Newport RV User manual

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USER’SMANUAL
High-Performance
Precision Rotation Stages
RV
www.newport.com
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EDH0168En1030 – 02/03 ii
RV High-Performance Precision Rotation Stages
War ranty
Newport Corporation warrants this product to be free from defects in
material and workmanship for a period of 1 year from the date of shipment.
If found to be defective during the warranty period, the product will either
be repaired or replaced at Newport’s discretion.
To exercise this warranty, write or call your local Newport representative,
or contact Newport headquarters in Irvine, California. You will be given
prompt assistance and return instructions. Send the instrument, trans-
portation prepaid, to the indicated service facility. Repairs will be made
and the instrument returned, transportation prepaid. Repaired products
are warranted for the balance of the original warranty period, or at least 90
days.
Limitation of Warranty
This warranty does not apply to defects resulting from modification or mis-
use of any product or part.
CAUTION
Warranty does not apply to damages resulting from:
•Incorrect usage:
–Load on the rotation stage greater than maximum specified load.
–Carriage speed higher than specified speed.
–Improper grounding.
¬Connectors must be properly secured.
¬When the load on the rotation stage represents an electrical
risk, it must be connected to ground.
–Excessive or improper cantilever loads.
•Modification of the rotation stage or any part.
This warranty is in lieu of all other warranties, expressed or implied,
including any implied warranty of merchantability or fitness for a particular
use. Newport Corporation shall not be liable for any indirect, special, or
consequential damages.
No part of this manual may be reproduced or copied without the prior writ-
ten approval of Newport Corporation.
This manual has been provided for information only and product specifica-
tions are subject to change without notice. Any changes will be reflected in
future printings.
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iii EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
Table of Contents
Warranty .................................................................................................................ii
Table of Contents..................................................................................................iii
Warnings .................................................................................................................v
Cautions .................................................................................................................vi
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................3
3.0 — Characteristics............................................................................3
3.1 Definitions ..................................................................................................4
3.2 Mechanical Specifications........................................................................5
3.3 Load Specifications Definitions...............................................................6
3.4 Specifications for RV Rotation Stages with Vacuum Preparation.......7
3.5 Load Specifications...................................................................................8
3.6 Maximum Inertia Tables...........................................................................9
3.7 Torque (Mz)/Speed.................................................................................10
3.8 Working Reliability and Safety...............................................................14
3.9 Rotation Stage Weights ..........................................................................14
4.0 — Drive ..............................................................................................14
4.1 Stepper Drive Versions...........................................................................14
4.2 DC-Servo Drive Versions ........................................................................16
4.3 Manual Drive............................................................................................17
5.0 — Motor .............................................................................................18
5.1 Stepper Motor Characteristics..............................................................18
5.2 Command Signals for Stepper Motors..................................................18
5.3 DC-Motor Characteristics.......................................................................19
5.4 Command Signals for DC-Motors ..........................................................19
5.5 Sensor Position........................................................................................20
5.6 Inhibition of Limit Switches ...................................................................20
5.7 Feedback Signal Position........................................................................21
5.8 Pinouts......................................................................................................22
6.0 — Connection to Newport Controllers..............................23
6.1 Warnings on controllers.........................................................................23
6.2 Connection...............................................................................................24
6.3 Cables .......................................................................................................24
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EDH0168En1030 – 02/03 iv
RV High-Performance Precision Rotation Stages
We declare that the accompanying product, identified with the “ ” mark, meets
all relevant requirements of Directives:
•73/23/EEC, for Low Voltage Compatibility.
•89/336/EEC for Electromagnetic Compatibility.
Generic standard:
Emission: NF EN61326-1, for measurement, lab and control equipment.
Immunity: NF EN61326-1, for measurement, lab and control equipment.
Safety: EIC 1010-1, safety standards for measurement, lab and control
equipment.
Newport Corporation shall not be liable for damages when using the product:
•Modification of the product.
•Using modified connector, or modified or not supplied cables.
•Connecting this product to non-CE equipment.
