Pfeiffer Vacuum TMH 521 Quick guide

Betriebsanleitung • Operating Instructions
PM 0496 BE/N (0707)
Compact Turbo
TurboDrag Pump
TMH 521
TMU 521
Translation of the Original Operating Instructions

2
Inhalt
Inhalt
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Transport and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
4 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Preparatory work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.3 Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.5 Connecting Pfeiffer Vacuum display and control units or PC . . . . . 17
5.6 Connecting the remote control . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.7 Connections diagram TC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.2 Operation modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.4 Montioring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . 24
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7 Maintenance / replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . 26
7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . 26
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . 29
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.1 Shutting down for longer periods. . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2 Re-starting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
11 Spare parts TMH/U 521. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
12 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
13.1 Dimension diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Manufacturer‘s Declaration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the func-
tioning of the designated product and provides the most important information for
safe use of the unit. The description follows applicable EU guidelines. All informa-
tion provided in this operating manual refer to the current state of the product's de-
velopment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.net.
Applicable docu-
ments
*also available via www.pfeiffer-vacuum.net
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, Semi-S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
TMH/U 521 Operating instructions
Safety information for vacuum pumps "Safety Guide" PT 0300 BN*
Operating instructions "Pumping operations with DCU" PM 0547 BN*
Operating instructions "Pfeiffer Vacuum protocol" PM 0488 BN*
Manufacturer’s declaration Part of this document
Operating instructions for accessories see section "accessories"*
DANGER
Immediate danger
Death or very severe injuries occur.
WARNING
Possible danger
Death or injuries may occur.
CAUTION
Possible danger
Medium to slight injuries may occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Piktograph
definitions
Instructions in the
text
ÎWork instruction: here you have to do something.
Abbreviations used DCU:Display and operating unit
HPU:Handheld programming unit
TC:Electronic drive unit for turbopump
TPS:Power supply
Symbols used The following symbels are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Air cooling
Electric connection
Sealing gas connection
Prohibition of an action or activity in connection with a
source of danger, the disregarding of which may result in
serious accidents.
Warning of a displayed source of danger in connection
with operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.
H
VV
F
G

5
Safety
2 Safety
2.1 Safety precautions
• Do not loosen any plug connection during operations.
• Wait for the rotor to reach standstill before peforming work on the high vacuum
flange.
• When using sealing gas, the pressure in the hose connection must be limited to
2 bar via an overpressure valve.
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Always ensure a safe connection to the protective earthing conductor (PE, pro-
tection class I).
• Discrete operating of the turbopump and the electronic drive unit is only allo-
wed after authorisation by Pfeiffer Vacuum. In this case the turbopump must be
connected to the PE.
• The danger of an electrical shock in the case of ground leakage must be elimi-
nated immediately (red LED flashes).
• Never fill or operate turbopump with cleaning agent.
2.2 Proper use
• Only operate the turbopump with a prooved backing pump.
• Only operate the turbopump with TC by a specified Pfeiffer Vacuum power sup-
ply. The use of other power units than the intended, is only permitted after co-
sultation with Pfeiffer Vacuum.
• Only operate the turbopump with TC 600 in ambient conditions up to protection
class IP 30.
• Only operate the turbopump together with a water cooling unit or in ambient
conditions up to protection class IP 54 after installing a specified TC cover plate.
NOTE
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum
pump must read and observe the safety-related parts of these operating instructions.
ÎAbsolute observe the safety information for vacuum pumps (PT 0300 BN) !
ÎThe operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
ÎFor information on the operating instructions of components, see "Accessories".
ÎUse original accessory parts only.
NOTE
CE conformity
The manufacturer's declaration becomes invalid if the operator modifies the original
product or installs additional components!
ÎFollowing installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.

