Pfeiffer Vacuum CCR 351 User manual

BG 5140 BEN (2017-09)
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BG 5140 BEN (2017-09) 3
Intended use
The Ceramic Capacitance Gauges of the CCR 35x series are
vacuum gauges and allow total pressure measurement of gases
in different measuring ranges (→2).
Functional principle
The CCR gauge consists of a ceramic capacitive sensor and an
electronic, which converts the capacity into a direct voltage
output signal.
The output signal is linear to the measured pressure and
independent of the gas type.
Trademark
VCO®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2,
7536915 B2
Scope of delivery
1× Vacuum gauge CCR 35x
1× Pin for adjusting settings
1× Calibration test report
2× Operating manuals (de & en)

4BG 5140 BEN (2017-09)
Contents
Product identification 2
Validity 2
Intended use 3
Functional principle 3
Trademark 3
Patents 3
Scope of delivery 3
1Safety 5
1.1 Used Symbols 5
1.2 Personnel qualification 5
1.3 General safety instructions 6
1.4 Liability and warranty 6
2Technical Data 7
3Installation 12
3.1 Vacuum connection 12
3.2 Electrical connection 15
4Operation 17
4.1 Calibrating the gauge 17
5Removal 19
6Maintenance, Repair 21
7Returning the product 22
8Disposing of the product 23
Conversion table 24
EC Declaration of conformity 25
For cross-references in the text, the symbol (→XY) is used.

BG 5140 BEN (2017-09) 5
1 Safety
1.1 Used Symbols
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and
environmental damage.
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labelling
1.2 Personnel qualification
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the
necessary experience or who have been instructed by the end-
user of the product.

6BG 5140 BEN (2017-09)
1.3 General safety instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.

BG 5140 BEN (2017-09) 7
2 Technical Data
Measurement range →"Validity"
Accuracy 1) ≤0.5% of reading
Temperature effect on zero 0.02% F.S./ °C
Temperature effect on span 0.02% of reading/ °C
Resolution 0.05% F.S.
Gas type dependance none
Output signal analog
(measurement signal)
Signal range -0.2 … +5.12 V
Measurement range 0 … +5 V
Relation current-pressure linear
Output impedance 10 Ω(short-circuit proof)
Load impedance >10 kΩ
Responde time 100 ms
Identification of the gauge Resistance 13.2 kΩto
supply common
Remote Zero Adjust Digital input for zero
adjustment with external
switching contact
External switching contact
Impulse
30 V (dc) / <5 mA (dc)
>1 s … <5 s
1) Non-linearity, hysteresis, repeatability at 25 °C without temperature
influence after 2 hours of operation.

8BG 5140 BEN (2017-09)
Supply
The gauge may only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded
protective extralow voltage (PELV) and limited
power source (LPS), Class 2. The connection to
the gauge has to be fused.
Supply voltage
at the gauge
Ripple
+12 … +32 V (dc)
class 2 / LPS
≤50 mV
pp
Current consumption <20 mA
Power consumption ≤0.3 W
Fuse (in series upstream) 2) 1 AT (delay), automatically
resetting (Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection D-Sub, 9 pins
Measurement cable 9 pins plus shielding
Cable length ≤100 m (0.14 mm²
conductor)
For longer cables you need larger conductor cross-sections.
Grounding concept
Vacuum flange – Signal ground →"Electrical connection"
Supply common – Signal
ground
separately; for differential
measurement (10 Ω)

BG 5140 BEN (2017-09) 9
Materials exposed to vacuum
Flange, tube
Sensor, Feedthrough
Stainless steel AISI 316L
Ceramic (Al2O3≥99.5%)
Internal volume ≤6.1 cm3
Max. pressure (absolute)
≥500 Torr/mbar (F.S.)
50 … 200 Torr/mbar (F.S.)
10 … 30 Torr/mbar (F.S.)
400 kPa
300 kPa
200 kPa
Bursting pressure (absolute) 600 kPa
Compensated temperature range
+10 °C … +50 °C
Admissible temperature
Storage
Operation
Bakeout (inoperative)
–20 °C … +85 °C
0 °C … +70 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40 °C
Use Only indoors,
altitude up to 4000 m NN
Degree of protection IP 40

10
Dimensions
[
Weight
External thre
a
[mm]
a
d
BG 514
0
≤159 g
BEN (2017-09)

BG 5140 BEN (2017-09) 11
Relation Measuring signal analog - pressure
p = (Uout / 5 V) × c (F.S.)
Conversion Torr ↔Pascal
Torr hPa
2) Pa 2)
c 1.00 1013.25 / 760 =
1.3332…
101325 / 760 =
133.3224…
Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 3 V
p = (3 V / 5 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
2) Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum,
ISBN 0904457x / 1998
Pressure p
Measurement signal Uou
t
[V]

12 BG 5140 BEN (2017-09)
3 Installation
WARNING: Fragile components
Impacts can damage the ceramic sensor.
Do not drop the product and prevent shocks.
3.1 Vacuum connection
DANGER: Overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.

