OPTO-EDU A63.7080 User manual

A63.7080/81
Scanning Electron Microscope (SEM)
Instruction Manual

Catalogue:
1. Getting Started....................................................................................................................................... 2
2. Structure Feature and Operating Principle..................................................................................... 8
3. Scanning Control Window of A63.7080/81.................................................................................... 15
4. Automatic sample stage.................................................................................................................... 26
5. SEM operating procedure.................................................................................................................. 42
6. Maintenance during operation......................................................................................................... 55
7. Transportation and storage .............................................................................................................. 60
8. Unpacking and Inspection ................................................................................................................ 60
9. Other....................................................................................................................................................... 63
1. Getting Started
1.1 General Description
1.1.1Features of A63.7080/81 Scanning Electron Microscope
A63.7080/81 Scanning Electron Microscope (A63.7080/81 for short) is a large- scale,
high precise electron optics instrument used to research microscopic structure
sof objectives. It receives the stimulated electron signals and forms images by
focusedelectron beam scanning on the specimen surface spot by spot. A63.7080/81
has following features:
1. It uses a field emission electron gun with high brightness and large depth of field,
which is suitable for analyzing and observing rough surfaces and fractures; the mirror
image is vivid and easy to identify and explain.
2. It can be used to observe the surface structure of large solid samples; sample
diameter can reach 15mm; sample preparation and pretreatment are very simple.
3. The resolution can reach 1.5nm.
4. Large magnification range; from low magnification to low magnification to soft
magnification. For multi-phase and multi-component heterogeneous materials, low
magnification is easy for general leaf preservation, and high magnification analysis

can be accurately performed.
5. Simple operation: users can perform main scan after receiving short-term training.
6. Electronics and computer science can appropriately improve image quality. For
example, the image processing modulator can improve the blackness and contrast of
the image to appropriately improve the brightness of each part of the image.
7. More image observation modes: For example, multi-channel scanning can help
users observe images from different detectors at the same time.
8. According to the observation purpose, users can conduct dynamic tests by
changing different stages such as high temperature, low temperature and traction
stage to observe the phase change and transformation under different stages
condition.
9 The scalability of the instrument is very good; users can perform multi-functional
analysis by adding different signal detection equipment, for example, can use X-ray
energy spectrometer (EDS) for micro area component analysis, or perform qualitative
and quantitative analysis in different micro areas analysis.
10. Windows operating system; friendly interface, simple and easy to master; the
image is displayed on the same screen, and can be enlarged or reduced; the image
resolution is optional; USB2.0 peripheral equipment standard communication
interface and support plug.
11. The pre-installed image processing software supports a variety of common image
formats, and can be converted between different image formats; optional image
processing software can enhance a series of image processing functions, such as
particle analysis.
1.2 Main Purpose and Scope of Application
Scanning electron microscope (SEM) can be used to observe one-dimensional,
two-dimensional and three-dimensional materials of metals, ceramics,

semiconductors, minerals, biology, polymers, composite materials and surface
morphology (secondary electron images, backscattered electron images); On it, on
the entire electrode, microscopic, electric field, surface, surface, surface, molecule,
surface, metal, metal, metal, metal, metal, ceramic, metal, ceramic, metal, ceramic,
copper, aluminum, copper, copper, Analysis on the surface of aluminum, copper,
copper, copper, copper, copper, copper, copper, copper, copper, aluminum and other
materials. , Macro molecular material, criminology, agriculture and forestry, etc. SEM
can be used for microstructure analysis, and normal micro-area analysis, including
quantitative and qualitative analysis of components. For micro structure analysis,
spatial resolution can reach to submicron grade. State measurement of grain
boundary, phase identification of crystal / crystal grain. When making micro-area
components analysis, element distribution measurement can be carried out by rapid
multi-element mapping and line scan. In modernin industrial production and scientific
research, material analysis become necessary Methods, industrial and agricultural
process control, quality control and safe production methods. At the same time, the
application of SEM Rapid changes in the field of human survival, such as biology,
Environmental protection and medicine.
1.3ProductnameandItsmodel
Product name: Scanning Electron Microscope Productmodel:A63.7080/81
1.4SpecificationandItsMeaning
A63.7080/81
Seriescode Modelcode
Code of SEM product

