OPTO-EDU A63 .7080 User manual

A63.7080
Scanning Electron Microscope
Std FEG SEM
Instruction Manual

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 1 of 51 sa[email protected]m
Content
1. Overview ..............................................................................................4
1.1. Product Features....................................................................................4
1.2. Main uses and scope of application ....................................................5
1.3. Model & Product Name .........................................................................5
1.4. Composition of the model No. and its representative meaning ......5
1.5. Main technical data ................................................................................6
1.6. Dimension and weight ...........................................................................6
1.6.1. Instrument Dimension.....................................................................6
1.6.2. Instrument Weight ...........................................................................6
1.7. Environmental conditions for using .....................................................6
1.7.1. Equipment requirements for the room .........................................6
1.7.2. Requirements for temperature and humidity environment .......6
1.7.3. Requirements for power supply ....................................................7
1.7.4. Requirements for vibration.............................................................7
1.7.5. Requirements for low frequency stray magnetic fields..............7
1.8. Impact on the environment and energy ..............................................8
1.9. Security ....................................................................................................8
2. System composition and working principle .....................................9
2.1. Overall structure .....................................................................................9
2.2. Electron optical tube ..............................................................................9
2.2.1. Schottky field emission electron gun..........................................10
2.2.2. Electron beam electromagnetic alignment system ..................10
2.2.3. Lens system ...................................................................................10
2.2.4. Scanning coil assembly................................................................10
2.2.5. Astigmatism Device ......................................................................10
2.2.6. Signal Detecting System..............................................................11
2.2.7. A63.7080 Accessories..................................................................11
2.3. Sample room and sample stage ........................................................11
2.3.1. Standard sample room .................................................................11
2.3.2. Large sample room .......................................................................11
2.3.3. Standard sample stage ................................................................11
2.3.4. Large sample stage ......................................................................12
2.3.5. Standard sample room accessories...........................................12

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 2 of 51 [e-mail]
2.4. Vacuum system ....................................................................................13
2.5. Electrical cabinet control .....................................................................14
2.5.1. Electrical cabinet ...........................................................................14
2.5.2. Computer System..........................................................................15
3. Use and operation of electron microscope software .....................17
3.1. Familiar with the basic use of Windows 7 ........................................17
3.2. Software Control Panel .......................................................................17
3.2.1. Software Scan Control Window ..................................................18
3.2.2. Starting and Shut down................................................................20
3.2.3. Function buttons............................................................................20
3.2.4. Electronic Gun Control .................................................................22
3.2.5. Electrical alignment.......................................................................24
3.2.6. Image electrical displacement.....................................................25
3.2.7. Main function area.........................................................................25
3.3. Image acquisition .................................................................................27
3.3.1. Overview of the Software Interface ............................................27
3.3.2. Scan Settings.................................................................................28
3.3.3. File Management Menu ...............................................................29
3.3.4. Getting images...............................................................................30
4. SEM Microscope Operation Procedure...........................................31
4.1. Preparation and inspection before use.............................................31
4.1.1. Power Supply Check ....................................................................31
4.1.2. Key position of the main rack panel ...........................................31
4.1.3. Installed the panel correctly.........................................................31
4.1.4. No people behind main unit & cabinet during work .................31
4.2. Operating procedures, methods and precautions for starting the
electron microscope..........................................................................................31
4.2.1. Starting the Electron Microscope from Standby.......................31
4.2.2. Starting the electron microscope from the off state .................32
4.2.3. Placing or replacing samples ......................................................33
4.2.4. Turning on the gun power supply ...............................................34
4.2.5. How to get images ........................................................................35
4.2.6. Adjusting sample position ............................................................37
4.2.7. Sample Preparation ......................................................................38
4.2.8. Image Processing Operations.....................................................38

