Inficon Transpector CPM User manual

OPERATING MANUAL
PN 074-641-P1B
C
over
P
age
Transpector CPM
Compact Process Monitor
®

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON®, Transpector®, and FabGuard® are registered trademarks and FabGuard Explorer™ is a trademark
of INFICON.
Windows®, Windows NT® and Microsoft® are registered trademarks of Microsoft Corporation.
Teflon® is a registered trademark of DuPont Co.
Swagelok® is a registered trademark of Swagelok Co.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Declaration Of Conformity
Page 1

Warranty
Standard INFICON One Year
Page 1
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com r[email protected]

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Transpector CPM Operating Manual
Table Of Contents
Cover Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Getting Started
1.1 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Purpose of Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Description of the Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.3 Using this Operating Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.4 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.4.1 Returning Transpector CPM to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5 Transpector CPM Performance Specifications. . . . . . . . . . . . . . . . . . . . . . . 1-5
1.5.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.5.2 Hex Block Orifice Sampling Inlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.5.3 Atmospheric Pressure (Capillary) Sampling. . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6 Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.1 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.6.3 Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7.1 Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7.1.1 Acceptable Supply Voltage Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7.1.2 Required Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7.1.3 Power Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.7.1.4 Fuse Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.7.1.5 Overvoltage Category. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.7.1.6 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.8 Nitrogen Purge Gas (Corrosive System Only) . . . . . . . . . . . . . . . . . . . . . . 1-11
1.9 Exhaust Gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.10 Air Pressure Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.10.1 Required Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.10.2 Air Pressure Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

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Transpector CPM Operating Manual
1.10.3 Moisture Content of Compressed Air Supply . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.10.4 Air Pressure Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.11 Vacuum Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.11.1 Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.11.2 Acceptable Range Of Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.3 Maximum Humidity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.4 Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.5 Maximum Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.6 Minimum Operating Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.12.7 Clean Room Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.12.8 Anti-Static Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.13 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.13.1 Operating System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Chapter 2
Installation
2.1 Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Transpector Electronics Module, Heat Guard, and Cable Box Installation . 2-2
2.2.1 Attach Transpector Electronics Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.2 Attach Heat Guard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.3 Attach Cable Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3 Sniffer Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.4 Mounting the Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.4.1 Installing the Support Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.4.2 Atmospheric Support Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.5 CPM Controller Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.6 Transpector Cable Box Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.7 CPM Foreline Pump Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.8 Software Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Chapter 3
Connecting Transpector CPM
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 General Networking Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2.1 IP Addresses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2.2 Subnetworking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3 Transpector CPM IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

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Transpector CPM Operating Manual
3.3.1 Using the INFICON Mass Spectrometer Search Utility to
Change the Transpector CPM IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3.1.1 Change IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.3.1.2 Launch Web UI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3.1.3 Find Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3.1.4 Show Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.4 Connecting Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.4.1 Connecting a Single Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.4.1.1 Single Transpector CPM Direct Connection Installation. . . . . . . . . . . . . . . . 3-6
3.4.1.2 Installing a Single Transpector CPM on an Existing Local Network. . . . . . . 3-6
3.4.2 Installing Multiple Transpector CPM Sensors. . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.4.2.1 Installing Multiple Transpector CPM Directly to a Host Computer . . . . . . . . 3-7
3.4.2.2 Installing Multiple Transpector CPM on an Existing Local Network . . . . . . . 3-7
3.5 Changing the Computer IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.5.1 Windows 7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Chapter 4
How the CPM System Works
4.1 CPM Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 Instrument Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3.1 Input/Output (Aux I/O) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3.1.1 CPM Aux I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.3.1.2 Two Digital Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.3.1.3 One Status Relay Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.3.1.4 One Analog Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.2 Ultra-High Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.2.1 Foreline Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.3 Heater(s) Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.4 CPM Controller Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.5 Solenoid Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.6 Sensor and Transpector Electronics Module Subsystem. . . . . . . . . . . . . . . 4-7
4.4 Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
4.5 Sample Inlet Systems and Examples of Use . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.5.1 Inlet System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.5.2 High Pressure Sampling: Orifice Bypass (V4) . . . . . . . . . . . . . . . . . . . . . . 4-12
4.5.3 Dual-Capillary Sampling Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.6 Advice and Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.6.1 Achieving Good Base Pressure in the CPM. . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.6.2 Avoiding Trapped Gas when Sampling Valves are Closed . . . . . . . . . . . . 4-14

