Parker ET Series Datasheet

Rotary Actuators and
Effective: January 1, 1998
BulletinPM-ET01/USA
Maintenance
Instructions &
Parts List
ET Series
Stepper and Servo
Driven Linear
Actuators
Automation

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
2
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
© Copyright 1997, Parker Hannifin Corporation, All Rights Reserved
The items described in this document are hereby offered for sale by Parker Hannifin Corporation, its subsidiaries or its authorized
distributors. This offer and its acceptance are governed by the provisions stated on the separate page of this document entitled "Offer of
Sale".
Offer of Sale
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN OR
RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries and authorized distributors provide product and/or
system options for further investigation by users having technical expertise. It is important that you analyze all aspects of your application
and review the information concerning the product or system in the current product catalog. Due to the variety of operating conditions and
applications for these products or systems, the user, through its own analysis and testing, is solely responsible for making the final selection
of the products and systems and assuring that all performance, safety and warning requirements of the application are met.
The products described herein, including without limitation, product features, specifications, designs, availability and pricing, are subject to
change by Parker Hannifin Corporation and its subsidiaries at any time without notice.
WARNING
Who'sWho
ER Series Rodless Actuators
Voice(330)336-3511-Fax[phone]
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Order Entry & Expediting
TechnicalInformation
Applications, Spare Parts
Programming

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
3
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Table of Contents
Description Page No.
ProductInformation............................................................................................... 4
Features ...............................................................................................................5
OrderingInformation.......................................................................................... 6, 7
ExplodedView ...................................................................................................... 8
Parts List .......................................................................................................9 - 13
Maintenance/TorqueTable,Cleaning ..................................................................14
Maintenance/AdjustingTimingBeltTension........................................................ 15
Lubricants,MotorCouplerandPulleySpacing .................................................... 16
AssemblyInformation ......................................................................................... 17
Pinouts - Servo Systems ............................................................................. 18- 21
Pinouts - Stepper Systems .......................................................................... 21- 23
StepperMotorOptions .................................................................................. 24,25
Hall Effect Sensors.............................................................................................26
ReedSwitchSensors.......................................................................................... 27
Reed Switch Specifications................................................................................. 28
QuickConnectandBrakeOption........................................................................ 29

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
4
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
This publication provides maintenance instructions, replacement parts information, options information, and system connec-
tion tables for the ET Series.
The ET Series Linear Actuator offers robust, modular design and easy integration in a packaged electric cylinder. Available
in four ISO mounting profile sizes, the ET Series can produce thrusts to 5300 lb and linear speeds to 60 inches per second.
Combined with a Parker Hannifin stepper or servo system, the ET Series becomes a fully programmable linear actuator
system.
ET Series Features
• Produced to hard metric ISO standards
• Four ISO mount sizes: 32mm, 50mm, 80mm, 100mm
• Angular contact thrust bearings at rear of screw
• Long length rod bearing
• Extruded, anodized aluminum body with integral switch/sensor grooves
• Unique anti-rotate nut bearing carriage
• Polyurethane bumper at ends of travel
• Low-friction ball bearing nut and quality rolled ball screw option
• Low-friction burnished lead screw with bronze nut option
• Ground and polished stainless steel rod
• Integral sensing magnet
• High quality flexible couplings
• High performance stepper and servo motors
Motor Systems
• Microstepping systems
• DC Brushless servo systems with encoder or resolver feedback
• User provided AC or DC motor systems
Control Systems
• Microprocessor-based programmable single and multi-axis stepper and servo controllers
• User-friendly 6000 and X languages from Compumotor
ET Series Stepper and Servo Driven Linear Actuators
Maintenance Instruction & Parts List Electric Cylinder features:
Product Information

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
5
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Features
Main Components Diagram
The figure below represents the main components of an ET Series Linear Actuator. Reverse parallel mounting shown for
convenience.
* Parallel cylinders only
Reverse-parallelcylinder
Frontendcap
Parallel timing belt housing *
Anti-rotate hearing carriage