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 3 of 51 [e-mail]
4.3. Monitoring and Recording in Operation............................................38
4.3.1. Working of the vacuum system...................................................38
4.3.2. Software Working Status..............................................................39
4.4. Operating procedures, methods & precautions for shutdown.......39
4.4.1. Daily standby status......................................................................39
4.4.2. Shutdown Status ...........................................................................39
4.4.3. Closing the electrical cabinet.......................................................39
5. Maintenance ......................................................................................40
5.1. Maintenance during operation............................................................40
5.1.1. Replacing Scintillator of the Secondary Electron Detector.....40
5.1.2. Cleaning the objective diaphragm and rod ...............................41
5.1.3. Other maintenance work..............................................................44
5.2. Maintenance cycle ...............................................................................44
5.3. Normal maintenance procedures ......................................................44
5.4. Maintenance during long-term parking .............................................44
6. Transportation and Storage .............................................................45
6.1. Lifting and transportation precautions...............................................45
6.2. Storage conditions, storage period and precautions ......................45
7. Unpacking and Inspection................................................................46
7.1. Unpacking Precautions .......................................................................46
7.2. Inspection contents ..............................................................................46
7.2.1. A63.7080 Packing List (For Reference Only) ...........................46
7.2.2. Instrument appearance inspection .............................................47
8. Other ..................................................................................................48
8.1. Guarantee, after-sales service, contact information.......................48
8.1.1. Manufacturer's guarantee commitment .....................................48
8.1.2. After-sales service.........................................................................48
8.1.3. Contact information.......................................................................49
8.2. User feedback.......................................................................................49
8.3. Other matters that need to be explained to the user ......................49
9. Appendix: Abbreviations, Glossary of Terminology ......................50

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 4 of 51 [e-mail]
1. Overview
1.1. Product Features
A63.7080 Scanning Electron Microscope Std FEG SEM, is a digital Field
Emission Gun scanning electron microscope (referred to as A63.7080). It is a large-
scale precision electronic optical instrument for studying the microstructure of
objects. The focused electron beam can scan point by point on the surface of the
sample to receive the excited electronic signal to form an image：
1. It adopts field emission electron gun, which has the characteristics of high
brightness and large depth of field. It is suitable for the analysis and observation
of rough surface and fracture; the image is full of three-dimensional, realistic,
easy to identify and explain.
2. The surface structure of large solid samples can be observed. The sample
diameter is 0~15mm. The sample preparation method and sample
pretreatment process are simple.
3. The max resolution can reach 1.5nm.
4. The observation magnification range is large, from 15x of low magnification to
500,000x of high magnification; for multi-phase and multi-component non-
uniform materials, it is convenient for ordinary observation under low
magnification and fine observation analysis under high magnification.
5. Easy to operate, after a short period of training, user can operate the instrument.
6. The quality of the image can be appropriately improved by using electronic
methods and computer technology. For example, the image processor can
adjust the brightness and contrast of the image, etc., so that all light/dark parts
of the image can be improved to show clearly.
7. Provide more image viewing methods, such as using a dual magnification
device or a split image selector to simultaneously view images of different
magnifications or images of different signal detectors on the display.
8. According to the purpose of observation, it is possible to increase the dynamic
test using a sample stage such as high temperature, low temperature and
stretching, and observe the phase transformation and morphological changes
under different conditions.
9. The instrument has good expandability to make different analysis work by
adding different signal detection devices. For example, an X-ray energy
spectrometer (EDS) can be used to perform micro-regional component
analysis while observing the morphology, and to qualitatively and quantitatively
analyze the elemental composition of different micro-regions of the sample.
10. The operating system adopts Windows 7 operating system, the software
operation interface is user friendly, concise and intuitive; the images can be
displayed in same screen display, can be scaled and zoomed, and the image
resolution can be selected; it support USB2.0 standard communication
interface, support plug/play function.
11. The standard image processing software supports a variety of common image

