Edwards iTIM E73/A1/T1 User manual

D374-20-880
Issue E Original
Instruction Manual
iTIM
Description Item Number
iTIM E73/A1/T1 D374-20-000
iTIM E73/A1/T1 + Serial D374-21-000
iTIM MCM/L1 D374-22-000
iTIM MCM/L1 + Serial D374-23-000

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
iTIM E73/A1/T1 D374-20-000
iTIM E73/A1/T1 + Serial D374-21-000
iTIM MCM/L1 D374-22-000
iTIM MCM/L1 + Serial D374-23-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
and fulfils all the relevant provisions of
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Mr L Marini, Technical Manage
r
Date and Place
P200-04-440 Issue A
9 December 2009

© Edwards Limited 2007. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D374-20-880 Issue E
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 General Description ..................................................................................................... 1
1.3 System Connector ........................................................................................................ 2
1.4 The Tool Interface Connectors ........................................................................................ 2
1.5 Serial Interface Connectors ............................................................................................ 2
2 Technical Data ....................................................................................5
2.1 General .................................................................................................................... 5
2.2 Electrical Data ........................................................................................................... 5
2.2.1 Parallel Interface Connectors .......................................................................................... 5
2.2.2 Serial Interface Connectors ............................................................................................ 5
2.3 Electrical Connectors ................................................................................................... 6
3 Installation .........................................................................................9
3.1 Unpack and Inspect ...................................................................................................... 9
3.2 Fit the iTIM ............................................................................................................... 9
3.3 Connect the iTIM to the Dry Pumping System ....................................................................... 9
3.4 Parallel Interface Connections ........................................................................................11
3.5 Serial Interface Connections ..........................................................................................11
3.6 Serial Interface Performance .........................................................................................12
4 Parallel Interface Operation .................................................................. 13
4.1 Introduction .............................................................................................................13
4.2 Inputs .....................................................................................................................13
4.3 Outputs ...................................................................................................................14
4.4 Setpoints and Configuration Parameters ............................................................................15
4.5 Take and Release Control .............................................................................................15
4.6 Introduction to Gate Valve Operation ...............................................................................16
4.6.1 Gate Valve Operation: Normal Operation ...........................................................................16
4.6.2 Gate Valve Operation: Emergency Shutdown / Stop ..............................................................16
5 Serial Interface Operation ..................................................................... 17
5.1 Message formats ........................................................................................................17
5.2 Reply messages ..........................................................................................................17
5.3 Query Messages .........................................................................................................17
5.3.1 Introduction .............................................................................................................17
5.3.2 Alarm status query message (?A) .....................................................................................22
5.3.3 Bitfield status query message (?B) ...................................................................................22
5.3.4 Control status query message (?C) ...................................................................................22
5.3.5 Gas ballast status query message (?D) ...............................................................................22
5.3.6 Format mode query message (?F) ....................................................................................22
5.3.7 Gate valve status query message (?G) ...............................................................................23
5.3.8 Information query message (?I) .......................................................................................23
5.3.9 Load-lock pump status query message (?L) .........................................................................23
5.3.10 Nitrogen supply status query message (?N) .........................................................................23
5.3.11 On process status query message (?O) ...............................................................................23
5.3.12 Pump status query message (?P) .....................................................................................24
5.3.13 Run til crash status query message (?R) .............................................................................24
5.3.14 Serial number query message (?S) ....................................................................................24
APT 11/07

