Pfeiffer Vacuum IKR 360 User manual

BG 5164 BEN / A (2016-01)
A
PASSION FOR PERFECTION
IKR 360, IKR 360 C, IKR 361, IKR 361 C
Compact Cold Cathode Gauges
PKR 360. PKR 360 C, PKR 361, PKR 361 C
Compact FullRange®Gauges
Operating Instructions

2BG 5164 BEN / A (2016-01)
Product Identification
In all communications with Pfeiffer Vacuum, please specify the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.
Validity
This document applies to products with part numbers:
IKR 360 (low current)
PT T00 140 010 (DN 25 ISO-KF
PT T00 140 011 (DN 25 ISO-KF, ceramic, IKR 360 C
PT T00 150 010 (DN 40 ISO-KF)
PT T00 150 011 (DN 25 ISO-KF, ceramic, IKR 360 C)
PT T00 350 010 (DN 40 CF-F)
PT T00 350 011 (DN 40 CF-F, ceramic, IKR 360 C)

BG 5164 BEN / A (2016-01) 3
IKR 361 (high current)
PT T01 140 010 (DN 25 ISO-KF)
PT T01 140 011 (DN 25 ISO-KF, ceramic, IKR 361 C)
PT T01 150 010 (DN 40 ISO-KF)
PT T01 150 011 (DN 25 ISO-KF, ceramic, IKR 361 C)
PT T01 350 010 (DN 40 CF-F)
PT T01 350 011 (DN 40 CF-F, ceramic, IKR 361 C)
PKR 360 (low current)
PT T02 140 010 (DN 25 ISO-KF)
PT T02 140 011 (DN 25 ISO-KF, ceramic, PKR 360 C)
PT T02 150 010 (DN 40 ISO-KF)
PT T02 150 011 (DN 25 ISO-KF, ceramic, PKR 360 C)
PT T02 350 010 (DN 40 CF-F)
PT T02 350 011 (DN 40 CF-F, ceramic, PKR 360 C)
PKR 361 (high current)
PT T03 140 010 (DN 25 ISO-KF)
PT T03 140 011 (DN 25 ISO-KF, ceramic, PKR 361 C)
PT T03 150 010 (DN 40 ISO-KF)
PT T03 150 011 (DN 25 ISO-KF, ceramic, PKR 361 C)
PT T03 350 010 (DN 40 CF-F)
PT T03 350 011 (DN 40 CF-F, ceramic, PKR 361 C)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to IKR 36x gauges with vacuum connec-
tion DN 25 ISO-KF. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.

4BG 5164 BEN / A (2016-01)
Intended Use
IKR 360, IKR 361
The Compact Cold Cathode Gauges IKR 360 and IKR 361 have
been designed for vacuum measurement of gases in the pres-
sure range of 1×10-9 … 1×10-2 mbar.
They are intended for operation in connection with a Pfeiffer
Vacuum measurement unit for Compact Gauges or with another
suitable controller.
PKR 360, PKR 361
The Compact FullRange®Gauges PKR 360 and PKR 361 have
been designed for vacuum measurement of gases in the pres-
sure range of 1×10-9 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
They are intended for operation in connection with a Pfeiffer
Vacuum measurement unit for Compact Gauges or with another
suitable controller.
Functional Principle
IKR 360, IKR 361
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.

BG 5164 BEN / A (2016-01) 5
PKR 360, PKR 361
The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons (PKR gauges only)
1× Operating Instructions German
1× Operating Instructions English
1× Operating Instructions French
Trademark
FullRange®Pfeiffer Vacuum GmbH

6BG 5164 BEN / A (2016-01)
Contents
Product Identification 2
Validity 2
Intended Use 4
Functional Principle 4
Scope of Delivery 5
Trademark 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Output Signal vs. Pressure 15
2.2 Gas Type Dependence IKR 36x 17
2.3 Gas Type Dependence PKR 36x 19
3Installation 22
3.1 Vacuum Connection 22
3.2 Power Connection 26
4Operation 28
4.1 Status Indication IKR 28
4.2 Status Indication PKR 29
4.3 Put IKR 365x Into Operation 30
4.4 Put PKR 36x Into Operation 30
4.5 Gas Type Dependence 31
4.6 Ignition Delay 32
4.7 Contamination 32
5Deinstallation 34
6Maintenance, Repair 36
6.1 Adjusting the Gauge 36
6.2 Cleaning the Gauge / Replacing Parts 38
6.2.1 Troubleshooting (measuring chamber) 39
6.2.2 Replacing Ionization Chamber and Ignition Aid 41
6.2.3 Replacing Measuring Chamber 43