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 5 of 51 [e-mail]
formats, and conversion between different image formats. The optional image
processing software enhanced a series of image processing functions such as
particle size analysis, on the basis of standard image processing software.
1.2. Main uses and scope of application
Scanning electron microscope is suitable tool for observation of surface
topography of metal, ceramic, semiconductor, mineral, biological, polymer,
composite materials and nanoscale one-dimensional, two-dimensional and three-
dimensional materials (secondary electron image, backscattered electron image);
Analysis of point, line and surface components of the micro-area. It is widely used
in petroleum, geology, minerals, electronics, semiconductor, medicine, biology,
chemical, polymer materials, public security criminal investigation, agriculture,
forestry and other fields.
Scanning electron microscope can perform microscopic morphology analysis.
If equipped with other analytical instruments, conventional micro-analysis of
components can be performed, including elemental quantification and qualitative
component analysis. When performing microscopic morphology analysis, the
spatial resolution can reach sub-micron level; it can measure the state of grain
boundary, or the phase identification of crystal/grain, and the measurement of
crystal and grain orientation; Distribution measurements can be made with fast
multi-element surface scanning and line scanning.
In modern industrial production and scientific research, the development of
scanning electron microscopy has become a necessary means for material
analysis, monitoring industrial and agricultural production, ensuring product quality,
and ensuring the safety and efficiency of large production processes. At the same
time, it is related to human survival and development in biology, environmental
protection and medicine. The application of the field is also changing with each
passing day; the development of military modern high-tech (such as biological
weapons, chemical weapons wars, on-site poison detection, life support tasks, etc.)
has played a huge role.
1.3. Model & Product Name
Product Name: Field Emission Gun Scanning Electron Microscope
Model No.：A63.7080
1.4. Composition of the model No. and its representative meaning
A63 .70 80 - X
Sub-Model No.
Model No.
Series No.
Scanning Electron Microscope

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 6 of 51 [e-mail]
1.5. Main technical data
Resolution 1.5nm@ 15kV or 30kV
Magnification 15x~500000x
Electron Gun Schottky Field Emission Gun
Accelerating Voltage 0~30kV
Lens System Electromagnetic lens
Objective Diaphragm Include 3 diaphragm, out of vacuum room, position
customized
Specimen Room Include 6 interface, can connect WDS、EDS、BSE and etc.
Standard Specimen Stage X 50mm/Y 50mm/Z 25mm, T=-5°~90°,R=360°
Large Specimen Stage X 80mm/Y 50mm/Z 30mm, T=-5°~90°,R=360°
Vacuum System Fully automatic ultra-high vacuum system
1.6. Dimension and weight
1.6.1. Instrument Dimension
Electron optical tube section：800×800×1380(mm)
Electrical cabinet control part：600×800×1600(mm)
Operator table： 800×1350（mm）
1.6.2. Instrument Weight
Total Weight： 550 Kgs
1.7. Environmental conditions for using
In order to obtain the best working condition of the instrument, ensure that the
environment's stray magnetic field, vibration, room temperature, humidity and
power supply meet the requirements of the installation environment before the
instrument is installed.
1.7.1. Equipment requirements for the room
A63.7080 is required to be installed in an independent laboratory with strong
load-bearing capacity (floor load ≥ 246 Kg/m2) and good anti-vibration effect. The
room where the instrument is installed should be able to be shaded, and some work
needs to be done in the darkroom. At the same time, the user should be able to
provide a desk lamp for sample and photo inspection without illumination.
1.7.2. Requirements for temperature and humidity environment
In the laboratory where A63.7080 is installed, the room temperature is
required to be constant and the humidity is small. The temperature should be kept
between 20 °C and 25 °C, the relative humidity should be less than 70%, and
equipment that guarantees to meet these requirements, such as air conditioners,
dehumidifiers, wet and dry thermometers, etc.