6
Transport and storage
2.3 Improper use
Improper use will cause all claims for liability and guarantees to be forfeited. Im-
proper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• Pumping of corrosive or explosive media.
• Pumping of condensing vapors.
• Operation with improper high levels of gas loads.
• Operation with improper high fore-vacuum pressures.
• Operation with improper gas mode.
• Operation with improper high levels of insulated heat input.
• Venting with improper high venting rates.
• Operation of the pump in potentially radioactive areas.
• Installation in systems where the turbopumps are subjected to impact-like stress
and vibrations or the effect of periodically occurring forces.
• The connection to a power supply with earthing of a direct voltage pole.
• The use of accessories, which are not named in this manual or not authorised
by Pfeiffer Vacuum.
3 Transport and storage
3.1 Transport
ÎReuse the transport container. Vacuum pumps should be transported or shipped
in the original packing only.
ÎOnly remove the protective covers from the high vacuum and the fore-vacuum
side immediately before connection.
ÎPreserve the original protective covers.
ÎAlways transport the turbopump uprightly.
3.2 Storage
ÎClose the flange openings by using the original protective covers.
ÎClose further connection ports by using the corresponding protective covers.
ÎStorage the pump only indoors with an ambient temperature between -25 °C
and +55 °C.
ÎIn rooms with moist or aggressive atmospheres, the turbopump must be air-see-
led in a plastic bag together with a bag of dessicant.

7
Product description
4 Product description
4.1 Product identification
Pump types The product designations of Pfeiffer vacuum turbomolecular pumps are self-ex-
planatory and permit conclusions about the different versions. The product desig-
nation consists of a family designation (1), the size (2), which is oriented on the
pumping speed, and the properties (3) of the pump.
TMH(1) 521(2) P(3)
To correctly identify the product when communicating with Pfeiffer Vacuum, al-
ways have the information from the rating plate available.
Fig. 1: Example for a rating plate
Standard version
Turbopumps without a property, which concernes to the installation orientation
will be characterized as standard version in the following (e.g. TMH 521 P).
Pump features
Scope of delivery • Turbopump
• Protective cover for the high vacuum and the fore-vacuum flange
• Operating instructions
4.2 Function
The turbopumps TMH/U 521 form a complete unit together with the electronic
drive unit TC 600. For the voltage supply only Pfeiffer Vacuum power supplies may
be used (e.g.TPS oder DCU). The use of other power units than the proper intended
is only permitted after consultation with Pfeiffer Vacuum (specification of the pow-
er supplies on request).
1. Family designation 2. Model designation 3. Properties
T= Turbopump
521 = Model designa-
tion of the pump related
to its pumping speed
class
U= Upside down version
P= Purge sealing gas system
M= Magnetic bearing
C= for corrosive gases
H= High throughput
T= Temerature management
Y= Installation in any orientation
N= Integrated power supply
P= Pure turbopump
M= Turbo with Holweck stage
H= ISO-flange variants for high
vacuum applications
U= CF-flange variants for ultra-
high vacuum applications
D= "Drag" pump for the medium
vacuum range
Mod.:
Mod.-No.:
Ser. No.:
Oil:
S(N2):
Mass:
Made in
Germany 2006/03
TMH 261 P
DN 100 ISO-K, 3P
PM P02 821 H
PM 063 265 -T
210 l/s
6 kg
D-35614 Asslar
Characteristics TMH 521 TMU 521
HV flange
DN 100 ISO-K
DN 100 ISO-F
DN 160 ISO-K
DN 160 ISO-F
DN 100 CF-F
DN 160 CF-F

8
Product description
Fig. 2: View of CompactTurbo™ TMH 521 P
Cooling • Air cooling
• Water cooling
In the case of excess temperature the electronic drive unit reduces the rotor rota-
tion speed automatically. Depending on the application and the CompactTurbo™
different cooling variants are selectable.
Rotor bearings • High vacuum side: maintenance-free permanent magnetic bearing.
• Fore-vacuum side: ceramic ball bearing.
4.3 Range of application
The pumps CompactTurbo™ TMH/U 521 must be installed and operated in the fol-
lowing ambient conditions.
8 Electronic drive
unit TC 600
12 Venting screw
15 High vacuum flange
39 Fore-vacuum flange
98 Remote plug
H
F
VV
15
12
39
8
98
NOTE
Observe the connection instructions!
On delivery turbopumps with TC 600 are set up for operations with "Remote Control".
ÎBefore operating with DCU, HPU or PC the 15-pole D-Sub connector (remote plug)
must be removed from the TC 600.
Installation location weather protected (indoors)
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Protection class IP 30
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure: 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surrounding magnetic field ≤5 mT
Overvoltage category II
Connection voltage TC 72 VDC ±5%

