Edwards EXT400/200/30H User manual

B756-60-880
Issue D Original
Instruction Manual
EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump
Description Item Number
80 Volt EXT400/200/30H Compound Turbomolecular Pump B756-60-000

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
EXT Compound Turbomolecular pump:
EXT400/200/30H B756-60-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for
+ A1: 2009 Design. Technical Principals
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.
VacuumPumps
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements*
EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
C22.2 61010-1-04: 2004†Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
UL61010-1: 2002†Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
* The pumps comply with EN61010-1: 2001 when installed in accordance with the instruction manual supplied.
†Pumps only comply with the Canadian Standards Authority and Underwriters
Laboratory when used with EXDC 80V family of controllers, EXC100E and EXC100L controllers.
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
B. D. Brewster, Technical Manager,
Burgess Hill Products Date and Place
P200-01-260 Issue D
9 December 2009

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Contents
B756-60-880 Issue D
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
2 Technical data ....................................................................................3
2.1 General .................................................................................................................... 3
2.2 Pumping media ........................................................................................................... 3
2.3 Vent gas specification and vent control data ....................................................................... 4
2.4 Materials exposed to gases pumped .................................................................................. 6
3 Installation .........................................................................................9
3.1 Unpack and inspect ...................................................................................................... 9
3.2 Typical installation .....................................................................................................10
3.3 Connection to the vacuum system ...................................................................................11
3.3.1 Mechanical fixing .......................................................................................................11
3.3.2 Inlet-screens (supplied fitted) ........................................................................................12
3.3.3 Inlet connection and orientation .....................................................................................12
3.3.4 Backing connection .....................................................................................................13
3.4 Vent options, vent valve connection and control ..................................................................14
3.5 Electrical installation ..................................................................................................15
3.5.1 EXDC controllers ........................................................................................................15
3.5.2 EXC controllers ..........................................................................................................15
3.6 Cooling ...................................................................................................................16
3.6.1 Introduction .............................................................................................................16
3.6.2 Forced-air cooling ......................................................................................................16
4 Operation ........................................................................................ 17
4.1 Start-up ..................................................................................................................17
4.2 Shut-down ................................................................................................................17
4.3 Safety interlocks and control system ................................................................................18
4.3.1 EXDC controllers ........................................................................................................18
4.3.2 EXC controllers ..........................................................................................................18
5 Maintenance ..................................................................................... 19
5.1 Introduction .............................................................................................................19
5.2 Bearing maintenace ....................................................................................................19
5.3 Rotor life .................................................................................................................19
5.4 Cleaning the pump ......................................................................................................20
5.5 Fault finding .............................................................................................................20
6 Storage and disposal ........................................................................... 23
6.1 Storage ...................................................................................................................23
6.2 Disposal ...................................................................................................................23
7 Service, spares and accessories .............................................................. 25
7.1 Introduction .............................................................................................................25
7.2 Service ....................................................................................................................25
7.3 Spares .....................................................................................................................25
7.3.1 Inlet-screens .............................................................................................................25
7.3.2 Inlet-flange seals ........................................................................................................25
dcs/8108/08/08

B756-60-880 Issue D
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Contents
7.4 Accessories ...............................................................................................................25
7.4.1 Installation ...............................................................................................................25
7.4.2 EXDC drive modules ....................................................................................................26
7.4.3 EXC controllers ..........................................................................................................26
7.4.4 Pump-to-controller cables .............................................................................................26
7.4.5 TAV vent-valve and vent-port adaptor ..............................................................................26
7.4.6 ACX air-cooler ...........................................................................................................27
7.4.7 VRX vent-restrictor .....................................................................................................27
Index .............................................................................................. 29
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Dimensions of the EXT400/200/30H split flow pump (units in mm) ............................................. 7
2 EXT400/200/30H split flow system ..................................................................................10
3 Correct installation of inlet-screen ..................................................................................12
4 Mounting attitude of the EXT400/200/30H split flow pump .....................................................13
5 Installation of optional accessories ..................................................................................28
Tables
Table Page
1 General data .............................................................................................................. 3
2 Vent gas and vent control data ........................................................................................ 4
3 Technical data ........................................................................................................... 4
4 List of items supplied ..................................................................................................11
5 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............14
6 Fault finding .............................................................................................................20
7 Spares .....................................................................................................................25
8 EXDC drive modules ....................................................................................................26
9 EXC controllers ..........................................................................................................26
10 Pump-to-controller cable ..............................................................................................26
11 TAV vent-valve and vent-port adaptor ..............................................................................26
12 AXC air-cooler ...........................................................................................................27
13 VRX vent-restrictor .....................................................................................................27

