Mitsubishi Electric MELSERVO-J5 MR-J5-G Series User manual

MR-J5
User's Manual
(Function)
-MR-J5-_G_
-MR-J5W_-_G_
-MR-J5-_A_
Mitsubishi Electric AC Servo System

1
SAFETY INSTRUCTIONS
Please read the instructions carefully before using the equipment.
To use the equipment correctly, do not attempt to install, operate, maintain, or inspect the equipment until you have read
through this manual, installation guide, and appended documents carefully. Do not use the equipment until you have a full
knowledge of the equipment, safety information and instructions.
In this manual, the safety instruction levels are classified into "WARNING" and "CAUTION".
Note that the CAUTION level may lead to a serious consequence depending on conditions.
Please follow the instructions of both levels because they are important to personnel safety.
Forbidden actions and required actions are indicated by the following diagrammatic symbols.
In this manual, precautions for hazards that can lead to property damage, instructions for other functions, and other
information are shown separately in the "POINT" area.
After reading this manual, keep it accessible to the operator.
WARNING
Indicates that incorrect handling may cause hazardous conditions, resulting in
death or severe injury.
CAUTION
Indicates that incorrect handling may cause hazardous conditions, resulting in
medium or slight injury.
Indicates a forbidden action. For example, "No Fire" is indicated by .
Indicates a required action. For example, grounding is indicated by .

2
[Installation/wiring]
[Setting/adjustment]
[Operation]
[Maintenance]
WARNING
●To prevent an electric shock, turn off the power and wait for 15 minutes or more before starting wiring
and/or inspection.
●To prevent an electric shock, ground the servo amplifier.
●To prevent an electric shock, any person who is involved in wiring should be fully competent to do the
work.
●To prevent an electric shock, mount the servo amplifier before wiring.
●To prevent an electric shock, connect the protective earth (PE) terminal of the servo amplifier to the
protective earth (PE) of the cabinet, then connect the grounding lead wire to the ground.
●To prevent an electric shock, do not touch the conductive parts.
WARNING
●To prevent an electric shock, do not operate the switches with wet hands.
WARNING
●To prevent an electric shock, do not operate the switches with wet hands.
WARNING
●To prevent an electric shock, any person who is involved in inspection should be fully competent to do
the work.
●To prevent an electric shock, do not operate the switches with wet hands.

3
ABOUT THE MANUAL
e-Manuals are Mitsubishi Electric FA electronic book manuals that can be browsed with a dedicated tool.
e-Manuals enable the following:
• Searching for desired information in multiple manuals at the same time (manual cross searching)
• Jumping from a link in a manual to another manual for reference
• Browsing for hardware specifications by scrolling over the components shown in product illustrations
• Bookmarking frequently referenced information
• Copying sample programs to engineering tools
If using the servo for the first time, prepare and use the following related manuals to ensure that the servo is used safely. The
manuals used differ depending on the interface of the servo amplifier. For details, refer to the User's Manual (Introduction).
This manual covers the following servo amplifiers.
• MR-J5-_G_/MR-J5W_-_G_/MR-J5-_A_
In this manual, the servo amplifier names are abbreviated as shown below.
Symbol Servo amplifier
[G] MR-J5-_G_
[WG] MR-J5W_-_G_
[A] MR-J5-_A_
Rotary Servo Motor
Linear Servo Motor
Direct Drive Motor
Partner Encoder
Function
Adjustment
Object Dictionary
Troubleshooting
This manual is necessary primarily for installing, wiring,
and using options.
The manual is necessary for operation of servo amplifiers.
The manual is necessary for adjustment of operation status.
The manual is necessary when looking up details of each
function.
Introduction
Hardware
Communication FunctionThe manual is necessary for using communication functions.
Parameters
The manual is necessary for specifying the causes of alarms
and warnings.

