Pfeiffer Vacuum GSD 350 OMNISTAR User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
GSD 350 OMNISTAR ∣THERMOSTAR
Gas analysis system

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new gas analysis system is
designed to support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. From this
extensive, practical experience we have gained a large volume of information that can
contribute to efficient deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 10
1.1 Validity 10
1.1.1 Applicable documents 10
1.1.2 Variants 11
1.2 Target group 11
1.3 Conventions 12
1.3.1 Instructions in the text 12
1.3.2 Pictographs 12
1.3.3 Stickers on the product 12
1.3.4 Orientation left/right 13
1.3.5 Abbreviations 13
1.4 Trademark proof 14
2 Safety 15
2.1 General safety information 15
2.2 Safety instructions 15
2.3 Safety precautions 18
2.4 Limits of use of the product 19
2.5 Proper use 19
2.6 Foreseeable misuse 19
2.7 Personnel qualification 20
2.7.1 Ensuring personnel qualification 20
2.7.2 Personnel qualification for maintenance and repair 20
2.7.3 Advanced training with Pfeiffer Vacuum 20
3 Product description 21
3.1 Functional description 21
3.1.1 OmniStar 21
3.1.2 ThermoStar 22
3.1.3 Corrosive gas version 22
3.2 Controls and indicators 22
3.2.1 Version with display 22
3.2.2 Version without display 23
3.3 Layout of the unit 24
3.3.1 Basic unit 24
3.3.2 Terminal area 24
3.3.3 Gas inlet system 25
3.3.4 Calibration unit 26
3.3.5 High vacuum side system 27
3.3.6 Fore-vacuum system 27
3.3.7 Sealing gas system 28
3.3.8 Gas analysis unit 28
3.3.9 Heating and insulation 29
3.3.10Electronic components 31
3.4 Identifying the product 32
3.5 Scope of delivery 32
4 Transport and storage 34
4.1 Transporting product 34
4.2 Storing product 35
5 Installation 36
5.1 Ensuring ventilation 36
5.2 Removing transport protection for the diaphragm pump 36
5.3 Establishing the Ethernet connection 37
5.4 Connecting the exhaust duct 37
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5.4.1 Trimming the exhaust gas hose 37
5.4.2 Connecting exhaust gas hose 37
5.5 Connecting the sealing gas line 38
5.5.1 Trimming the sealing gas hose 38
5.5.2 Connecting the sealing gas line 38
5.6 Connecting the capillary 39
5.6.1 Connecting the OmniStar stainless steel capillary 40
5.6.2 Connecting the ThermoStar quartz capillary 40
5.7 Adapting position of the capillary hose 40
5.8 Establishing a network connection 41
5.8.1 IP addresses 41
5.8.2 Sub-networks 42
5.8.3 Changing IP address for the GSD 350 43
5.8.4 Changing the host computer IP address 43
5.9 Connecting the functional earth 44
5.10 Establishing mains connection 45
5.11 Installing the PV MassSpec software 45
6 Interfaces and connections 46
6.1 Mains connection 46
6.2 Ground terminal 46
6.3 "User I/O" connection 46
6.4 "AUX IO" connection 47
6.5 "Ethernet" (LAN) connection 48
7 Commissioning 50
7.1 Switching on unit 50
7.2 Starting pumping system 50
8 Operation via the display 52
8.1 "Dashboard" screen 52
8.2 Menu structure with functions 53
8.3 "Info" menu 54
8.4 "Settings" menu 55
8.4.1 Creating and editing measurement recipes 56
8.4.2 Adjusting the heating units 58
8.4.3 Adjusting sensors 59
8.4.4 Changing user settings 60
8.4.5 Setting autostart functions 60
8.4.6 Setting network parameters 61
8.4.7 Resetting the unit to the factory settings 61
8.4.8 "Service" submenu 62
8.5 "Messages" menu 62
8.6 "Control" menu 63
8.6.1 Pumping down the vacuum system 64
8.6.2 Venting vacuum system 64
8.6.3 Switching heating units on and off 65
8.6.4 Opening and closing gas inlet (OmniStar) 65