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Introduction
B756-60-880 Issue D
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards EXT400/200/30H
Split Flow Compound Turbomolecular Vacuum Pump. Please read and follow all instructions in this manual.
The EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump is designed for use with an Edwards EXDC
Controller. Read this manual and the instruction manual supplied with your controller before you attempt to install
or operate the equipment. The controller manual contains details of electrical installation.
Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these
instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI international system of units of measurement. Also
throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard
cm3min-1: this is a flow of 1 cm3min-1 at an ambient temperature of 0°C and a pressure of 1013 mbar (1.013 x 105Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.

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Technical data
B756-60-880 Issue D
2Technicaldata
2.1 General
2.2 Pumping media
CAUTION
Do not use the EXT400/200/30H Split Flow pump to pump gases containing more than 20 % oxygen. If you do,
the lubricant will polymerise and the pump will fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
Table 1 - General data
General items Reference data
Performance Refer to Table 3
Dimensions Refer to Figure 1
Maximum inlet-flange temperature 70°C
Maximum magnetic field 3.5 mT
Installation category EN61010 part 1, Category 1
Pollution degree CAN/CSA, UL, EN61010 part 1, Category 2
Altitude 2000 m
Humidity 10 to 90 % non condensing
Electrical supply 80 V
Equipment type Fixed equipment, for indoor use only
WARNING
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.
WARNING
Do not use the EXT400/200/30H Split Flow pump to pump explosive gas mixtures as the pump is
not suitable for this purpose.
WARNING
If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.
WARNING
If pumping hazardous gases or vapours, the customer must observe the safety recommendations
of the supplier of the gas or vapour.

B756-60-880 Issue D
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Technical data
The pump is designed to pump the following residual gases normally used in high-vacuum systems:
You can use the pump to pump oxygen and water vapour, subject to the following conditions:
zOxygen – The oxygen concentration must be less than 20 % by volume.
zWater vapour - You must ensure that vapour does not condense inside the pump.
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pumps are not suitable for pumping aggressive or corrosive gases.
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent the pump with dry, clean gases.
zAir zNitrogen zCarbon dioxide
zCarbon monoxide zKrypton zHelium
zNeon zArgon zHydrogen
zEthane zPropane zButane
zMethane
Table 2 - Vent gas and vent control data
Vent items Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22°C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reduce to 50 % ≥15 seconds
Purge gas pressure*
*If you wish to use purge pressures in excess of this value, consult Edwards.
≤0.5 bar gauge
Table 3 - Technical data
Parameter EXT400/200/30H Notes
Mass 14.67 kg
Main Inlet Port Rectangular 96 x 210 mm
Side Inlet Port Rectangular 96 x 60 mm
Interstage Inlet Port Rectangular 96 x 20 mm
Outlet-flange DN25NW
Vent-port 1/8 inch BSP
Main Inlet Pumping Speed
N2*†‡ 302 l s-1 Pb < 5 mbar (500 Pa)
He*†‡ 325 l s-1 Pb < 1 mbar (100 Pa)
H2*†‡ 260 l s-1 Pb < 0.5 mbar (50 Pa)
Side Inlet Pumping Speed
N2*†‡ 190 l s-1 Pb < 5 mbar (500 Pa)
Pi= 5 x 10-3 mbar (0.5 Pa)

