OPTO-EDU A63.7080 User manual

A63.7080/81
Scanning Electron Microscope (SEM)
Instruction Manual

Catalogue:
1. Getting Started....................................................................................................................................... 2
2. Structure Feature and Operating Principle..................................................................................... 8
3. Scanning Control Window of A63.7080/81.................................................................................... 15
4. Automatic sample stage.................................................................................................................... 26
5. SEM operating procedure.................................................................................................................. 42
6. Maintenance during operation......................................................................................................... 55
7. Transportation and storage .............................................................................................................. 60
8. Unpacking and Inspection ................................................................................................................ 60
9. Other....................................................................................................................................................... 63
1. Getting Started
1.1 General Description
1.1.1Features of A63.7080/81 Scanning Electron Microscope
A63.7080/81 Scanning Electron Microscope (A63.7080/81 for short) is a large- scale,
high precise electron optics instrument used to research microscopic structure
sof objectives. It receives the stimulated electron signals and forms images by
focusedelectron beam scanning on the specimen surface spot by spot. A63.7080/81
has following features:
1. It uses a field emission electron gun with high brightness and large depth of field,
which is suitable for analyzing and observing rough surfaces and fractures; the mirror
image is vivid and easy to identify and explain.
2. It can be used to observe the surface structure of large solid samples; sample
diameter can reach 15mm; sample preparation and pretreatment are very simple.
3. The resolution can reach 1.5nm.
4. Large magnification range; from low magnification to low magnification to soft
magnification. For multi-phase and multi-component heterogeneous materials, low
magnification is easy for general leaf preservation, and high magnification analysis

can be accurately performed.
5. Simple operation: users can perform main scan after receiving short-term training.
6. Electronics and computer science can appropriately improve image quality. For
example, the image processing modulator can improve the blackness and contrast of
the image to appropriately improve the brightness of each part of the image.
7. More image observation modes: For example, multi-channel scanning can help
users observe images from different detectors at the same time.
8. According to the observation purpose, users can conduct dynamic tests by
changing different stages such as high temperature, low temperature and traction
stage to observe the phase change and transformation under different stages
condition.
9 The scalability of the instrument is very good; users can perform multi-functional
analysis by adding different signal detection equipment, for example, can use X-ray
energy spectrometer (EDS) for micro area component analysis, or perform qualitative
and quantitative analysis in different micro areas analysis.
10. Windows operating system; friendly interface, simple and easy to master; the
image is displayed on the same screen, and can be enlarged or reduced; the image
resolution is optional; USB2.0 peripheral equipment standard communication
interface and support plug.
11. The pre-installed image processing software supports a variety of common image
formats, and can be converted between different image formats; optional image
processing software can enhance a series of image processing functions, such as
particle analysis.
1.2 Main Purpose and Scope of Application
Scanning electron microscope (SEM) can be used to observe one-dimensional,
two-dimensional and three-dimensional materials of metals, ceramics,

semiconductors, minerals, biology, polymers, composite materials and surface
morphology (secondary electron images, backscattered electron images); On it, on
the entire electrode, microscopic, electric field, surface, surface, surface, molecule,
surface, metal, metal, metal, metal, metal, ceramic, metal, ceramic, metal, ceramic,
copper, aluminum, copper, copper, Analysis on the surface of aluminum, copper,
copper, copper, copper, copper, copper, copper, copper, copper, aluminum and other
materials. , Macro molecular material, criminology, agriculture and forestry, etc. SEM
can be used for microstructure analysis, and normal micro-area analysis, including
quantitative and qualitative analysis of components. For micro structure analysis,
spatial resolution can reach to submicron grade. State measurement of grain
boundary, phase identification of crystal / crystal grain. When making micro-area
components analysis, element distribution measurement can be carried out by rapid
multi-element mapping and line scan. In modernin industrial production and scientific
research, material analysis become necessary Methods, industrial and agricultural
process control, quality control and safe production methods. At the same time, the
application of SEM Rapid changes in the field of human survival, such as biology,
Environmental protection and medicine.
1.3ProductnameandItsmodel
Product name: Scanning Electron Microscope Productmodel:A63.7080/81
1.4SpecificationandItsMeaning
A63.7080/81
Seriescode Modelcode
Code of SEM product

