating medium
Material of the seal
Supply voltage
Maximum power
consumption
Electrical interface
Construction codeOrder code of
the device
Serial
number
Fig. 3: Details of a name plate (example)
Calibration data 00202378
Medium 1
P1: 0.700 barg
Mounting: Horizontal mounting
QC passed: 25.11.2011
Calibration date
Calibration
pressure
Mounting
position
Order code of the device
Calibration fluid
Fig. 4: Details of a calibration plate (example)
6.2. Conditions of use
Warning
Risk of injury from malfunction due to effects of the weather!
The MFM / MFC is not designed for unrestricted use outdoors.
• Protect the device from direct sunlight.
• Observe the ambient temperature range of the device.
• Protect the device from humidity.
Setting Value
Ambient temperature Types 8702 / 8712: -10 °C to +50 °C
Types 8006 / 8626: -10 °C to +45 °C
For UL devices: 0 °C to 40 °C
Medium temperature for oxygen: -10 °C to +60 °C
for other fluids: -10 °C to +70 °C
Air humidity < 95%, without condensation
Relative humidity for UL
devices
80% up to a temperature of 31°C,
with a linear decrease to a relative
humidity of 50% at 40°C
Protection class
according to EN 60529
Only if devices are cabled and the
connectors are plugged in and
tightened: IP65
Absolute height above
sea level for UL devices
2000 m max.
Operating environment Indoors, with pollution degree 2
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Technical data
Type 8626, 8712
6.3. Compliance to standards and
directives
MFM/MFC conformity with the EC directives comes through the
following standards:
• EMC: EN 61000-6-2, EN 61000-6-3.
The MFMs/MFCs compliant with ATEX Directive 94/9/EEC adhere to
the standards below:
• EN 60079-15
• EN 61241-1.
The MFM / MFC UL devices conform to the following standards:
• UL 61010-1
• CAN/CSA-C22.2 no. 61010-1.
6.4. Mechanical data
The device may be mounted in a horizontal or vertical position: see the
calibration plate and/or the calibration protocol.
Type Base block material Material of the housing
8006,
8626
1.4305 stainless steel,
1.4404 stainless steel or
anodized aluminium
Painted pressure cast
aluminium
8702,
8712
Stainless steel 1.4404 Polycarbonate (PC)
Sealing material: FKM or EPDM (see name plate)
Other parts of the solenoid control valve in contact with the medium:
1.4310, 1.4113 and 1.4305
6.5. Fluidic data
6.5.1. Overview of measurement
specifications
Type 8006, 8626 8702, 8712
Full scale range ref. to
N2 (lN/min)
16 … 1500 0.01 … 80
Measuring accuracy
(after heating time)
± 1.5 % of the
measured value
± 0.3 % of the full
scale
± 0.8 % of the
measured value
± 0.3 % of the full
scale
Span/control range 1 : 50 *) 1 : 50 **)
Settling time (MFC) or
response time (MFM)
(ms)
< 500 < 150
*) 1:20 in case of vertical mounting, with downward flow.
**) Higher span (e.g. 1:100) possible on request.
Repeatability: ± 0.1% of the full scale.
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Technical data
Type 8006, 8702
6.5.2. Operating fluids
• Operating fluids: clean, dry gas.
• Operating fluid for UL devices: neutral, uncontaminated gas.
Other hazardous gases are possible on request; the devices
do not release any hazardous gases under normal operating
conditions. However, to use an MFC with natural gas, only
the solenoid valve Bürkert type 2875 can be used : in this
case, the order key must include the letter "-D" (for example
8626-0100L-CH4-E-A-GM82-ALFF-D-08,0).
• Calibration fluid: operating fluid or air.
• Max. operating pressure: 10 bar (depending on valve nominal
diameter).
To obtain the required measuring accuracy or control quality,
but also to respect the safety requirements, the gas or
gaseous mixture must conform to the following safety criteria,
compliant with ISO standard 8573-1 (Compressed air -
Part 1: Contaminants and purity classes):
• Maximum particle size and density: class 2:
Maximum particle size: 1 µm 1)
Maximum particle density: 1 mg/m³ 1)
• Maximum dew point under pressure: class 4: 3 °C
• Maximum oil concentration: class 1: 0.01 mg/m³ 1)
1) For more information refer to ISO 8573-1
6.5.3. Pressure loss specifications
Q [lN/min]
∆p [mbar]
0
20
40
60
80
100
120
140
160
180
200
0100 2003004005006007008009001000 1100
1200
1300
140015
00
1/4''
3/8''
1/2''
3/4''
1''
Fig. 5: Pressure loss diagram (ref. air, with 250 µm inlet filter),
type 8006
The characteristic diagram shows the air pressure loss in the device
for 3 different bases (up to 100 Nl/min, from 100 to 500 Nl/min,
from 500 to 1500 Nl/min) and 4 different connections (1/4'', 1/2'',
3/4'', 3/8'' and 1'').
For determining the pressure loss with another gas first calculate the
equivalent air flow rate of the other gas.
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Technical data
Type 8626, 8712
0
10
20
30
40
50
60
70
80
90
100
110
120
130
0510 15 20 25 30 35 40 45 50 55 60 65 70 75
80
Q [lN/min]
∆p [mbar]
flanges
1/4''
Fig. 6: Pressure loss diagram (ref. air, with 250 µm inlet filter),
type 8702
The characteristic diagram shows the air pressure loss in the
device for versions with flange connections and versions with 1/4''
connections.