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 7 of 51 [e-mail]
1.7.3. Requirements for power supply
1.7.3.1. Requirement for power
A63.7080’s main body (excluding X-ray analysis equipment), need to supply:
AC 220V, 50Hz, 15A, with UPS power supply, at least two power output sockets
(220V, 50Hz, 10A and 220V, 50Hz, 16A respectively) ). The experimental indoor air
equipment switch is: AC 220V, 40A.
In addition, the test equipment for the installation of A63.7080 and accessories
needs to be equipped with power: 220V, 50Hz, 10A. The power outlet should have
three cores and two cores and a terminal block.
1.7.3.2. Requirement for power supply quality
Like other high-precision electronic equipment, the A63.7080 is sensitive to
electrical noise and power drift. Required voltage AC 220V ± 10%, 50Hz ± 1 Hz,
standard distortion-free sine wave (waveform distortion less than ± 2%), no noise,
transients, oscillations and pulses. When there is a problem with the power supply,
the impact on the A63.7080 may be varied, sometimes affecting the resolution of
the instrument, and sometimes linear or stripe streaks may appear on the image.
If there is a device with large power and large power consumption, the power
supply line cannot be shared with A63.7080. At the same time, it is the responsibility
of the user to ask the professional to bury the independent ground wire. Other
equipment cannot share the ground wire with the instrument and ensure that the
grounding resistance is less than 3Ω.
1.7.4. Requirements for vibration
Although the electron optical tube of A63.7080 has a vibration isolating device,
vibration beyond the allowable range (frequency 0 to 200 Hz) will have a bad
influence on the normal operation of the instrument. In the mounting position of
A63.7080, the vibration in any direction should be less than 3μm. The CNC
engineer will perform a comprehensive measurement of the instrument and
perform data analysis before installation. If the analysis results indicate that there
is a problem with the environmental conditions, the user will be advised to make
improvements.
It is important to note that the vibrations caused by excessive sound can also
affect the high-resolution image of the A63.7080. It is the responsibility of the user
to provide a relatively "quiet" environment for the A63.7080. If it is found that the
sound in the installation environment affects the SEM image, it is the user's
responsibility to take action to correct it. Depending on the source of the sound that
affects the instrument, you can eliminate the sound source or find another suitable
place to install the instrument.
1.7.5. Requirements for low frequency stray magnetic fields
Special attention must be paid to transformers, motors, and power supply
lines near the A63.7080 installation environment to ensure that the magnetic
induction in any direction should be less than 1.5 × 10-7T (1.5 milligauss, P--P).
Any magnetic field that exceeds the limit must be corrected. If you can know what

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 8 of 51 [e-mail]
equipment is in your environment (adjacent, upstairs, downstairs, etc.), it is good
for measuring or correcting problems.
1.8. Impact on the environment and energy
The X-ray radiation of A63.7080 meets the standards required by the state
and does not affect the environment and energy
1.9. Security
A63.7080 is safe to use, it complies to Chinese national standards for
instrument safety requirements.

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 9 of 51 [e-mail]
2. System composition and working principle
2.1. Overall structure
A63.7080 interacts with an electron beam with a certain energy to excite a
physical signal. The imaging signal is collected, digitized, and the like by
means of a computer system and an electrical control system to form an
image. The overall structure of A63.7080 mainly includes electronic optical
tube, sample chamber, vacuum system and electrical cabinet control.
Picture 2-1 Electron Optical Tube
2.2. Electron optical tube
The A63.7080 electro-optical lens barrel is capable of generating and
focusing an electron beam, and finally forms a small-diameter beam spot on
the sample. The electron optical lens tube is composed of a Schottky field
emission electron gun, an electromagnetic centering system, a lens barrel
blocking valve, a lens system, a scanning coil assembly, an astigmatism device,
and a signal detecting system, as shown in Picture 2-1. There is an
electromagnetic shielding tube outside the entire optical path, which can
eliminate the interference of the external stray electromagnetic field on the
electron beam.。
Objective Iris
Schottky Field Emission Gun
Electromagnetic Centering System
Signal Detecting System
Scanning Coil Assembly
Astigmatism Device
Electromagnetic Lens System
Lens Barrel Blocking Valve