9
Installation
5 Installation
5.1 Set-up
When installing the pump, observe the following conditions:
• The ambient conditions named for the area of use.
• The temperature of the high vacuum flange must not exceed 120 °C.
• The pump may be fastened to the floor only after consultation with Pfeiffer Va-
cuum.
• The pumps must not be installed in systems in which sporadic loads and vibra-
tions or periodic forces have an effect on the pump.
5.2 Preparatory work
ÎEnsure sufficient cooling for the turbopump.
ÎWhere magnetic fields > 5 mT are involved, a suitable shielding must be used.
Check installation location and consult Pfeiffer Vacuum if needed!
ÎThe maximum permissible rotor temperature for the turbopump is 90 °C. If high
temperatures arise for process reasons, the radiated heat input must not exceed
8 W. Install suitable screening sheets, if necessary (design information on re-
quest).
5.3 Assembly
• Ensure the greatest possible cleanliness when installing any high vacuum parts.
Unclean components prolong the pump-down time.
• All flange components must be grease-free, dust-free and dry at installation.
• The operating fluid reservoir is already installed and filled for the turbopumps
TMH/U 521.
WARNING
Danger from the turbopump being ripped off.
If the rotor is suddenly blocked, torques of up to 6690 Nm can occur; if the turbopump
is not properly fastened, it can be ripped off.
ÎPrecisely follow installation instructions.
ÎOnly use original components for the installation.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
ÎFor information on the operating instructions of components, see "Accessories".
ÎUse original accessory parts only.

10
Installation
Splinter shield and
protection screen
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protec-
tion screen in the high vacuum flange protects the turbopump against foreign bod-
ies coming from the recipient. The volume flow rate is reduced as followed.
Vibration
compensator
Mounting orientation
Horizontal mounting orientation
Reduced volume flow rate in %
H2He N2
Splinter shield DN 100
Splinter shield DN 160
9
5
13
7
18
14
Protection screen DN 100
Protection screen DN 160
2
1
3
2
5
4
CAUTION
Danger from the pump being ripped off
When a Pfeiffer Vacuum vibration compensator is used, suitable safety measures
must be taken to compensate for the torques in case of sudden blocking.
ÎDefinitely consult with Pfeiffer Vacuum.
ÎDo not exceed the maximum permitted temperature at the vibration compensator
(100°C).
NOTE
Observe type-specific mounting orientations!
Pfeiffer Vacuum CompactTurbo™ pumps may only be installed in specific mounting
orientations. Impermissible mounting orientations can result in contamination of the
process vacuum or damage to the pump.
ÎPay attention to the properties code after the model designation on the name plate!
Fig. 3: Permissible installation orientati-
ons for standard versions
Fig. 4: Installation orientations for turbo-
pumps with "Y" in their properties
180°
360°
20˚ max
H
VV VV VV

11
Installation
ÎFor horizontal installation, the fore-vacuum flange must point vertically down-
ward (± 20°), since otherwise the turbopump can be contaminated.
ÎSupport pipes in front of the pump or remove them. No force from the pipe sys-
tem may be exerted on thebraced turbopump.
The maximum axial loading capacity of the high vacuum flange is 1000 N (equals
100 kg). A one-sided load on the high vacuum flange is not permitted.
Installing the high
vacuum flange
In the case the rotor is suddenly blocked, the torques arising from the system and
the high vacuum flange must be absorbed. Only the components listed in the fol-
lowing can be used to fasten the turbo pumps to the high vacuum flange. The com-
ponents for installing the turbo pumps are special designs of Pfeiffer Vacuum. Ob-
serve the minimum strength of 170 N/mm2 for the flange material.
Installation of ISO-K
with ISO-K flange
For the installation of the flange connections the following components are avail-
able:
ÎMind that the sealing surfaces are not damaged.
ÎFlange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.
ÎUse the required number of bracket screws.
ÎTighten the bracket screws crosswise in three steps.
ÎTightening torque: 5, 15, 25 ± 2 Nm
Installation of ISO-F
with ISO-F flange
The connection types for installation of ISO-F to ISO-F flange are "hex screw and
pocket hole", "stud screw and pocket hole" as well as "stud screw and through
hole". The following elements are required:
DANGER
Danger to life - impermissible fastening
Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the fas-
tening of pumps on a vacuum chamber with different flange variants.
ÎBoth flanges of the turbopump and the vacuum chamber must be always of the same
type.
ÎThe connection of different flange types is impermissible in any case.
ÎPfeiffer Vacuum will not accept any liability for all damages resulting from impermis-
sible fastening.
Connection nominal diameter Designation Ordering No.
DN 100 ISO-K
Centering ring (coated) PM 016 210-U
Centering ring (coated) with
splinter shield PM 016 211-U
Centering ring (coated) with
protective screen PM 016 212-U
Bracket screw (use 16 pieces) PF 300 110-T
DN 160 ISO-K
Centering ring (coated) PM 016 216-U
Centering ring (coated) with
splinter shield PM 016 217-U
Centering ring (coated) with
protective screen PM 016 218-U
Bracket screw (use 14 pieces) PF 300 110-T