7.0 — Connection to Non-Newport Controllers ....................26
8.0 — Mounting......................................................................................27
8.1 Horizontal Rotation Stages ....................................................................27
8.2 Vertical Rotation Stages .........................................................................28
9.0 — Dimensions.................................................................................29
9.1 RV80 Rotations Stages............................................................................29
9.2 RV120 to RV350 Rotations Stages .........................................................30
9.3 RVHAT & RVHAHLT Versions................................................................31
9.4 RVMS Versions ........................................................................................32
10.0 — Accessories: EQ120 & EQ180 Brackets........................32
11.0 — Maintenance ..............................................................................34
11.1 Maintenance.............................................................................................34
11.2 Repairing ..................................................................................................34
11.3 Calibration................................................................................................34
Service Form .........................................................................................................35
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vEDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
Warnings
WARNING
The rotation of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WARNING
Do not use this stage when its motor is emitting smoke or is unusually
hot to the touch or is emitting any unusual odor or noise or is in any
other abnormal state.
Stop using the stage immediately, switch off the motor power and then
disconnect the electronics power supply.
After checking that smoke is no longer being emitted contact your
Newport service facility and request repairs. Never attempt to repair the
stage yourself as this can be dangerous.
WARNING
Make sure that this stage is not exposed to moisture and that liquid does
not get into the stage.
Nevertheless, if any liquid has entered the stage, switch off the motor
power and then disconnect the electronics from power supply.
Contact your Newport service facility and request repairs.
WARNING
Do not insert or drop objects into this stage, this may cause an electric
shock, or lock the drive.
Do not use this stage if any foreign objects have entered the stage. Switch
off the motor power and then disconnect the electronics power supply.
Contact your Newport service facility for repairs.
WARNING
Do not place this stage in unstable locations such as on a wobbly table or
sloping surface, where it may fall or tip over and cause injury.
If this stage has been dropped or the case has been damaged, switch off
the motor power and then disconnect the electronics power supply.
Contact your Newport service facility and request repairs.
WARNING
Do not attempt to modify this stage; this may cause an electric shock or
downgrade its performance.
WARNING
Do not exceed the usable depth indicated on the mounting holes (see
section “Dimensions”). Longer screws can damage the mechanics or
cause a short-circuit.
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EDH0168En1030 – 02/03 vi
RV High-Performance Precision Rotation Stages
Cautions
CAUTION
Do not place this stage in a hostile environment such as X-Rays, hard
UV,… or in a vacuum environment less than 10-2 Torr.
CAUTION
Do not place this stage in a location affected by dust, oil fumes or steam.
This may cause an electric shock.
CAUTION
Do not leave this stage in places subject to extremely high temperatures
or low temperatures. This may cause an electric shock.
•Operating temperature: +10 to +35 °C.
•Storage temperature: -10 to +40 °C (in its original packaging).
CAUTION
Do not move this stage if its motor power is on.
Make sure that the cable to the electronics is disconnected before
moving the stage. Failure to do so may damage the cable and cause an
electrical shock.
CAUTION
Be careful that the stage is not bumped when it is being carried. This
may cause it to malfunction.
CAUTION
When handling this stage, always unplug the equipment from the power
source for safety.
CAUTION
To reach the specifications stated for RC, rotation stages must be fixed
on a plane surface with a flatness <5 µm.
CAUTION
Contact your Newport service facility to request cleaning and
specification control every year.
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1EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
High-Performance
Precision Rotation Stages
RV
1.0 Introduction
This manual provides operating instructions for the rotation stage that you
have purchased in the RV Series:
•Direct motor:
•Folded motor (except RV80):
1) REMARK
Vacuum compatible rotation stages to 10-6 Torr. In this case, max. speed
and load capacity have to be divided by two.
RV Series rotation stages.
RECOMMENDATION
We recommend you read carefully the chapter “Connection to
electronics” before using the RV rotation stage.
–RVPP-F
–RVPE-F
–RVPEV6-F (1) –RVCC-F
–RVCCHL-F
–RVHAT-F
–RVHAHLT-F
–RVPP
–RVPE
–RVPEV6 (1) –RVCC
–RVCCHL
–RVHAT
–RVHAHLT
–RVMS
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EDH0168En1030 – 02/03 2
RV High-Performance Precision Rotation Stages
2.0 Description
The RV Series rotation stages provide high-precision angular positioning
accuracy combined with high load capacity in a compact, annular design.