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Technical data
B756-60-880 Issue D
He*†‡ 200 l s-1 Pb < 1 mbar (100 Pa)
Pi= 5 x 10-3 mbar (0.5 Pa)
H2*†‡ 130 l s-1 Pb < 0.5 mbar (50 Pa)
Pi= 5 x 10-3 mbar (0.5 Pa)
Interstage Inlet Pumping Speed
N2*†‡ 28 l s-1 Pb = 5 mbar (500 Pa)
Pi= 5 x 10-1 mbar (50 Pa)
He*†‡ 28 l s-1 Pb = 5 mbar (500 Pa)
Pi= 5 x 10-1 mbar (50 Pa)
H2*†‡ 24 l s-1 Pb = 5 mbar (500 Pa)
Pi= 5 x 10-1 mbar (50 Pa)
Compression ratio from the backing port to the main inlet
N26.9 x 106
He 5.45 x 106
H23.34 x 105
Compression ratio from the side inlet to the main inlet
N23.15 x 104
He 3.6 x 103
H22.15 x 103
Maximum backing pressure**
N25.33 mbar (533 Pa)
He 5.33 mbar (533 Pa)
H25.33 mbar (533 Pa)
Minimum backing pump displacement 27.5 m3h-1
Maximum continuous inlet pressure - air-cooling at 35 °C
ambient††‡ Air-cooling is beneficial to the EXDC controller
Main inlet 4.17 x 10-2 mbar
(4.17 Pa) 80 V variant Pb set to 3.28 mbar
Side inlet 8.73 x 10-2 mbar
(8.73 Pa) 80 V variant Pb set to 3.28 mbar
Interstage inlet 1.07 x 10-1 mbar
(10.7 Pa) 80 V variant Pb set to 3.28 mbar
Operating attitude Refer to Figure 4
Nominal rotational speed 60000 rpm
Starting time to 90 % speed
EXDC160 150 sec
Cooling method Forced-air
Ambient air temperature (forced-air cooling) 0 - 35°C
Noise level (at 1 metre) < 45 dBA
Recommended controller EXDC160
EXDC160 maximum VA input 250 VA
Quiescent power 25 W
Recommended backing pump‡‡ E2M28
Table 3 - Technical data (continued)
Parameter EXT400/200/30H Notes

B756-60-880 Issue D
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Technical data
2.4 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels,
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin
and carbon-fibre reinforced epoxy resin.
*Pb = backing pressure,
Pi= Inlet pressure,
†Pumping speeds are without inlet-screen.
Inlet-screens reduce speed by approximately 10% for main and side inlets and by approximately 4 % at
interstage inlet.
‡With an E2M28 backing pump.
** Point at which pump folds back.
†† Above this pressure, rotational speed drops below nominal.
‡‡ The customer must ensure that the exhaust system and relief valves are capable of passing the maximum
throughput without causing the maximum pump outlet pressure to be exceeded.

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Technical data
B756-60-880 Issue D
Figure 1 - Dimensions of the EXT400/200/30H split flow pump (units in mm)
1. 6 slots 8.4 mm by 12 mm deep

B756-60-880 Issue D
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Installation
B756-60-880 Issue D
3 Installation
3.1 Unpack and inspect
Take care when you unpack the pump to avoid excessive shocks which could damage the bearings and reduce the life
of the pump. The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour. Do not
remove these seals until you are ready to install the pump on your vacuum system.
Cut the plastic fibre banding strip/s with suitable sidecutters/knife, being aware that the strip is under tension and
could therefore cause a whipping hazard. Open the cardboard box from the top by firstly removing the tape and then
by removing the staples. Once the box lid is open, remove the upper piece of foam. The cardboard can then be lifted
away from the pallet by pulling in a vertical direction. The pump can now be lifted vertically from the packaging
using appropriate mechanical lifting equipment and the two M8 tapped holes provided in the top of the pump. If the
pump is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the
pump together with your order number and your supplier’s invoice number. Retain all packing materials for
inspection. Do not use the pump if it is damaged.
Check that your package contains the items listed in Table 4. If any of these items is missing, notify your supplier in
writing within three days.
If the pump is not to be used immediately, store the pump in suitable conditions as described in Section 6.1.
It is advised to retain all packing materials for use, should you return it for service.
WARNING
The pump weighs approximately 15 kg (33 lbs). Appropriate care should be taken when lifting and
moving the pump to avoid injury.