12
Installation
Hexagon screw and pocket hole
ÎMind that the sealing surfaces are not damaged.
ÎFlange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.
ÎUse the required number of hex screws.
ÎFor a flange material with a strengh of > 270 N/mm2screw in the hex screw 1,5 d
into the blind hole.
ÎTighten the hex screws crosswise in three steps.
ÎTightening torque DN 100: 5, 12, 22 ± 2 Nm
ÎTightening torque DN 160: 10, 20, 38 ± 3 Nm
Stud screw and pocket hole
ÎMind that the sealing surfaces are not damaged.
ÎFlange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.
ÎUse the required number of stud screws and nuts.
ÎFor a flange material with a strengh of 170 - 270 N/mm2screw in the hex screw
2,5 d into the blind hole.
ÎTighten the nuts crosswise in three steps.
ÎTightening torque DN 100: 5, 12, 22 ± 2 Nm
ÎTightening torque DN 160: 10, 20, 38 ± 3 Nm
Stud screw and through hole
ÎMind that the sealing surfaces are not damaged.
ÎFlange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.
ÎUse the required number of stud screws and nuts.
ÎTighten the nuts crosswise in three steps.
ÎTightening torque DN 100: 5, 12, 22 ± 2 Nm
ÎTightening torque DN 160: 10, 20, 38 ± 3 Nm
Connection nominal diameter Designation Ordering No.
DN 100 ISO-F
Centering ring (coated) PM 016 210-U
Centering ring (coated) with
splinter shield PM 016 211-U
Centering ring (coated) with
protective screen PM 016 212-U
Hexagon screw (use 8pieces) N 3024 428 1C
Stud screw with nut (use 8
pieces each, for clearence hole
use 16 nuts and washers)
N 3169 428 2C
N 3433 047 8P
DN 160 ISO-F
Centering ring (coated) PM 016 216-U
Centering ring (coated) with
splinter shield PM 016 217-U
Centering ring (coated) with
protective screen PM 016 218-U
Hexagon screw (use 8pieces) N 3024 479 1C
Stud screw with nut (use 8
pieces each, for clearence hole
use 16 nuts)
N 3169 485 2C
N 3433 051 8P
1.5d
2.5d

13
Installation
Installation of CF-F
flanges
The connection types for installation of CF-F to CF-F flange are "stud screw and
pocket hole" as well as "hex screw and through hole". The following elements are
required:
• A set of mounting material for the respective type of connection
• A copper seal
• A protective screen or splinter shield can optionally be used
1)number of pieces in bracket is the delivery quantity
Stud screw and pocket hole
ÎIf used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange.
ÎPlace the seal exactly in the hollow.
ÎConnect the flanges of nominal diameter DN 100 using 16 stud screws (M8) with
washers and nuts.
ÎConnect the flanges of nominal diameter DN 160 using 20 stud screws (M8) with
washers and nuts.
ÎTighten the nuts circularly.
ÎTightening torque: 22 ± 2 Nm
ÎAfter this, check the torque, since flowing of the sealing material may make it ne-
cessary to retighten the screws.
NOTE
Preservation of sealing capacity
Observe the following to preserve sealing capacity:
ÎTouch seals only with gloves.
ÎMake sure sealing lips are undamaged.
Connection nominal diameter Designation Ordering No.
DN 100 CF-F
Hexagon bolt M8 with washer and
nut (25 pieces)1) PF 505 003-T
Stud screw M8 with washer and nut
(25 pieces)1) PF 507 003-T
Copper seal (10 pieces)1) PF 501 410-T
Copper seal, silvered (10 pieces)1) PF 501 510-T
Splinter shield PM 016 315
Protective screen PM 016 336
DN 160 CF-F
Hexagob bolt M8 with washer and
nut (25 pieces)1) PF 505 003-T
Stud screw M8 with washer and nut
(25 pieces)1) PF 507 003-T
Copper seal (10 pieces)1) PF 501 416-T
Copper seal, silvered (10 pieces)1) PF 501 516-T
Splinter shield PM 016 318
Protective screen PM 016 339
52