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
6
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Brushless
Servo
Motor
Options3
(ETB
Series)
ETS
NEMA 23, Flange & Coupling/Pulley only B48-49 2 0
NEMA 34, Flange & Coupling/Pulley only B48-49 3 0
SM233BE-LTQN, Size 32 & 50 B48-49 2 2
SM233BR-LMSN, Size 32 & 50 B48-49 2 3
APEX 60X Flange & Coupling/Pulley only, Size 50 & 80 B50-51 6 0
APEX 605 Motor, Size 50 & 80 B50-51 6 1
APEX 606 Motor, Size 50 (inline only) & 80 B50-51 6 2
APEX 610 Motor, Size 80 B50-51 6 3
APEX 620 Flange & Coupling/Pulley only, Size 100 B50-51 7 0
APEX 620, Size 80 (inline H.T. only) & 100 B50-51 7 1
APEX 640, Flange & Coupling/Pulley only, Size 100 B50-51 8 0
APEX 640, Size 100 B50-51 8 1
Special, Flange & Coupling/Pulley only* - 9 0
P
Feature
Series
Model/Size
Drive
Screw Type
Motor
Mounting
Style
Drive Ratio
Stepper
Motor Nom-
inal Mounting
Size
Stepper
Motor Style
A 1 2 B05 50
Description Catalog Symbol
Page
Electro-Thrust Stepper Series C1 ETS
Electro-Thrust Brushless Servo Series B1 ETB
32 mm - 32
50 mm - 50
80 mm - 80
100 mm - 100
Ball Screw, 1.875 in (47.6 mm) lead, Size 100 See Curves B53
Ball Screw, 1.000 in (25.4 mm) lead, Size 50 & 80 See Curves B01
Ball Screw, .500 in (12.70 mm) lead, Size 32, 50, 80, 100 See Curves B02
Ball Screw, .250 in (6.35 mm) lead, Size 80, 100 See Curves B04
Ball Screw, .200 in (5.08 mm) lead, Size 50 See Curves B05
Ball Screw, .125 in (3.18 mm) lead, Size 32 See Curves B08
Acme Screw, .250 in (6.35 mm) lead, Size 32, 80, 100 See Curves A04
Acme Screw, .200 in (5.08 mm) lead, Size 50 See Curves A05
Acme Screw, .125 in (3.18 mm) lead, Size 32 See Curves A08
Inline, Direct Drive, Motor on End D2 L
Parallel Version, Timing Belt, Motor Position (1) D2 P1
Parallel, Timing Belt, Motor Position (2) D2 M
Parallel, Timing Belt, Motor Position (3) D2 N
Parallel, Timing Belt, Motor Position (4) D2 Q
Reverse Parallel, Timing Belt, Motor Position (1) D2 R
Reverse Parallel, Timing Belt, Motor Position (2) D2 S
Reverse Parallel, Timing Belt, Motor Position (3) D2 T
Reverse Parallel, Timing Belt, Motor Position (4) D2 V
Inline Direct or Parallel, Ratio 1:1 See Curves A
Parallel, Ratio 1.5:1 See Curves B2
Parallel, Ratio 2:1 See Curves D2
Parallel, Ratio 1:1.5, Available on ET32 only See Curves Z
NEMA 23, Size 32 and 50 C62-63 2
NEMA 34, Size 50 and 80 C62-63 3
NEMA 42, Size 80 only C62-63 4
Special - 9
No Motor, Flange and Coupling only - 0
Std. Motor, Cable Grommet, w/o Damper C55 1
Std. Motor, Conduit Connection, w/o Damper C56 2
Std. Motor, Brad Harrison Connector, w/o Damper C57 3
Std. Motor, Cable Grommet, w/ Damper C58 4
Std.Motor, Conduit Connection, w/ Damper C58 5
Std. Motor, Brad Harrison Connector, w/ Damper C58 6
Special Motor* - 9
ETS
ETB
ETS
ETB
MODELCODEAND ORDERING INFORMATION
Example: ETS50-B05PA21-FMAE600L-A
1 Will obstruct standard (12 o'clock) switch
groove orientation.
² Not available on ET32 or ET100. Not
available with larger frame size motor on
ET50 and ET80. See chart on facing page.
³APEX motors purchased through AAD
includes 7.5m (25 ft.) motor and resolver
cable. SM233BE-LTQN option includes
23TQ Cable-10. SM233BR-LMSN option
includes 23RS Cable-10.
* Special motore/reducers must be mounted
at factory.
Ordering Information

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
7
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Ordering Information
F
M
E
A 600 L
A
A - Assigned by Factory
Omit - No linear Potentiometer
L - Linear Potentiometer
50 - ET32, ET50, (1.97)
100 - ET32, ET50, ET80, ET100 (3.94 in)
150 - ET32, ET50,ET80, ET100 (5.91 in)
200 - ET32, ET50, ET80, ET100 (7.87 in)
300 - ET32, ET50, ET80, ET100 (11.81in)
450 - ET32, ET50, ET80, ET100 (17.72 in)
600 - ET32, ET50, ET80, ET100 (26.62 in)
750 - ET32, ET50, ET80, ET100 (29.53 in)
1000 - ET50, ET80, ET100 (39.37 in)
1250 - ET80, ET100 (49.21 in)
1500 - ET80, ET100 (59.05 in)
Omit - No Brake
E E4 115 VAC w/ Fling leads and cable gland on lead screw
F E4 24 VDC w/ Flying leads and cable gland on lead screw
G E4 115 VAC w/ Brad Harrison conn. & 4m cable
H E4 24 VDC w/ Brad Harrison conn. & 4m cable
V - 115 VAC w/ Flying leads and cable gland on stepper
W - 124 VDC w/ Flying leads and cable gland on stepper
Y - 115 VAC w/ Brad Harrison conn. & 4m cable on stepper
Z - 24 VDC w/ Brad Harrison conn. & 4m cable on stepper
Omit - Standard (12 o’clock)
A - 3 o’clock
B - 6 o’clock
C - 9 o’clock
M D12 Male (Metric Standard)
F D12 Female
K D12 Male - Imperial
C D13 Clevis
S D13 Spherical Rod Eye
R5D15-20 Linear Rod Guide Module
X - Special
B4D3 Foot Mount (MS1)
C4D10 Rear Clevis (MP2-R)
D D4-5 Trunnion (MT4)
E4D9 Rear Eye (MP4)
F B48-49 Bottom Tap (MS4) (Standard)
G D8 Foot Side Lug
H4D7 Rear Flange (MF2)
J D6 Front Flange (MF1)
N4D7 Front & Rear Flange (MF1 & MF2)
X - Special
Symbol Catalog Description
Page Design Series
Linear
Potentiometer
Stroke Length
(in mm)
Brake Option 7
Body
Orientation6
Rod End
Cylinder
Mounting
4 Not available with Inline (L)
Motor Mounting.
5 Linear rod guide module may interfere with some switch groove orientations (Body Orientation A and C) on ET32, ET50 & ET80.
Not compatible with G, J, or N mounting options.
6 Switch Groove Orientation as viewed from Cylinder Shaft End. May decrease side load capacity. ET100 has switch grooves on all four sides.
7 Not available on ET32 or NEMA 23 motors. Options (E,F,G & H) not compatible with rear mounting options (B,C,E,H & N).
Options (V,W,Y & Z) not compatible damper or encoder.
Feature
Available Drive Ratio Combinations (Parallel only) (ET100 1:1 only)
Size S57-102 S83-135 S106-178 SM233B APEX605 APEX606 APEX610
32 1:1, 1:1.5 - - 1:1, 1:1.5 - - -
50 1:1, 1.5:1, 2:1 1:1, 1.5:1 - 1:1, 1.5:1 1:1 - -
80 - 1:1, 1.5:1, 2:1 1:1, 1.5:1 - 1:1, 1.5:1 1:1, 1.5:1 1:1, 1.5:1