4
OBJECT UNITS
This section explains the pos units, vel units, and acc units used in this manual.
pos units
The standard unit can be changed using [Pr. PT01.2 Unit for position data] as shown in the following table.
vel units
The speed unit can be changed using [Pr. PT01.1 Speed/acceleration/deceleration unit selection] as shown in the following
table. The command unit can be changed to pulse or 10-3 degree using [Pr. PT01.2].
*1 0.01 mm/s is used in the linear servo motor control mode.
acc units
The acceleration unit can be changed using [Pr. PT01.1] as shown in the following table. The command unit can be changed
to pulse or 10-3 degree using [Pr. PT01.2].
U.S. CUSTOMARY UNITS
U.S. customary units are not shown in this manual. Convert the values if necessary according to the following table.
Setting value Standard unit
2 degree
3 pulse
Setting value Unit
0 0.01 r/min, 0.01 mm/s *1
1 Command unit/s
Setting value Unit
0ms
1 Command unit/s2
Quantity SI (metric) unit U.S. customary unit
Mass 1 [kg] 2.2046 [lb]
Length 1 [mm] 0.03937 [inch]
Torque 1 [N•m] 141.6 [oz•inch]
Moment of inertia 1 [(× 10-4 kg•m2)] 5.4675 [oz•inch2]
Load (thrust load/axial load) 1 [N] 0.2248 [lbf]
Temperature N [°C] × 9/5 + 32 N [°F]

5
CONTENTS
CONTENTS
SAFETY INSTRUCTIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
ABOUT THE MANUAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
OBJECT UNITS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
U.S. CUSTOMARY UNITS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
CHAPTER 1 FUNCTION 11
1.1 Function explanation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
CHAPTER 2 CONTROL MODE 19
2.1 Control mode [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Control switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
Cyclic synchronous position mode (csp) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Cyclic synchronous velocity mode (csv) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Cyclic synchronous torque mode (cst) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Profile position mode (pp) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
Profile velocity mode (pv) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Profile torque mode (tq). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Continuous operation to torque control mode (ct) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Homing mode (hm) and homing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
2.2 Control mode [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Control switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .69
Position control mode (P) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Speed control mode (S). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Torque control mode (T) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Position/speed control switching mode (P/S) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .78
Speed/torque control switching mode (S/T) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
Torque/position control switch mode (T/P) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
CHAPTER 3 BASIC FUNCTION 83
3.1 Outline of servo parameter and object dictionary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Servo parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Object dictionary [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
3.2 Rotation/travel direction selection [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
Setting methods of functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
3.3 Rotation/travel direction selection [A]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Setting methods of functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
3.4 Stroke limit function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Explanation of the stroke limit signal names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Setting methods of functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Stop method at stroke limit detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Servo parameter list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
3.5 Stroke limit function [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Setting methods of functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Stop method at stroke limit detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
Servo parameter list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
3.6 Limit switch release position assessment function [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .100

6
Setting methods of functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
3.7 Command unit select function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
Position command unit selection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
Speed command unit selection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
3.8 Command unit select function [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
Torque command unit selection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
3.9 Electronic gear function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Setting example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .106
3.10 Electronic gear function [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Setting example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Electronic gear selection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
3.11 In-position range setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
3.12 Assigning I/O devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
3.13 Regenerative option selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
Regenerative option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
3.14 Alarm function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Operation status at alarm occurrence [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Operation status at alarm occurrence [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Operation status at warning occurrence [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .122
Operation status at warning occurrence [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Returning from an alarm [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Returning from an alarm [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Returning from a warning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Alarm history [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Alarm history [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
Stop method at occurrence of alarms/warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
Timing chart at alarm occurrence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
3.15 Forced stop deceleration function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
Timing chart [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .129
Timing chart [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
3.16 Electromagnetic brake interlock function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Base circuit shut-off delay time function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
Timing chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
3.17 Vertical axis freefall prevention function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Timing chart [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .142
Timing chart [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
3.18 Acceleration/deceleration function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
Acceleration/deceleration time constant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
S-pattern acceleration/deceleration time constant [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145