8.6.5 Baking out the vacuum chamber 66
8.6.6 Switching emission on and off 66
8.6.7 Switching electron multiplier on and off 66
8.6.8 Opening and closing calibration valve 67
8.7 "Measurement" menu 67
9 Decommissioning 69
10 Maintenance 70
10.1 Maintenance work and intervals 70
10.2 Maintaining the basic unit 72
10.2.1Removing/attaching gas inlet cover 72
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10.2.2Removing/attaching side covers 73
10.2.3Removing/attaching housing cover 74
10.2.4Cleaning housing parts 75
10.2.5Cleaning the protection screens on the fans 76
10.3 Maintaining the high vacuum system 76
10.3.1Replacing operating fluid reservoir on turbopump 76
10.3.2Replacing the venting valve 77
10.4 Maintaining the fore-vacuum system 77
10.4.1Replacing diaphragm pump 77
10.4.2Replacing diaphragm pump diaphragm 79
10.5 Maintaining the gas analysis unit 80
10.5.1Maintaining QMA 250 M analyzer 80
10.5.2Maintaining total pressure gauge 82
10.6 Maintaining gas inlet system of OmniStar 83
10.6.1Removing gas inlet flange 83
10.6.2Replacing orifice 85
10.6.3Replacing interior gas guide and orifice 85
10.6.4Installing gas inlet flange 86
10.7 Maintaining gas inlet system of ThermoStar 87
10.7.1Removing gas inlet flange 87
10.7.2Replacing orifice 88
10.7.3Replacing interior gas guide and orifice 89
10.7.4Installing gas inlet flange 90
10.8 Servicing capillary 90
10.8.1Shortening stainless steel capillaries 91
10.8.2Replacing stainless steel capillary 92
10.8.3Trimming quartz capillaries 93
10.8.4Replacing quartz capillary 94
10.9 Maintaining the heating units 95
10.9.1Replacing the capillary hose 95
10.9.2Maintaining the gas inlet heating 95
10.9.3Servicing the vacuum chamber heating 95
10.10 Maintaining electronic components 95
10.10.
1
Replacing display 95
10.10.
2
Replacing the PoE injector 96
10.10.
3
Replacing the mainboard 96
10.10.
4
Replacing the power supply pack 96
10.10.
5
Replacing the QME 250 electronic unit 96
10.10.
6
Replacing the TC 110 electronic drive unit on the turbopump 97
10.11 Maintaining the calibration unit 97
10.11.
1
Refilling calibration medium 97
10.11.
2
Replacing the calibration valve 98
10.12 Additional maintenance work for the corrosive gas version 98
10.12.
1
Replacing sealing gas valve 98
10.12.
2
Replacing manual pressure regulator 98
10.12.
3
Replacing digital pressure switch 98
11 Troubleshooting 99
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12 Shipping 103
13 Recycling and disposal 104
13.1 General disposal information 104
13.2 Dispose of a gas analysis system 104
14 Service solutions by Pfeiffer Vacuum 105
15 Spare parts 107
16 Special tool 110
17 Accessories 111
17.1 Accessory information 111
17.2 Ordering accessories 111
18 Technical data and dimensions 112
18.1 General 112
18.2 Technical data 112
18.3 Dimensions 114
Certification 115
Declaration of Conformity 116
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List of tables
Tbl. 1: Applicable documents 10
Tbl. 2: Variants 11
Tbl. 3: Features of variants 11
Tbl. 4: Abbreviations used 14
Tbl. 5: Permissible ambient conditions 19
Tbl. 6: Symbols and colors of the status and components icons 23
Tbl. 7: Status LEDs and their meanings 24
Tbl. 8: Heating units on the unit 29
Tbl. 9: Examples for sub-networks 42
Tbl. 10: Status of the Ethernet connection 49
Tbl. 11: Menu structure with functions 54
Tbl. 12: Maintenance work and intervals 72
Tbl. 13: Determined sensitivity of the mass spectrometer 81
Tbl. 14: Troubleshooting 102
Tbl. 15: Spare parts and components, maintenance level 1 108
Tbl. 16: Hose colors and dimensions 108