We offer five stage sizes and seven drive configurations enabling a variety
of operating conditions for optimizing load capacity, torque, speed, and
resolution.
All RV stages are constructed of tool steel with the rotation accuracy
ensured by a double row of preloaded ball bearings on hardened surfaces.
This allows for high off-center loads within a reduced footprint. The single
monolithic design offers improved stiffness without compromising
dynamic performance characteristics. The largest member of the RV
product family can bear up to 650 kg or rotate up to 80°/sec while
maintaining eccentricity of less than 4 µm.
In standard, these stages are equipped with limit switches (limited to
±170°) for protecting the equipment, and a home position search device. A
switch enables inhibiting the limit switches in order to use the rotation
stage over 360° or more (except HAT & HAHLT versions).
ATTENTION
Newport Corporation shall not be liable for any damage resulting from
improper use of RV Rotation Stages while limit switches are inhibited.
The drive is ensured by a worm and gear located on the rotation part of the
stage. The worm/gear ratio is:
•1/180 for RV80 rotation stages.
•1/90 for RV120 to RV350 rotation stages.
The position is measured by an encoder placed on the motor shaft (except
HAT & HAHLT versions), without tachometer:
•2000 pts/rev. encoder for RV80 rotation stages.
•4000 pts/rev. encoder for RV120 to RV350 rotation stages.
The HAT & HAHLT (High Accuracy) versions are available in diameters
from 120 up. These stages are equipped with an optical encoder fixed on
the mobile core and a tachometer. They avail the best indexing accuracy
characteristics. The travel is limited to ±170° (limit switches are not
inhibited in this case).
At the end of the drive screw in RV stages (side opposite motor), a hexagon
socket is given for manual movement of the mobile core, using an “Allen”
wrench.
Disabling of
limit switches
Hexagon socket
for manual movemen
t
of the mobile core
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3EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
ATTENTION
Do not attempt to move the mobile core manually with the rotation stage
switched on.
For optimal performance, we recommend the use of our ESP or MM series
motion controllers.
The RV Series rotation stages are supplied with a 3-meter cable for
connection to our motion controllers.
2.1 Design Details
Base Material Stainless Steel
Bearings Double row of ball bearings
Drive Mechanism Ground worm gear with self compensating
preload
Worm Gear Ratio RV80: 1:180
RV120 to RV350: 1:90
Reduction Gear Reduction gear before encoder on some
versions (please contact Newport for
details)
Feedback HAT and HAHLT: Direct reading optical
encoder on the rotating platen
Others: Worm mounted rotary encoder,
2,000 pts/rev., Index pulse (RV80) or worm
mounted rotary encoder, 4,000 pts/rev.,
Index pulse (RV120-350)
Limit Switches Optical, at ± 170°, can be disabled for
continuous 360° rotation (except HAT and
HAHLT)
Origin Optical
Vacuum Compatibility Vacuum compatible versions are available
up to 10-6 Torr using full-step motor (PE)
MTBF 20,000 h
RV120 rotation stage mounted in a vertical configuration
with an EQ120 to an (M-)ILS stage.
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EDH0168En1030 – 02/03 4
RV High-Performance Precision Rotation Stages
3.0 Characteristics
NOTE
Apart from the dimensions, the specifications of the rotation stages
equipped with a folded motor are the same as those of the direct motor
versions.
3.1 Definitions
Specifications of our products are established in reference to ISO 230
standard part II “Determination of the position, precision and repeatability
of the machine tools with CNC”.
This standard gives the definition of position uncertainty which depends
on the 3 following quantities:
(Absolute) Accuracy
Difference between ideal position and real position.
On-Axis Accuracy
Difference between ideal position and real position after the compensation
of linear error sources.
Linear errors include: cosine errors, inaccuracy of screw or linear scale
pitch, angular deviation at the measuring point (Abbe error) and thermal
expansion effect. All Newport motion electronics can compensate for linear
accuracy errors by step encoder correction.
The relation between absolute accuracy and on-axis accuracy is as follow:
Absolute Accuracy = On-Axis Accuracy + Slope x Travel
Repeatability
Ability of a system to achieve a commanded position over many attempts.
Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target
position when approached from opposite directions.