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
8
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Exploded View
Parts list and exploded view
Order parts through the Automation Actuator Division in Wadsworth, Ohio, or through your local Parker Automation Technology
Center (distributor).
10
(Page 10)
(Page 9)
(Pages11,12)
1Parts listed on page 13.
6
25
7
1
1
1
111
32

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
9
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Parts List
Actuator Common Parts List
Part No.
Item Description Qty. ET 32 ET50 ET 80 ET 100
1 Head 1 ET32E01 ET50E01 ET80E01 ET100E01
2 Rod Bearin
g
1 RA340 RA335 RA341 RA365
3 Bumper 2 ET32M01 ET50M01 ET80M01 ET100M01
4 Washer 1 ET32M03 ET50M03 ET80M03 ET100M03
5 Snap Ring 2 BNVH-112 BNVH-162 BNVH-275 BNVH-337
6 Rod Seal 1 RS422 RS423 RS424 RS453
7 End Cap-Standard 1 ET32E02 ET50E02 ET80E02 ET100E02
7T End Cap-Trunnion Mount 1 ET32E02T ET50E02T ET80E03 ET100E02T
8 Screw Support Bearing 2 RA373 RA336 RA342 RA362
9 Washer 1 ET32M02 ET50M02 ET80M02 ET100M06
10 Drive Screw 1 TS*****N****** TS*****N****** TS*****N****** TS*****N******
11 Bearin
g
Locknut 1 ET32R07 B8777 B8776 B8866
12 Cap Screw 1 CS-CM3X0.5-008
13 Sleeve 1 ET32R08 NA NA NA
14 Screw End Bearing 1 ET32R06 ET50R06 ET80R06 ET100R06
15 Washer 1 ET32R09 ET50R09 ET80R09 ET100R09
16 Elastic Locknut 1 B3118 B3117 B3119 B3121
17 Nut Retainer 1 ET32R03 ET50R03 ET80R03 ET100R03
18 Roller Cover 3 ET32R10-0813 ET50R10-1000 ET80R10-1500 ET100R10-2000
19 Bearin
g
3 RA328 RA338 RA330 RA331
20 Snap Ring 3 BNVH-62 BNVH-75 BNVH-112 BNVH-137
21 Bearin
g
Retainer 3 ET32R04 ET32R04 ET80R04 ET100R04
22 Flat Head Cap Screw 3 CFT-CM3X0.5-008 CFT-CM3X0.5-008 CF-CM6X1.0-016 CF-CM6X1.0-016
23 Ma
g
net 1 ET32M10 ET50M10 ET50M10 ET100M10
24 Brass Tip Set SCrew 1 SB-CM4X0.7-006 SB-CM6X1-008 SB-CM8X1.25-008 SB-CM8X1.25-008
25 C
y
linder Rod 1 ET32R01-**** ET50R01-**** ET80R01-**** ET100R01-****
26M Cylinder Rod End - M 1 ET32R05 ET50R05 ET80R05 ET100R05
26F C
y
linder Rod End - F 1 ET32R12 ET50R12 ET80R12 ET100R14
26K Cylinder Rod End - K 1 ET32R13 ET50R15 ET80R13 ET100R15
27M Jam Nut - M 1 509-2 509-4 509-5 509-17
27K Jam Nut - K 1 NHJ-C04420-Z NHJ-C06318-Z NHJ-C07516-Z NHJ-C10014
28 Gasket 2 ET32M04 ET50M04 ET80M04 ET100M04
29 Cylinder Body 1 ET32C**** ET50C**** ET80C**** ET100C****
30 Cap Screw
(
in line onl
y)
4 CS-CM6X1.0-035 CS-CM8X1.25-040 CS-CM10X1.5-055 CS-CM10X1.5-080
31 Tie Rod Bolt 4 SC-CM6X1.0-020 SC-CM8X1.25-030 B8805-M10-30 B8805-M10-45
32 Tie Rod Nut 8 32-27015 50-27015 80-27015 80-27015
33L Key-Inline 1 B8534M2-06 B8534M2-08 B8534M5-14 B8534M8-20
33P Ke
y
-Parallel 1 B8534M2-20 B8534M3-20 B8534M5-32 B8534M8-40
33B Key-Brake 1 B8534M2-14 B8534M5-32 B8534M8-40
34 Coupler End Fittin
g
1
35 Coupler Sleeve 1 SEE PAGE 13
36 Coupler End Fittin
g
1
37 Gasket 2 ET32M05 ET50M05 ET80M05 ET100M05
45 Pulle
y
- No Flan
g
e1
46 Pulley - Double Flange 1 SEE PAGE 13
47 Timin
g
Belt 1
57 Acme Screw Adapter 1 ET32R11 NA ET80R11 ET100R13
58 Acme Nut 1 TNA06*** TNA10*** TNA16*** TNA24***