D374-20-880 Issue E
Page ii © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
5.3.15 Pump node type query message (?T) ................................................................................24
5.3.16 Inlet purge status query message (?U) ...............................................................................24
5.3.17 Value query message (?V) .............................................................................................24
5.4 Command Messages .....................................................................................................24
5.4.1 Message syntax ..........................................................................................................24
5.4.2 Control command message (!C) ......................................................................................25
5.4.3 Gas ballast command message (!D) ..................................................................................25
5.4.4 Format mode command message (!D) ...............................................................................25
5.4.5 Gate valve command message (!G) ..................................................................................25
5.4.6 Load-lock pump command message (!L) ............................................................................25
5.4.7 Simulation mode command message (!M) ...........................................................................26
5.4.8 Nitrogen supply command message (!N) ............................................................................26
5.4.9 On process command message (!O) ..................................................................................26
5.4.10 Pump command message (!P) .........................................................................................26
5.4.11 Run til crash command message (!R) ................................................................................26
5.4.12 Inlet purge command message (!U) ..................................................................................26
5.5 Simulation Mode ........................................................................................................27
5.5.1 Introduction .............................................................................................................27
5.5.2 Simulated pumping system ............................................................................................27
6 Maintenance ..................................................................................... 29
6.1 Inspect the Electrical Connections ...................................................................................29
6.2 Fault Finding .............................................................................................................29
6.2.1 Tool Interface Problems ...............................................................................................29
6.2.2 Error number reply messages .........................................................................................29
6.2.3 Determine the pumping system error number .....................................................................29
6.2.4 Serial Communications Problems .....................................................................................30
7 Storage and Disposal ........................................................................... 31
7.1 Storage ...................................................................................................................31
7.2 Disposal ...................................................................................................................31
8 Service, Spares and Accessories .............................................................. 33
8.1 Service ....................................................................................................................33
8.2 Spares .....................................................................................................................33
8.3 Accessories ...............................................................................................................33
Index .............................................................................................. 35
Illustrations
Figure Page
1 Components of the iTIM ................................................................................................ 3
2 Components of the iTIM (without E73 connector) .................................................................. 4
3 Dimensions (mm) ........................................................................................................ 7
4 Fitting the iTIM to a Dry Pumping System ...........................................................................10

© Edwards Limited 2007. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D374-20-880 Issue E
Tables
Table Page
1 Checklist of items ........................................................................................................ 9
2 Serial Interface Connections ..........................................................................................11
3 Example IBM PC-Compatible Serial Connections ...................................................................11
4 Parallel Interface Inputs ...............................................................................................13
5 Parallel Interface Outputs .............................................................................................14
6 Variable items ...........................................................................................................18
7 Alarm type ...............................................................................................................18
8 Query Messages .........................................................................................................19
9 Parameters ...............................................................................................................20
10 Priority Level ............................................................................................................21
11 Bitfield status ...........................................................................................................21
12 Status Level ..............................................................................................................22
13 Typical Control Object Values ........................................................................................22
14 Command Messages .....................................................................................................25
15 Simulated Pumping System Data .....................................................................................27
16 Serial Interface Error Numbers .......................................................................................29
17 Serial communications fault finding .................................................................................30

This page has been intentionally left blank.
D374-20-880 Issue E
Page iv © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.

© Edwards Limited 2007. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
D374-20-880 Issue E
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards iTIM. You must use the
iTIM as specified in this manual.
Read this manual before you install, operate and maintain the iTIM. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement; US equivalent
units of measurement are also given.
The following IEC warning labels appear on the iTIM:
1.2 General Description
Four types of iTIM are available (refer to Figures 1and 2):
zThere are two variants of the iTIM both of which allow you to control the operation and monitor the status of
the dry pumping system through a parallel interface (for example, connected to your process tool).
zThe serial option of the iTIM contains a serial interface card, which allows the user to control the operation
and to monitor the status of the dry pumping system through a serial interface. The serial interface card uses
RS232 serial communications to communicate with your control equipment (refer to Section 5).For example,
it is possible to connect the iTIM to the serial port of a PC (Personal Computer) on which a suitable SCADA
(Supervisory Control And Data Acquisition program) has been installed.
Note: All information sent to or received from the iTIM, except from the emergency stop connections, (Whether
serial or parallel data) is software derived.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
WARNING
Edwards take no responsibility for damage or injury caused by improper use of the equipment.

D374-20-880 Issue E
Page 2 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
1.3 System Connector
Refer to Figure 1. The iTIM is connected to the dry pumping system through the 15-way ‘D-Type’ system connector
(10) on the rear of the iTIM.
CAUTION
Damage to the iTIM may result if connection is made to any other connector on the dry pumping system.
1.4 The Tool Interface Connectors
The Tool Interface Connectors allow you to control the operation and to monitor the status of the dry pumping
system.
Refer to Section 2.3 for details of the connections and 4for details of how to use the Tool Interface Connectors.
1.5 Serial Interface Connectors
The Serial Interface Connectors allow you to control the operation and to monitor the status of the dry pumping
system.
Refer to Section 3.5 for details of the connections and 5for details of how to use the Serial Interface Connectors.