Tbl. 17: Components for hose connections 109
Tbl. 18: Special tool 110
Tbl. 19: Accessories 111
Tbl. 20: Conversion table: Pressure units 112
Tbl. 21: Conversion table: Units for gas throughput 112
Tbl. 22: Technical data 114
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 13
Fig. 2: Vacuum diagram of the OmniStar 21
Fig. 3: Vacuum diagram of ThermoStar 22
Fig. 4: Additionally sealing gas supply in corrosive gas version 22
Fig. 5: Display with operator keys 23
Fig. 6: Housing parts 24
Fig. 7: Connection panel with interfaces and connections 25
Fig. 8: Gas inlet systems 26
Fig. 9: Calibration unit at the gas inlet 27
Fig. 10: Diaphragm pump 27
Fig. 11: Sealing gas system 28
Fig. 12: Gas analysis unit components 29
Fig. 13: Vacuum chamber heating and insulation 30
Fig. 14: Gas inlet heating 30
Fig. 15: Capillary heating 31
Fig. 16: Electronic components 32
Fig. 17: Assembly aid for analyzer QMA 250 33
Fig. 18: Special tool for the orifice of the gas inlet system 33
Fig. 19: Mounting aid for calibration gas support 33
Fig. 20: Transport protection for the diaphragm pump 34
Fig. 21: Minimum lateral distances of the unit 36
Fig. 22: Transport protection for the diaphragm pump 36
Fig. 23: Trimming the exhaust gas hose 37
Fig. 24: Connecting exhaust gas hose 38
Fig. 25: Trimming the sealing gas hose 38
Fig. 26: Connecting the sealing gas line 39
Fig. 27: Connecting the capillary 40
Fig. 28: Position of the capillary hose upon delivery 41
Fig. 29: Changing IP address of the GSD 350 via the web interface 43
Fig. 30: Connection for functional earth 44
Fig. 31: Mains connection with IEC 320 C13 socket 45
Fig. 32: Mains connection with main switch and fuse 46
Fig. 33: "USER I/O" connection 47
Fig. 34: "AUX IO" connection 48
Fig. 35: "Ethernet" (LAN) connection 49
Fig. 36: "Dashboard" screen after starting the program 50
Fig. 37: "Control" screen 51
Fig. 38: "Dashboard" screen 53
Fig. 39: Example of parameter setting 56
Fig. 40: "Recipes" submenu 56
Fig. 41: Measurement recipe for "Spectrum Scan" measuring mode 57
Fig. 42: Measurement recipe for " Selected Masses" measuring mode 57
Fig. 43: Measurement recipe for “Selected Masses - Special” measuring mode 58
Fig. 44: Tempering mode of the vacuum chamber 59
Fig. 45: “User settings” submenu 60
Fig. 46: "Autostart" submenu 60
Fig. 47: "Network" submenu 61
Fig. 48: "Factory settings" submenu 62
Fig. 49: Example of a malfunction message 62
Fig. 50: Example of older messages 63
Fig. 51: "Control" menu 64
Fig. 52: Recipe selection 68
Fig. 53: Removing/attaching gas inlet cover 72
Fig. 54: Removing/attaching side covers 73
Fig. 55: Removing/attaching housing cover 74
Fig. 56: Unit underside 77
List of figures
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Fig. 57: Replacing diaphragm pump 78
Fig. 58: Connect the exhaust gas and intake hose, and draw off 78
Fig. 59: PrismaPro Quadrupole mass spectrometer 80
Fig. 60: Groove on analyzer 81
Fig. 61: Total pressure gauge on the gas analysis unit 82
Fig. 62: Part of internal gas guide on OmniStar 83
Fig. 63: Disassemble the valve block 84
Fig. 64: Gas guide approx. 1–2 mm behind the end of the ceramic sleeve 85
Fig. 65: Parts of the internal gas guide on the ThermoStar 87
Fig. 66: Removing gas inlet flange 88
Fig. 67: Gas guide approx. 1–2 mm behind the end of the ceramic sleeve 89
Fig. 68: Length of stainless steel capillary with clamping collar fitting 91
Fig. 69: Notch and snap off the stainless steel capillary 91
Fig. 70: Clamp collar fitting for stainless steel capillary 92