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 10 of 51 [e-mail]
2.2.1. Schottky field emission electron gun
The Schottky field emission electron gun is a high-brightness electron
source consisting of a very fine single crystal tungsten wire tip and four
electrodes. The four electrodes are the suppression pole, the absorption pole,
the focusing pole and the anode, and the tungsten wire tip acts on the electric
field. A high-brightness cross spot is formed, and the cross spot is imaged under
the focusing of the lens system.
2.2.2. Electron beam electromagnetic alignment system
Mechanical alignment may not guarantee strict alignment of the electron
beam, so the electromagnetic alignment system is used to perform
electromagnetic alignment correction to ensure that the electron beam
coincides with the central axis of the optical path. A63.7080 uses two sets of
electromagnetic centering coils to form an electromagnetic alignment system,
which can be easily adjusted by the control software to make the electron beam
coincide with the optical path axis.
2.2.3. Lens system
The main part of the lens system consists of an objective lens, which is an
asymmetrical lens with a long working distance, a low spherical aberration
coefficient and a small magnetic flux leakage. Under the objective lens, the pole
piece can be disassembled in the sample chamber, and the removal of the pole
piece under the objective lens does not affect the original state of the scanning
coil.
An adjustable objective lens is mounted below the objective lens and is
placed in the main plane of the objective lens by adjustment. The objective lens
mount can be loaded with three diaphragms. The diaphragm diameter is usually
100μm or 200μm (users can also install other diameter diaphragms according
to actual needs). The objective lens X, Y direction adjustment device is installed
in the right front of the sample chamber. With this adjustment device, the
objective lens can be selected according to the user's needs and aligned with
the electron beam. The objective pupil can affect the depth of focus, resolution,
and beam current.
2.2.4. Scanning coil assembly
The scanning coil assembly is mounted in the pole hole of the objective
lens so that the electron beam can be deflected in the X and Y directions on the
surface of the sample.
When observing a high magnification image, the fine areas of interest on
the image are typically moved, which is accomplished by electrical
displacement. The electrical displacement is achieved by the DC level applied
to the scanning coils X, Y for the purpose of movement.
2.2.5. Astigmatism Device
The astigmatism device is mounted in the scanning coil assembly to
quickly and easily correct astigmatism

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 11 of 51 [e-mail]
2.2.6. Signal Detecting System
The signal detection system collects low energy secondary electrons and
high energy backscattered electrons.
When the grid at the front end of the detector is applied with a positive
voltage, low-energy secondary electrons are attracted into the detector, and a
positive voltage of 10KV is applied to the scintillator to accelerate the secondary
electrons. The photon generated by the scintillator enters the window of the low
noise photomultiplier tube, and the photomultiplier tube outputs the video signal.
If the grid is negatively charged, the backscattered electrons enter the
detector.
2.2.7. A63.7080 Accessories
Standard accessories that can be installed in the A63.7080 include X-ray
energy spectrometers, X-ray spectrometers, and cathode fluorescent probes.
The X-ray spectrometer is the most commonly used.
The X-ray energy spectrometer consists of an energy spectrometer
detector and an energy spectrum analysis system, which enables spectral line
acquisition and analysis.
2.3. Sample room and sample stage
The sample chamber is mounted on a shock-proof frame with a vacuum
system mounted below and an electron-optic lens barrel mounted on it. The
sample stage is loaded from the front door of the sample chamber, and the
sample chamber is deflated without affecting the vacuum of other systems. The
sample chamber provides a working space for the sample and also facilitates
attachment installation. The sample chamber accessories include a high
temperature stage, a low temperature stage, a stretching stage, and etc.
2.3.1. Standard sample room
The standard sample has a diameter of Φ156 mm, a sample chamber inlet
diameter of Φ 153 mm, and a sample chamber height of 284 mm. It can be
equipped with various types of sample stages and detectors, such as X-ray
spectrometer, X-ray spectrometer, cathode fluorescent probe, backscattered
electron detector, secondary electron detector and other experimental devices.
2.3.2. Large sample room
The large sample chamber has an approximate size of 10 inches by 10
inches by 13.5 inches and allows observation of large samples. The large
sample chamber can also be equipped with various types of sample stages and
detectors, such as X-ray spectrometers, X-ray spectrometers, cathode
fluorescent probes, backscattered electron detectors, secondary electron
detectors and other experimental devices. The number of interfaces is also
larger than the standard sample chamber.
2.3.3. Standard sample stage
The standard sample stage is used in a standard sample chamber. The