Minimum Incremental Motion (Sensitivity)
Minimum motion that a rotation stage can achieve. Our rotation stages and
our kinematic chain are conceived in such a way that sensitivity is better
than the resolution of the encoder.
Resolution
The smallest motion an encoder fixed to the rotation stage can measure.
Concentricity
Displacement of the geometric center of a rotation stage from the rotation
axis in the plane defined by bearings.
Wobble
Tilt of rotation axis during rotation of a stage.
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5EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
The testing of on-axis accuracy, repeatability, and reversal error are made
systematically with our test equipment in an air-conditioned room (20 °C ±1 °C).
Each rotation stage is tested with a precision optical encoder.
A linear cycle with 21 measures on the travel and 4 cycles in each direction
gives a total of 164 points.
3.2 Mechanical Specifications
Diameter (mm) 80, 120, 160, 240, 350
Travel Range
Except HAT & HAHLT versions 360° continuous (1)
HAT & HAHLT versions ±170°
Resolution
Except HAT & HAHLT versions 0.001°
RV120HAT & HAHLT 0.0001°
RV160HAT & HAHLT 0.000075°
RV240HAT & HAHLT 0.00005°
RV350HAT & HAHLT 0.000035°
Unidirectional Repeatability
Except HAT & HAHLT versions 0.002°
HAT & HAHLT versions 0.0002°
Reversal Value (Hysteresis)
Except HAT & HAHLT versions 0.002°
HAT & HAHLT versions 0.001°
Absolute Accuracy
RV80 0.015°
RV120 to RV350 0.010°
HAT & HAHLT versions 0.005°
Wobble: 3-Point @ 120° Mounting
RV80 50 µrad
RV120 30 µrad
RV160 & RV240 25 µrad
RV350 30 µrad
Wobble: 5-Point Mounting on a Flat Plane <5 µm
RV80 40 µrad
RV120 & RV160 20 µrad
RV240 & RV350 16 µrad
Eccentricity 4 µm
Operating Temperature +10 °C to +35 °C
Storage Temperature -10 °C to +40 °C
(into its original packaging)
1) With disabled limit switches, see chapter 5.6: “Disabling of Limit Switches”.
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EDH0168En1030 – 02/03 6
RV High-Performance Precision Rotation Stages
3.3 Load Specifications Definitions
Load Capacity (Cz)
This is the maximum load that a rotation stage can move. This value is
given with the conditions of speed and acceleration specific to the stage.
This value corresponds to a normal centered load on bearings. It further
depends on the static load capacity of the plane.
centered Load Capacity (Cz)
Direct centered load capacity with the specified speed and acceleration
conditions.
This value defines the vertical load capacity.
Off-center Load (Q)
This is the maximum cantilever load that the rotation stage can move:
Q ≤Cz
(1 + D/a)
D:Off-center distance.
a:Construction parameter.
WARNING
Off-center loads can generate high moments of inertia. Refer to the table
of maximum allowed inertia (see Chapter 3.6) before using the RV
rotation stage.
Angular Stiffness (kα)
This value is based on the stage construction. We specify the stiffness
perpendicular to the rotation axis, to enable determining the distortion of
the stage due to the torque generated by an off-center load.
Of the two values specified, the first corresponds to the stage fixed at 3
points at 120°, the second to a plane fixing with 5 points. In the second
case, the quality of the fixing plane has an impact on the quality of
displacement. In order to be compliant with the specifications stated for
RV stages, the load-bearing surface must have a plane value of less than
5µm.
Maximum Inertia
We specify the maximum value of the moment of inertia of the carried load,
for each model of the RV stage. This value is expressed in kg.cm2.
It is limited in order to avoid any risk of damage to the stage in the event of
a sudden halt during a high speed rotation.
In each case, the specified value corresponds to the acceptable limit with
the stage rotating at the maximum speed (see Chapter 3.6).
WARNING
The rotation of heavy loads and the high moments of inertia may cause
the equipment to downgrade and carry risks for the operators.
NEVER EXCEED THE SPECIFIED INERTIA VALUES.
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7EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
Torque (Mz)/Speed
The torque available on each rotation stage depends on the following:
•Kinematic chain.
•Motor.
•Use of the stage (speed).
In order to obtain the best performance from your RV rotation stage, see
the stage use diagrams given below, for each version (see Chapter 3.7).