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Transpector CPM Operating Manual
Chapter 5
Theory and Application Guide
5.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.1 The Ion Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.2.2 The Quadrupole Mass Filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.2.2.1 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.2.2.2 The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.2.3 The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.2.3.1 The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.2.3.2 The Continuous Dynode Electron Multiplier/Faraday Cup Detector. . . . . . . 5-9
5.3 How to Interpret The Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.3.1 Qualitative Interpretation Of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.3.1.1 Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.3.1.2 Isotope Ratios . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
5.3.1.3 Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.3.1.4 A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.3.1.5 Dry Etching Chemistries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
5.3.1.6 Tungsten CVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.3.1.7 Copper MOCVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
5.3.2 Quantitative Interpretation of Mass Spectra
(Calculating Partial Pressures). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
5.3.3 Additional Information For Interpreting Mass Spectra . . . . . . . . . . . . . . . . 5-32
5.3.3.1 Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
5.3.3.2 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33
5.3.3.3 Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34
Chapter 6
Operation
6.1 HexBlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.1.1 HexBlock Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.1.1.1 Hex Block Process Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.1.2 Calibration Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.1.2.1 High Mass FC5311 Tuning Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
6.1.3 Process Gauge (CDG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.2 Heaters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.3 Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.3.1 Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.3.1.1 Foreline Pirani Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

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6.3.2 Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.3.2.1 Turbo Molecular Pump Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.4 Nitrogen Purge Valve for the Turbo Molecular Pump on Corrosive Pumping
Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5 Filament Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5.1 Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5.2 Total Pressure Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5.3 Filament Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.6 Pneumatic Digital Pressure Switch and Pressure Gauge . . . . . . . . . . . . . 6-11
6.6.1 Setup Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.6.2 How to Test for Proper Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.6.3 How to Lock and Unlock the Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Chapter 7
Maintenance
7.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2.1 Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.2.2 Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.2.3 Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.3 Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.3.1 Bakeout of Quadrupole. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.3.2 Spare Heating Jacket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.4 General Instructions For All Repair Procedures . . . . . . . . . . . . . . . . . . . . . . 7-4
7.5 Required Tools, Materials, or Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.1 Tools for Replacing the Filament Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.2 Tools for Replacing the Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.3 Tools for Replacing the Electron Multiplier. . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.4 Parts Required For Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.6 Changing Diaphragms in the Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.6.1 Replacement Interval . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.6.2 Diaphragm kit PN 923-418-G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.6.3 Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
7.7 Transpector Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
7.7.1 How to Determine if a Filament Kit Replacement is Required . . . . . . . . . . 7-17
7.7.2 Transpector Sensor Filament Replacement . . . . . . . . . . . . . . . . . . . . . . . . 7-18
7.7.3 Transpector Sensor Ion Source Replacement . . . . . . . . . . . . . . . . . . . . . . 7-20
7.7.4 Electron Multiplier Replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
7.8 HexBlock Inlet Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
7.8.1 Valve and Orifice Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29

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Transpector CPM Operating Manual
Chapter 8
Diagnosing Problems
8.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.3 CPM Symptom—Cause—Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.4 If You Cannot Resolve Your Problem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9
8.5 Event Log Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9
Chapter 9
Recommended Parts List
9.1 Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.2 CPM Consumable Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.3 Preventative Maintenance Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
9.4 Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Chapter 10
FabGuard Explorer Operation
10.1 Operation (FabGuard Explorer) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.3 Connecting to Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
10.4 RGA Configuration—CPM tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
10.4.1 Valves and Orifices pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
10.4.1.1 Inlet LP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
10.4.1.2 Inlet HP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
10.4.1.2.1 Inlet HC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
10.4.1.2.2 Inlet Bypass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
10.4.1.2.3 Inlet Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.4.2 Gauges pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.4.2.1 Process Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.4.3 Bypass Delay - Interlock between V2 and V4 . . . . . . . . . . . . . . . . . . . . . . 10-7
10.5 CPM Configuration Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8
10.6 CPM Sensor Acquisition Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12
10.6.1 What to Acquire (RGAs). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12
10.6.1.1 Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12
10.6.1.1.1 Spectrum Mode Acquisition Parameters . . . . . . . . . . . . . . . . . . . . . . . . . 10-14
10.6.1.2 Selected Masses Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-15
10.6.1.2.1 Existing Masses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-16
10.6.1.2.2 Adding Masses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-17
10.6.2 How to Acquire (CPM) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-20
10.6.2.1 Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21