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
10
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET SeriesParts List
Motor Mounting Parts List for Parallel Units
Part No. ET 32 Series ET 50 Series ET 80 Series ET 100 Series
37 ET32M05 ET50M05 ET80M05 ET100M05
44 ET32E06 ET50E06 ET80E06 ET100E06
C 48 ET32E07 ET50E07 ET80E07 ET100E07
O 49 B8805-M6-50 B8805-M8-60 B8805-M10-90 B8805-M10-140
M 50 ET32E10 ET50E10 ET80E10 ET100E10
M 51 ET32M08 ET50M08 ET80M08 ET100M08
O 52 CB-CM3X0.5-008-Z CB-CM4X0.7-012-Z ESF4005-12 ESF4005-12
N 54 ET32M09 ET50M09 ET80M09 ET100M09
55 CB-CM4X0.7-010 CB-CM5X0.8-010 CB-CM6X1.0-012 CB-CM8X1.25-020
63 B2128-M4 B2128-M5 B2128-M6 B2128-M8
53 ET32E08 ET50E08 NA NA
S57-102 59 CS-CM5X0.8-012-Z CS-CM5X0.8-012-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
53 NA ET50E09 NA NA
S83-135 59 CS-CM5X0.8-012-Z
60 ET80M13
61 WS-SLR-CM05-Z
53 NA NA ET80E09 ET100E15
S106-178 59 CS-CM6X1.0-016-Z CS-CM6X1.0-025-Z
60 ET80M12 ET80M12
61 WS-SLR-CM06-Z WS-SLR-CM06-Z
53 ET32E08 ET50E08 NA NA
SM233 59 CS-CM5X0.8-016-Z CS-CM5X0.8-012-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
53 ET32E08 ET50E08 NA NA
ML-2340B 59 CS-CM5X0.8-012-Z CS-CM5X0.8-012-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
53 NA ET50E09 ET80E08
ML-3450B 59 CS-CM5X0.8-016-Z CS-CM5X0.8-016-Z
60 ET80M13 ET80M13
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
APEX605 53 NA ET50E17 ET80E16 NA
APEX606 59 CS-CM6X1.0-025-Z CS-CM6X1.0-020-Z
APEX610 60 ET50M11 ET50M11
61 WS-SLR-CM06-Z WS-SLR-CM06-Z
53 NA NA NA ET100E08
APEX620 59 CS-CM8X1.25-030-Z
60 ET100M12
61 ESF1108
53 NA NA NA ET100E09
APEX640 59 CS-CM10X1.5-040-Z
60 ET100M13
61 ESF1110

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
11
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Part No. ET 32 Series ET 50 Series ET 80 Series ET 100 Series
38 ET32E04 ET50E04
39 CS-CM3X0.5-035 CS-CM5X0.8-050
40 ET32M05 NA
41 ET32E05 NA
S57-102 42 CFT-CM3X0.5-012 NA
59 CS-CM5X0.8-012-Z CS-CM5X0.8-016-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
62 NA NA
38 ET50E04 ET80E04
39 CS-CM5X0.8-050 CS-CM6X1.0-080
40 ET50M06 NA
41 ET50E05 NA
S83-135 42 CS-CM5X0.8-016 NA
59 CS-CM5X0.8-016-Z CS-CM5X0.8-016-Z
60 ET80M13 ET80M13
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
62 NA NA
38 ET80E04
39 CS-CM6X1.0-080
40 ET80M05
41 ET80E05
S106-178 42 CF-CM5X0.8-020
59 CS-CM6X1.0-020-Z
60 ET80M12
61 WS-SLR-CM06-Z
62 B8544-404
38 ET32E04 ET50E15
39 CS-CM3X0.5-035 CS-CM5X0.8-050
40
41 ET32E09
SM233 42 CS-CM3X0.5-025
59 CS-CM5X0.8-018-Z CS-CM5X0.8-016-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
62
38 ET32E04 ET50E15
39 CS-CM3X0.5-035 CS-CM5X0.8-050
40
41 ET32E09
ML-2340B 42 CS-CM3X0.5-025
59 CS-CM5X0.8-018-Z CS-CM5X0.8-016-Z
60 ET50M06 ET50M06
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
62 B8534008-.75 B8534008-.75
Motor Mounting Parts List for Inline Units
Parts List