7
CONTENTS
S-pattern acceleration/deceleration time constant [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
Acceleration/deceleration [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .147
3.19 Quick stop [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
Objects for setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
Timing chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
3.20 Halt [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Objects for setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Timing chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
3.21 Command pulse train monitoring function [A]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
Setting a command frequency error threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
Setting PEN (Command input permission signal) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
CHAPTER 4 APPLICABLE FUNCTIONS 153
4.1 Tough drive function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
Vibration tough drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
Instantaneous power failure tough drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
4.2 Compliance with SEMI-F47 standard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
Requirements of the SEMI-F47 standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160
Calculation method of tolerance against instantaneous power failure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .160
4.3 Scale measurement function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
Function block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162
System configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
Scale measurement encoders. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Procedure for replacing the Mitsubishi Electric servo motor equipped with a batteryless absolute position encoder
170
Related objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
4.4 Touch probe [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
4.5 Machine diagnosis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 184
Friction vibration estimation function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185
Friction failure prediction function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191
Vibration failure prediction function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Total travel distance failure prediction function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
Gear failure diagnosis function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213
Belt diagnosis function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
4.6 Drive recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
Specification outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .241
How to use the function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 241
How to use the function [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 244
Servo parameter/object dictionary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246
Standard acquisition waveform list [G] [WG]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 259
Standard acquisition waveform list [A]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .261
Waveform recording inapplicable alarm list. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263
List of auxiliary recording data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
4.7 Software reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265

8
Software reset in MR Configurator2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
Software reset via network communication [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
4.8 Software position limit [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
4.9 Torque limit [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269
Checking "Limiting torque" status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
4.10 Torque limit [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273
Checking "Limiting torque" status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 274
4.11 Speed limit [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
Checking "Limiting speed" status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
4.12 Speed limit [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
Checking "Limiting speed" status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278
4.13 A/B/Z-phase pulse output function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 279
Setting method [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280
Setting method [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283
Z-phase pulse output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 286
4.14 Degree unit [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287
Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287
Position-related data when the unit is set to "degree". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 288
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289
Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 290
4.15 Infinite feed function [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
When the servo motor rotates 32768 rev or more. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
When using the infinite feed function with a controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .291
4.16 Servo amplifier life diagnosis function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 292
Cumulative energization time function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 292
Relay usage count display function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 293
4.17 Encoder communication diagnosis function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294
Usage [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294
Usage [A]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .295
Diagnostic procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 295
4.18 Disconnection/incorrect wiring detection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296
Input open-phase detection function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296
Output open phase detection function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
Servo motor incorrect wiring detection function [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 301
4.19 Overload protection (electronic thermal) function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303
4.20 Command offset [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 304
CHAPTER 5 MONITORING 306
5.1 Explanation of monitor signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 306
Name and description of the monitor signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .306
Signal block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 318
5.2 Checking with MR Configurator2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 321
"Display all" function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 321

9
CONTENTS
Graph function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .321
I/O monitor display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322
System configuration display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323
5.3 Analog monitor [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324
Setting details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .325
5.4 Analog monitor [A] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329
Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329
Setting details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .330
CHAPTER 6 FUNCTIONAL SAFETY 334
6.1 Functions and configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334
Outline of safety sub-functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334
Risk assessments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 335
6.2 Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 336
Explanation of signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 336
Power-on sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 338
6.3 Setting method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
Setting functional safety parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
Functional safety parameters that must be set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 340
Test operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 341
6.4 Safety sub-function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 342
Achievable safety level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 342
I/O function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344
STO function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354
SS1 function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
SS2/SOS function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 364
SLS function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 370
SSM function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 374
SBC function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 375
SDI function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 376
SLI function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 379
SLT function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 381
Status monitor (SM) function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385
Multiple operation commands for safety sub-functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385
Simultaneous operation of STO and SS1 functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 386
At alarm occurrence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 387
6.5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 389
Parameter combinations that trigger [AL. 537.2 Parameter combination error A (safety sub-function)] . . . . . . 389
CHAPTER 7 NETWORK FUNCTION 391
7.1 IP address setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Setting an IP address [G] [WG] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Setting an IP address [A]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
7.2 Managing accounts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Setting an account. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .392
7.3 FTP server function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
Restrictions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393

