Pfeiffer Vacuum TPR 265 User manual

Operating manual
BG 805 174 BE (9910) 1
Compact Pirani Gauge
TPR 265

2BG 805 174 BE (9910) TPR265.bet
In all communications with Pfeiffer Vacuum, please specify the information given
on the product nameplate. Copy that information into the nameplate replica.
Typ:
No:
F-No:
14...30V ; 1.5W
This document applies to products with ordering number
PT R26 750 (DN 16 ISO-KF short)
PT R26 751 (DN 16 CF-R short)
PT R26 752 (
'
" NPT short)
PT R26 760 (DN 16 ISO-KF long)
PT R26 761 (DN 16 CF-R long)
The ordering number can be taken from the nameplate.
We reserve the right to make technical changes without prior notice.
The Compact Pirani Gauge TPR 265 has been designed for vacuum
measurement of gases in the pressure range of 5×10-4 ... 1000 mbar.
The gauge can be operated in connection with a Pfeiffer Vacuum controller for
compact gauges or with another evaluation unit.
Over the whole measurement range, the measuring signal is output as a logarithm
of the pressure.
Product identification
Validity
Intended use
Functional principle

BG 805 174 BE (9910) TPR265.bet 3
Contents
Product identification 2
Validity 2
Intended use 2
Functional principle 2
1 Safety 4
1.1 Symbols used 4
1.2 Personnel qualifications 4
1.3 General safety instructions 4
1.4 Liability and warranty 4
2 Technical data 5
3 Installation 7
3.1 Vacuum connection 7
3.2 Electrical connection 8
3.2.1 Use with Pfeiffer Vacuum controller for compact gauges 8
3.2.2 Use with other supply and evaluation units 8
4 Operation 10
5 Maintenance 11
5.1 Adjusting the gauge 11
5.2 Cleaning the sensor 12
5.3 What to do in case of problems 13
6 Removal 14
7 Accessories 15
8 Returning the product 15
9 Disposal 16
Appendix 17
A: Relationship between measuring signal and pressure 17
B: Gas type dependency 18
Declaration of contamination 19
For cross-references within this document, the symbol (→2XY) is used, for cross-
references to other documents, the symbol (→&[Z]).

4BG 805 174 BE (9910) TPR265.bet
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Note
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
• Adhere to the applicable regulations and take the necessary precautions for
the process media used.
Consider possible reactions between the materials (→26) and the process
media.
Consider possible reactions of the process media due to heat generated by the
product.
• All work may only be carried out in adherence to the applicable regulations and
with the necessary precautions. Consider the safety remarks within this
document.
• Before you begin to work, find out whether any vacuum components are
contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Communicate the safety instructions to other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.) to the product
• use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
1.1 Symbols used
1.2 Personnel qualifications
1.3 General safety
instructions
1.4 Liability and warranty

BG 805 174 BE (9910) TPR265.bet 5
2 Technical data
Measurement principle thermal conductance Pirani
Measurement range (Air, N2, O2, CO) 5×10-4 ... 1000 mbar
Accuracy ≈10 % of reading
in the range of 1×10-3 ... 100 mbar
(outside of this range up to factor 2)
Repeatability ≈2 % of reading
in the range of 1×10-3 ... 100 mbar
Gas type dependency →Appendix B
Voltage range ≈0 V ... ≈+10.3 V
Measurement range 2.2 V ... 8.5 V
Relationship voltage-pressure logarithmic, increase 1.0 V / decade
(→Appendix A)
Error signal < 0.5 V (filament rupture)
Output impedance 2×10 Ω
Minimum load 10 kΩ, short circuit-proof
Rise time ≈10 ms
Gauge identification 3.0 kΩresistance referenced to supply
common
Trimming potentiometer <HV>
Trimming potentiometer <ATM> adjustment at 5×10-4 mbar adjustment at atmospheric pressure
DANGER
The gauge may only be connected to supply and evaluation units that
conform to the requirements of a grounded protective extra-low
voltage (SELV-E according to EN 61010). The connection to the
gauge has to be fused. 1)
Voltage at gauge 14.0 ... 30.0 V= (max. ripple 1 Vpp)
Power consumption ≤1.5 W
Fuse 1) ≤1 AT
Electrical connection Hirschmann compact connector type
GO 6, 6 poles, male
Cable 5 poles plus screening
Cable length max. 150 m (0.25 mm2conductor)
200 m (0.34 mm2conductor)
Grounding concept →Figure 1
Vacuum flange – measuring
common connected by 10 kΩ
(max. voltage differential ±50 V)
Supply common – signal common conducted separately; for great cable
lengths (≥10 m) differential measuring
is recommended
1) Pfeiffer Vacuum controllers for compact gauges fulfill this requirement.
Measuring
Output signal
Adjustment
Supply

