Pfeiffer Vacuum FullRange PTR 91 User manual

BG 5041 BEN / B (2016-07)
OP
E
PT
R
FullRan
E
RATING
I
R
91
ge® Gauge
I
NSTRUC
T
T
IONS
T
r
r
anslation of the original instru
c
c
tions

2
Product Id
e
In all communi
information gi
v
reference cop
y
Validity
This documen
t
PT T03 148
PT T03 158
PT T03 358
The part num
b
If not indicated
document corr
e
DN 25 ISO-KF
We reserve th
e
notice.
e
ntification
cations with Pfeif
f
v
en on the produc
t
y
that information
t
applies to produ
c
310 (DN 25 IS
O
310 (DN 40 IS
O
310 (DN 40 C
F
b
er (No) can be ta
k
otherwise in the
e
spond to gauge
s
. They apply to th
e
right to make te
c
BG 5041 B
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f
er Vacuum, plea
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nameplate. For
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into the space pr
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ts with part num
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en from the prod
legends, the illust
s
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e other gauges b
y
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hnical changes
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N / B (2016-07)
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ithout prior

BG 5041 BEN / B (2016-07) 3
Intended Use
The FullRange® Gauges PTR 91 have been designed for
vacuum measurement of gases in the pressure range of
1×10-9 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
They are intended for operation in connection with a Pfeiffer
Vacuum measurement unit for gauges or with another suitable
controller.
Functional Principle
The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Instructions German
1× Operating Instructions English
Trademark
FullRange®Pfeiffer Vacuum GmbH

4BG 5041 BEN / B (2016-07)
Contents
Product Identification 2
Validity 2
Intended Use 3
Functional Principle 3
Scope of Delivery 3
Trademark 3
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technische Daten 8
2.1 Output Signal vs. Pressure 12
2.2 Gas Type Dependence PTR 91 13
3Installation 16
3.1 Vacuum Connection 16
3.2 Power Connection 20
4Operation 22
4.1 Status Indication 22
4.2 Put Gauge Into Operation 23
4.3 Gas Type Dependence 23
4.4 Ignition Delay 24
4.7 Contamination 24
5Deinstallation 26
6Maintenance, Repair 28
6.1 Adjusting the Gauge 28
6.2 Cleaning the Gauge / Replacing Parts 30
6.2.1 Troubleshooting (measuring chamber) 31
6.2.2 Replacing Ionization Chamber and Ignition Aid 33
6.2.3 Replacing Measuring Chamber 35
6.3 Troubleshooting 37
7Returning the Product 39

BG 5041 BEN / B (2016-07) 5
8Disposal 40
9Options 41
10 Accessories 41
11 Spare Parts 42
11.1 Ignition Aid 42
11.2 Ionization chamber 42
11.3 Measuring Chamber Cpl. (Spare Sensor) 43
ETL Certification 44
EU Declaration of Conformity 45
For cross-references within this document, the symbol (→XY)
is used.

6BG 5041 BEN / B (2016-07)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Consultation of operating manual required (symbol
printed on the product nameplate)
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

BG 5041 BEN / B (2016-07) 7
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. ionization chamber, ignition aid, Pirani
filament), are not covered by the warranty.

8BG 5041 BEN / B (2016-07)
2 Technical Data
Measurement range (air, N2) 1×10-9 … 1000 mbar
Accuracy (N2)
1×10-8 … 100 mbar
100 … 1000 mbar
30% of reading
50% of reading
Repeatability (N2)
1×10-8 … 100 mbar
5% of reading
Gas type dependence →13
Voltage range (analog output) 0 … +10.5 V
Measurement range +1.397 … +8.6 V (dc)
Voltage vs. pressure 0.6 V/decade, logarithmic
Error signal +9.5 … +10.5 V (dc)
Output impedance 2 × 4.7 Ω, short-circuit proof
Load impedance ≥10 kΩ, short-circuit proof
Step response time
>1×10-6 mbar
1×10-6 … 1×10-8 mbar
pressure dependent
<100 ms
≈1 s
Gauge identification 85 kΩreferenced to supply
common
Status signal (digital output)
Current rating 100 mA
High voltage is ON +14.5 … +30 V (dc)
(depending on supply voltage)
High voltage is OFF 0 V (dc)

BG 5041 BEN / B (2016-07) 9
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused. 1)
Supply voltage
at the gauge 2)
Class 2 / LPS
+14.5 … +30 V (dc)
Ripple ≤1 V
pp
Power consumption ≤2 W
Fuse to be connected 1) ≤1 AT
High voltage in the measuring chamber
Ignition voltage
Operating voltage
≤4.5 kV
≤3.3 kV
Current in the measuring
chamber High current
Electrical connection FCC 68, 8-pin
Sensor cable 8-pin, shielded
Cable length ≤50 m (0.14 mm2/conductor)
Grounding concept →"Power Connection"
Vacuum connection – signal
common
connected via 10 kΩ
(potential difference ≤16 V)
Supply common – signal
common
conducted separately;
differential measurement is
recommended
1) Pfeiffer Vacuum controllers fulfill this requirement.
2) The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