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
12
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Parts List
Motor Mounting Parts for Inline Units
Part No. ET 32 Series ET 50 Series ET 80 Series ET 100 Series
38 ET50E04 ET80E26
39 CS-CM5X0.8-050 CS-CM6X1.0-080
40 ET50M06
41 ET50E05
ML-3450B 42 CS-CM5X0.8-016
59 CS-CM5X0.8-020-Z CS-CM5X0.8-020-Z
60 ET80M13 ET80M13
61 WS-SLR-CM05-Z WS-SLR-CM05-Z
62 B8534008-.75 B8534008-.75
38 ET50E04 ET80E14
39 CS-CM5X0.8-050 CS-CM6X1.0-080
40 ET50M05
APEX605 41 ET50E11
APEX606 42 CF-CM5X0.8-016
APEX610 59 CS-CM6X1.0-025-Z CS-CM6X1.0-025-Z
60 ET50M11 ET50M11
61 WS-SLR-CM06-Z WS-SLR-CM06-Z
62 B8534M5-20 B8534M5-20
38 ET100E04
39 CS-CM8X1.25-110
40
41
APEX620 42
59 CS-CM8X1.25-035-Z
60 ET100M12
61 ESF1108
62 B8534M8-35
38 ET100E05
39 CS-CM8X1.25-090
40 ET100M05
41 ET100E13
APEX640 42 CS-CM8X1.25-025
59 CS-CM10X1.5-040-Z
60 ET100M13
61 ESF1110
62 B8534M8-35

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
13
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Parts List
Parallel Series Timing Belts & Pulleys
Part No.
45 46 47
Model Motor Driven Pulley DrivePulley Belt
ETS32-***PA2 S57-102M0 B8789-20 B8793F-20 B8801-15-56
ETS32-***PZ2 S57-102M0 B8789-16 B8793F-24 B8801-15-56
ETB32-***PA2 ML2340B-10 B8789-20 B8793-2038 B8801-15-56
ETB32-***PZ2 ML2340B-10 B8789-16 B8793-2438 B8801-15-56
ETS50-***PA2 S57-102M0 B8790-28 B8793F-28 B8801-15-78
ETS50-***PB2 S57-102M0 B8790-33 B8793F-22 B8801-15-78
ETS50-***PD2 S57-102M0 B8790-36 B8793F-18 B8801-15-78
ETS50-***PA3 S83-135M0 B8791-18 B8794F-18 B8802-15-51
ETS50-***PB3 S83-135M0 B8791-21 B8794F-14 B8802-15-51
ETB50-***PA2 ML2340B-10 B8790-28 B8793-2838 B8801-15-78
ETB50-***P82 ML2340B-10 B8790-33 B8793-2238 B8801-15-78
ETB50-***PA3 ML3450B-10 B8791-18 B8794-1850 B8802-15-51
ETB50-***PA6 APEX605-M0 B8791-18 B8794-1855 B8802-15-51
ETS80-***PA3 S83-135M0 B8792-28 B8794F-28 B8802-15-66
ETS80-***PB3 S83-135M0 B8792-33 B8794F-22 B8802-15-66
ETS80-***PD3 S83-135M0 B8792-36 B8794F-18 B8802-15-66
ETS80-***PA4 S106-178M0 B8792-28 B8795F-28 B8802-25-70
ETS80-***PB4 S106-178M0 B8792-33 B8795F-22 B8802-25-70
ETB80-***PA3 ML3450B-10 B8792-28 B8795-2850 B8802-25-66
ETB80-***PB3 ML3450B-10 B8792-33 B8795-2250 B8802-25-66
ETB80-***PD3 ML3450B-10 B8792-36 B8795-1850 B8802-25-66
ETB80-***PA6 APEX605, 606 & 610 B8792-28 B8795-2855 B8802-25-66
ETB80-***PB6 APEX605, 606 & 610 B8792-33 B8795-2255 B8802-25-66
ETB100-***PA** APEX620 & 640 B8869-25 B8870-25 B8868-36-60
Inline Series Couplers
Part No.
34 35 36
Model Motor Screw Couple Sleeve/Spider Motor Coupler
ETS32-***LA2* S57-102M0 GCM100602 GC12-SU GC102500
ETB32-***LA2* ML2340B-10 RG5M090602 RGS0998 RG5093813
ETS50-***LA2* S57-102M0 GCM180802 GC19-SU GC182500
ETS50-***LA3* S83-135M0 GCM180802 GC19-SU GC183800
ETB50-***LA2* ML2340B-10 RG5M140802 RGS1 498 RGS143813
ETB50-***LA3* ML3450B-10 RG5M140802 RG51498 RGS145013
ETB50-***LA6* APEX605, 606 RG5M140802 RG S1498 RGSM14140
ETS80-***LA3* S83-135M0 GCM401405 GC42-SU GC403800
ETS80-***LA4* S106-178M0 GCM401405 GC42-SU GC406313
ETB80***LA3* ML3450 B-10 1RG5M1914051 RG51998 RG5195013
ETB80-***LA6* APEX605, 606 & 610 RG5M191405 RGS1998 RGSM191405
ETB100-***LA** APEX620&640 RG5M242008 RG52498 RG5M242408