BG 5164 BEN / A (2016-01) 7
6.3 Troubleshooting 45
7Returning the Product 48
8Disposal 49
9Accessories 50
10 Spare Parts 50
10.1 Ignition Aid for IKR 36x and PKR36x 50
10.2 Ionization chamber for IKR 36x and PKR36x 50
10.3 Measuring Chamber Cpl. (Spare Sensor) 51
10.3.1 Measuring Chamber cpl. for IKR 36x 51
10.3.2 Measuring Chamber cpl. for PKR 36x 52
Conversion Table 52
ETL Certification 53
EC Declaration of Conformity 54
For cross-references within this document, the symbol (→XY)
is used.

8BG 5164 BEN / A (2016-01)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Consultation of operating manual required (symbol
printed on the product nameplate)
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

BG 5164 BEN / A (2016-01) 9
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product (PKR 36x
only).
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. ionization chamber, ignition aid, Pirani
filament (PKR 36x only)), are not covered by the warranty.

10 BG 5164 BEN / A (2016-01)
2 Technical Data
Display range (air, N2)
IKR 36x
PKR 36x
1×10-9 … 1×10-2 mbar
1×10-9 … 1000 mbar
Measurement range (air, N2)
IKR 36x
PKR 36x
1×10-8 … 1×10-2 hPa
1×10-8 … 1000 hPa
Accuracy IKR (N2)
1×10-8 … 1×10-2 hPa 30% of reading
Accuracy PKR (N2)
1×10-8 … 100 hPa
100 … 1000 hPa
30% of reading
50% of reading
Repeatability (N2)
IKR, 1×10-8 … 1×10-2 hPa
PKR, 1×10-8 … 100 hPa
5% of reading
5% of reading
Gas type dependence
IKR 36x
PKR 36x
→17
→19
Voltage range (analog output) 0 … +10.5 V
Display range
IKR 36x
PKR 36x
+1.5 … +8.5 V (dc)
+1.397 … +8.6 V (dc)
Measurement range
IKR 36x
PKR 36x
+2.5 … +8.5 V (dc)
+2.0 … +8.6 V (dc)
Voltage vs. pressure
IKR 36x
PKR 36x
1 V/decade, logarithmic
0.6 V/decade, logarithmic
Error signal
IKR 36x
PKR 36x
<+0.5 V
+9.5 … +10.5 V

BG 5164 BEN / A (2016-01) 11
Output impedance 2 × 4.7 Ω, short-circuit proof
Load impedance ≥10 kΩ, short-circuit proof
Step response time
p > 10-6 hPa
p = 10-8 hPa
pressure dependent
<100 ms
≈1 s
Gauge identification IKR 36x 5.1 kΩreferenced to supply
common
Gauge identification PKR 36x
Pirani only operation 11.1 kΩreferenced to supply
common
Combined Pirani- / cold
cathode operation
9.1 kΩreferenced to supply
common
The following conditions must
be fulfilled:
Polarity the polarity of pin 1 referenced
to supply common is always
positive
Measurement
with constant current measurement current
0.2 … 0.3 mA
with constant voltage measurement voltage 2 … 3 V
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused 1).
1) Pfeiffer Vacuum measurement and control units for Compact Gauges
fulfill this requirement.

12 BG 5164 BEN / A (2016-01)
Supply voltage
at the gauge 2)
Class 2 / LPS
+14.5 … +30 V (dc)
Ripple ≤1 V
pp
Power consumption ≤2 W
Fuse to be connected 1) ≤1 AT
High voltage in the measuring chamber
Ignition voltage
Operating voltage
≤4.5 kV
≤3.3 kV
Current in the measuring chamber
IKR / PKR 361, High current
IKR / PKR 361, Low current
≤500 µA
≤100 µA
Electrical connection Hirschmann compact connec-
tor type GO 6, 6-pin, male
Tightening torque ≤0.2 Nm
Sensor cable 5-pin plus shielding
Cable length ≤75 m (0.14 mm2/conductor)
≤100 m (0.34 mm2/conductor)
≤300 m (1.0 mm2/conductor)
Grounding concept →"Power Connection"
Vacuum connection – signal
common
connected via 10 kΩ
(potential difference ≤16 V)
Supply common – signal
common
conducted separately;
differential measurement is
recommended
2) The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

