HP HP 5526A Troubleshooting guide

Hewlett-Packard
Laser Metrology Package
OPERATING NOTE and Program LISTINGS
*HP 5526A
*HP 9825A
*HP 9872A

TABLE OF CONTENTS
Introduction....................................................... 1
Hardware Description ............................................. 1
Basic software description and operation........................... 2
Individual Software Programs....................................... 5
Initialization Program (Program 0) ............................... 5
Surface Plate Calibration (Program I) ............................ 6
Introduction ................................................... 6
Operation ...................................................... 6
Example I ...................................................... 9
Isometric Data Plot (Program II) ................................ 10
Introduction .................................................. 10
Operation ..................................................... 10
Example II .................................................... 10
Numeric Data Plot (Program III) ................................. 12
Introduction .................................................. 12
Operation ..................................................... 12
Large angle correction (Program IV) ............................. 15
Introduction .................................................. 15
Example IV .................................................... 16
Velocity of Light Compensation (Program V) ...................... 17
Introduction .................................................. 17
Operation ..................................................... 17
Standard Error Plotting (Program VI) ............................ 19
Introduction .................................................. 19
Operation ..................................................... 20
Example VI .................................................... 22
Straightness, Squareness, and Parallelism (Program VII) ........ 24
Squareness sign convention guide .............................. 26
Squareness .................................................... 26
Squareness .................................................... 27
Operation ..................................................... 28
Example VII ................................................... 31
Parallelism ................................................... 32
Squareness .................................................... 34
Statistical Package (Program VIII) .............................. 36
Introduction .................................................. 36
Software notes ................................................ 36
Operation ..................................................... 37
Metrology program cartridge duplication........................... 41
Hardware ...................................................... 41
Procedure ..................................................... 41
Program Listings.................................................. 42
Program 0 (Metrology package directory) ......................... 42
Program 1 (Surface Plate calibration) ........................... 43
Program 2 (Surface Plate Isoplot) ............................... 46
Program 3 (Surface Plate Numeric plot) .......................... 48
Program 4 (Large angle error correction) ........................ 50
Program 5 (Velocity of light compensation) ...................... 51
Program 6 (Standard error plotting) ............................. 53
Program 7 (Straightness and Squareness) ......................... 54
Program 8/1 (Linear/Angular Statistical) ........................ 57
Program 8/2 (Linear/Angular STAT-PAY) ........................... 59
AppendixI......................................................... 61
Use of 9872A Plotter ............................................ 61
2

Introduction
The 9825A Laser Metrology Package provides data acquisition,
reduction, and graphic display of several common error measurements
performed by the HP 5526A Laser Measurement System. The programs
were adapted to the 9825A Desktop Computer because of its
flexibility and programming ease. These programs can be modified
or new ones created by the user to solve unique problems.
Hardware Description
The following hardware is needed to run the 9825A Metrology Program:
9825A Programmable Calculator
98216A 9872A Plotter/General I/O, Extended I/O ROM
98210A String Advanced Programming ROM
98034A HP-IB Cable
9872A Plotter
K76-59995A 98033A BCD Input Interface Cable
Before connecting the entire system together, turn off all
instruments and connect the system as shown in Figure 1.
Always cut off power before installing or removing the interface
cables.
1

Basic software description and operation
The 9825A Metrology Program Package has eight metrology programs and 28
data storage files. The available programs are described in later
sections. Data storage files 1 thru 19 are available for storing
user-generated data. Any data storage file may be reused by storing the
new data over the old, previously stored data. However, the old data will
be lost in this operation.
It is suggested that the user duplicate the 9825A Metrology Program
following the procedure in V. and keep the master copy in a safe place
as a backup for the future. Eventually, after heavy usage, the cartridge
will wear out to the extent that the calculator will not be able to read
a file. At this point, take out the master tape and a new tape can be
copied.
To read a number from the Laser Display over the interface, the following
sequence has to be performed:
red 3, X, Y
X + sgn(X) (Y 1e8) -> X
X will be the 9 digits on the display. X must then be multiplied by a
power of ten dependent upon the display switch settings.
2

Figure 1 System configuration
3

For a linear measurement, this correction factor is:
Units
Display Mode
English Metric λ/4
x10 10-6 10-5 .1
NORMAL 10-5 10-4 1
A thorough familiarity with the 9825A is required before any program
modifications should be attempted.
4