10
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .393
Directory structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394
Steps of accessing the FTP server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394
7.4 Firmware update . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 395
CHAPTER 8 COMMUNICATION FUNCTION (MITSUBISHI ELECTRIC AC SERVO PRO-
TOCOL) [A] 396
8.1 Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 396
System architecture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .396
Precautions for using the RS-422/USB communication function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .398
8.2 Communication specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
Outline of communication specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
Setting servo parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
8.3 Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
Transmission data configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
Character codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .402
Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 403
Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 403
Time-out processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .404
Retry processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
Initialization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
Communication procedure example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 405
8.4 Command and data No. list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 406
Reading command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 406
Writing commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .413
8.5 Detailed explanations of commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
Data processing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .415
Status display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .417
Servo parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 418
External I/O signal status (DIO diagnosis). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .421
Input device on/off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .423
Disabling/enabling I/O devices (DIO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 424
Input device on/off (test operation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 424
Test operation mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425
Output signal pin on/off (output signal (DO) forced output) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 429
Alarm history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 430
Current alarm. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 432
Version. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 433
Absolute position monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434
REVISIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .436
WARRANTY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .437
TRADEMARKS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .438

1 FUNCTION
1.1 Function explanation 11
1
1FUNCTION
1.1 Function explanation
This section lists the functions mentioned in this manual. For details of the functions, refer to each section indicated in the
detailed explanation column.
For the functions which are not listed here, refer to "FUNCTION" in the User's Manual (Introduction).
Control mode
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
*2 This control mode is not available for multi-axis servo amplifiers.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
CiA 402 control
mode
Cyclic synchronous position mode
(csp)
This function operates the servo motor in the cyclic
synchronous position mode.
A0 Page 20 Cyclic
synchronous position
mode (csp)
Cyclic synchronous velocity mode
(csv)
This function operates the servo motor in the cyclic
synchronous velocity mode.
A0 Page 22 Cyclic
synchronous velocity
mode (csv)
Cyclic synchronous torque mode
(cst)
This function operates the servo motor in the cyclic
synchronous torque mode.
A0 Page 24 Cyclic
synchronous torque mode
(cst)
Profile position mode (pp) This function operates the servo motor in the profile
position mode.
A5 Page 26 Profile
position mode (pp)
Profile velocity mode (pv) *2 This function operates the servo motor in the profile
velocity mode.
A5 Page 30 Profile
velocity mode (pv)
Profile torque mode (tq) *2 This function operates the servo motor in the profile
torque mode.
A5 Page 34 Profile torque
mode (tq)
Homing mode (hm)/homing This function either operates the servo motor in the
homing mode or performs homing.
A0 Page 42 Homing
mode (hm) and homing
Thrust/torque
control
Continuous operation to torque
control mode (ct)
This function enables smooth switching to torque
control from the position control mode or speed control
mode without stopping the servo motor. This
eliminates rapid change of speed and torque,
contributing to reduction in load to the machine and
high-quality product molding.
B0 Page 37 Continuous
operation to torque control
mode (ct)
Pulse/analog/DI
command
Position control mode (P) (pulse
train input)
This function operates the servo motor in the position
control mode by the pulse train input.
A0 Page 69 Position
control mode (P)
Speed control mode (S) (Internal
speed command/analog speed
command)
This function operates the servo motor in the speed
control mode by the internal speed command or
analog speed command.
A0 Page 73 Speed
control mode (S)
Torque control mode (T) (Analog
torque command)
This function operates the servo motor in the torque
control mode by the analog torque command.
A0 Page 75 Torque
control mode (T)