1.5 Key technical performance indicators
Resolution: SE 1.5nm@15kv BSE3nm @ 30kv Magnetization: 8 times~800,000 times
Electronic clamp: Schottky field emission electron gun Accelerating voltage: 0~30kV
Lens system: Electromagnetic lens Objective lens aperture: Three holes optional (the
position can be adjusted outside the vacuum) Chamber : Six switches connected to
two interfaces (1) Displacement of the standard manual sample stage: X = 80mm, Y =
60mm, Z = 50mm, T = -5°~+90°, R = 360° Maximum sample diameter: Ф175mm
Maximum sample height: 40mm (2) Medium-sized automatic sample stage
displacement: X = 80mm, Y = 50mm, Z = 30mm, T = -5°~+70°, R = 360°Maximum
sample diameter: Ф175mm Maximum sample height: 20m (3) Large automatic
Sample stage displacement: X = 150mm, Y = 150mm, Z = 60mm, T = -10°~+65°, R =
360°Maximum sample diameter: Ф340mm Maximum sample height: 50m Remarks:
The collision warning function is preinstalled in all series of sample chambers.
Vacuum system: secondary ion pump, single turbo molecular pump, a rotary pump;
the vacuum degree of the sample chamber is higher than 2Pa and the vacuum degree
is higher than 7Pa
1.6 Size and weight
1.6.1 Dimension of instrument
Mainengine:800×800×1480(mm)Electrical
cabinet:1340×850×740(mm)
1.6.2 Weight of instrument
Total weight of instrument: 4 50Kg
1.7 Using Condition

In order to obtain the best working condition of the instrument, before the instrument is
installed, the conditions of the stray magnetism of the environment, vibration, room
temperature, humidity and power supply should be ensured to meet the requirements
of the installation environment of the instrument.
1.7.1 Room requirements
A63.7080/81 is required to be installed with strong load-bearing capacity (floor load ≥
246500 Kg/m2) and shockproof effect is better in the independent laboratory. 5 The
instrument installation room should be able to block the light, part of the work needs to
be in the darkroom. At the same time, it is better for the user to provide a lamp so as to
examine samples and photos without
1.7.2 Temperature and humidity requirements
In the laboratory where A63.7080/81 is installed, the room temperature is required to
be constant and the humidity maintains low. The temperature should be kept between
2018℃and 2522℃, the relative humidity should be less than 670%, and the
instruments should be guaranteed to meet these requirements such as air conditioner,
dehumidifier, dry and wet thermometer.
1.7.3 Power supply requirements
1.7.3.1 Power requirements
A63.7080/81 main body (excluding X-ray analysis instrument), the power supply
should be: AC 220V,50Hz, 15A, equipped with a set of UPS power supply, power
output socket at least two (respectively 220V, 50Hz, 10A and 220V, 50Hz, 16A).The
switch of air equipment in the laboratory is AC 220V, 4063A. In addition, power supply
is required for the test equipment installing A63.7080/81 and accessories: 220V,50
hHz, 10 aA. The power output socket shall have three and two cores and terminal
blocks.
1.7.3.2 Power quality requirements
A63.7080/81 like other high-precision electronic instruments and equipment, is