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Materials on the vacuum side
Flange
Filament
Feedthrough
Baffle (only version DN 16 ISO-KF)
Other materials
stainless steel
tungsten
glass
stainless steel
Ni, copper, NiFe
Internal volume
short version
long version ≈2 cm³
≈10 cm³
Pressure max. ≤10 bar (absolute)
limited to inert gases
Admissible temperatures
Storage
Operation
Flange temperature short version
long version
–20°C ... +65°C
+ 5°C ... +60°C
up to 80 °C
up to 250 °C
Relative humidity max. 80% at temperatures up to +31 °C
decreasing to 50 % at +40 °C
Application only for indoor use
altitudes up to 2000 m NN
Type of protection IP 40
Measurements [mm]
'
" NPT
65.341.4
28
ATMHV ATMHV
65.3121.6
28
121.65
DN 16 ISO-KFDN 16 CF-R
ATMHV
28
65.322.65 20
16
22.5
45
19.4
DN 16 ISO-KFDN 16 CF-R
Weight ≈100 g (DN 16 ISO-KF short)
≈120 g (DN 16 CF-R short)
≈120 g ('" NPT short)
≈140 g (DN 16 ISO-KF long)
≈160 g (DN 16 CF-R long)
Vacuum
Environment
Measurements, weight

BG 805 174 BE (9910) TPR265.bet 7
3 Installation
Note
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The gauge may be mounted in any orientation. A horizontal to upright orientation
is to be preferred, to keep condensates and particles from getting into the meas -
uring chamber.
èRemove the protective cap.
The protective cap will be
needed for maintenance.
Make the flange connection.
Clamping ring Seal
If adjustment must be possible after the gauge has been installed, be sure
to install it so that trimmer potentiometers <HV> and <ATM> can be
accessed with a screwdriver.
The space necessary can be gathered from the diagram (→26).
DANGER
Caution: overpressure in the vacuum system > 4 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot
withstand such pressures. Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering ring.
DANGER
Caution: overpressure in the vacuum system > 1 bar
If clamps are opened incorrectly or inadvertently, injury can be caused
by catapulted parts and your health can get damaged by leaking pro-
cess gases.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which cannot be opened inadvertently (e.g. hose
clip clamping rings).
3.1 Vacuum connection
Procedure

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DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a
protective connection according to EN 61010:
• CF and NPT flanges fulfill this requirement
• For gauges with a KF flange, use a conductive metallic clamping
ring.
If the gauge is used with a
Pfeiffer Vacuum controller for
compact gauges, a corre-
sponding sensor cable is
required (→215).
• Plug the cable in at the
gauge and at the controller.
Secure the plug at the gauge
with the screw.
The gauge can also be operated with other supply and evaluation units. In this
case a sensor cable must be made by the user.
For cable lengths up to 10 m (with 0.25 mm2 conductor cross section), the
measuring signal can be read directly between positive signal (pin 2) and supply
common (pin 5). For longer sensor cable lengths, we recommend a differential
measurement between signal and signal common (Pin 3) (as a result of the
voltage drop along the supply cable grounding lead, the common mode signal is
approx. 0.5 V at the max. permissible cable length).
èPrepare the cable box
(ordering number
→215).
3.2 Electrical connection
3.2.1 Use with Pfeiffer Vacuum
controller for compact
gauges
3.2.2 Use with other supply
and evaluation units
Procedure

BG 805 174 BE (9910) TPR265.bet 9
Solder the sensor cable according to the diagram.
10k
10
10
3k
2
3
1
4
5
6
V–
+
–
+
Figure 1:Electrical connection
Pin 1 identification
Pin 2 signal output
(measuring signal)
Pin 3 signal common
Pin 4 supply (14 ... 30 V=)
Pin 5 supply common
Pin 6 screening
2
5
31
6
4
Cable box solder side
WARNING
Supply common (pin 5) and screen (pin 6) must always be
grounded to the supply unit.
Incorrect connection, incorrect polarity or inadmissible supply
voltages can damage the gauge.
Assemble the cable box.
Equip the other end of the sensor cable with the appropriate connection for
the supply and evaluation unit.
Connect the cable box to the gauge
and secure it with the screw. Connect
the other end of the cable to the
supply and evaluation unit.