14
Installation
Hexagon screw and through hole
ÎIf used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange.
ÎPlace the seal exactly in the hollow.
ÎConnect the flanges of nominal diameter DN 100 using 16 stud screws (M8) with
washers and nuts.
ÎConnect the flanges of nominal diameter DN 160 using 20 stud screws (M8) with
washers and nuts.
ÎTighten the nuts circularly.
ÎTightening torque: 22 ± 2 Nm
ÎAfter this, check the torque, since flowing of the sealing material may make it ne-
cessary to retighten the screws.
5.4 Connections to the turbopump
Fig. 5: Connection designations for turbopumps with electronic drive unit TC 600
Connecting the fore-
vacuum side
Recommendation: As backing pump, use a dry-compressing diaphragm pump or
rotary vane pumps from the Pfeiffer Vacuum programme. The backing pump must
generate a vacuum pressure of ≤ 5 mbar.
ÎWith rigid pipe connections: Install bellows for attenuation of vibrations in the
connection line.
ÎConnect the fore-vacuum line with small-flange components or threaded hose
couplings. Do not narrow the free cross section of the fore-vacuum flange!
ÎThe backing pump is connected electrically via a relay box. Insert the control line
of the relay box into the "FV PUMP" connection of the TC 600 .
Cooling Pfeiffer Vacuum turbopumps must be cooled by means of air or water cooling.
• When operating the pump with more than 50 % of the maximum gas load,
sealing gas must be used to ensure rotor cooling.
• In case of increased backing pressure (> 0.1 mbar) and/or operation with gas
loads, either air or water cooling may be used.
• Generally use water cooling if the ambient temperature is > +35 °C.
55
HEAT/TMS
VENT
FV PUMP
FAN
REMOTE
RS 485
H
F
VV
TC 600
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
ÎSafely guide away the gas emission from the backing pump!
ÎObserve all safety recommendations of the gas producer.

15
Installation
ÎConnect air cooling for the corresponding pump type in accordance with the ac-
cessory's operating manual.
ÎConnect water cooling for the corresponding pump type in accordance with the
accessory's operating manual.
Venting valve The TVF 005 venting valve is used for automatic flooding in case of shut-down or
power failure. The maximum permissible pressure at the venting valve is 1.5 bar
absolute.
Installation of the venting valve
ÎUnscrew the venting screw from the venting connection of the turbopump.
ÎScrew in the venting valve with seal ring.
Electrical connection
ÎPlug the control lead of the venting valve in accordance with the accessory’s
operating instructions.
ÎSelect the venting mode of the venting valve via the DCU, HPU or serial interface
RS485.
Casing heating unit The turbopump and vacuum chamber can be heated to reach the final pressure
more quickly. Use of a casing heating unit makes sense only for pumps with the
high vacuum flange in stainless steel design. The heating duration depends on the
degree of contamination as well as the final pressure to be reached and should be
at least 4 hours.
ÎConnect the casing heating for the corresponding pump type in accordance with
the accessory's operating manua
Sealing gas valve Only pumps with the pump designation P(see rating plate) are equipped for con-
nection of sealing gas. The turbopump must be operated with sealing gas to pro-
tect it, such as in the case of corrosive or dusty processes. The connection is made
via a sealing gas valve.
CAUTION
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.
ÎAlways use water cooling when a casing heating unit is used.
WARNING
Danger of burns
High temperatures arise when the turbopump or vacuum chamber are baked out. As a
result, there is a danger of burns from touching hot parts, even after the housing hea-
ter is switched off!
ÎThermally insulate heating sleeve, pump housing and vacuum chamber, if possible
during installation.
ÎDo not touch heating sleeve, pump casing and vacuum chamber during bake out.