sensitive to electronic noise and electrical drift. The required voltage is AC 220V±10%,
50Hz ±1hHz, the standard distortion free sine wave (wave shape distortion less than
±2%), no noise, transients, oscillations and pulses. When there's a problem with the
power supply, the effects on A63.7080/81 may be complicated, sometimes it affects
the resolution of the instrument, sometimes Linear or banded streaks may appear on
the image. If you have equipments with high power and large power consumption
variation, you can not share the power supply line with A63.7080/81.At the same time,
the user has the responsibility to ask professional to embed independent ground wire,
other devices shall not share the ground wire with the instrument, and guarantee the 6
grounding resistance less than 3 Ω.
1.7.4 Vibration requirements
Although A63.7080/81’s electronic optical lens tube has vibration isolation device, the
vibration beyond the allowable range (frequency 0 ~ 200Hz) will bring bad influence
on the normal operation of the instrument. In the installation position of A63.7080/81,
the vibration in any direction should be less than 3 μm. The engineer of OPTOEDU
will make a comprehensive measurement of the instrument before installation and
analyze the data. If the analysis results show that there is something wrong with the
environment, the user will be suggested to make improvement. It should be noted that
the vibration caused by too much sound can also affect the high-resolution image of
A63.7080/81. It is the user's responsibility to provide a relatively "quiet" environment
for A63.7080/81. If it is found that the sound in the installation environment affects the
scanning electron microscope image, the user is responsible to take measures to
correct it. Depending on the sound source that affects the instrument, the sound
source can be eliminated or an appropriate place can be found to install the
instrument.
1.7.5 Low frequency stray magnetic fields requirements
Special attention must be paid to the transformers, motors and power supply lines
near the installation environment of A63.7080/81 to ensure that the magnetic
induction intensity in any direction should be less than 2×10-7T (2 mm gaussm gauss,
P--P). Any excess magnetic field may affect the resolution of the instrument

1.8 Influence on Environment and Energy Sources
The X-ray radiations of A63.7080/81 conform to the national standard, and will not
influence environment and energy sources.
1.9 Safety
The safety of A63.7080/81 conforms to the requirements of the national safety 7
standards of instruments.
2. Structure Feature and Operating Principle
2.1 General Structure
A63.7080/81 ultilizes the interaction a certain energy electron beam and sample, which will
produce various physical signals. The SE detector collects and amplifies secondary electronic
signal, then transmit the signal to electrics console, converts to digital signal. Finally, the
computer receive the signal and form a image. The main structures of A63.7080/81 are electron
optics column, chamber, automatic vacuum system, electronics and display console, etc.

2.2 Electron Optics Column
A63.7080/81 electron optics column can produce and focus electron beam to form a fine spot on
specimen. The electron optics column consists of Schottky field emission electron gun,
electromagnetic beam alignment system, column isolation valve (V1), objective lens, scanning
coil assembly, stigmator and electron detector. the electron optical column is shown in Fig.2-1.
The system has one set of electromagnetic shielding column outside the optical path, which can
eliminate the electromagnetic interference from the environment.
2.2.1 Schottky field emission electron gun
Schottky field emission electron gun has the characteristics of good monochrome and high
brightness. The electron beam emitted by the gun forms a very small beam spot on the sample
surface through electrostatic lens and magnetic focusing system.
2.2.2 Electromagnetic Beam Alignment System

The electromagnetic beam alignment system is adopted to ensure coincidence of electron
beam and the optical axes. A63.7080/81 adopts two sets of electromagnetic alignment coils to
form the electromagnetic alignment system, which can be conveniently adjusted by the control
software to make the electron beam coincide with the optical path axis.
2.2.3 Lens system
The objective lens forms the main lens system. Objective lens is an asymmetric lens with low
spherical aberration coefficients and small magnetic flux leakage. The final apertures are
installed between top and bottom pole piece of objective lens. Three apertures can be installed
in the final aperture holder, diameter of aperture is usually 70μm, 50μm or 30μm (customers can
choose other diameters according to actual needs). The adjusting device can help users select
final aperture according to 9 actual needs and align it with electron beam though adjust knobs in
X and Y directions. The final aperture influences depth of focus, resolution and electron beam
current.
2.2.4 Scanning Coil Assembly
Scanning coil assembly is installed inside of objective lens to make the electron beam deflect on
the surface of specimen along X direction and Y direction. When observing images at high
magnification, the operator usually needs to move the ROI(region of interest) image. This can be
completed by scan shift, which is realized by changing DC level on scanning coil X and Y.
2.2.5 Stigmator
The stigmator is installed inside of the scanning coil assembly, and can correct astigmatism
quickly. The adjustment of stigmator is realized by the software.
2.2.6 Electron Detector
Electron detector of OPTOEDU can collect low-energy secondary electrons (SE) and high
energy backscattered electrons(BSE). ETD: secondary electronic detector, used to receive
secondary electronic signals, used to characterize the morphology and contrast of the sample; A