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
14
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
The following maintenance information is contained in this section:
Torque table - Provides torque specification for all items requiring specific torque values. When assembling parts, make sure
to use the recommended torque value listed in this table. If a torque value is not listed, use industry standard torque for the
fastener/metal combinations. (page 14)
Cleaning - Provides external cleaning information. (page 14)
Adjusting timing belt tension - Provides a procedure for timing belt adjustment. (page 15)
Lubrication - Provides lubrication information. (page 16)
Motor coupler and pulley spacing - Provides motor coupler (for inline motors) and pulley (for parallel motors) installation
information. (page 16)
Assembly information - Provides information necessary for replacement of specific components requiring adhesives during
the assembly process. (page 17)
*This part number is the number used in the parts listing as well as any maintenance tasks contained in this manual.
Cleaning Information
Clean cylinder body, front end cap, etc., using a clean cloth. Use only a mild, non-corrosive cleaning agent. Remove any
sludge, deposits, or other foreign substances from the surface of the cylinder.
NOTE: Do not use high-pressure wash down or steam-lance type cleaning systems.
Maintenance/Torque Table, Cleaning
Torque Specifications
Torque Specifications (Max.)
Part ET 32 Series ET 50 Series ET 80 Series ET 100 Series
Description Numbers * Size in-lb ft-lbs Size in-lb ft-lbs Size in-lb ft-lbs Size in-lb ft-lbs
Rod Assembly 17,25,26 - 530 44 - 1325 110 - 2650 221 - 4200 165
Roller Retainer FHSCS 22 M3 11 1 M3 11 1 M6 85 7 M6 85 7
Elastic Locknut 16 M5 50 4 M6 85 7 M8 210 18 M12 725 60
Bearing Ret. Locking SHCS 12 M3 11 1 M3 11 1 M5 50 4 M5 50 4
Cylinder Tie Bolts 30 & 32 M6 85 7 M8 210 18 M10 415 35 M10 415 35
Coupler End SHSS (Servo) 34,36 M2,5 11 1 M3 11 1 M4 41 3 M6 85 7
Coupler End SHSS (Stepper) 34,36 M4 41 3 M6 85 7 M6 85 7 - - -
Motor Adapter SHCS 39 M3 11 1 M5 50 4 M6 85 7 M8 210 18
Motor Adapter FHSCS/SHCS 42 M3 11 1 M5 50 4 M5 50 4 M8 210 18
Motor Mounting Bolts 59 M5 50 4 M5 50 4 M5 50 4
M6 85 7 M6 85 7
Parallel Flange BHSCS 55 M4 41 3 M5 50 4 M6 85 7 M8 210 18
Parallel Cover BHSCS 52 M3 11 1 M4 41 3 M5 50 4 M5 50 4
DrivePulley SHSS/SHCS 56 M2,5 11 1 M2,5 11 1 M3 11 1 M6 85 7
M3 11 1 M4 41 3

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
15
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
53
AdjustingTiming BeltTension
Procedure
1. Remove four button head cap screws (52).
2. Remove cover (50) and gasket (51) from end cap (44).
3. Loosen four button head cap screws (55). Loosen just enough to allow motor to move freely.
4. Adjust belt (47) tension. Refer to Belt tension table for deflection values. A belt with correct tension should deflect the listed
value with proper finger pressure at the mid-span of the belt.
• Using belt tension tool
Attach belt tension tool assembly to mounting plate (53).Turn adjustment screw as required to properly
tension the timing belt. (Tensioning procedure supplied with tool.)
• By hand
a. Maintaining proper force on the belt at the middle of the belt span (see chart), tighten button head cap screws (55).
b. Check for proper belt deflection.
5. Visually inspect for proper seating of belt teeth in pulley grooves.
6. Torque the four button head cap screws (55). (Refer to the torque values chart located earlier in this section.)
7. Place gasket (51) and cover (50) on end cap (44), securing with four button head cap screws (52).
8. Torque the four button head cap screws (52) as required. (Refer to the torque values chart located earlier in this section.)
Maintenance/AdjustingTiming BeltTension
(availablefrom the Division)
Dimension "A"
Cylinder Deflection Force (lb)
Model Value
32 0.034" .4 - .7
50 0.048" .9 - 1.75
80 0.061" .9 - 1.75
Stepper (except S106)
80 0.061" 1.6 - 2.8
Servo & S106
100 0.086" 12 - 13
(At mid-span of belt)

