Edwards STP Series User manual

MT-41E-101-I
Model name Voltage
STP-A2203 series 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-A2203 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.08

Declaration of Conformity
This product has been manufactured under a
quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI
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This declaration of conformity is issued under the sole responsibility of the manufacturer:
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Jana Sigmunda 300
Lutín , 78349
Czech Republic
T: [phone]
[email protected]
Product Name:
T
urbomolecular pump
Model Number:
STP
-
A
03
series
Is in conformity with the relevant requirements of European CE legislation:
006/4 /EC
Machinery directive
Note: The safety objectives of the Low Voltage Directive 2014/35/ U were
complied with in accordance with Annex 1 No. 1.5.1 of this directive.
014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
011/65/EU
Restriction of certain hazardous s
ubstances (RoHS)
d
irective
as amended by Delegated Directive (EU) 015/863
Based on the relevant requirements of harmonised standards:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 613 6
-
1: 013
Electrical
equipment for measurement, control and laboratory use. EMC
requirements
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Declaration of Conformity
This product has been manufactured under a
quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI
-
DOC
-
41
-
0
10
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
[email protected]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
T
urbomolecular pump
Model Number:
STP
-
A
03
series
The object of the declaration described above is in conformity with relevant statutory requirements:
Supply of Machinery (Safety) Regulations 008
The objectives of the lectrical quipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.
Electromagnetic Compatibility Regulations 016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 01
Relevant designated standards or technical specifications are as follows:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN
613 6
-
1: 013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

This product has been manufactured under a quality management system certified to
ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK): Material Exe ption Infor ation
This product is compliant with the following Exemptions
Annex III:
• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
• 6(c) Copper alloy containing up to 4% lead by weight
• 7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)
• 7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction
to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration:
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
015 European Court of Justice ruling in case C-106/14.
• Lead (Pb)
This substance is present in certain steel / aluminium / brass / electrical or electronic components.
W ASTE F RAMEWORK D IRECTIVE
(EU)

This product has been manufactured under a quality management system certified to
ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
× 〇 〇 〇 〇 〇
铜管管件
Brass pipe fitting
× 〇 〇 〇 〇 〇
电缆/电线/连接器
Cable/wire/connector
× 〇 〇 〇 〇 〇
电子元件和控件
Electronics and
Controls
× 〇 〇 〇 〇 〇
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 657 标准规定的限量要求 。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 657 .
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T 657 标准规定的限量要求 。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T 657 .

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra (for SCU-1601 series only）
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page i
PAGE
i
CONTENTS
Section Title Page
1TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 6
1.4 Accessories 7
2HOW TO SECURE THE STP PUMP 9
2.1 When securing the inlet port with bolts 10
2.2 When securing the inlet port flange with claw clamps 14
2.3 When installing the damper in the inlet port flange 15
3TEMPERATURE MANAGEMENT SYSTEM (TMS) 17
3.1 Configuration of the STP pump with the TMS 17
3.2 TMS connection cable 19
3.3 TMS heater 20
3.4 TMS valve 20
3.5 TMS sensor cable 20
3.6 Installation of the TMS unit 21
3.6.1 Connecting the TMS connection cable to the STP control unit 21
3.6.2 Connecting the pump and TMS sensor cable, TMS valve 21
3.6.3 Connecting TMS connection cable to STP pump 22
3.7 Replacing the fuses in the TMS connection cable 22
3.8 Condition for the TMS unit 23
3.9 Accessories 23

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page ii
PAGE
ii
ILLUSTRATIONS
Figure Title Page
1 STP-A2203 series: VG250/ISO250F/ICF305 4
2 Label affixing positions for the STP pump 6
3 Bolt position for securing the flange 12
4 Example of securing the STP pump
(when securing the inlet port with bolts) 12
5 Shape of reduced diameter shank bolts 13
6 Example of securing the STP pump
(when securing the inlet port flange with claw clamps) 14
7 Example of securing the STP pump
(when installing the damper in the inlet port flange) 15
8 Configuration of the STP pump with the TMS 17
9 External view of TMS connection cable 19
10 TMS sensor cable 20
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 10
3 Shape of reduced diameter shank bolts 13
4 Number of claw clamps for flange size 14
5 Service parts specification 22

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 1
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name
Specification
Applicable Control unit
STP-A2203 series
High-throughput type
SCU-1600/1601
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-A2203C).
•"CV" indicates an enhanced corrosion resistant type with TMS*2 (e.g. STP-A2203CV).
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
*2 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the
turbomolecular pump by monitoring the temperature with the temperature sensor in
the base of the turbomolecular pump, and performing the TMS valve and base heater
ON/OFF control.