10 BG 805 174 BE (9910) TPR265.bet
4 Operation
This gauge uses the thermal conductivity of gases for vacuum measurements
(Pirani).
Two thin tungsten wires are heated up to two different, constant temperatures (ca.
65 °C and 120 °C). The difference between the required thermal inputs for this is a
measure for the pressure (independent of the ambient temperature). After
logarithmization the output signal is generated from this value (→Appendix A).
When voltage is being supplied to the gauge, the measuring signal is available
between pins 2 and 3 (relationship between measuring signal and pressure
→Appendix A).
Allow for a stabilization time of approx. 2 minutes. It is advisable to operate the
gauge continuously.
The gauge is factory-calibrated. Adjustment may become necessary because of
the use in different climatic conditions, extreme temperatures, contamination or
ageing (→211).
Measurement accuracy is reduced in the pressure range above 100 mbar and
below 1×10-3 mbar.
The measuring signal depends on the type of gas being measured. The
relationship between measuring signal and pressure is accurate for N 2, O2, dry air
and CO (→Appendix A). They can be mathematically converted for other gases
(→Appendix B).
Is the gauge being operated with a Pfeiffer Vacuum controller for compact gauges,
a calibration factor can be applied for correction of the reading
(→&of the appropriate controller).
Measurement principle
Stabilizing time
Accuracy
Gas type dependency

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5 Maintenance
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to your health.
Before you begin to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
The gauge is factory calibrated. Through the use in different climatic conditions,
through extreme temperatures, contamination or ageing a shifting of the
characteristic curve can occur and readjustment can become necessary.
Otherwise the gauge requires no maintenance.
During adjustment, the effect on the pressure range between approx. 10-2 mbar
and 102mbar is negligable.
Note
Malfunctions of the gauge, that are caused by contamination are not
covered by warranty.
• Screw driver 1.5 mm
èActivate the gauge.
Evacuate to p <<10-4 mbar, and wait ≥2 min.

Adjust the potentiometer <HV> to …
… 5×10-4 mbar or … 2.2 V
... and then turn it approx. 45°counter-
clockwise.
Vent with air at atmospheric pressure, and wait ≥2 min.
5.1 Adjusting the gauge
Tools required
Procedure

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
Adjust the potentiometer <ATM> to …
… 1000 mbar or … 8.5 V
DANGER
Caution: cleaning agents
Cleaning agents can be detrimental to your health and the
environment.
Adhere to the relevant regulations and take the necessary precautions
when handling and disposing of cleaning agents. Consider possible
reactions with the product materials (→26).
• Screw driver Nr. 1
• Industrial alcohol
èRemove the gauge from the system (→214).
Remove the baffle carefully with
the screw driver
(only gauges with flange
DN 16 ISO-KF).
• Fill with industrial alcohol.
• Allow it to soak for 5 min.
5.2 Cleaning the sensor
Tools / materials required
Procedure

BG 805 174 BE (9910) TPR265.bet 13
Pour out the industrial alcohol
and dispose of it.
Allow the measurement chamber to dry for at least 10 min.
òInsert the cleaned or a new baffle
(only gauges with flange
DN 16 ISO-KF).
óMake the flange connection (→27).
õEvacuate the gauge.
Note
During evacuation, remaining cleaning agents will evaporate.
öMake the electrical connection.
úAdjust the gauge (→211).
Problem Possible cause Correction
Measuring signal
continually < 0.5 V. Supply missing. Turn on the supply voltage.
Pfeiffer Vacuum
controller: "Er-4" or
"Sensor Error"
Sensor defective
(filament rupture). Replace the gauge.
Gauge maladjusted Adjust the gauge
(→211).
Readout is too high at
low pressures. Sensor contaminated. Adjust the gauge
(→211).
Clean the sensor
(→212).
Replace the gauge.
5.3 What to do in case of
problems

14 BG 805 174 BE (9910) TPR265.bet
6 Removal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to your health.
Before you begin to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Note
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
èVent the vacuum system.
Take the gauge out of operation.
Unplug the sensor cable.
Remove the gauge from the
vacuum system.
Clamping ring Seal
Put the protective cap on.
Procedure

BG 805 174 BE (9910) TPR265.bet 15
7 Accessories
Ordering number
Sensor cable for Pfeiffer Vacuum
controller for compact gauges
3 m
6 m
10 m
Cable box, Hirschmann GO 6 WF,
6 poles, angled, socket
BG 448 250 -T
BG 448 251 -T
BG 448 252 -T
B 4707 283 MA
8 Returning the product
WARNING
Caution: forwarding contaminated products
Products returned to Pfeiffer Vacuum for service or repair should
preferably be free of harmful substances (e.g. radioactive, toxic,
caustic or microbiological).
Adhere to the forwarding regulations of all involved countries and
forwarding companies and enclose a completed declaration of
contamination (→219).
Products that are not clearly declared as "free of harmful substances" are de -
contaminated at the expense of the customer.
When returning a product for service, put it in a tight and impact resistant package.