© Edwards Limited 2007. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
D374-20-880 Issue E
Figure 1 - Components of the iTIM
1. 6-way XLR connector
2. Module fixing screw
3. Tool EMS connector P2
4. Tool EMS connector J1
5. Gate valve connector
6. Parallel connector A1
7. Serial connector (optional)
8. Parallel connector E73
9. Parallel connector T1
10.System connector

D374-20-880 Issue E
Page 4 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
Figure 2 - Components of the iTIM (without E73 connector)
1. 6-way XLR connector
2. Module fixing screw
3. Tool EMS connector L2
4. Tool EMS connector MCM2
5. Gate valve connector
6. Parallel connector MCM
7. Serial connector (optional)
8. Parallel connector L1
9. Systm connector

© Edwards Limited 2007. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
D374-20-880 Issue E
2TechnicalData
2.1 General
2.2 Electrical Data
2.2.1 Parallel Interface Connectors
2.2.2 Serial Interface Connectors
Note: The signal and earth (ground) connections are isolated from the chassis of the iTIM, with a 500V maximum
isolation rating.
Dimensions Refer to Figure 3
Maximum mass 2kg
Operating temperature range 0 to 55oC
Storage temperature range -20 to 65oC
Operating humidity range 25 to 95% RH at 40oC
Maximum storage humidity 90% RH at 65oC for 12 hours
Maximum operating altitude 2000m
Inputs: Type 1 a.c./d.c. input signal
Number 2
High input voltage threshold > 20V
Low input voltage threshold < 5V
Type 2 Volt-free (dry) contacts
Number 10
External contact rating 24V
Outputs: Type Contacts are normally open
Number upto 8
Rating 1A, 24V
Inputs: Type RS232 ‘RX data’
Number 1
Rating Compliant with EIA RS232
Outputs: Type RS232 ‘TX data’
Number 1
Rating Compliant with EIA RS232
Communications
Protocol EIA RS232
Baud rate 9600 baud
Data bits 8
Stop bits 1
Parity setting No parity

D374-20-880 Issue E
Page 6 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
2.3 Electrical Connectors
System Connector 15-way ‘D-Type’ socket
A1/MCM 16-way CPC plug
T1 25-way ‘D-type’ plug
E73 15-way ‘D-type’ socket
L1 25-way ‘D-type’ socket
J1/MCM2 4-way CPC plug
P2/L2 4-way CPC socket
Gate Valve 9-way CPC plug
Serial 9-way ‘D-type’ socket

© Edwards Limited 2007. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
D374-20-880 Issue E
Figure 3 - Dimensions (mm)

D374-20-880 Issue E
Page 8 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.

© Edwards Limited 2007. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
D374-20-880 Issue E
3 Installation
3.1 Unpack and Inspect
Remove all of the packaging materials and check the iTIM. If the iTIM is damaged, notify your supplier and the carrier
in writing within three days, stating the item number of the iTIM together with your order number and your suppliers
invoice number. Do not use the iTIM if it is damaged.
Check that you have received the items listed in Table 1. If any item is missing, notify your supplier in writing within
three days. If you will not use the iTIM immediately, replace any packing materials and store it in suitable conditions,
as described in Section 7 of this instruction manual.
3.2 Fit the iTIM
Before the iTIM is fitted, the electrical supply to the dry pumping system must be isolated.
CAUTION
The iTIM may be damaged if it is disconnected while the pump is powered.
The iTIM can be directly fitted to a dry pumping system.
To fit the iTIM directly to a dry pumping system:
1. Remove active gauge bung.
2. Refer to Figure 4. Fit the pumping system mounting tabs into the fixing slots on the rear panel of the dry
pumping system.
3. Position the (captive) pumping system mounting screws into the fixing holes on the rear panel of the dry
pumping system, then tighten the screw to secure the iTIM in place.
3.3 Connect the iTIM to the Dry Pumping System
Use the following procedure to connect the iTIM to the dry pumping system, and (optionally) to another pumping
system module; where necessary, refer to the instruction manual supplied with the dry pumping system.
1. On an iH or iL dry pumping system, remove the 6-way XLR terminator plug or the module connector cable from
the OEM connector on the Electrics and Pump control box.
2. Insert the 6-way XLR connector on the short lead that comes out of the iTIM into the OEM connector on the
Electrics and Pump Control Box.
Table 1 - Checklist of items
Quantity Description Check (✔)
1iTIM ❏
2 iTIM Instruction Manual ❏