positive voltage biased on the collect grid which is mounted in front of detector, can attract
low-energy SE to electron detector. A positive 10KV potential biased on the scintillator
accelerates SE. The photon produced by scintillator enters into the window of photomultiplier,
and output video signal. BSE: backscatter detector, used to receive backscattered electron
signals, used to characterize the atomic number contrast of sample.
2.2.7 A63.7080/81 accessories
Standard accessories which can be installed on A63.7080/81 are X-Ray Energy Dispersive
spectrometer (EDS), X-ray wave dispersive spectrometer, 10 Cathodoluminescence
spectrometer, etc. Currently, EDS is the most popular accessory of SEM. EDS consists of
detector and analysis system, which can realize the identification and quantification of the
specimen. Used for component analysis of samples.
2.3 Specimen Chamber and Specimen Stage
The specimen chamber is mounted on the vibration isolated frame. Vacuum system is
installed under chamber, which electron optics column is installed above chamber. The
specimen stage is installed in the front of chamber. Vent of chamber will not influence vacuum
status of other parts. The chamber provides a big working area for specimen. Meanwhile, it is
convenient for accessory installation. Specimen chamber accessories available are high -
temperature stage, low - temperature stage, drawing stage,,etc.
2.3.1 Specimen Chamber
Medium and large specimen chambers are available to match different specimen stage. The
chamber can be equipped with various stages and detectors, such as X-ray wave dispersive
spectrometer, X-ray energy dispersive spectrometer, cathodoluminescence spectrometer,
backscattered electrons detector, SE detector and other experimental instrument.
2.3.2 Manual specimen stage (standard)
Horizontal: X=80mm Y=60mm Vertical: Z =50mm Tilt= -5°~ +90°Rotation = 360°Maximum

sample size: Ф175 mm ; Maximum sample height: 40mm
2.3.3 Five axis automatic medium size specimen stage (optional)
Horizontal: X=80mm Y=50mm Vertical: Z =30mm Tilt= -5°~ +70°Rotation = 360°Maximum
sample size: Ф175 mm ; Maximum sample height: 20mm The sample locking device can be
used to lock the sample stage and sample chamber after the sample stage is inserted to reduce
the influence of vibration.
2.3.4 Five axis automatic huge size specimen stage (optional)
Horizontal: X=150mm Y=150mm Vertical: Z =60mm Tilt= -10°~ +65°Rotation = 360°Maximum
sample size: Ф340 mm ; Maximum sample height: 50mm
2.3.5 Accessories of Standard Chamber
High temperature stage, low temperature stage and tensile stage can be installed in standard
chamber for observing the state changes of specimen
2.4 Vacuum System
The electron optical column and chamber must work on certain vacuum state. The realization
and control of vacuum state can be completed by vacuum system. The automatic vacuum
system is installed under chamber, and directly connected with column through vacuum
pipeline, which is shown as Fig.2-2. The automatic vacuum system mainly includes Ion
Pump ,Turbo Molecular Pump, Mechanical Pump, Cold Cathode Gauge, connecting pipeline,
damping device, various valves, and various gauges etc. More details are as follows:
1. Ion Pump is used to acquire ultra high vacuum for the system.
2. Turbo Molecular Pump is used to acquire high vacuum for the system.
3. Mechanical pump is used to acquire low vacuum for the system and foreline vacuum for
Turbo Molecular Pump.
4. Connecting pipeline is used for the connections between vacuum components.

5. Various valves are used for vacuum partition. e.g., V1 can separate electron gun from
chamber; when the chamber is venting, the electron gun can keep in vacuum state; V2 is used
to acquire vacuum between chamber and mechanical pump . When the specimen chamber
meet the starting requirements of the molecular pump, the V2 is opened and molecular pump is
started to make the system obtain a high vacuum. When the specimen chamber and the
electron gun meet the ion pump startup requirements, the ion pump is started, enabling the
electron column to obtain ultra-high vacuum.
6. Cold Cathode Gauge(CCG) measure vacuum in real time and assist valves to realize vacuum
control. 7. Air compressor supplies power to each pneumatic valve.
The vacuum control part is installed on the rear of main frame. The whole process from low
vacuum to high vacuum is fully automatically controlled by software. The system can realize the
vacuum real-time measurement and various vacuum logic control functions Operations of
vacuum system are very simple: the operators only need to press buttons on the software
interface, the vacuum system can work automatically. The system can also be operated in
manual mode while being maintained.