12 1 FUNCTION
1.1 Function explanation
Network
*1 "Ver." indicates the supported firmware version of the servo amplifier. The function is available on servo amplifiers with the indicated
firmware version or later.
Position detection
*1 "Ver." indicates the supported firmware version of the servo amplifier. The function is available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Remote
maintenance
Firmware update This function updates the firmware of the servo
amplifier.
A0 A0 Page 395 Firmware
update
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Control method Scale measurement function This function connects the scale measurement
encoder in the state of the semi closed loop control to
transmit the position information of the scale
measurement encoder to the controller.
A5 Page 161 Scale
measurement function [G]
[WG]

1 FUNCTION
1.1 Function explanation 13
1
Operation function
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Stop function Quick Stop This function stops the servo motor with a specified
method and switches to the servo-off status.
A0 Page 149 Quick stop
[G] [WG]
Halt This function stops the servo motor while the servo-on
status is maintained.
A0 Page 151 Halt [G]
[WG]
Stroke limit function This function uses LSP (Forward rotation stroke end)
and LSN (Reverse rotation stroke end) to limit the
travel interval of the servo motor.
A0 A0 Page 92 Stroke limit
function [G] [WG]
Page 98 Stroke limit
function [A]
This function limits the travel interval of the servo
motor using FLS (Upper stroke limit) and RLS (Lower
stroke limit) via a controller.
A0 Page 92 Stroke limit
function [G] [WG]
Software position limit This function uses servo parameters to limit the travel
intervals by address. A function equivalent to the
stroke limit function can be set with the servo
parameter.
A0 Page 266 Software
position limit [G] [WG]
Command
generation
Command pulse selection The command pulse train form can be selected from
among three different types.
A0 Page 69 Position
control mode (P)
Rotation/travel direction selection This function sets the rotation direction of the servo
motor without changing the command polarity.
A0 A0 Page 86 Rotation/
travel direction selection
[G] [WG]
Page 90 Rotation/
travel direction selection
[A]
Electronic gear This function performs positioning control with the
value obtained by multiplying the position command
from the upper controller by a set electronic gear ratio.
A0 A0 Page 105 Electronic
gear function [G] [WG]
Page 111 Electronic
gear function [A]
Acceleration/deceleration function This function enables smooth acceleration/
deceleration.
A0 A0 Page 143
Acceleration/deceleration
function
S-pattern acceleration/deceleration
time constant
This function performs smooth acceleration and
deceleration.
A5 A0 Page 145 S-pattern
acceleration/deceleration
time constant [G] [WG]
Page 146 S-pattern
acceleration/deceleration
time constant [A]
Torque limit This function limits the servo motor torque. A0 A0 Page 269 Torque limit
[G] [WG]
Page 272 Torque limit
[A]
Speed limit This function limits the servo motor speed in the
torque control mode.
A0 A0 Page 275 Speed limit
[G] [WG]
Page 276 Speed limit
[A]
Command offset This function compensates the position/speed/torque
commands by adding a desired amount of offset to the
commands.
A5 Page 304 Command
offset [G] [WG]

14 1 FUNCTION
1.1 Function explanation
I/O, monitor
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
Option
*1 "Ver." indicates the supported firmware version of the servo amplifier. The function is available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
DI/DO Input signal selection (device
selection)
This function assigns input devices such as LSP
(Forward rotation stroke end) to certain pins of the
connector.
A0 A0 Page 117 Assigning I/
O devices
Output signal selection (device
setting)
This function assigns output devices such as MBR
(Electromagnetic brake interlock) to certain pins of the
connector.
A0 A0 Page 117 Assigning I/
O devices
A/B/Z-phase output This function outputs the positions of the encoder and
linear encoder in the A/B/Z-phase signal.
A0 A0 Page 279 A/B/Z-
phase pulse output
function
Analog input/output Analog monitor This function outputs the servo status in voltage in real
time.
A0 A0 Page 306
MONITORING
Monitor Power monitoring function This function calculates the running power and the
regenerative power from the data in the servo amplifier
such as speed and current. The power consumption
and other values are displayed on MR Configurator2.
A0 A0
Touch probe Current position latch function This function latches the current position when TPR1
(Touch probe 1), TPR2 (Touch probe 2), or TPR3
(Touch probe 3) is turned on.
A5 Page 172 Touch
probe [G] [WG]
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Regenerative
capacity
enhancement
Regenerative option Use this function if the built-in regenerative resistor of
the servo amplifier does not have sufficient
regenerative capacity for the generated regenerative
power.
A0 A0 Page 120
Regenerative option
selection