Individual Software Programs
Initialization Program (Program 0)
The first program located on the 9825A Metrology Program Cartridge is
the Initialization Program. This program is read into the 9825A
Calculator when the calculator is turned on. The purpose of the
initialization program is to set up specific measurement and data
presentation conditions inside the 9825A Calculator before a metrology
program is run.
The soft keys, f1 through f8, located on the 9825A Calculator keyboard
define the specific metrology program being used.
f1 Used to select the Surface Plate calibration program.
f2 Used to select the Surface Plate Isoplot program.
f3 Used to select the Surface Plate Numeric plot program.
f4 Used to select the LARGE ANGLE CORRECTION program.
f5 Used to select the Velocity of light compensation calculation
program.
f6 Used to select the STANDARD ERROR MEASUREMENT and PLOT program.
f7 Used to select the Straightness, Squareness and Parallelism
program.
f8 Used to select the STATISTICAL PACKAGE program to perform
statistical error analysis.
5

Surface Plate Calibration (Program 1)
(Used with Angular Optics)
Introduction
This program accepts data from the 5526A Angular Optics and computes
the flatness contours of a surface plate. Once the calculations have
been-made, the results can be listed on the calculator printer
and/or stored on the data cartridge for future use by Programs II
and III. These programs provide graphics display of results stored
on the tape. Data can be entered directly from the Laser Display
or via the calculator keyboard in either English or Metric units.
The inspection lines can be entered in any order and any line can
be edited or replaced during the calibration.
Application Note 156-2 describes the complete surface
plate calibration procedure and should be referred to
before making the measurement.
CAUTION: Care should be taken when inputting the data
for the inspection lines or when editing a previously
input line of data. When editing, the new number of
points must equal the number of points in the original
data line. Otherwise, lines of data may overlap and yield
erroneous results.
Operation
1. English (0) or Metric (1) units?
Answer this question according to the switch setting on the Laser
Display or in whatever units the data is to be entered. For example,
if data is English units (inches), respond with "0". (Default =
English).
2. CREATE (0) or EDIT File #) data?
If a new surface plate is to be measured in entirety, answer "0".
If a previously stored data file is to be modified or edited, respond
with the file # that is to be modified. (Default = CREATE).
6

3. Data via 5526 (0) or Keyboard (1)?
Indicate how data is to be sent to calculator. If transfer is over
the interface direct from the Laser Display, answer "0". If data
is hand entered into the calculator keyboard, answer (1). (Default
= 5526).
4. Foot Spacing?
Distance between measurement points if different from the standard
spacing provided by the angular optics bracket (2.0625 inches).
(Default = 2.0625 inches).
NOTE: At this point, we are ready to input the data. Step 5 will
occur before each new inspection line is begun. Step 6 or Step 7
will occur for each point that is input on the current inspection
line. Step 8 will be reached after all lines have been entered.
5. (+/-) line # ? (+: Away) (-: Toward)
As explained in Application Note 156-2, the line # identifies the
inspection line which is to be measured or edited next. The positive
or negative sign indicates the reference direction of the angular
mount with respect to the interferometer. All lines should be
measured with the same reference direction. A line can be
re-measured simply by re-entering its line # when this question is
asked. Press CONTINUE with no line entry when all lines are completed.
This exits this section. (Default = end of data acquisition).
6. Break Beam and Push PRINT to End.
This message is displayed when data entry directly from the Laser
was selected. When a line has been completed, break the alignment
by passing hand through beam (flashing RESET indicator on display)
and press the "PRINT" switch an additional time on the display. This
will return to Step #5 (new line #). If the beam is broken
accidentally during a line, press the "PRINT" switch and re-enter
the same line # in response to Step 5.
7

7. Data?
This question is asked for each data point to be entered on the calcu-
lator keyboard during hand entry. Press CONTINUE after each data
point is entered. Return to Step #7. When a line is complete, press
CONTINUE with no data entered. Return to Step #5. (Default = end
of line).
NOTE: For either Laser or Keyboard data entry, the first point of
each inspection line is always O. The calculator assumes this. Do
not enter the first zero measurement point of each line. Increment
the angular optics and begin data entry with the second position.
8. Data Printout? NO (0) or YES (1)
This question occurs after all calculations are complete. If a
listing of the calculated points is desired, then answer "1". If
not, answer "0". (Default = No).
9. Month? (1-12)
Enter the month in numerics, 1 through 12.
Day? (1-31)
Enter the date in numerics, 1 through 31.
Year? (0-99)
Enter the year in numerics, 0 through 99.
10. Surface Plate ID #?
Enter a numeric identifier for the plate measured. (This will be
printed on all plots).
11. Data to be stored on File #?
Enter the file # to store the results. Data must be stored before
programs II and III can be used to display results.
8