B756-60-880 Issue D
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Installation
3.2 Typical installation
CAUTION
Local legislation concerning the impact of the pump on the environment must be followed when installing the
pump.
A typical pumping system with an EXT400/200/30H pump is shown in Figure 2.
Figure 2 - EXT400/200/30H split flow system
The accessories available for the EXT400/200/30H Split Flow pump are detailed in Section 7.4; the accessories are
shown in Figure 5.
1. Vacuum system
2. High vacuum gauge
3. Alternative position for vent valve
4. TMP
5. Backing valve
6. Vacuum gauge
7. Foreline trap
8. Rotary backing pump
9. Mist filter
10.Cooling fan
11.EXDC controller
12.Vent valve
13.Control system

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Installation
B756-60-880 Issue D
3.3 Connection to the vacuum system
Carefully remove the pump from packaging media and connect to vacuum system.
3.3.1 Mechanical fixing
WARNING
Install the pump in the vacuum system before you connect the controller to the power supply. This
will ensure that the pump cannot operate and injure people during installation.
WARNING
The impeller blades on an EXT400/200/30H are very sharp. Care should be taken when handling
the pump not to dislodge or damage the protective inlet screens.
WARNING
Under no circumstances must a part of the human body be exposed to a vacuum.
Table 4 - List of items supplied
Qty Description Check (9)
1 EXT400/200/30H Split Flow Turbomolecular Pump 
1 Large inlet-screen (fitted) 
1 Medium inlet-screen (fitted) 
1 Small inlet-screen (fitted) 
1 Large inlet seal (O-ring) 
1 Medium inlet seal (O-ring) 
1 Small inlet seal (O-ring) 
1EXDC160controller(fitted)
*
*EXDC160 controller only supplied with system variants.

WARNING
Ensure the EXT400/200/30H Split Flow pump is securely fixed to the vacuum system via its
inlet-flange using all available mounting points. If the pump were to seize when not securely
mounted, the stored energy of the rotor could cause rapid movement of the pump, which may
cause further damage and injury to personnel.

B756-60-880 Issue D
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Installation
3.3.2 Inlet-screens (supplied fitted)
Do not remove the inlet-screens unless you can be sure that there is no danger that debris can fall into the pump.
To remove an inlet-screen carefully extract it from the inlet-flange using a bent wire hook. Once removed, a screen
is not reusable. Spares are available (refer to Section 7).
Figure 3 - Correct installation of inlet-screen
3.3.3 Inlet connection and orientation
CAUTION
Do not store or orientate the pump such that the finned body is above the pump inlets.
The pump can be mounted in any attitude apart from one where the finned body (with electrical connector) is above
the inlets of the pump. Mounting in such a condition may allow oil from the lower lubricated bearing to drain into
the pumping mechanism, reducing performance and pump life.
Make sure that the pump's inlets and all components fitted to the pump-inlets are clean and dust-free. If the
pump-inlets are not kept clean, the pump-down time may be increased.
Use the O-rings supplied with the pump and use six M8 bolts tightened to a torque of 20 Nm (15 lbf ft) to connect the
inlet-flange of the pump to the vacuum system.
WARNING
Removal of inlet-screens will expose the risk of injury from sharp edges.
1. Inlet-screen
2. Inlet-flange

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Installation
B756-60-880 Issue D
Figure 4 - Mounting attitude of the EXT400/200/30H split flow pump
3.3.4 Backing connection
CAUTION
Do not use the EXT400/200/30H Split Flow pump with a backing pressure below 5 x 10-4 mbar (5 x 10-2 Pa).
Lower backing pressures will increase the evaporation rate of the lubricating oil and so will reduce the life of
the bearings.
Use suitable vacuum tubing and connectors to connect the NW25 flange of the backing-port to your backing-pump.
If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing-pump to the
EXT400/200/30H Split Flow pump.
WARNING
The customer must ensure safe ducting of the backing line if oil mist or hazardous substances are
present.
WARNING
The EXT400/200/30H must not be operated, or vented from a positive pressure gas supply, with a
restricted/blocked backing line.
1. Inlets
2. Backing port