1 FUNCTION
1.1 Function explanation 15
1
Protective functions
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Alarm Alarm function This function displays an alarm or warning when an
error occurs during operation. When an alarm occurs,
ALM (Malfunction) turns off and stops the servo motor.
When a warning occurs, WNG (Warning) will turn on.
The servo motor may stop or continue operation
depending on the warning.
A0 A0 Page 121 Alarm
function
Alarm history clear This function clears alarm histories. A0 A0 Page 123 Alarm
history [G] [WG]
Page 125 Alarm
history [A]
Power error
detection
Disconnection detection function This function detects a disconnection in the main
circuit power supply input and the servo motor power
supply output.
A0 A0 Page 296
Disconnection/incorrect
wiring detection function
Coasting distance
reduction
Forced stop deceleration function This function decelerates the servo motor to a stop at
EM2 (Forced stop 2) off or when there is an alarm.
A0 A0 Page 128 Forced stop
deceleration function
Drop protection Electromagnetic brake interlock
function
This function operates the electromagnetic brake at
servo off and error occurrence, and prevents the
vertical axis from dropping.
A0 A0 Page 131
Electromagnetic brake
interlock function
Vertical axis freefall prevention
function
This function moves the axis up by the mechanical
backlash amount of the electromagnetic brake to
prevent damage to machines.
A0 A0 Page 141 Vertical axis
freefall prevention function

16 1 FUNCTION
1.1 Function explanation
Functional safety
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Safety sub-function STO (Safe torque off) This function electrically shuts off the servo motor
driving energy with input signals from external devices
(shut-off by the secondary-side output). This is
equivalent to the stop category 0 of IEC/EN 60204-1.
B2 Page 354 STO
function
SS1 (Safe stop 1) This function starts deceleration with input signals
from external devices. After the specified time to
confirm the motor stop, the STO function is executed
(SS1). This is equivalent to the stop category 1 of IEC/
EN 60204-1.
B2 Page 357 SS1
function
SS2 (Safe stop 2) This function starts deceleration with input signals
from external devices. After the specified time to
confirm the motor stop, the SOS function is executed
(SS2). This is equivalent to the stop category 2 of IEC/
EN 60204-1.
B2 Page 364 SS2/SOS
function
SOS (Safe operating stop) This function monitors whether the servo motor stops
within the prescribed range. Energy is supplied to the
servo motor.
B2 
SLS (Safely-limited speed) This function monitors whether the speed is within the
prescribed speed limit. If the speed exceeds the
specified speed limit, the STO will shut off energy.
B2 Page 370 SLS
function
SSM (Safe speed monitor) This function outputs signals when the servo motor
speed is below the prescribed speed.
B2 Page 374 SSM
function
SBC (Safe brake control) This function outputs signals for controlling the
external brake.
B2 Page 375 SBC
function
SDI (Safe direction) This function monitors whether the servo motor travels
in the specified direction. If the servo motor travels in a
direction different from the specified direction, the STO
will shut off energy.
B2 Page 376 SDI
function
SLI (Safely-limited increment) This function monitors whether the travel distance of
the servo motor is within the specified range. If the
travel distance of the servo motor exceeds the
specified range, the STO will shut off energy.
B2 Page 379 SLI function
SLT (Safely-limited torque) This function monitors whether the torque is below the
specified torque. If the torque exceeds the specified
torque, the STO will shut off energy.
B2 Page 381 SLT
function
Status monitor (SM: Status monitor) This function outputs the statuses of the safety sub-
functions as signals. This is a function designed
specifically for the safety sub-functions and differs
from the function defined in IEC/EN 61800-5-2.
B2 Page 385 Status
monitor (SM) function