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 12 of 51 [e-mail]
standard sample stage has a similar sample stage operation and the range of
motion is as follows:：
Horizontal X,Y=50mm
Vertical Z=25mm
Inclination T=-5°~ +90°
Rotation R=360°Continous
The sample locking device can be used to lock the sample table and the
sample chamber after the sample stage is inserted to reduce the effects of
vibration.
2.3.4. Large sample stage
The large sample stage allows observation of large volume samples that
can be moved in the X, Y, and Z directions and can be rotated and tilted. The
height (Z) of the sample is adjusted externally to meet the working distance
requirement (the distance from the sample surface to the pole piece under the
objective lens), and the continuous adjustable range is 30 mm.
The large sample stage is tilted from 0° to +90°. At low magnifications, if
the observed area is at the center of the display, the observed area is still within
the field of view when the sample is tilted (there will be small movements). The
positive value of the tilt angle is read directly, and the negative value should be
-100° plus the indicated value to get the true value. For example, if the
indication is 96°, the true value should be -100°+96°=- 4°.
The large sample stage can also be rotated 360° when tilting. The center
of rotation is at the center of the sample holder. The minimum value of the
rotation reading is 0.1°.
The large sample stage has a range of movement of 80 mm and 60 mm
in both X and Y directions. The movement of the large sample stage before and
after is the X direction, which corresponds to the horizontal movement of the
picture tube. The large sample stage moves to the left and right in the Y
direction, and the corresponding picture tube moves up and down. If the tilt is
within the depth of focus, then the magnification is essentially the same and the
entire image is clear.
Large sample tables can generally be placed in a 15mm diameter sample,
and larger samples can also be placed in the sample stage for observation. But
pay special attention to not allowing the sample to touch the pole piece under
the objective lens. When observing a large sample, you can loosen the fixed
sample holder screw and fix the sample directly at the X, Y, and Z orthogonal
points for observation.
The sample locking device can be used to lock the sample table and the
sample chamber after the sample stage is inserted to reduce the effects of
vibration.
2.3.5. Standard sample room accessories
The standard sample chamber can be equipped with a high temperature
stage, a low temperature stage and a stretching stage to observe the state of

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 13 of 51 [e-mail]
the sample under different conditions.
2.4. Vacuum system
The electron optical lens barrel and the sample chamber must be operated
under a certain vacuum state, and the realization and control of the entire
system vacuum is completed by the vacuum system. The vacuum system is
mounted below the sample chamber and is connected directly to the barrel via
a vacuum line.
The vacuum system is shown in Figure 2 2. It mainly includes ion pump,
molecular pump, mechanical pump, connecting pipe, damping device, various
valves, and various measurement regulations. The details are as follows:
1. Ion pump: used for pumping system ultra-high vacuum.
2. Molecular pump: used to pump high vacuum system.
3. Mechanical pump: used for pumping system low vacuum and molecular
pump pre-stage vacuum.
4. Connecting the pipe: for the connection between the vacuum parts.
5. Various valves: for vacuum control, for example: V1 can separate the
electron gun from the sample chamber. When the sample chamber is
deflated, the electron gun can maintain the vacuum state; V2 is used to
pump the sample chamber and the electron gun is low vacuum; when the
sample chamber When the electron gun reaches the molecular pump start-
up requirement, the molecular pump starts to make the system obtain a
high vacuum; when the sample chamber and the electron gun reach the ion
pump start-up requirement, the ion pump starts, so that the system obtains
an ultra-high vacuum.
6. Vacuum measurement regulation: vacuum measurement in real time,
vacuum control with valve.
7. Air compressor: The air compressor supplies power to each pneumatic
valve.