D374-20-880 Issue E
Page 10 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
Figure 4 - Fitting the iTIM to a Dry Pumping System

© Edwards Limited 2007. All rights reserved. Page 11
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
D374-20-880 Issue E
3.4 Parallel Interface Connections
Note: Refer to Section 4 to determine the signals used in the parallel cable.
1. Make a suitable parallel cable. Refer to Section 8 for back shell kits if required.
2. Connect one end of the parallel cable to your control equipment.
3. Refer to Figure 1. Fit the socket at the other end of the cable to the appropriate connector on the iTIM.
3.5 Serial Interface Connections
1. Ensure that your control equipment is correctly configured (for example, install the necessary software) to
interpret your commands, to send and receive messages to and from the iTIM, and to display information
received from the iTIM.
2. Ensure that the serial settings of your control equipment are configured correctly for the iTIM: refer to the
information given in Section 4.
3. Make a three-wire RS232 cable to connect your control equipment to the iTIM: Table 2 shows the serial interface
connection signals and Table 3 shows the example IBM PC-compatible connections. If the cable between your
control equipment and the iTIM is more than 10m long, you must incorporate line drivers in the cable. When you
make the cable:
zFit a 9-way male ‘D-type’ plug on one end of the cable.
zFit a connector suitable for the serial connector on your control equipment to the other end of the cable.
Typically, this will be a 9-way female ‘D-type’ connector, to fit the COMM port of your PC.
4. Refer to Figure 1. Fit the 9-way ‘D-type’ plug on one end of the RS232 cable to the serial connector (7) on the
iTIM; fit the connector on the other end of your RS232 cable to the appropriate connector on your control
equipment.
Table 2 - Serial Interface Connections
Signal Serial Connector (9-way ‘D-type’ plug) Direction
RXD Pin 2 Output
TXD Pin 3 Input
GND Pin 5 -
Table 3 - Example IBM PC-Compatible Serial Connections
Signal Serial Connector
(9-way ‘D-type’ plug) IBM PC compatible connectors
9-way ‘D-type’ male 25-way ‘D-type’ male
RXD Pin 2 Pin 2 Pin 3
TXD Pin 3 Pin 3 Pin 2
GND Pin 5 Pin 5 Pin 7

D374-20-880 Issue E
Page 12 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
3.6 Serial Interface Performance
The iTIM has to process both the LON network messages (that arrive when sent by the pumping system) and the serial
messages. It is not possible to provide definitive performance figures for the serial interface as it will vary with time
according to the pumping system configuration and operation. However, the following information is provided to
assist in programming your control equipment for optimum operation with the serial interface.
zThe pumping system sends data from each object at relatively low frequencies, usually regularly at 3, 7, 15
or 45 second intervals. Messages are also sent by the pumping system when there is a sudden change in
status.
zAt 9600 baud, each character in a command/query message or the corresponding reply message will take
approximately 1ms. The response for a query takes, typically, 30 to 50ms.
zCommand messages can take several seconds to be actioned, as a serial response is sent that is, the
command message is sent to the pumping system through the LON network, then the pumping system must
action the message.
zWe recommend that you do not send a command/query message until the reply message from the previous
command/query message has been received. A small delay of 100ms will allow the iTIM to process any LON
messages, and to carry out internal ‘housekeeping’.
zIf the serial link is overloaded, the worst effect will be that the iTIM will miss a data update from the
pumping system, however, the new data will then be provided by the pumping system at the next regular
update. There will be no direct effect on the operation of the pumping system.