10 BG 5041 BEN / B (2016-07)
Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament W
Feedthrough
Isolation
Ring
Anode
Pin
glass, ceramic (Al2O3)
stainless steel (1.4435)
molybdenum
Ni alloy
Ionization chamber stainless steel (1.4301, 1.4016)
Ignition aid stainless steel (1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
≈19.9 cm3
≈20.9 cm3
≈25.2 cm3
Permissible pressure
(absolute)
10 bar, limited to inert gases
<55 °C
Bursting pressure (absolute) >13 bar
Permissible temperatures
Operation
Pirani filament (PTR 91)
Bakeout
Storage
+5 °C … +55 °C
120 °C
≤150 °C 3)
–40 °C … +70 °C
Relative humidity for 30 days a
year
1×10-8 … 1×10-2 mbar
1×10-7 … 1×10-2 mbar
≤70% (non-condensing)
≤95% (non-condensing)
Mounting orientation any
Use indoors only, altitude up to
6000 m NN
Degree of protection IP 40
3) Without electronics unit.

BG 50
4
4
1 BEN / B (2016-
0
Dimensions
[
Weight
DN 25 ISO-
DN 40 ISO-
DN 40 CF-
F
0
7)
[mm]
KF
KF
F
<280 g
<320 g
<570 g
11

12 BG 5041 BEN / B (2016-07)
2.1 Output Signal vs. Pressure
p = 101.667U-d ⇔U = c + 0.6 log p
valid in the range 1×10-9 mbar < p < 1000 mbar
7.5×10-10 Torr < p < 750 Torr
1×10-7 Pa < p < 1×105Pa
mbar Pa Torr
c 6.798 5.598 6.873
d 11.33 9.333 11.46
where p pressure
U measurement signal
c, d constant (pressure unit dependent)
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0 0.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
Measurement signal U [V]
Pressure p
8.6
1.397
1E–09
sensor error
Pa
mbar
torr
1.217
underrange
overrange

BG 5041 BEN / B (2016-07) 13
2.2 Gas Type Dependence PTR 91
Indication range from 102… 10-2 mbar
(Pirani-only operation)
Indicated pressure (gauge calibrated for air)
p [mbar]
peff [mbar]
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
H2He Ne Air
N2
O2
CO
10–3 246 10–2 10–1 100101102
8 2 468 2 468 2 468 2 468
Water vapor
Indication range
above 10-2 mbar
Xe
Kr
Ar
CO2
Freon 12

14 BG 5041 BEN / B (2016-07)
Indication range 10-6 … 0.1 mbar
Indicated pressure (gauge calibrated for air)
Indication range below 10-5 mbar
In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
peff = K × indicated pressure
6
4
2
6
4
2
6
4
2
10–4
8
6
4
2
10–6 24
610–5 10–4
10–5
8
6
4
2
10–6
824 68 24 624 624 6
10–3
810–2 810–1 8
10–3
8
10–2
8
10–1
8
peff (mbar)
p (mbar)
Indication range
10-6 ... 10-1 mbar
Air
N2
O2
CO
Ar
He

BG 5041 BEN / B (2016-07) 15
where: Gas type K
Air (N2, O2,CO) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H
22.4
Ne 4.1
He 5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.

16 BG 5041 BEN / B (2016-07)
3 Installation
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

BG 5041 BEN / B (2016-07) 17
DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
•CF connections fulfill this requirement
•For gauges with a KF flange, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

18
Mount the gau
g
gauge cause
a
The gauge ma
sates and part
i
ferably choos
e
For potentially
measurement
s
optional seal
w
(Options →
4
Remove the p
r
vacuum syste
m
Keep
t
g
e so that no vibr
a
a
deviation of the
m
y be mounted in
a
i
cles from getting
e
a horizontal to u
p
contaminating a
p
s
ystem against c
o
w
ith centering ring
4
1).
r
otective lid and c
o
m
.
t
he protective lid.
BG 5041 B
E
a
tions occur. Vib
r
m
easured values.
a
ny orientation. T
o
into the measurin
p
right position.
p
plications and to
p
o
ntamination, inst
a
and filter is reco
m
o
nnect the produ
c
E
N / B (2016-07)
a
tions at the
o
keep conden-
g chamber pre-
p
rotect the
a
llation of the
m
mended
c
t to the

BG 50
4
4
1 BEN / B (2016-
0
When
vanta
g
Keep
t
W
A
H
e
ef
f
B
e
du
un
0
7)
making a CF flan
g
g
eous to tempora
r
t
he protective lid.
WARNIN
A
RNING: electric
e
lium may cause
e
f
ects on the elect
r
e
fore performing
a
ct out of operatio
n
it.
g
e connection, it
m
r
il
y
remove the el
e
G
arcing
e
lectric arcing wit
h
r
onics of the prod
u
a
ny tightness test
s
n
and remove the
19
m
ay be ad-
e
ctronics unit.
h
detrimental
u
ct.
s
put the pro-
electronics

20 BG 5041 BEN / B (2016-07)
3.2 Power Connection
Make sure the vacuum connection is properly made
(→16).
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused. 4)
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
•Use an overall metal braided shielded cable. The
connector must have a metal case.
•Connect the supply common with protective ground
directly at the power.
•Use differential measurement input (signal common
and supply common conducted separately).
•Potential difference between supply common and
housing ≤18 V (overvoltage protection).
4) Pfeiffer Vacuum controllers fulfill these requirements.