1.5 Key technical performance indicators
Resolution: SE 1.5nm@15kv BSE3nm @ 30kv Magnetization: 8 times~800,000 times
Electronic clamp: Schottky field emission electron gun Accelerating voltage: 0~30kV
Lens system: Electromagnetic lens Objective lens aperture: Three holes optional (the
position can be adjusted outside the vacuum) Chamber : Six switches connected to
two interfaces (1) Displacement of the standard manual sample stage: X = 80mm, Y =
60mm, Z = 50mm, T = -5°~+90°, R = 360° Maximum sample diameter: Ф175mm
Maximum sample height: 40mm (2) Medium-sized automatic sample stage
displacement: X = 80mm, Y = 50mm, Z = 30mm, T = -5°~+70°, R = 360°Maximum
sample diameter: Ф175mm Maximum sample height: 20m (3) Large automatic
Sample stage displacement: X = 150mm, Y = 150mm, Z = 60mm, T = -10°~+65°, R =
360°Maximum sample diameter: Ф340mm Maximum sample height: 50m Remarks:
The collision warning function is preinstalled in all series of sample chambers.
Vacuum system: secondary ion pump, single turbo molecular pump, a rotary pump;
the vacuum degree of the sample chamber is higher than 2Pa and the vacuum degree
is higher than 7Pa
1.6 Size and weight
1.6.1 Dimension of instrument
Mainengine:800×800×1480(mm)Electrical
cabinet:1340×850×740(mm)
1.6.2 Weight of instrument
Total weight of instrument: 4 50Kg
1.7 Using Condition

In order to obtain the best working condition of the instrument, before the instrument is
installed, the conditions of the stray magnetism of the environment, vibration, room
temperature, humidity and power supply should be ensured to meet the requirements
of the installation environment of the instrument.
1.7.1 Room requirements
A63.7080/81 is required to be installed with strong load-bearing capacity (floor load ≥
246500 Kg/m2) and shockproof effect is better in the independent laboratory. 5 The
instrument installation room should be able to block the light, part of the work needs to
be in the darkroom. At the same time, it is better for the user to provide a lamp so as to
examine samples and photos without
1.7.2 Temperature and humidity requirements
In the laboratory where A63.7080/81 is installed, the room temperature is required to
be constant and the humidity maintains low. The temperature should be kept between
2018℃and 2522℃, the relative humidity should be less than 670%, and the
instruments should be guaranteed to meet these requirements such as air conditioner,
dehumidifier, dry and wet thermometer.
1.7.3 Power supply requirements
1.7.3.1 Power requirements
A63.7080/81 main body (excluding X-ray analysis instrument), the power supply
should be: AC 220V,50Hz, 15A, equipped with a set of UPS power supply, power
output socket at least two (respectively 220V, 50Hz, 10A and 220V, 50Hz, 16A).The
switch of air equipment in the laboratory is AC 220V, 4063A. In addition, power supply
is required for the test equipment installing A63.7080/81 and accessories: 220V,50
hHz, 10 aA. The power output socket shall have three and two cores and terminal
blocks.
1.7.3.2 Power quality requirements
A63.7080/81 like other high-precision electronic instruments and equipment, is