1 FUNCTION
1.1 Function explanation 17
1
Instantaneous power failure measures
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Tough drive SEMI-F47 function This function uses the electrical energy charged in the
capacitor to avoid triggering [AL. 010 Undervoltage] in
case that an instantaneous power failure occurs
during operation. Use a 3-phase power supply for the
input power supply of the servo amplifier. Using a 1-
phase 200 V AC for the input power supply will not
comply with SEMI-F47 standard.
A0 A0 Page 159 Compliance
with SEMI-F47 standard
Tough drive function This function makes the equipment continue operating
even under conditions where an alarm would normally
occur. There are two types of tough drive function: the
vibration tough drive and the instantaneous power
failure tough drive.
A0 A0 Page 155 Tough drive
function

18 1 FUNCTION
1.1 Function explanation
Diagnostics
*1 "Ver." indicates the supported firmware version of the servo amplifier. The functions are available on servo amplifiers with the indicated
firmware version or later.
History
*1 "Ver." indicates the supported firmware version of the servo amplifier. The function is available on servo amplifiers with the indicated
firmware version or later.
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Drive data diagnosis Drive recorder This function continuously monitors the servo status
and records the state transition before and after an
alarm for a fixed period of time. The recorded data can
be checked by the Waveform-Display button on the
drive recorder window of MR Configurator2 being
clicked.
A0 A0 Page 239 Drive
recorder
Graph function This function obtains the servo status in the graph. A0 A0 Page 321 Graph
function
Failure diagnosis Encoder communication diagnosis
function
This function diagnoses with MR Configurator2
whether the encoder communication error is caused
by the circuit malfunction of the servo amplifier or by
the malfunction of the cables/encoder.
A0 A0 Page 294 Encoder
communication diagnosis
function
Service life
diagnosis
Servo amplifier life diagnosis
function
This function enables checking of the cumulative
energization time, the number of the inrush relay on/off
times, and the number of dynamic brake usage times.
It gives an indication of the replacement time for parts
on the servo amplifier with a service life (such as the
capacitor and the relay) before they malfunction. MR
Configurator2 is required for this function.
A0 A0 Page 292 Servo
amplifier life diagnosis
function
Motor life diagnosis function This function predicts failures of the equipment and
the servo motor based on the machine total travel
distance. It gives an indication of the replacement time
for the servo motor.
A0 A0
Machine diagnosis function This function uses the data in the servo amplifier to
estimate the friction and vibrational component of the
drive system in the equipment and to recognize an
error in machine parts such as ball screws and
bearings.
A0 A0 Page 184 Machine
diagnosis
This function automatically sets the threshold used for
detecting the error of machine parts such as ball
screws and bearings. It outputs the warning when the
friction, vibrational component, and total revolution of
the servo motor are out of the set threshold. The error
in the machine parts such as ball screws and bearings
can be detected automatically.
A0 A0
This function estimates the friction of gears and
loosening of belts (decrease in the belt tension), and
detects errors in the gears and belts.
A0 A0
System diagnosis System configuration information This function uses MR Configurator2 to monitor the
servo amplifier model, connected servo motor,
encoder, and other information.
A0 A0 Page 323 System
configuration display
Functions Detailed functions Description Ver. *1
MR-J5
Detailed explanation
G A
Alarm history This function saves information of the alarm that
occurred in the servo amplifier. The information is
saved in chronological order and used for occasions
such as analyzing the cause of the alarm.
A0 A0 Page 123 Alarm
history [G] [WG]
Page 125 Alarm
history [A]