µPG 501
User Guide iii
Table of Contents
Table of Contents ........................................................................................................... iii
Preface ............................................................................................................................1
Conventions used.....................................................................................................1
Safety Information.....................................................................................................1
Related Documentation ............................................................................................1
Contact .....................................................................................................................2
System Description..........................................................................................................3
System Startup and Shutdown ........................................................................................5
Startup ......................................................................................................................5
Shutdown..................................................................................................................5
Restart ......................................................................................................................5
Design Data.....................................................................................................................6
Exposures........................................................................................................................7
Choice of Substrate ..................................................................................................7
Exposure Procedure.................................................................................................8
Substrate Processing..............................................................................................26
Exposure Optimization...................................................................................................28
Tools Menu....................................................................................................................30
Initialize Stage ........................................................................................................30
Control Panel..........................................................................................................30
Troubleshooting and Maintenance.................................................................................32
Functional Problems...............................................................................................32
Exposure result problems .......................................................................................33
Advanced Troubleshooting .....................................................................................34
Fuses......................................................................................................................35
Maintenance ...........................................................................................................35