For determining the pressure loss with another gas first calculate
the equivalent air flow rate of the other gas and respect the fluidics
needed with the other gas.
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Technical data
Type 8006, 8702
6.6. Electrical data, devices with an 8 pin M16 female fixed connector
Operating voltage 24 V DC ± 10%; residual ripple < 2% (5% for UL devices)
Power supply (not provided) for UL devices Power supply limited to class 2
Power required (max. in Watt) depending on the type of the
device
8006 8702 8626 8712
12.5 5 36.5 14
MFC only:
Analogue input (configurable)
• 0/4 - 20 mA
Max. input impedance: 300 Ω, resolution: 5 µA
• 0 - 5/10 V
Min. input impedance: 20 kΩ, resolution: 2.5 mV
Binary inputs (configurable) 3 binary inputs
Low active
Connect to DGND for activation
Analogue output (configurable) • 0/4 - 20 mA
Max. load: 600 Ω, resolution: 20 µA
• 0 - 5/10 V
Max. current: 10 mA, resolution: 10 mV
On certain versions: Fieldbus communication
(alternative to "analogue input + outputs")
PROFIBUS DP V1, DeviceNet or CANopen
Relay outputs (configurable) 2 relay outputs
Potential-free changer 60 V, 1 A, 60 VA
LEDs (configurable) 4 LEDs
Status display for Power, Communication, Limit, Error
Electrical connections 8 pin M16 female fixed connector, and 15-pin Sub-HD
Additional connections for version with fieldbus 5 pin M12 male or female fixed connector, or 9 pin Sub-D female fixed
connector
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Technical data
Type 8626, 8712
6.7. Electrical data, devices with a 9 pin Sub-D male fixed connector, with RS485
interface
Operating voltage 24 V DC ± 10%; residual ripple < 2% (5% for UL devices)
Power supply (not provided) for UL devices Power supply limited to class 2
Power required (max. in Watt) depending on the type of the
device
8006 8626
12.5 36.5
Binary inputs (configurable) 1 binary input
Low active
Connect to DGND for activation
Communication interface RS485, full-duplex or half-duplex
RS422, supports the MODBUS RTU protocole
Relay outputs (configurable) 1 relay output
Potential-free make contact 25 V, 1 A, 25 VA
LEDs (configurable) 4 LEDs
Status display for Power, Communication, Limit, Error
Electrical connections 9 pin Sub-D male fixed connector
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Installation and commissioning
Type 8006, 8702
7. INSTALLATION AND
COMMISSIONING
7.1. Safety instructions
danger
Risk of injury due to high pressure in the installation.
• Shut off the gas flow, relief the pressure and drain the pipe
before loosening the process connections.
Danger due to electrical voltage.
• Shut down and isolate the electrical power supply before
carrying out work on the system.
• Observe all applicable accident protection and safety
regulations for electrical equipment.
Risk of injury from the outflow of operating fluid
• Respect the prevailing regulations on accident prevention and
safety relating to the operating fluids used.
Warning
Danger due to nonconforming installation or commissioning
• Installation and commissioning can only be carried out by
qualified and skilled staff with the appropriate tools.
Risk of injury due to the installation being accidentally
energized or an uncontrolled restart.
• Take appropriate measures to avoid the installation being
accidentally energized.
• Ensure the installation is subject to a controlled restart after any
intervention on the device.
7.2. Prior to installation
→Before installing the MFM / MFC, remove dirt from the pipes and
fluid system components.
→Connect a suitable filter (≤ 25 µm mesh size) upstream to ensure
that the operating fluid is kept clean.
note
• Use a power supply unit with adequate power.
• Observe the maximum permitted residual ripple of the
operating voltage.
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Installation and commissioning
Type 8626, 8712
7.3. Description of the MFM / MFC
LEDs
5 pin M12 male or female fixed connector,
or 9 pin Sub-D female fixed connector, fieldbus
15 pin Sub HD female fixed
connector, setpoint input /
Measured flow rate input /
Binary inputs / RS232
Screw for earth
connection
8 pin M16 female fixed
connector,
24 V power supply /
Relay outputs Connection to the
pipe
Fig. 7: Description of the devices with an 8 pin M16 female fixed
connector
LEDs
9 pin Sub-D male fixed
connector,
fieldbus /
24 V power supply /
Binary input /
Relay output /
RS485
Connection to the pipe
Screw for earth connection
Fig. 8: Description of the devices with a 9 pin Sub-D male fixed
connector, with RS485 interface
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Installation and commissioning
Type 8006, 8702
7.4. Sequence of the steps to be
performed
1. Mechanical installation
2. Fluid installation
3. Electrical installation
4. Set the device parameters
5. Pressurize the lines with operating fluid
6. Flush the lines with operating fluid at the calibration pressure and
deaerate completely
7.5. Setting the parameters
7.5.1. Setting the bus address
To ensure trouble-free adjustment, reset the device by
switching off the power supply to the device.
The bus address of the device can be set either via the Bürkert
"Mass Flow Communicator" software tool in the "Views" window →
PROFIBUS / DeviceNet / CANopen or directly via the master bus.
The address must be reinitialized after a change on the slave and on
the master. Depending on the bus, it may be necessary to send a
corresponding telegram.
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