B756-60-880 Issue D
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Installation
We recommend that you use an Edwards E2M28 backing-pump. The minimum size of the backing-pump required is
given in Table 3. You may have to use a larger backing-pump if you run the pump at a high inlet pressure. The
EXT400/200/30H is also suitable for use with diaphragm backing-pumps although the effect of higher backing
pressure on the pump's performance and cooling requirements should be noted (refer to Table 3 and Section 3.6).
3.4 Vent options, vent valve connection and control
To maintain the cleanliness of your vacuum system, we recommend that, whenever you switch the pump off, you
vent the pump (or vacuum system) when the speed of the EXT400/200/30H Split Flow pump is between full rotational
speed and 50 % of full rotational speed.
At and above 50 % of full rotational speed, the rotor spins fast enough to suppress any backstreaming of hydrocarbon
oil from your backing pump. Venting may be accomplished by one of the following methods:
zUse a TAV5 or TAV6 solenoid vent-valve accessory (refer to Section 7) in place of the manual vent-valve.
zUse a TAV5 or TAV6 solenoid vent-valve connected to a convenient flange on your vacuum system.
zUse an alternative valve, with an appropriate restriction, connected to your vacuum system. For further
details contact Edwards.
However, if you manually vent the pump when it is at full rotational speed and the rate of pressure rise is too high,
the pump life may be reduced. When using the manual vent valve supplied, we recommend that you either limit the
vent or only open the vent-valve after the EXT400/200/30H Split Flow pump speed has fallen to 50 % of full rotational
speed.
Do not vent from the backing line, this may lead to contamination. If you vent into your vacuum system, select a
point upstream of the pump, to prevent oil backstreaming from the backing line.
If you use the TAV5 or TAV6 vent-valve you can control it using an EXC controller, or by other methods. Table 5 gives
an indication of the appropriate orifice size to be fitted to the vent valve for given vacuum system volumes in order
that the vent rate is kept within the limits given in Section 4.
Table 5 - Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve)
Vacuum system volume (l) Orifice diameter (mm)
<20 <1.0
<10 <0.7
<5 <0.5
<2 <0.35

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Installation
B756-60-880 Issue D
3.5 Electrical installation
The EXT400/200/30H Split Flow pump should be electrically bonded to earth using the connection provided
(M5 thread located next to the pump electrical connector). Refer to the instruction manual supplied with the
controller to complete the electrical installation.
3.5.1 EXDC controllers
An EXDC controller requires connection to a suitably rated power supply. The EXDC Controller is designed to allow a
pumping system to operate in a fully automatic system.
3.5.2 EXC controllers
The EXC Controller provides the electrical supply to the EXT400/200/30H Split Flow pump through the
pump-to-controller cable. Connect and lock the bayonet-connectors at the ends of the cable to the mating
connectors on the pump and the EXC Controller (if applicable). If the cable is disconnected at the pump, the
EXC Controller output is switched off, making the cable safe. However, if the cable is disconnected from the
EXC Controller it should be noted that the other end of the cable is still connected to the pump. Refer to the
appropriate warning in Section 3.5 regarding exposure to hazardous voltages whilst the pump is still rotating.
The EXC Controller is designed to allow a pumping system to be configured in a variety of ways, from a basic
manually-operated system to a fully automatic system with remote control.
WARNING
The customer must ensure that any electrical circuits are protected from dripping water caused
by condensation on cold surfaces.
WARNING
It is the responsibility of the customer to ensure that the power supply used is correctly
rated/protected.
WARNING
This product requires a separate power supply (not included). The power supply should be
adequately protected against a hazardous live condition (for example in case of a short circuit).
WARNING
Do not remove the EXDC/EXC controller cable from the pump until the pump is completely at rest.
This could expose the user to hazardous voltage and potentially damage the EXDC/EXC controller.
WARNING
The customer must ensure appropriate routing of cables and pipework to avoid slip/trip hazards.
WARNING
The customer must provide an emergency stop circuit to turn off power to the EXDC controller.

B756-60-880 Issue D
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Installation
3.6 Cooling
3.6.1 Introduction
CAUTION
You must cool the pump by forced-air to prevent damage to the bearing.
You must use forced-air cooling to cool the pump. You must ensure that there is an adequate supply of cooling-air to
the pump.
During operation, if the temperature of any surface of the pump is higher than 60°C, the pump is too hot and you
must increase the cooling.
3.6.2 Forced-air cooling
An air-cooler accessory is available for the EXT400/200/30H pump (refer to Section 7). Fit the air-cooler as described
in the instruction manual supplied with it. If you wish to use an alternative fan for air-cooling, ensure that the flow
rate is above 70 m3h-1 (40 cfm).