3.4 Specifications for RV Rotation Stages with Vacuum Preparation
NOTE
RVPE rotation stages are primarily designed for applications requiring
the direct positioning accuracy to be maintained to within the stage’s
mechanical resolution when power is switched off, such as operation in
vacuum (10 -6 Torr vacuum preparation on request).
In this case, specifications for speed (°/sec), load capacity (Cz) and
torque (Mz) have to be divided by two.
With:
Mz0: Max. torque at max. allowed speed (N.m).
MzMax. : Max. torque (N.m).
V0: Max. speed at max. torque (°/sec).
VMax. : Max. allowed speed (°/sec).
V0Vmax.
Speed
(°/sec)
Mz 0
Torque
(N.m)
Specified Working
Range
Mz max.
Torque/Speed Curve of RV Series Stages
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EDH0168En1030 – 02/03 8
RV High-Performance Precision Rotation Stages
3.5 Load Specifications
RV80 RV120 RV160 RV240 RV350
Cz (N) 900 1800 2700 4000 6500
a(mm) 30 40 50 70 100
b(mm) 39 53 57 59 73
HAT & HAHLT Versions.
–71757791
3-point @ 120° mounting
kα(µrad/N.m) 52.5 1.2 0.6 0.25
5-point mounting on a flatness plane <5 µm
3.5 1.5 0.6 0.3 0.1
Horizontal Load Characteristics
where:
QH:Off-center load,
Cz : Normal centered load capacity
on bearings
D:Off-center distance in mm
a:Construction parameter
kα:Angular stiffness
Example: QHat a distance D of 100 mm, for
RV160 rotation stage.
Vertical Load Characteristics
where:
QV:Off-center load,
Cz : Normal centered load capacity
on bearings
D:Off-center distance in mm
a:Construction parameter
b:Construction parameter:
Distance between the top
surface and the bearings center
Example: QVat a distance D of 100 mm,
for RV160 rotation stage.
In this example, the load QVis placed at
43 mm (100 - 57) from the mounting
plane of the stage.
Q
V
<Cz
[2 (1 + D/a)]
Q
V
Cz
D
b
Mz
Q
H
=2700 = 900 N
(1 + 100/50)
Q
H
<Cz
(1 + D/a)
kα
Z
Q
H
D
Cz
Mz
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9EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
3.6 Maximum Inertia Tables
The maximum moment of inertia of the load borne by the stage depends on
the size of the rotation stage used and on its kinematic chain. The table
below gives the maximum allowed values for each model in the standard
range. The applicable limits are the same for direct motor versions and
folded motor versions.
Maximum Inertia
(kg.m2)
Versions RV80 RV120 RV160 RV240 RV350
PP 0.1 1344
PE 12 70 100 150 220
CC & HAT 0.02 0.2 0.7 1.5 1.5
CCHL & HAHLT 7.5 7 24 38 56
This table specifies the maximum inertia value for each RV stage. This
value represents the maximum kinetic energy that the rotation stage can
absorb in the event of a sudden halt at the maximum speed. This inertia is
also in agreement with the capability of the stage to accelerate from a
halted state to the maximum speed in 250 msec.
The inertia is expressed in kg.m2and is given with respect to the rotation
axis of the RV rotation stage (1 kg.m2is the inertia of a load of 1 kg placed
at a distance of 1 m from the rotation axis).
Example of Inertia Value
A load of 20 kg must be placed at 240 mm from the rotation axis of the RV
rotation stage. The corresponding inertia is:
20 x0.24 x0.24 = 1.152 kg.m2
It is therefore possible to use the RV240CC rotation stage (Iz max. =
1.5 kg.m2) and to move a load up to 80 °/sec.
Verification of Other Values
The maximum load capacity at 240 mm from the rotation axis of the RV240
rotation stage is:
QH=4000 = 903 N ≈90 kg (>20 kg)
(1 + 240/70)
The maximum torque of the RV240 rotation stage is 13 N.m. At 240 mm, this
torque represents a load of:
Mz=13 = 54 N ≈5.4 kg (<20 kg)
0.24
In these conditions, the RV240 rotation stage can be used only in the
horizontal position (where the rotation axis is vertical).