Fig. 71: Notching and snapping off the quartz capillary 93
Fig. 72: Front fitting of quartz capillary 94
Fig. 73: Replacing display 96
Fig. 74: Calibration unit 97
Fig. 75: Wrench for turbopump housing cover 110
Fig. 76: Centering gauge for QMA 110
Fig. 77: Mounting aid for calibration gas support 110
Fig. 78: Capillary hose adapter 111
Fig. 79: Dimensions 114
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"GSD 350 OmniStar/ThermoStar" operating instructions
Operation via web interface and PV MassSpec
DA 0106
"Quadrupole mass spectrometer" operating instructions
QMG 250 PrismaPro
BG 6001
"Quadrupole mass spectrometer" quick start guide
QMG 250 PrismaPro
BG 6003
"Diaphragm pump" operating instructions
MVP 010-3 DC
PU 0071
"Turbopump" operating instructions
HiPace 80
PT 0208
"Turbopump" supplementary information
SplitFlow 80
PT 0635
“Electronic drive unit” operating instructions
TC 110
PT 0204
"Total pressure gauge" operating instructions
DigiLine Pirani/ Cold cathode gauge MPT 200 AR
PG 0025
"Analog Relay" supplementary information
DigiLine Gauge
PG 0029
"Mini angle valve" operating instructions 1)
EVI 005 M
BP 5120
Operating instructions for “venting valve” PT 0228
"Sealing gas valve" operating instructions 2) PT 0229
Software documentation
PV MassSpec
(part of the software)
Safety data sheet 3)
Perfluorotributylamine (PFTBA)
-
"Digital pressure switch" operating instructions 4) OM_ZSE_ISE30A_OML0003 (SMC)
Declaration of conformity (part of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1) Only for version with calibration unit
2) only for corrosive gas version
3) Only for version with calibration unit
4) only for corrosive gas version
About this manual
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1.1.2 Variants
This document applies to products with the following article numbers:
Variant Version Analyzer with filament Gas inlet Mass range Display
PT Q8 = OmniStar 0 = Standard
GSD 350 O
1 = Corrosive gas
GSD 350 O C
1 = Ir-Y2O3 (calibration unit)
2 = Ir-Y2O3
5 = W (calibration unit)
6 = W
151 = Quartz / 1 m /
heating 200 °C
1 = 100 u
2 = 200 u
3 = 300 u
0 = yes
1 = no
152 = Quartz / 2 m /
heating 200 °C
153 = Quartz / 1 m /
heating 350 °C
161 = Stainless steel /
without capillary tube
171 = Stainless steel /
1 m / heating 200 °C
172 = Stainless steel /
2 m / heating 200 °C
173 = Stainless steel /
1 m / heating 350 °C
PT Q9 = Thermo-
Star
0 = Standard
GSD 350 T
1 = Corrosive gas
GSD 350 T C
1 = Ir-Y2O3 (calibration unit)
2 = Ir-Y2O3
5 = W (calibration unit)
6 = W
101 = Quartz / without
capillary tube
1 = 100 u
2 = 200 u
3 = 300 u
0 = yes
1 = no
111 = Quartz / 1 m /
heating 200 °C
112 = Quartz / 2 m /
heating 200 °C
113 = Quartz / 1 m /
heating 350 °C
Tbl. 2: Variants
Example of breakdown for article number PT Q80 217 110
●OmniStar version
●Standard version
●Analyzer with filament made of Ir-Y2O3, without calibration unit
●Gas inlet with heating up to 200°C and 1 m long stainless steel capillary
●Mass range up to 100 u
●Version with display
Feature OmniStar ThermoStar
Capillary Stainless steel (OD = 1/16", ID = 0.12 mm)
or
Quartz (OD 0.23", ID = 0.14 mm)
Gas inlet screen Platinum
Gas inlet Controlled by 2 valves Continuously open
Options ● Heating to 200 °C or 350 °C
● Corrosive gas version with sealing gas connection
● Calibration unit for calibrating the mass scale
(Calibration medium for mass calibration: PFTBA)
Tbl. 3: Features of variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
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●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
D-35614 Asslar
Mod.