BG 5140 BEN (2017-09) 13
DANGER: Protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection
according to EN 61010:
•VCO connections meet this requirement.
Caution: Vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take
appropriate measures to ensure cleanliness and
prevent damages.
Caution: Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

14 BG 5140 BEN (2017-09)
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep
condensates and particles from getting into the
measuring chamber preferably choose a horizontal to
upright position. If adjustment should be possible after
the gauge has been installed, be sure to install it so that
the buttons can be accessed with a pin.
Remove the protective lid and connect the product to the
vacuum system.
Keep the protective lid.

BG 5140 BEN (2017-09) 15
3.2 Electrical connection
Make sure that the gauge is properly connected to the
vacuum system.
The gauge may only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded
protective extralow voltage (PELV) and limited
power source (LPS), Class 2. The connection to
the gauge has to be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, observe the following notes:
•Use cables with braided screen and metallic plug
housing
•Only connect the cable shield to the ground on one
side of the connector housing. Leave the other screen
open.
•Connect the supply common with protective ground
directly at the power supply.
•Use differential measurement input (separate signal
and supply ground).
•Potential difference between supply common and
housing ≤16 V (overvoltage protection)

16 BG 5140 BEN (2017-09)
If you do not have a measurement cable, configure a
measurement cable according to the following scheme. Connect
the measurement cable (Cable →8).
Electrical connection
Pin 1 Output signal (measuring signal)
Pin 2 n.c.
Pin 3 n.c.
Pin 4 Supply
Pin 5 n.c.
Pin 6 n.c.
Pin 7 Gauge identification
or Remote Zero Adjust
Pin 8 Signal ground
Pin 9 Supply common GND
case Connector case
9-pin
D-Sub
Sockets
soldering side
95
61
Meas.
signal

BG 5140 BEN (2017-09) 17
4 Operation
Put the gauge in operation.
Warm-up time of the gauge: approximately 1 Minute.
4.1 Calibrating the gauge
The gauge is factory calibrated in “standing upright” position and
is maintenance-free.
Installation position, long time operation and contamination can
lead to a zero drift and a zero adjustment will become
necessary.
Perform a zero adjustment under the same and constant
ambient conditions and in the same mounting orientation, in
which the gauge is normally used.
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
4.1.1 Zero adjustment
Zero can be adjusted via
•The Zero button on the gauge, or
•The digital input "Remote Zero Adjust": Apply the supply
voltage to pin 7 (pulse →7).

18 BG 5140 BEN (2017-09)
Evacuate the gauge to a pressure according to the
following table:
F.S.
Recommended final pressure
for zero adjustment
1000 Torr
100 Torr
10 Torr
<5×10-2 Torr
<5×10-3 Torr
<5×10-4 Torr
<7×10-2 hPa
<7×10-3 hPa
<7×10-4 hPa
<7×10-2 mbar
<7×10-3 mbar
<7×10-4 mbar
If the final pressure is too high for a zero adjustment (>25%
of F.S.), zero cannot be reached.
Briefly press the button with a pin (max. ø1.1 mm), or …
… apply supply voltage to Remote Zero at pin 7 (Pulse
→7).
Zero adjustment runs automatically (duration ≈8 s).
After the zero adjustment, the gauge automatically
returns to the measurement mode.
Taster kurz drücken
max. ø1.1 mm
Press the button briefly

BG 5140 BEN (2017-09) 19
5 Removal
WARNING: Fragile components
Impacts can damage the ceramic sensor.
Do not drop the product and prevent shocks.
DANGER: Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution: Vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take
appropriate measures to ensure cleanliness and
prevent damages.

20 BG 5140 BEN (2017-09)
Caution: Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Vent the vacuum system.
Put the gauge out of operation.
Disconnect the measurement cable.
Remove the gauge from the vacuum system and install the
protective lid.