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EDH0168En1030 – 02/03 10
RV High-Performance Precision Rotation Stages
3.7 Torque (Mz)/Speed
RV80 Rotation Stages
Torque/Speed curve of RV80.
with:
Mz0: Maximum torque at maximum allowed speed.
Mzmax. : Maximum torque.
V0: Maximum speed at maximum torque.
Vmax. : Maximum allowed speed.
RV120 Rotation Stages
Torque/Speed curve of RV120.
0
0
10 20 30 40 80
Speed
(°/sec)
10
20
RV120PP
RV120CC
RV120HAT
Torque
(N.m)
RV120CCHL
RV120HAHLT
RV120PE
Mzmax. V0Mz0Vmax.
(N.m) (°/sec) (N.m) (°/sec)
RV80PP 1.8 20 1.8 20
RV80PE 2.5 2 2.5 12
RV80CC 1 80 1 80
RV80CCHL 2.2 2.5 2.2 2.5
0
0
10 20 30 40 80
Speed
(°/sec)
1
RV80PE
Torque
(N.m)
2
3
RV80CCHL
RV80PP
RV80CC
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11 EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
with:
Mz0: Maximum torque at maximum allowed speed.
Mzmax. : Maximum torque.
V0: Maximum speed at maximum torque.
Vmax. : Maximum allowed speed.
RV160 Rotation Stages
Torque/Speed curve of RV160.
with:
Mz0: Maximum torque at maximum allowed speed.
Mzmax. : Maximum torque.
V0: Maximum speed at maximum torque.
Vmax. : Maximum allowed speed.
Mzmax. V0Mz0Vmax.
(N.m) (°/sec) (N.m) (°/sec)
RV160PP 20 20 20 20
RV160PE 35 2 35 2
RV160CC (1) 11 80 11 80
RV160CCHL (2) 30 8 20 16
1) and RV160HAT — 2) and RV160HAHLT
0
0
10 20 30 40 80
Speed
(°/sec)
10
20 RV160PP
RV160PE
RV160CCHL
RV160HAHLT
RV160CC
RV160HAT
30
Torque
(N.m)
Mzmax. V0Mz0Vmax.
(N.m) (°/sec) (N.m) (°/sec)
RV120PP 15 20 15 20
RV120PE 20 2 20 2
RV120CC (1) 10 80 10 80
RV120CCHL (2) 20 8 15 16
1) and RV120HAT — 2) and RV120HAHLT
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EDH0168En1030 – 02/03 12
RV High-Performance Precision Rotation Stages
RV240 Rotation Stages
Torque/Speed curve of RV240.
with:
Mz0: Maximum torque at maximum allowed speed.
Mzmax. : Maximum torque.
V0: Maximum speed at maximum torque.
Vmax. : Maximum allowed speed.
Mzmax. V0Mz0Vmax.
(N.m) (°/sec) (N.m) (°/sec)
RV240PP 22 20 22 20
RV240PE 60 2 60 2
RV240CC (1) 13 80 13 80
RV240CCHL (2) 50 8 30 16
1) and RV240HAT — 2) and RV240HAHLT
0
0
10 20 30 40 80
Speed
(°/sec)
10
20
RV240PP
RV240CCHL
RV240HAHLT
RV240CC
RV240HAT
30
40
50
60
Torque
(N.m)
RV240PE
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

13 EDH0168En1030 – 02/03
RV High-Performance Precision Rotation Stages
RV350 Rotation Stages
Torque/Speed curve of RV350.
with:
Mz0: Maximum torque at maximum allowed speed.
Mzmax. : Maximum torque.
V0: Maximum speed at maximum torque.
Vmax. : Maximum allowed speed.
Mzmax. V0Mz0Vmax.
(N.m) (°/sec) (N.m) (°/sec)
RV350PP 25 20 25 20
RV350PE 80 2 80 2
RV350CC (1) 14 80 14 80
RV350CCHL (2) 50 8 30 16
1) and RV350HAT — 2) and RV350HAHLT
0
0
10 20 30 40 80
Speed
(°/sec)
10
20
RV350PP
RV350CCHL
RV350HAHLT
RV350CC
RV350HAT
30
40
50
60
70
80
Torque
(N.m)
RV350PE
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com