sensitive to electronic noise and electrical drift. The required voltage is AC 220V±10%,
50Hz ±1hHz, the standard distortion free sine wave (wave shape distortion less than
±2%), no noise, transients, oscillations and pulses. When there's a problem with the
power supply, the effects on A63.7080/81 may be complicated, sometimes it affects
the resolution of the instrument, sometimes Linear or banded streaks may appear on
the image. If you have equipments with high power and large power consumption
variation, you can not share the power supply line with A63.7080/81.At the same time,
the user has the responsibility to ask professional to embed independent ground wire,
other devices shall not share the ground wire with the instrument, and guarantee the 6
grounding resistance less than 3 Ω.
1.7.4 Vibration requirements
Although A63.7080/81’s electronic optical lens tube has vibration isolation device, the
vibration beyond the allowable range (frequency 0 ~ 200Hz) will bring bad influence
on the normal operation of the instrument. In the installation position of A63.7080/81,
the vibration in any direction should be less than 3 μm. The engineer of OPTOEDU
will make a comprehensive measurement of the instrument before installation and
analyze the data. If the analysis results show that there is something wrong with the
environment, the user will be suggested to make improvement. It should be noted that
the vibration caused by too much sound can also affect the high-resolution image of
A63.7080/81. It is the user's responsibility to provide a relatively "quiet" environment
for A63.7080/81. If it is found that the sound in the installation environment affects the
scanning electron microscope image, the user is responsible to take measures to
correct it. Depending on the sound source that affects the instrument, the sound
source can be eliminated or an appropriate place can be found to install the
instrument.
1.7.5 Low frequency stray magnetic fields requirements
Special attention must be paid to the transformers, motors and power supply lines
near the installation environment of A63.7080/81 to ensure that the magnetic
induction intensity in any direction should be less than 2×10-7T (2 mm gaussm gauss,
P--P). Any excess magnetic field may affect the resolution of the instrument

1.8 Influence on Environment and Energy Sources
The X-ray radiations of A63.7080/81 conform to the national standard, and will not
influence environment and energy sources.
1.9 Safety
The safety of A63.7080/81 conforms to the requirements of the national safety 7
standards of instruments.
2. Structure Feature and Operating Principle
2.1 General Structure
A63.7080/81 ultilizes the interaction a certain energy electron beam and sample, which will
produce various physical signals. The SE detector collects and amplifies secondary electronic
signal, then transmit the signal to electrics console, converts to digital signal. Finally, the
computer receive the signal and form a image. The main structures of A63.7080/81 are electron
optics column, chamber, automatic vacuum system, electronics and display console, etc.

2.2 Electron Optics Column
A63.7080/81 electron optics column can produce and focus electron beam to form a fine spot on
specimen. The electron optics column consists of Schottky field emission electron gun,
electromagnetic beam alignment system, column isolation valve (V1), objective lens, scanning
coil assembly, stigmator and electron detector. the electron optical column is shown in Fig.2-1.
The system has one set of electromagnetic shielding column outside the optical path, which can
eliminate the electromagnetic interference from the environment.
2.2.1 Schottky field emission electron gun
Schottky field emission electron gun has the characteristics of good monochrome and high
brightness. The electron beam emitted by the gun forms a very small beam spot on the sample
surface through electrostatic lens and magnetic focusing system.
2.2.2 Electromagnetic Beam Alignment System

The electromagnetic beam alignment system is adopted to ensure coincidence of electron
beam and the optical axes. A63.7080/81 adopts two sets of electromagnetic alignment coils to
form the electromagnetic alignment system, which can be conveniently adjusted by the control
software to make the electron beam coincide with the optical path axis.
2.2.3 Lens system
The objective lens forms the main lens system. Objective lens is an asymmetric lens with low
spherical aberration coefficients and small magnetic flux leakage. The final apertures are
installed between top and bottom pole piece of objective lens. Three apertures can be installed
in the final aperture holder, diameter of aperture is usually 70μm, 50μm or 30μm (customers can
choose other diameters according to actual needs). The adjusting device can help users select
final aperture according to 9 actual needs and align it with electron beam though adjust knobs in
X and Y directions. The final aperture influences depth of focus, resolution and electron beam
current.
2.2.4 Scanning Coil Assembly
Scanning coil assembly is installed inside of objective lens to make the electron beam deflect on
the surface of specimen along X direction and Y direction. When observing images at high
magnification, the operator usually needs to move the ROI(region of interest) image. This can be
completed by scan shift, which is realized by changing DC level on scanning coil X and Y.
2.2.5 Stigmator
The stigmator is installed inside of the scanning coil assembly, and can correct astigmatism
quickly. The adjustment of stigmator is realized by the software.
2.2.6 Electron Detector
Electron detector of OPTOEDU can collect low-energy secondary electrons (SE) and high
energy backscattered electrons(BSE). ETD: secondary electronic detector, used to receive
secondary electronic signals, used to characterize the morphology and contrast of the sample; A