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 2
TECHNICAL DATA
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
A2203 series
Flange size
Inlet port flange
VG250/ISO250F/ICF305
Outlet port flange
KF40
Pumping speed
N2
L/s
2,200
H2
L/s
1,700
Compression ratio
N2
>108
H2
2.5×104
Ultimate pressure
Pa (Torr)
10-6 (10-8) order [after baking]
Maximum gas flow-rate*1
N2
Pa·m3/s
(SCCM)
2.5 (1,500): Water cooling
2.0 (1,200): TMS unit used (60 °C)
Ar
Pa·m3/s
(SCCM)
1.5 (900): Water cooling
1.0 (600): TMS unit used (60 °C)
Allowable backing pressure*1
Pa (Torr)
400 (3): Water cooling/TMS unit used
Flow rate of purge gas <N2>
Pa·m3/s (SCCM)
3.4×10-2 (20)
Rated speed
rpm
27,000
Backup rotational speed*2
rpm
Approximately 6,000
Starting time
min
7
Stopping time
min
8
Noise
dB
<50 (at 27,000 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Recommended backing-pump
L/min
>1,300
Mass*3
kg
61
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
Applicable Control unit
SCU-1600/1601

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 3
TECHNICAL DATA
1
*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping
speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can
be exhausted. Consult Edwards about conditions.
*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power
failure.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
1.1.2 Condition for the water-cooling unit
Item
Specification
Port type
Rc 1/4 (Female)*1
Flow rate
L/min
2
Water temperature
°C
5 to 25
Water pressure
MPa (kgf/cm2)
0.3 (3)
*1 Standard type

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 4
TECHNICAL DATA
1
1.2 External appearance of the STP pump
(A) With original TMS sensor connecter
(B) With alternative TMS sensor connecter
Figure 1 - STP-A2203 series: VG250/ISO250F/ICF305

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 5
TECHNICAL DATA
1
No.
Item
Description
1
Height of purge port
2
Height of cooling water port
3
Caster
4
4
TMS sensor connector
Optional accessory
5
Screw hole for casters
Rc*11/4
6
TMS heater
Optional accessory
7
STP cable connector
8
Outlet port flange
KF*240
9
Purge port
KF*210
10
Screw hole for legs
8-M16 depth 24
11
Cooling water port
2-Rc*11/4
Optional accessory
12
Viewed from arrow A
13
Bending dimension of the
STP connection cable
14
Viewed from arrow J
Inlet
port
flange
VG250
ISO250F
ICF305
φA
350
335
305
B
18
16
28
C
438
448
478
D
373.5
383.5
413.5
E
337
347
377
F
325
335
365
G
235
245
275
H
329
339
369
I
364
374
404
*1 ISO
*2 JIS

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 6
TECHNICAL DATA
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 2 - Label affixing positions for the STP pump
1
STP pump installation warning label
2
Hot surface warning label
3
Heavy product caution label
4
Connector caution label
5
STP pump/control unit caution label
6
TMS heater caution label
7
Rotational direction instruction label
8
Name plate
9
Company logo
2
1
6
1
9
4
5
7
8
3

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 7
TECHNICAL DATA
1
1.4 Accessories
Item
Q’ty
Remarks
Inlet port cover
1
Outlet port cover
1
STP connector cover
1
Blank flange for purge port
1
KF10
Clamping ring for purge port
1
KF10
O-ring washer for purge port
1
KF10
Leg
4
Leg with a caster
4
adjustable
Instruction Manual (B)
1
This manual

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 8
TECHNICAL DATA
1
This page is intentionally blank.