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
16
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Approved lubricants:
• MagnaLube (part number 1331815-000-01), 1.5 oz tube
• Thompson Linear Lube 14.5 oz tube
1. Determine type of motor (inline or parallel).
2. Referring to the appropriate illustration and specification table, assemble coupler to motor shaft using Loctite
609. Make sure to measure the “A” dimension from the mounting face of the motor. Do not measure off of the
pilot. Tighten set screw (if applicable).
3. Make sure to torque motor mounting hardware as necessary (if applicable). Refer to page 14 for torque
values.
NOTE: Use precautions contained with Loctite or any other adhesive used in assembly.
Lubrication
Motor coupler and pulley spacing
NOTE: Use appropriate personal protection equipment when using lubricants (refer to applicable MSDS). Unit is lubricated
from the factory for the design life of the cylinder.
Lubricants, Motor Coupler and Pulley Spacing
Pulley Spacing
Motor ET32 ET50 ET80 ET100
S57-102 0.176 0.193 — —
S83-135 — 0.190 0.255 —
S106-178 — — 0.193 —
SM16 0.364 — — —
SM23 0.176 0.193 — —
ML-2340B 0.176 0.193 — —
ML-3450B — 0.190 0.193 —
APEX605 — 0.410 0.311 —
APEX606 — — 0.311 —
APEX610 — — 0.311 —
APEX620 — — — 0.395
APEX640 — — — 0.513
Parallel Motors dimension“A”
Inline Servo Motors dimension“A”
Model Motor Dimension
ETB32 SM16 0.984
ETB32 SM233 0.450
ETB32 ML-2340B5 0.876
ETB50 SM-233 0.773
ETB50 ML-2340B5 0.773
ETB50 ML-3450B 0.852
ETB50 APEX605 & 606 0.749
ETB80 ML-3450B 0.356
ETB80 APEX605, 606, & 610 0.218
ETB80 APEX620 0.995
ETB100 APEX620 0.807
ETB100 APEX640 0.857
PARALLEL STEPPER MOTOR
Inline Stepper Motors dimension“A”
Model Motor Dimension
ETS32 S57-102 0.331
ETS50 S57-102 0.102
ETS50 S83-135 0.693
ETS80 S83-135 0.134
ETS80 S106-178 0.528
Coupler Spacing

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
17
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
Assembly Information
NOTE: Use appropriate personal protection equipment when using adhesives (refer to applicable MSDS).
Part Description Lubricant/Adhesive
Cylinder rod-end - Female Loctite 271
Flat Head Cap Screw Loctite 242
Set screw Loctite 242
Cylinder rod-end - Male Loctite 271
Tie rod bolt and tie rod nut Loctite 271
Apply between the tie rod
bolt and nut only.
Screw support bearing Grease
If not sealed
The following parts, when assembled, require the use of industrial lubricants or adhesives as indicated.

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
18
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Servo System Connector Information
BLH and BLHX Connections
User I/O (15-Pin D socket)
Pin No. Signal
1 VEL 2
2 VEL 1
3 - 15V
4 Logic ground
5 Reset
6 + 15V
7 Tachometer out
8 Reserved
9 Fault
10 CHA+
11 CHA -
12 CHB +
13 CHB -
14 CHZ +
15 CHZ -
Motor connector (5-Pin screw terminal)
Pin No. Signal
1B1
2B2
3 Ground
4A1
5A2
AC Supply Connector (3-Way screw terminal)
PinNo. Signal
1 AC in
2 AC in
3 Ground
Positioner I/O (23-Pinscrew terminal) (BLHX only)
Pin No. Signal
1Vs
2 Limit (+)
3 Limit (-)
4 HOME
5 STOP
6 AUX.-IN
7IN1
8IN2
9IN3
10 IN4
11 IN5
12 IN6
13 IN7
14 IN8
15 IN9
16 IN10
17 OUT1
18 OUT2
19 OUT3
20 OUT4
21 OUT5
22 OUT6
23 Ground
RP240 (5-Pin screw terminal) (BLHX only)
Pin No. Signal
1 +5VDC (Out)
2 ISO Ground
3Rx
4Tx
5 Shield
RS232 (3-Pin screw terminal) (BLHX only)
Pin No. Signal
1Rx
2Tx
3 ISO ground
AUX-in 24VDC (2-Pin screw terminal)
Pin No. Signal
1 + 24V in
2 Ground (0V)
External encoder (9-Pin D socket) (BLHX only)
Pin No. Signal
1 A + (Step +)
2 A - (Step -)
3 B + (Dir +)
4 B - (Dir -)
5Z+
6Z-
7 + 5VDC
8 Ground
9 Ground
TQ10 Connections
Connector 1 (10-Pin removable connector)
Pin No. Type Signal
1 Input Enable In
2 Ground Enable Gnd
3 Output Fault Out+
4 Output Fault Out-
5 Input Reset In
6 Ground Reset Gnd
7 Input Command+
8 Input Command-
9 Ground Command Shield
10 Ground Ground
Pinouts - Servo Systems
Connector 2 (10-Pin removable connector)
Pin No. Type Signal
1 Ground Ground
2 Output +15VDC
3 Output -15VDC
4 Ground Hall Gnd
5 Output Hall +5VDC
6 Input Hall 1
7 Input Hall 2
8 Input Hall 3
9 Input Motor Temp+Drive Input Power
10 Input Motor Temp-Voltage