2.5 Electronics Console Control System
Electronics console control system consists of electronics console and computer system,
which is used to control various functions of A63.7080/81.
2.5.1 Electronics Console
Electronics console includes circuit boards with various functions and power supplies. It is
controlled by software manually. The Electronics console of A63.7080/81 includes three parts:
the scanning electron microscope control electrical system, the vacuum power supply and the
high voltage power supply. The three parts can be controlled by a master switch in the middle of
the cabinet, or by their own power switch for independent control.
Fig.2-3 Electrical master switch
2.5.2 Computer System
Computer operating system is Using Microsoft Windows® 10 operating system, 14 image can
be stored at any time in large capacity hard disk or other storage media, or directly printed out.
computer workstation configuration for the mainstream brand, its configuration is not lower than:
I5 quad core 3.2 GHz, HD video card 530; DDR4 8gb memory; 24" LCD display; 500G
high-speed hard disk; Photoelectric mouse, keyboard. Peripheral unified USB2.0 and above
standard communication interface, support hot plug. The operating software have been installed
in computer and supports multi-language, which is simple, kindly and easy to use, with low
system resources occupancy and high stability. The SEM operation software also provides
automatic control functions, including auto focus, auto stigmator correction, and auto brightness/
contrast. SEM control software supports a variety of common image formats and the conversion

between different image formats. Software internal integration of part of the general image
processing functions, more convenient to use.In addition, special software for electron
microscope image processing can be installed, which has more powerful functions and supports
a variety of image formats.
3. Scanning Control Window of A63.7080/81
3.1 computer operating system
A63.7080/81 operating software is installed on the Windows operating system and follows
the usage habits of the Windows operating system.
3.2 operating system
The SEM operating software icon is shown in Fig. 3-1. Double-click the icon to open the
user interface, as shown in Fig. 3-2. The SEM operating software includes: filament high
pressure control, vacuum control, image acquisition, image analysis and other functions.
The user interface mainly includes menu bar, toolbar, image display area and scan
control window.
3.2.1 scan controlwindow
As shown in Fig.3-3 and Fig.3-4 are the scan control window interface and its main
functions 17 Fig.3-3 the scan control window interface component function Menu bar
（page 2-9）- Import: loads the Settings - Save: save Settings Key bar （page 2-10）-
Different functions on and off - Display status and related functions Function Field
Includes various control functions of scanning electron microscopy Set electron beam 18

-Beam -Align（page 2-14）-Image（page 2-15）-Aux（page 2-16）-Status（page 2-17）
Set the astigmatic set the scan area Set the external scan signal Display working voltage,
high voltage error code and operation log of different parts Main Field（page 2-18）Set
contrast brightness, focus, magnification, scan rotation Status Field Displays the vacuum
and beam values Table 3-4 main functions of scan control window Instructions on mouse
operation: After clicking the slider on the toolbar, drag the mouse to fine tune the
corresponding parameters; After double-clicking the slider on the toolbar, drag the mouse
to make coarse adjustment of the corresponding parameters; After the adjustment, click
the right mouse button to determine the current parameter value.

Instructions on mouse operation: After clicking the slider on the toolbar, drag the mouse to
fine tune the corresponding parameters; After double-clicking the slider on the toolbar,
drag the mouse to make coarse adjustment of the corresponding parameters; After the
adjustment, click the right mouse button to determine the current parameter value.
3.2.2 Get started
1. Operating the electron microscope operating software A63.7080/81;
2. Click the "SE" button in the upper right corner of the control interface to load the power
of each system

Fig.3-5Click"SE"intheupperrightcornertouse
3.2.3stopusing
1. Click the "vacuum" button;
2. Wait for all function indicators to go off;
3. Keep the A63.7080/81 software on; In this state, the software system will automatically
detect and record the operation parameters of the electron microscope.
Fig.3-6 Click the "vacuum" button to stop using
3.2.4 Function button
The function button and state display of the scan control window are shown in the Fig. 3-7,
and the function button's meaning is shown in the table 3-1.

Fig.3-7 The function button and state display of the scan control window