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Transpector CPM Operating Manual
10.6.2.2 Start Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21
10.6.2.2.1 Start Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21
10.6.2.2.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22
10.6.2.2.3 Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22
10.6.2.2.4 Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22
10.6.2.2.5 Relay 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22
10.6.2.3 Stop Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23
10.6.2.3.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23
10.6.2.3.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23
10.6.2.3.3 Maximum Duration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24
10.6.2.3.4 Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24
10.6.2.3.5 Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24
10.6.2.3.6 Relay 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25
10.6.2.4 Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25
10.6.2.4.1 Dwell Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25
10.6.2.4.2 Dwell Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-26
10.6.2.5 Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-26
10.6.2.5.1 Delay Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-26
10.6.2.5.2 Time Between Scans . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27
10.6.2.5.3 Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27
10.6.2.6 Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27
10.6.2.6.1 Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27
10.6.2.6.2 Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-28
10.6.2.7 Inlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-28
10.6.2.7.1 Close After . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29
10.6.2.7.2 Duty Cycle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29
10.6.2.8 Heater. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29
10.6.2.8.1 Off After . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29
Chapter 11
Glossary
Chapter 12
Bibliography

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Transpector CPM Operating Manual
Chapter 1
Getting Started
1.1 General Safety Information
WARNING
Transpector CPM is not for use in a manner not specified
by INFICON.
WARNING - Risk Of Electric Shock
There are no user serviceable components within the
Transpector CPM case.
WARNING - Risk Of Electric Shock
Potentially lethal voltages are present when the line cord
is connected to Transpector CPM.
WARNING - Risk Of Electric Shock
Refer all Transpector CPM maintenance to qualified
personnel.

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Transpector CPM Operating Manual
1.2 Purpose of Transpector CPM
Transpector CPM samples a representative fraction of a process environment and
directs the gas sample to a Residual Gas Analyzer (RGA). The CPM can detect
levels of impurities in process gases at sub-ppm levels.
1.2.1 Description of the Transpector CPM
Transpector CPM is comprised of:
FabGuard® or FabGuard Explorer™ software provides automatic or manual
control and status information. It includes a full array of basic residual gas
analyzer (RGA) features, including Spectrum or Selected Peaks scanning,
Leak Detection and Recipe Generation.
Quadrupole Sensor analyzes gases by: (1) ionizing the gas molecules,
(2) separating the ions by their mass-to-charge ratio, and (3) measuring the
quantity of ions at each mass. The sensor can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel,
and is used to investigate the nature of a process or to monitor process
conditions.
Electronics Module (Transpector®) controls the sensor. The electronics
module and quadrupole sensor are a matched set. The electronics module
attaches to and is supported by the sensor.
CPM Controller consolidates control functions into a single device. The CPM
controller works in conjunction with the Transpector electronics module to
control valve activation, heaters, pumps, and power to all elements of the
system.
Pumping System provides process sampling from 1.5 atmospheres to high
vacuum.
Inlet Valves, a HexBlock™ inlet provides several sampling ranges, a
calibration reference, and a process pressure gauge.

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Transpector CPM Operating Manual
1.3 Using this Operating Manual
Before using this manual, please take a moment to understand the Cautions and
Warnings used throughout. They provide pertinent information that is useful in
achieving maximum instrument efficiency while ensuring personal safety.
NOTE: Notes provide additional information about the current topic.
HINT: Hints provide insight into product usage.
CAUTION
Failure to obey these messages could result in damage
to the sensor.
WARNING
Failure to obey these messages could result in personal
injury.
WARNING - Risk Of Electric Shock
Potentially lethal voltages are present.

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Transpector CPM Operating Manual
1.4 How to Contact INFICON
To contact INFICON regarding Transpector CPM, please use the following contact
information:
INFICON, Inc.
Two Technology Place
East Syracuse, NY 13057
USA
Tel: [phone]
Fax: [phone]
E-mail: [email protected]
Worldwide customer support information is also available at www.inficon.com
under Contact >> Support Worldwide
Sales and Customer Service
Technical Support
Repair Service
If experiencing a problem with Transpector CPM, please have the following
information readily available:
The Transpector CPM serial number
A description of the problem
An explanation of any attempts at corrective action
The exact wording of any error messages received
1.4.1 Returning Transpector CPM to INFICON
Do not return any component of the Transpector CPM to INFICON without first
speaking with a Customer Support Representative. A Return Material
Authorization (RMA) number must be obtained from the Customer Support
Representative.
If a package is delivered to INFICON without an RMA number, the package will be
held and customer contact will be made. This will result in delays in servicing
Transpector CPM.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.