16
Installation
Fig. 6: Connecting the sealing gas valve
ÎUnscrew the screw plug with sealing ring out of the sealing gas connection of
the turbopump.
ÎScrew the sealing gas valve with seal ring into the purge gas connection.
ÎObtain details on adjusting the sealing gas quantity from the corresponding
operating manual.
• When operating the pump with more than 50 % of the maximum gas load,
sealing gas must be used to ensure rotor cooling.
Connecting the elec-
tronic drive unit to
the power supply
The turbopumps CompactTurbo™ TMH/U 521 form a single unit with the electron-
ic drive unit. For voltage supply, use only Pfeiffer Vacuum power supplies (e.g.
TPS 300 or DCU 300). Use other power supplies only after consultation with Pfe-
iffer Vacuum and comparison with valid specifications (specifications of the power
supplies on request).
Fig. 7: TC 600 connection to power supply TPS or DCU, installation drawing for shiel-
ded cable
2Pump lower part
2a Sealing gas connection
2b Locking screw
2c O-ring
2d Sealing gas valve
2e O-ring
G
2b
2d 2e
2c 22a
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
ÎAlways keep the mains connection freely accessible so you can disconnect it at any
time.
8Electronic drive unit X Power supply unit TPS or DCU
8a Connecting cable TC 600 - TPS/DCU X1 Mains connection TPS/DCU
8b Screw X2 Connection connecting cable - TPS/DCU
8c Screw with lock washer X4 Connection connecting cable - TC
98 Remote plug S1 Switch ON/OFF
I
O
S1
X
X2 X2
X1
8c 8a
X4
8b 8c X4 8 98
H

17
Installation
ÎUnscrew the screw with lock washer 8c from the TC 600 (below
connection X4).1)
ÎInsert the X4 plug on the 8a connection cable into the X4 connection on the
TC 600 and screw in the 8b screw.
ÎFasten the X4 plug to the TC 600 with a screw and lock washer 8c.1)
ÎConnect the X2 plug on the 8a connection cable to the TPS 300/DCU 300 power
supply pack at the X2 connection.
ÎFasten the X2 plug to the power supply with a screw and lock washer 8c (inclu-
ded with the cable).1)
1) Only for PM 051 843 -T shielded connection cable (siehe S. 34, Kap. 12).
After operating voltage is applied, the TC 600 performs a self-test to check the sup-
ply voltage. The supply voltage for the turbopumps TMH/U 521 is 72 VDC ± 5% in
accordance with standard EN 60 742.
5.5 Connecting Pfeiffer Vacuum display and control units or PC
Fig. 8: Connecting the serial interface RS485
An external operating part (DCU or HPU 001) or an external computer can be con-
nected via the connection with the designation "RS485" on the electronic drive
unit. The interface is securely separated galvanically from the maximum occurring
supply voltage of the TC 600. The electrical couplings are optically decoupled in-
ternally.
Connections The connection of a RS232- oder USB-interface is possible via a TIC 001 or the
USB/RS485-converter.
NOTE
Observe the connection instructions!
On delivery turbopumps with TC 600 are set up for operations with "Remote Control".
ÎBefore operating with DCU, HPU or PC the 15-pole D-Sub connector (remote plug)
must be removed from the TC 600.
DCU 001
DCU 100-600
TC 600
HPU 001
RS-232
TIC 001
RS-485
USB/RS485-converter
Designation Value
Serial interface RS485
Baud rate 9600 Baud
Data file word length 8 bit
Parity keine (no parity)

18
Installation
Cross-linking via the
connection RS485
ÎThe connections must be made in accordance with the specification of the inter-
face RS485.
ÎConnect all units with D+ (pin 5 / RS485) and D- (pin 7 / RS485) to the bus.
• The group address of the TC 600 is 960.
• All units connected to the bus must have differing serial interface addresses (pa-
rameter 797).
• All switched on remote functions have priority over the serial interface func-
tions.
• Refer to the component operating instructions for detailed information concer-
ning operation procedures and electrical data of the interface RS485.
5.6 Connecting the remote control
Remote control options are provided via the 15-pole D-Sub connector with the des-
ignation ”REMOTE“ on the TC 600. The inputs 2 - 6 are activated by connecting
them with +24 V at Pin 1 (active high) (siehe S. 20, Kap. 5.7). When connecting sup-
ply voltage the turbopump is started.
•On delivery: Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the remote plug.
ÎShielded cable must be used.
Start bits 1
Stop bits 1..2
Designation Value
1 .... 8
Pin Assignement
1 not connected
2 +24 V output ladable with ≤210 mA
3 not connected
4 not connected
5 RS485: D+
6Gnd
7 RS485: D-
8 not connected
D+ D-
TC
D+ D-
TC
D+ D-
D+
D-
TIC 001/
USB/RS485-converter
RS 485
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
ÎConnect only suitable devices to the bus system.
NOTE
Connection to an external bus system
The integration into an external bus system (e.g. Profibus DP, DeviceNet) is possible
via connection gateway TIC 250 or TIC 260. Thus a synchronous use of interface
RS485 on the TC 600 is not possible.
15 9
81