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, OH 44281
19
Automation
ET Series
PM-ET01/USA Stepper and Servo Driven Linear Actuators
TQ10SD Connections
Connector 1 (10-Pin connector)
Pin No. Type Signal
1 Output Velocity Monitor
2 Input CPE 2 (Position Error 2)
3 Input Step+
4 Input Direction+
5 Input Deriv. Gain Reduction
6 Input Integral Gain Off
7 Input CPE 1 (Position Error 1)
8 Ground Ground
9 Input Step-
10 Input Direction-
Connector 2 (10-Pin removable connector)
Pin No.Type Signal
1 Input Shutdown+
2 Input Shutdown-
3 Ground Encoder Ground
4 Output Encoder +5VDC
5 Input Encoder A+
6 Input Encoder A-
7 Input Encoder B+
8 Input Encoder B-
9 Output Reserved
10 Output Reserved
Connector 3 (10-Pin removable connector)
Pin No. Type Signal
1 Input Enable In
2 Ground Enable Gnd
3 Output Fault Out+
4 Output Fault Out-
5 Input Reset In
6 Ground Reset Gnd
7-10 Not Used
Connector 4 (10-Pin removable connector)
Pin No. Type Signal
1-3 Not Used
4 Ground Hall Gnd
5 Output Hall +5VDC
6 Input Hall 1
7 Input Hall 2
8 Input Hall 3
9 Input Motor Temp +
10 Input Motor Temp -
APEX Drives/Controllers
APEX10, APEX20, and APEX40
Control connections (13-Pin removable connector)
Pin No. Signal
1 Reset
2 Ground
3 Velocity Integrator Enable
4 Enable
5 Fault
6 Ground
7 Command (+)
8 Command (-)
9 Tachometer out
10 Ground
11 + 15V
12 Ground
13 - 15V
Power connections (4 Pin-high power removable connector)
Pin No. Signal
1 Line 1
2 Line 2
3 Line 3
4 Earth
Resolver connections (13-Pin removable connector)
Pin No. Signal
1 Shield
2 Stator 1
3 Stator 2
4 Stator 3
5 Stator 4
6 Rotor 1
7 Rotor
8 Motor Temperature (+)
9 Motor Temperature (-)
10 Fault relay (+)
11 Fault relay (-)
12 Feedback (+)
13 Feedback (-)
Motor connections (7-Pin high power removable connector)
Pin No. Signal
1 VBUS (+)
2 Regen Resistor
3 VBUS (-)
4 Phase A
5 Phase B
6 Phase C
7 Motor ground
Encoder connections (7-Pin removable connector)
Pin No. Signal
1 CHA +
2 CHA -
3 CHB +
4 CHB -
5 CHZ +
6 CHZ -
7 Ground
Pinouts - Servo Systems

Parker Hannifin Corporation
Automation Actuator Division
Wadsworth, Ohio
20
Automation
Stepper and Servo Driven Linear ActuatorsPM-ET01/USA ET Series
Resolver connections (13-Pin removable connector)
Pin No. Signal
1 Shield
2 Stator 1
3 Stator 2
4 Stator 3
5 Stator 4
6 Rotor 1
7 Rotor
8 Motor Temperature (+)
9 Motor Temperature (-)
10 Fault relay (+)
11 Fault relay (-)
12 Feedback (+)
13 Feedback (-)
Motor connections (7-Pin high power removable connector)
Pin No. Signal
1 VBUS (+)
2 Regen Resistor
3 VBUS (-)
4 Phase A
5 Phase B
6 Phase C
7 Motor ground
Encoder connections (7-Pin removable connector)
Pin No. Signal
1 CHA +
2 CHA -
3 CHB +
4 CHB -
5 CHZ +
6 CHZ -
7 Ground
APEX6151, APEX6152, and APEX6154
External Encoder (9-Pin screw terminal)
Pin No. Signal
1 Shield
2 ISO Ground
3 Z- Channel
4 Z+ Channel
5 B- Channel
6 B+ Channel
7 A- Channel
8 A+ Channel
9 +5 VDC (out)
Motor connections (7-Pin screw terminal)
Pin No. Signal
1 V bus (+)
2 Regen Resistor
3 V bus (-)
4 Phase A
5 Phase B
6 Phase C
7 Motor ground
Auxiliary (14-Pin screw terminal)
Pin No. Signal
1 Reserved
2 Reserved
3 Trigger A
4 Trigger B
5 Output (-)A
6 ISO Ground
7 +5 VOC (out)
8 Output Pull-Up
9 Input Pull-Up
10 Auxiliary Pull-Up
11-14 Not used
Power input (4-Pin screw terminal)
Pin No. Signal
1 Earth
2 Neutral
3 N/A
4 Line
Programmable I/O Pin Outs (14-Pin screw terminal)
Pin No. I/O Connector
1 Input#16
3 Input#15
5 Input#14
7 Input#13
9 Input#12
11 Input#11
13 Input#10
15 Input#9
17 Output #8
19 Output #7
21 Output #6
27 Input #7
29 Input #6
31 Input #5
33 Output #4
35 Output #3
37 Output #2
39 Output #1
41 Input #4
43 Input #3
45 Input #2
47 Input #1
Pinouts - Servo Systems