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 14 of 51 [e-mail]
Figure 2-2 Vacuum System
The vacuum control part is installed on the front and rear panels of the
main frame, and can be fully controlled from low vacuum to high vacuum. The
vacuum system is controlled by a thermocouple tube and logic circuit to achieve
real-time measurement of vacuum.
The vacuum system is easy to operate. The operator only needs to press
the work button, and the system will automatically reach the high vacuum state
required for the work from the initial state; the system can be operated manually
during maintenance.
2.5. Electrical cabinet control
The electrical cabinet control consists of an electrical cabinet and a
computer system to control various functions of the A63.7080, as well as to
observe sample images, take photographs, etc.
2.5.1. Electrical cabinet
The electrical cabinet includes a circuit board, a power supply, etc. for
implementing various functions of the A63.7080, and is controlled by a
computer operation interface. The electrical cabinet of A63.7080 includes three
Field Emission Gun
Transition Chamber
Condenser
Valve 1
Objective
Sample Chamber
Vacuum Meter
Vibration Reduction
Molecular Pump
Ion Pump 1
Ion Pump 2
Electron Optical Tube
Vacuum Meter
Mechanical
Pump
Valve 3

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 15 of 51 [e-mail]
parts: SEM control electric system, vacuum power supply and field emission
gun power supply.
The power switch of the SEM control electrical system, the power switch
of the vacuum system and the power switch of the field emission gun are
relatively independent and are controlled by respective power button switches.
However, there is a main switch in the middle of the electrical cabinet. This
switch can cut off the three parts of the SEM control electric appliance, the
vacuum power supply and the field emission gun power supply at the same
time.
Picture 2-3 Power Switch
2.5.2. Computer System
The computer operating system is Windows 7 operating system. At
present, the peripherals are unified USB2.0 standard communication interface
and support hot swap.
The interface of the electronic mirror operation control software is simple,
friendly and intuitive. It is easy for users to master and easy to communicate
between users. Optimized software design, super fault tolerance, less system
resources, and more stable and reliable operation.
The electronic mirror operation control software is on the same screen
display, and the image display and scanning control are combined to facilitate
the user's operation; the software window can be zoomed to fully meet the
needs of the user's observation; the oscilloscope function can display the
waveform map or the gray histogram in real time; Editing function, support
multiple languages including traditional Chinese, simplified Chinese, more
powerful.
The EM operation control software also provides a variety of automatic
control functions: auto focus, automatic astigmatism, and automatic
brightness/contrast functions. After adopting the new algorithm, accuracy,
adaptability, reliability, etc. are greatly improved. If the noise ratio is very poor,
it still works.
The electronic mirror operation control software generates image scale

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 16 of 51 [e-mail]
and image format selectable settings; supports a variety of common image
formats, and conversion between different image formats; the software
integrates some common image processing functions, which is more
convenient to use.
The computer operating system can be installed with electronic mirror
image processing software, which is a more powerful independent image
processing software; supports a variety of common image formats and
conversion between different image formats; on the basis of general image
processing functions, added some New features; enhanced a range of image
processing features related to particle size analysis.

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 17 of 51 [e-mail]
3. Use and operation of electron microscope software
3.1. Familiar with the basic use of Windows 7
The A63.7080 operating software is installed on the Windows 7 operating
system and complies with all applications of the Windows 7 operating system.
Therefore, if you are familiar with the use of the Windows 7 operating system,
you will be better able to use the A63.7080 operating software.
The Windows 7 operating system has many features and tools that make
the use of the computer easier and more efficient. For details, please see the
information in the Help section of the Windows 7 operating system.
3.2. Software Control Panel
The EMI control software desktop table is shown in Figure 3 1. Double-
click the figure to open the software control interface, as shown in Figure 3 2.
The SEM control software includes various functions of operating the electron
microscope, obtaining the figure image and the figure image analysis. The
control interface mainly includes a menu bar, a toolbar, a figure image display
area, and a scan control window.
Figure 3-1 Software Icon
Menu
Tool
Image
Scan
Control
Window
s
Figure 3-2 Software Control Panel

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 18 of 51 [e-mail]
3.2.1. Software Scan Control Window
Figure 3-3、3-4 show main function & meaning of software
Figure 3-3 Scan Control Window
Menu bar
Key bar
Function field
Main field
Status field

OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 19 of 51 [e-mail]
Figure 3-4 Scan Control Function
Note Mouse operation: After clicking the active block on the toolbar, drag
the mouse to fine tune the corresponding parameters; After double-clicking the
active block on the toolbar, drag the mouse to thicken the corresponding
parameters; The right mouse button determines the current parameter value.