© Edwards Limited 2007. All rights reserved. Page 13
Edwards and the Edwards logo are trademarks of Edwards Limited.
Parallel Interface Operation
D374-20-880 Issue E
4 Parallel Interface Operation
4.1 Introduction
Use the parallel interface to monitor and control the dry pumping system as described in the following sections.
Where necessary, refer to the instruction manual supplied with your dry pumping system, and to the instruction
manual(s) supplied with other pumping system components.
4.2 Inputs
Note: At least 10 seconds must be allowed between successive set/reset inputs.
The parallel interface has nine inputs; use these to control the operation of the dry pumping system, as shown in
Table 4. In Table 4, the terms ‘set’ and ‘reset’ are used as follows:
On volt free inputs;
z‘Set’ means that you close (link) the appropriate two pins of the input.
z‘Reset’ means that you must open (unlink) the appropriate two pins of the input.
On voltage inputs;
z‘Set’ means apply > 20V
z‘Reset’ means apply < 5V
Table 4 - Parallel Interface Inputs
Input Pins Function Use
1
Voltage Input A1 - 1 & 2 L1 - 10 & 23
MCM - 1 & 2
Both pumps on/off *
*If a mechanical booster pump has not been fitted then this function will only operate the dry pump.
Set the input to switch on the both pumps.
Reset the input to switch off both pumps.
2
Voltage Input A1 - 5 & 6 L1 - 11 & 24
MCM - 15 & 16
Process / AUC On / Off Set the input to select ‘process off’.
Reset the input to select ‘process on’.
3
Volt-free Input A1 - 15 & 16 T1 - 1 & 14
MCM - 5 & 6
Both pumps on/off *Set the input to switch on the both pumps.
Reset the input to switch off both pumps.
4
Volt-free Input E73 - 1 & 9 Dry Pump On / Off Set the input to switch on the dry pump. Reset the input to switch off the pump.
5
Volt-free Input E73 - 2 & 10 Mechanical Booster On / Off †
†The mechanical booster pump will not start unless the dry pump is on. The input is ignored if no
mechanical booster pump is fitted to the dry pumping system.
Set the input to switch on the booster pump.
Reset the input to switch off the pump.
6
Volt-free Input T1 - 2 & 15 MCM - 13 & 14 Process / AUC On / Off Set the input to select ‘process off’. Reset the input to select ‘process on’.
7
Volt-free Input T1 - 4 & 17 Run Til Crash On / Off Set the input to select ‘run til crash’ on. Reset the input to select ‘run til crash’ off.
8
Volt-free Input T1 - 5 & 18 Auto / Fast Shutdown Set the input to select ‘Auto shutdown’. Reset the input to select ‘fast shutdown’.
9
Volt-free Input T1 - 3 & 16 Open / Close Gate Valve Set the input to open the gate valve. Reset the input to close the gate valve.

D374-20-880 Issue E
Page 14 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Parallel Interface Operation
4.3 Outputs
Theparallel interface has 11 outputs;use these to monitor the status ofthe dry pumping system, as shown in Table 5.
In Table 5, the terms ‘set’ and ‘reset’ are used as follows:
z‘Set’ means that the output relay is closed (short circuit).
z‘Reset’ means that the output relay is open (open circuit).
Table 5 - Parallel Interface Outputs
Input Pins Function Use
1
Contact Output E73 - 7 & 15 Remote / Local Control
Status
If the output is set, the iTIM may control the pumping system.
2
Contact Output E73 - 3 & 11 Dry pump running status If the output is set, the dry pump is on.
3
Contact Output E73 - 4 & 12 Booster running status If the output is set, the booster pump is on.
4
Contact Output A1 - 3 & 4 T1 - 8 & 20
L1 - 2 & 15
MCM - 3 & 4
Both pumps
running status If the output is set, the both pumps are on. If no booster pump is fitted, the output is set when the dry
pump is on.
5
Contact Output A1 - 13 & 14 Final Valve Signal If the output is set, then the pumps are running and no gas purge flow warning exists.
6
Contact Output A1 - 7 & 8 T1 - 9 & 21
E73 - 5 & 13
MCM - 7 & 8
General
Warning The signal will be set if no warning exists for any of the configured parameters listed in the ‘alerts to tool’
configuration (object 135). The default parameters are:
Dry pump current (3)
Dry pump power (4)
Exhaust pressure (39)
Dry pump motor temperature (55)
Dry pump body temperature (57)
Gate valve not closed (152)
Gate valve not opened (153)
7
Contact Output A1 - 11 & 12 T1 - 11 & 23
MCM - 11 & 12
Gas flow
warning If the output is set, no gas purge flow warning condition exists.
8
Contact Output L1 - 3 & 16 LAM Warning If the output is set, no general or gas flow warnings exsist.
9
Contact Output T1 - 13 & 25 Exhaust pressure
warning
If the output is set, no exhaust pressure warning condition
exists.
10
Contact Output T1 - 12 & 24 Water flow warning If the output is set, there is sufficient cooling water flowing through the pumping system.