P/N
S/N
Input
GSD 350
PT Q.. ...
...
... Made in Germany 2022/02
Rating plate (example)
Rating plate of unit.
warranty seal
Warranty seal
The product is sealed ex factory. Damaging or removing a
warranty seal results in loss of the warranty.
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Warning hot surface
This sticker warns of injuries caused by high temperatures
as a result of contact without protection during operation.
www.vsm-cloud.com
VSM sticker
This sticker contains links to Dreebit virtual service manage-
ment.
2
1
43
2
Fig. 1: Position of the stickers on the product
1"Warning hot surface" sticker 5) 3 VSM sticker
2 Warranty seal 4 Rating plate
1.3.4 Orientation left/right
The orientation left and right is from the display operator's view.
1.3.5 Abbreviations
Abbreviation Explanation
OD Outer diameter
AI Analog input
AO Analog output
ATEX Areas with a risk of explosive atmosphere (atmosphères explosibles)
C/B Cross beam (ion source type)
DCU Display and Control Unit
DHCP Communication protocol for assigning the network configuration (Dynamic Host
Communication Protocol)
DI Digital input
DO Digital output
EM Electron multiplier
EPDM Ethylenepropylene diene-monomer rubber, M group
5) Only for capillary heating up to 350°C
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Abbreviation Explanation
FIL Filament
FKM Fluorinated rubber
ID Inner diameter
IP Internet protocol
IQS Standard for plug-and-socket connections in vacuum technology
Ir-Y2O3Yttrium oxide (Y2O3) coated iridium (Ir)
MVP Diaphragm vacuum pump
NBR Nitrile butadiene rubber
MSL Mean sea level
PA Polyamide
PE Polyethylene
PFTBA Colorless liquid for mass calibration (perfluortributylamine)
PID Proportional-integral derivative
PoE Power over Ethernet
PT100 Platinum measuring resistor with shunt resistance of 100 Ohm
PTFE Polymer of fluorine and carbon (polytetrafluorethylene)
PUN hose Externally calibrated polyurethane hose
PV Pfeiffer Vacuum
PVC Polyvinyl chloride
PWM Type of modulation (pulse width modulation) in which one technical variable, e.g. the
electrical voltage, changes between 2 values.
RJ-45 Standardized plug-and-socket connection for telecommunication cabling (registered
jack)
sccm Standard cubic centimeters per minute as a unit of a defined gas volume flow per
unit of time under standard conditions
slpm Standard liters per minute as a unit of a defined gas volume flow per unit of time un-
der standard conditions
VLAN Virtual local area network
VSM Cloud-based software for managing vacuum components and systems, and for plan-
ning service processes (virtual service management)
W Tungsten
Tbl. 4: Abbreviations used
1.4 Trademark proof
●Windows® and Internet Explorer® are trademarks of Microsoft Corporation.
●OmniStar®, ThermoStar® and PrismaPro® are trademarks of Pfeiffer Vacuum GmbH.
●Swagelok® is a registered trade name of Swagelok Company.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
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WARNING
Danger of injury due to lifting heavy loads
The product is heavy; it weighs up to 26 kg depending on the version. If one person lifts the product
incorrectly without help, this will lead to injuries.
►Always use 2 persons to lift the product with two hands.
►Take all necessary safety precautions (e.g. wear work gloves).
►Observe local regulations.
►Comply with the instructions for safe transport.
Risks during installation
DANGER
Danger to life from electric shock
Inadequate or incorrect grounding of the unit leads to contact-sensitive voltage on the housing. When
making contact, increased leakage currents will cause a life-threatening electric shock.
►Before the installation, check that the connection leads are voltage-free.
►Conduct the electrical connection in accordance with locally applicable regulations.
►Make sure that the local mains voltage and frequency match rating plate specifications.
►Make sure that the mains cable and extension cable meet the requirements for double isolation
between input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►Use only a 3-pin mains cable and extension cable with properly connected protective earthing
(earthed conductor).
►Plug the mains plug into a socket with earthing contact only.
►Always connect the mains cable prior to all other cables, to ensure continuous protective earth-
ing.