16 BG 805 174 BE (9910) TPR265.bet
9 Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to your health.
Before you begin to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
N
WARNING
Caution: substances detrimental to the environment
Electronic components must be disposed of in accordance with
special regulations.
Dispose of such products in accordance with the relevant local regula -
tions.
After disassembling the product, separate its components according to the
following criteria:
Contaminated components (radioactive, toxic, caustic, or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and recycled.
Such components must be separated according to their materials and recycled.
Separating the components
Contaminated components
Other components

BG 805 174 BE (9910) TPR265.bet 17
Appendix
p = 10(U-c) ⇔U = c + log10 p
Up c U p c Up c
[V] [mbar] 5.5 [V] [Torr] 5.625 [V] [Pa] 3.5
[V] [µbar] 2.5 [V] [mTorr] 2.625 [V] [kPa] 6.5
[V] [micron] 2.625
where p pressure
U measuring signal
c constant (pressure unit
dependent)
valid in the range 5×10-4 mbar < p < 1000 mbar
3.75×10-4 Torr < p < 750 Torr
5×10-2 Pa < p < 1×105Pa
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Pa
mbar
torr
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.3 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
underrange
Pressure p
Measuring signal U[V]
Measuring
signal U
[V] [mbar] Pressure p
[Torr] [Pa]
< 0.5 Sensor error
0.5...2.2 Underrange
2.2
2.5
3.5
4.5
5.5
6.5
7.5
8.5
5.0×10-4
1.0×10-3
1.0×10-2
0.1
1.0
10
100
1000
3.8×10-4
7.5×10-4
7.5×10-3
7.5×10-2
0.75
7.5
75
750
5.0×10-2
0.1
1.0
10
100
1000
1.0×104
1.0×105
8.5 ... 10.3 Overrange
A: Relationship between
measuring signal and
pressure
Conversion formula
Conversion curves
Conversion table

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Indicated pressure
(Gauge calibrated for air)
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
p (mbar)
peff (mbar)
10–3 24
6
10–2 24
6
10–1 24
6
10024
6
10124
6
102
H2He Ne
Xe
Kr
Ar
CO2
Freon 12
Luft / Air
O2
CO
N2
H2O-Dampf /
water vapor
Note
A mixture of gases is often involved. In this case, accurate
determination is only possible with a partial pressure measurement
instrument, e.g. a quadrupole mass spectrometer.
Calibration factors for the pressure range below 1 mbar
Gas
type Calibration
factor K Gas type Calibration factor K
He 0.8 H20.5
Ne 1.4 N2, O2, CO, air 1.0
Ar 1.7 CO20.9
Kr 2.4 water vapor 0.5
Xe 3.0 Freon 12 0.7
peff = K × Indicated pressure
B: Gas type dependency

BG 805 174 BE (9910) TPR265.bet 19
Declaration of contamination
Legally binding declaration:
I hereby declare that the information supplied on this form is complete and accurate. The dispatch of the contaminated product will
be in accordance with the appropriate regulations covering packaging, transportation and labelling of dangerous substances.
Name of organization or company
Address Post code, place
Phone Fax
E-Mail
Name
Date and legally binding signature Company stamp
*) Products thus conta-
minated will not be
accepted without
written evidence of
decontamination!
Process related contamination of product:
toxic no q yes q
corrosive no q yes q
biological hazard no
q yes q *)
explosive no
q
yes
q
*)
radioactive no
q yes q *)
other harmful substances no
q yes q
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.
This declaration can only be completed and signed by authorized and qualified staff.
Harmful substances, gases and/or by-products
Please list all substances, gases and by-products which may have come into contact with the product:
Trade/product name
manufacturer Chemical name
(or symbol) Dangerous
material class Measures if spillage First aid in case of
contact
Description of product
Type
Article No.
Serial No.
Reason for return
Operating fluid(s) used
The product is free of any substances
which are damaging to health yes
q
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Pfeiffer Vacuum GmbH
Emmeliusstrasse 33
D–35614 Asslar
Deutschland
Tel [phone]
Fax [phone]
Original: German BG 805 174 BD (9910) [email protected]
www.pfeiffer-vacuum.de