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 9
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the STP pump model and its installation
requirements. Secure the STP pump to the vacuum equipment according to the method specified in
this manual.
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when installing to the semiconductor equipment.
•Confirm that electric resistance value between the STP pump and vacuum equipment is set to
0.1 Ωor less after securing the STP pump to the vacuum equipment.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the destructive torque in pump abnormality.
Refer to Table 2 for the destructive torque.
In some cases, the damper and the claw clamper securing cannot be used.
This will depend on the type of STP pump. Refer to Table 1 for torque tightening the bolts used.
Bolt size
Tightening torque (Nm)
M8
12
M10
24
M12
42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
Damper
With bolts
No
Refer to Section 2.1
Secure the inlet port
Refer to Section 2.2
With claw clamps
Yes
Refer to Section 2.3

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 10
HOW TO SECURE THE STP PUMP
2
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or
more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
2.1 When securing the inlet port with bolts
Pump model
STP-A2203 series
Flange type
VG250
ISO250F*3
ICF305
Torque reduction mechanism
Not Equipped
(standard)
Equipped (optional)
Not Equipped
(standard)
Not Equipped
(standard)
Destructive torque [Nm]
6.7×104
3.4×104
5.2×104
6.7×104
Base (8 positions) securing
No
Yes
No
Yes
No
Yes
No
Yes
Recommended
securing bolt
for flange
Shape
Standard
Standard
Standard
Standard
R.D.S.B.*2
Standard
Standard
Standard
Size
M12
M12
M10
M10
M10
M10
M8
M8
Q’ty
12
12
12
12
12
12
32
32
Material*1
Carbon
steel
Alloyed
steel
Stainless
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1
12.9 or
more
70 or
more
12.9 or
more
70 or
more
12.9 or
more
70 or
more
12.9 or
more
70 or
more
Special washer
Not
necessary
Not
necessary
Figure 3
Figure 3
Not
necessary
Not
necessary
Not
necessary
Not
necessary
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification).
*2 Refer to Figure 5 for Shape of Reduced Diameter Shank Bolts (R.D.S.B.)
*3 Destructive torque of ISO_K flange type pump is the same as that of ISO_F flange type pump.
Table 2 - Destructive torque and recommended securing bolt for inlet port flange

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 11
HOW TO SECURE THE STP PUMP
2
Refer to Table 2 for the destructive torque in any pump abnormality and for the recommended type of
securing bolt for inlet port flange.
Secure the inlet port flange with the correct size bolts as specified in the inlet port flange standard.
The destructive torque depends on the presence of a torque reduction mechanism that can be built
into the flange, according to the pump model and flange type. This mechanism, shown in Figure 3, is
designed to absorb energy and also buffer the destructive torque.
There are two installation methods for the pump, as shown in Figure 4. Make sure to secure the inlet
port flange of the pump with the recommended bolts, as described in Table 2, according to the
installation method used.
Note that special washers will be required if the pump includes the inlet torque reduction mechanism.
The washer shape is shown in Figure 3.
Reduced diameter shank bolts (R.D.S.B.) listed on Table 2 are more reinforced bolts over standard
bolts by smoothing the portion to attach flange securing bolts to the respective face at the equipment
side. Refer to Figure 5 for Shape of R.D.S.B.
Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with
regard to legs and bolts for securing the base are adhered to page 9. Make sure that the
recommended securing bolt is the correct one depending on the method of securing the base.
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 3. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.

STP-A2203 Series Turbomolecular Pump
MT-41E-101-I
Page 12
HOW TO SECURE THE STP PUMP
2
1.
Vacuum equipment
2.
Inlet port flange
3.
Washer
4.
Torque reduction mechanism
5.
Bolt insert position
Figure 3 - Bolt position for securing the flange
(A) When the base is not secured
(B) When the base is secured
1.
Recommended fitting bolt for flange
2.
Secure the base
Figure 4 - Example of securing the STP pump
(when securing the inlet port with bolts)
2 A
1
2