DANGER
Electric shock due to missing internal earthed conductor
The internal earthed conductor is fastened to the housing. A unit without an internal earthed conduc-
tor attached can be life-threatening in the event of a malfunction.
►Do not rotate or release the internal earthed conductor.
Risks during operation
DANGER
Electric shocks due to moisture penetrating into the device
Moisture that has penetrated into the device results in personal injury through electric shocks.
►Only operate the device in a dry environment.
►Operate the device away from fluids and humidity sources.
►Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv-
ice.
►Always disconnect the current supply before cleaning the device.
WARNING
Danger of burns on hot surfaces
During operation high temperatures (> 50 °C) occur on touchable surfaces of the heating compo-
nents and the gas inlet. There is a risk of burning.
►Secure hot parts against inadvertent touching.
►Display warning signs.
►Make sure that the product has cooled down before performing work.
►Wear protective gloves (in accordance with EN 420).
Safety
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WARNING
Danger of poisoning due to toxic process media escaping from the exhaust pipe
During operation with no exhaust line, the vacuum pump allows exhaust gases and vapors to escape
freely into the air. There is a risk of injury and fatality due to poisoning in processes with toxic process
media.
►Observe the pertinent regulations for handling toxic process media.
►Safely purge toxic process media via an exhaust line.
►Use appropriate filter equipment to separate toxic process media.
CAUTION
Health risks and environmental damage due to the process gases used
Gases used (process gases) represent a health risk and damage to the environment.
►Check the leak tightness of the connections before introducing the process gas.
►Make sure that the exhaust gas system is suitable for the gases supplied.
►Consider potential interactions between the materials and process gases.
►When handling the gases used, observe the applicable guidelines.
►Observe the protective measures.
Risks during maintenance
DANGER
Danger to life due to electric voltage
High voltages are present inside the device. When touching parts that are live, there is a risk of
death. If there is visible damage, there is a risk of death when commissioning the device.
►Work on the open device must only be carried out by trained specialist personnel.
►Before carrying out any installation and maintenance work, switch the device off and disconnect
it from the current supply.
►Never open the device with the current supply connected.
►Secure the current supply against unauthorized or unintentional reactivation.
►Never operate an open or defective device.
►Secure a defective device against accidental operation.
►Protect the device against moisture.
WARNING
Danger of burns on hot surfaces
During operation high temperatures (> 50 °C) occur on touchable surfaces of the heating compo-
nents and the gas inlet. There is a risk of burning.
►Secure hot parts against inadvertent touching.
►Display warning signs.
►Make sure that the product has cooled down before performing work.
►Wear protective gloves (in accordance with EN 420).
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Safety
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WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
CAUTION
Risk of injury due to splintering of the quartz capillary
Quartz capillaries splinter in case of unintended use. There is a risk of eye injuries due to splinters
being projected.
►Do not apply force when notching the quartz capillary.
►Wear safety goggles.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
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General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Limits of use of the product
Installation location weatherproof (internal space)
Installation altitude max. 2000 m
Rel. air humidity max. 80%, at T <31°C,
up to max. 50% at T <40°C
Protection class I
Excess voltage category II
Permissible protection degree IP30
Pollution degree 2
Ambient temperature 10 ℃ to 40 ℃
Tbl. 5: Permissible ambient conditions
2.5 Proper use
The gas analysis system is used for manually controlled or automatic analysis for non-corrosive and
non-flammable gases. The corrosive gas version of the gas analysis system is suitable for specific cor-
rosive gas applications.
►Install, operate and maintain the product only in accordance with these operating instructions.
►Comply with the application limits.
►Observe the technical data.
►Contact Pfeiffer Vacuum for advice on corrosive or flammable gases.
2.6 Foreseeable misuse
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Use outside the mechanical and electrical application limits
●Operation with corrosive, inflammable or explosive media, if this is not explicitly permitted
●Operation in potentially explosive areas 6)
●Operation in environments where explosive gas mixes can occur.
●Operation outdoors
●Use after technical changes (inside or outside on the product)
●Use of accessories or spare parts that are not listed in these instructions
6) The gas analysis system is not explosion proof in the sense of ATEX.
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2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.7.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.7.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.7.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
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