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Transpector CPM Operating Manual
1.5 Transpector CPM Performance Specifications
1.5.1 General Specifications
Table 1-1 General specifications
Mass Range (AMU) 1 – 100 1 – 200 1 – 300
Resolution <1 AMU wide @ 10% peak height over entire mass range
(per AVS 1993 recommended practice)
Total Pressure Range15x10-7–1x10-3 Torr (6.6x10-7–1.3x10-3 mbar)
Total Pressure
Accuracy2
±25% 1x10-6–1x10-3 Torr (1.3x10-6–1.3x10-3 mbar)
Maximum Ion Source
Operating Pressure3
1x10-3 Torr (1.3x10-3 mbar)
Nominal Operating
Pressure4
2x10-4 Torr (2.6x10-4 mbar)
System Operating
Pressure
1x10-8 Torr (1.3x10-8 mbar)–1.2 atmospheres (with proper inlet configuration)
Sensitivity
@ Low Emission
@ High Emission
Amps/Torr (Amps/mbar)
>4x10-6 (>3x10-6)
>2x10-5 (>1.5x10-5)
Amps/Torr (Amps/mbar)
>2x10-6 (>1.5x10-6)
>1x10-5 (>7.6x10-6)
Amps/Torr (Amps/mbar)
>1x10-6 (>7.6x10-7)
>5x10-6 (>3.8x10-6)
Minimum Detectable
Partial Pressure5
1x10-13 Torr
(1.3x10-13 mbar)
2x10-13 Tor r
(2.6x10-13 mbar)
4x10-13 Torr
(5.3x10-13 mbar)
Maximum Data Rate
(analog scans OR
selected peaks)
1.8 ms per point
(555 data points per second)
Abundance Sensitivity6<5 ppm <10 ppm <100 ppm
Zero Blast7<2 ppm <25 ppm <200 ppm
Detection Limit8<1 ppm <2 ppm <4 ppm
Linearity9±20%

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Transpector CPM Operating Manual
Minimum Background
Pressure
1x10-8 Torr
(1.3x10-8 mbar)
Maximum Sensor and
Inlet Temperature
150°C
1 Ion source pressure reading @ low emission using total pressure lens
2 Total pressure accuracy @ low emission
3 Maximum ion source operating pressure @ low emission
4 2x10-4 Torr in the ion source will produce about 1x10-5 Torr in the quadrupole region
5 MDPP at the ion source with EM on and 1 s dwell time
6 Mass 40 contribution onto 41 AMU
7 Zero blast contribution onto 2 AMU
8 Minimal detectable concentration with Krypton in air @ a 1 s dwell time
9 For 1 Torr orifices and lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure
Table 1-1 General specifications (continued)
Mass Range (AMU) 1 – 100 1 – 200 1 – 300

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Transpector CPM Operating Manual
1.5.2 Hex Block Orifice Sampling Inlets
Table 1-2 HexBlock inlets and available orifices (maximum nominal pressure for orifice)
Inlet Orifices
V1 (LP) 3 mTorr (no orifice)
10 mTorr
15 mTorr
100 mTorr
360 mTorr
1 Torr
V2 (HP) 3 mTorr (no orifice)
10 mTorr
15 mTorr
100 mTorr
360 mTorr
1 Torr (bypass)
3 Torr (bypass)
10 Torr (bypass)
30 Torr (bypass)
1 Torr Sniffer (bypass)
3 Torr Sniffer (bypass)
7 Torr Sniffer (bypass)
10 Torr Sniffer (bypass
30 Torr Sniffer (bypass)
100 Torr Sniffer (bypass)
V3 (HC) 1 mTorr (High Conductance)

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Transpector CPM Operating Manual
1.5.3 Atmospheric Pressure (Capillary) Sampling
Table 1-3 Capillary sampling option
Process Pressure Range
(23oC ambient, no purge)
300 to 900 Torr (400 to 1199 mbar)
Capillary Size and Lengths 1/16 in. OD x 1.5 m SS capillary
1/16 in. OD x 3.0 m SS capillary
Process Gas Consumption 2.6 sccm @ 300 Torr (400 mbar)
17 sccm @ 760 Torr (1013 mbar)
30 sccm @ 900 Torr (1199 mbar)
Response Time for Composition
Changes (response to normal inert
gases)
Capillary Delay: t(1.5m) = 0.3 s
t(3.0m) = 1 s
Intermediate Volume Tau = 0.7 s
CPM Isolation time constant = 75 s

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Transpector CPM Operating Manual
1.6 Physical Requirements
1.6.1 Physical Dimensions
Figure 1-1 Pumping system dimensions
Pumping System dimensions
545 x 152 x 378 mm (21.5 x 6.0 x 14.9 in.)
CPM Controller dimensions
195 x 207 x 89 mm (7.7 x 8.1 x 3.5 in.)
Foreline Pump dimensions
218 x 150 x 147 mm (8.6 x 5.9 x 5.8 in.)
NOTE: See Figure 2-8 on page 2-10 for cable connections.
183 mm
362 mm
(7.2 in.)
(14.3 in.)
378 mm
(14.9 in.)
545 mm
(21.5 in.)
152 mm
(6.0 in.)