19
Installation
ÎConnect the shielding on the plug side for the TC 600 to the TC housing.
Pin assignment and
function of the re-
mote plug
Reference voltage
Inputs
1)The option must be set via serial interface RS485 (refer to operating instructions PM 0547 BN,
Pumping Operation With DCU)
Outputs
1)The option must be set via serial interface RS485 (refer to operating instructions PM 0547 BN,
Pumping Operation With DCU)
2)The following technical data are applicable for the contacts: Umax = 50 VDC, Imax = 1 A
Pin Function
1 +24 V Reference voltage level for all remote in and outputs
10 Ground Ground potential for all remote in- and putputs
Pin Function Open (low) Closed (high)
2 Venting release Venting blocked Venting released
3 Motor turbopump Motor off
Motor on: the turbopump is
driven, current flows through
the motor coils
4 Pumping station Pumpstand aus
Pumping station on: the turbo-
pump is driven, backing pump
control via relay box, the air
cooling unit runs
5
Heating Heizung aus
Heating on: the heating is swit-
ched on once the rotation
switchpoint is attained. The
heating is switched off, if the
rotation switchpoint is not
attained
Option: Sealing gas con-
nection control1) Sealing gas valve closed Sealing gas valve open
Reset
Reset: by supplying a pulse
(T< 2s) with an amplitude of
24V a malfunction acknow-
ledgement can be processed
6 Standby Standby off
The turbopump is controlled
to 66% of its nominal rotation
speed
7Rotation speed setting
mode
Rotation speed setting mode is
off
The rotation speed can be
modified by feeding a PWM
signal to this pin or via
RS4851)
Pin Function Open (low) Closed (high)
8 Switching output 1 Rotation speed switchpoint
not attained
Rotation speed switchpoint
attained; output can be loaded
with 24 V/50 mA
9 Switching output 2 Collective malfunction mes-
sage
failure-free operation; output
can be loaded with 24 V/50 mA
11 Contact output 1 Rotation speed switchpoint
not attained
contact2) between Pin 11 and
Pin 12 is closed, if the rotation
switchpoint is exceeded
12 Contact output 1
13 Contact output 2 Collective malfunction mes-
sage
contact2) between Pin 13 and
Pin 14 is closed at failure-free
operation
14 Contact output 2
15 Analog output Output voltage is proportional to the rotation speed: 0 - 10 VDC
= 0 - 100% *fend / load R ≥10 kΩ(optional current/power)1)

20
Installation
5.7 Connections diagram TC
TC 600
TC 750
X4
1
1
2
2
3
3
4
n.c.
Mains input
power supply
(90 - 132 /
185 - 265) VAC
TPS XXX/DCU XXX
X2
Protection conducter (PE)
Supply voltage, TC
GND
PE GY/YE
Br
Bl
1
2
3
4
5
6
FAN
Fan
M
Relay box
FV PUMP
1
2
3
4
5
6
L
N
PE
PE
N
L'
Pumping station (Imax = 16 A)
Mains input, pumping station
115/208/230 VAC
Connection, pumping station
VENT
1
2
3
4
5
6
Venting valve
TVF 005
HEAT/TMS
1
2
3
4
5
6
Relay box
Heating
Mains input, heating
115/208/230 VAC
HEATING
L
N
PE
PE
N
L'
REMOTE
1
2
3
4
5
6
+24 VDC*/max. 50 mA
Venting release
Motor TMP
Pumping station
Heating / Reset (opt. sealing gas)
Standby
PWM on (touch relation 25 - 75 %)
Switching output 1 (24 VDC / max. 50 mA)
Switching output 2 (24 VDC / max. 50 mA)
GND*
Contact current:
max. 6 mA / contact
7
8
9
10
12
13
14
15
11
Contact output 1: Switch point attaind
Contact output 2: Collective malfunction
Analog output 0-10 VDC
RS 485
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
n.c.
+24 VDC* / max. 200 mA (supply voltage, DCU)
n.c.
n.c.
n.c.
RS 485+/ (DO/RI)
GND* (mass connection, DCU)
RS 485- / (DO/RI)