BG 5164 BEN / A (2016-01) 13
Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament (PKR 36x) W
Feedthrough, IKR/PKR 36x
Isolation
Ring
Anode
Pin
glass, ceramic (Al2O3)
stainless steel (1.4435)
molybdenum
Ni alloy
Feedthrough, IKR/PKR 36x C ceramic coated
Ionization chamber stainless steel
Ignition aid stainless steel (1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
≈19.9 cm3
≈20.9 cm3
≈25.2 cm3
Permissible pressure
(absolute)
1000 kPa limited to inert gases
<55 °C
Bursting pressure (absolute) >1300 kPa
Permissible temperatures
Operation
Pirani filament (PKR)
Bakeout
Storage
+5 °C … +55 °C
120 °C
≤150 °C 3)
–40 °C … +70 °C
Relative humidity for 30 days a
year
1×10-8 … 1×10-2 hPa
1×10-7 … 1×10-2 hPa
≤70% (non-condensing)
≤95% (non-condensing)
Mounting orientation any
Use indoors only, altitude up to
6000 m NN
Degree of protection IP 40
3) Without electronics unit.

14 BG 5164 BEN / A (2016-01)
Dimensions [mm]
Weight
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
<280 g
<320 g
<570 g

BG 5164 BEN / A (2016-01) 15
2.1 Output Signal vs. Pressure
IKR 360, IKR 361 (display range 1.5 … 8.5 V)
Pressure p
Output signal U [V]
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
1E–02
1E–03
1E–04
1E–05
underrange
Pa
hPa
torr
overrange
p = 10(U-c) ⇔U = c + log10 p
valid in the range 1×10-9 hPa < p < 1×10-2 hPa
7.5×10-10 Torr < p < 7.5 ×10-3 Torr
1×10-7 Pa < p < 1 Pa
hPa Pa Torr
c 10.5 8.5 10.625
where p pressure
U output signal
c constant (pressure unit dependent)

16 BG 5164 BEN / A (2016-01)
PKR 360, PKR 361 (display range 1.397 … 8.6 V)
Output signal U [V]
Pressure p
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0 0.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
8.6
1.397
1E–09
sensor error
Pa
hPa
torr
1.217
underrange
overrange
p = 101.667U-d ⇔U = c + 0.6 log p
valid in the range 1×10-9 hPa < p < 1000 hPa
7.5×10-10 Torr < p < 750 Torr
1×10-7 Pa < p < 1×105Pa
hPa Pa Torr
c 6.798 5.598 6.873
d 11.33 9.333 11.46
where p pressure
U output signal
c,d constant (pressure unit dependent)

BG 5164 BEN / A (2016-01) 17
2.2 Gas Type Dependence IKR 36x
Indicated pressure (gauge calibrated for air)
4
2
10
–3
8
6
4
2
10
–4
8
6
4
2
10
–5
8
6
4
2
10
–6
8
6
4
2
10
–7
10
–7
246
10
–6
246
10
–5
246
10
–4
246
10
–3
246
10
–2
Xe Kr
Air
O2
CO
N2H2Ne He
p
eff
[hPa]
p [hPa]
Ar
Indication range below 10-5 mbar
In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
peff = K × indicated pressure

18 BG 5164 BEN / A (2016-01)
where: Gas type K
Air (N2, O2,CO) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H
22.4
Ne 4.1
He 5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.

BG 5164 BEN / A (2016-01) 19
2.3 Gas Type Dependence PKR 36x
Indication range from 102… 10-2 hPa
(Pirani-only operation)
Indicated pressure (gauge calibrated for air)
p [hPa]
p
eff
[hPa]
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
H
2
He Ne Air
N
2
O
2
CO
10
–3
246
10
–2
10
–1
10
0
10
1
10
2
8 2 468 2 468 2 468 2 468
Water vapor
Indication range
above 10
-2
hPa
Xe
Kr
Ar
CO
2
Freon 12

20 BG 5164 BEN / A (2016-01)
Indication range from 10-6 … 0.1 hPa
Indicated pressure (gauge calibrated for air)
6
4
2
6
4
2
6
4
2
10
–4
8
6
4
2
10
–6
246
10
–5
10
–4
10
–5
8
6
4
2
10
–6
8 2 468 2 46 2 46 2 46
10
–3
8
10
–2
8
10
–1
8
10
–3
8
10
–2
8
10
–1
8
p
eff
(hPa)
p (hPa)
Indication range
10
-6
...10
-1
hPa
Air
N2
O2
CO
Ar
He
Indication range below 10-5 mbar
In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
peff = K × indicated pressure