Rohde & Schwarz R&S ZNA Series User manual

R&S®ZNA
Vector Network Analyzers
User Manual
1178646202
Version 29
(;ÜÎÌ2)

This document describes the following R&S®ZNA vector network analyzers:
●R&S®ZNA26, 10 MHz to 26.5 GHz, 2 test ports, 3.5 mm (m) connectors, order no. 1332.4500K22
●R&S®ZNA26, 10 MHz to 26.5 GHz, 4 test ports, 3.5 mm (m) connectors, order no. 1332.4500K24
●R&S®ZNA43, 10 MHz to 43.5 GHz, 2 test ports 2.92 mm, order no. 1332.4500K42
●R&S®ZNA43, 10 MHz to 43.5 GHz, 4 test ports 2.92 mm, order no. 1332.4500K44
●R&S®ZNA43, 10 MHz to 43.5 GHz, 2 test ports 2.4 mm, order no. 1332.4500K43
●R&S®ZNA43, 10 MHz to 43.5 GHz, 4 test ports 2.4 mm, order no. 1332.4500K45
●R&S®ZNA50, 10 MHz to 50 GHz, 2 test ports 2.4 mm, order no. 1332.4500K52
●R&S®ZNA50, 10 MHz to 50 GHz, 4 test ports 2.4 mm, order no. 1332.4500K54
●R&S®ZNA67, 10 MHz to 67 GHz, 2 test ports 1.85 mm, order no. 1332.4500K62
●R&S®ZNA67, 10 MHz to 67 GHz, 4 test ports 1.85 mm, order no. 1332.4500K64
Furthermore, it covers the vector network analyzer systems R&S®ZNA67EXT, with extended frequency
range 10 MHz to 110 GHz and 1 mm external test sets:
●R&S®ZNA67EXT Variant 02, order no. 1352.1888K02,
2-port R&S®ZNA67, 2 standard power external test sets
●R&S®ZNA67EXT Variant 03, order no. 1352.1888K03,
4-port R&S®ZNA67, 2 standard power external test sets
●R&S®ZNA67EXT Variant 04, order no. 1352.1888K04,
4-port R&S®ZNA67, 4 standard power external test sets
●R&S®ZNA67EXT Variant 05, order no. 1352.1888K05,
2-port R&S®ZNA67, 2 high power external test sets
●R&S®ZNA67EXT Variant 06, order no. 1352.1888K06,
4-port R&S®ZNA67, 2 high power external test sets
●R&S®ZNA67EXT Variant 07, order no. 1352.1888K07,
4-port R&S®ZNA67, 4 high power external test sets
© 2023 Rohde & Schwarz GmbH & Co. KG
Muehldorfstr. 15, 81671 Muenchen, Germany
Phone: [phone] - 0
Email: [email protected]
Internet: www.rohde-schwarz.com
Subject to change – data without tolerance limits is not binding.
R&S® is a registered trademark of Rohde & Schwarz GmbH & Co. KG.
MIPI® marks and logos are service marks owned by MIPI Alliance, Inc. and any use of such marks by Rohde & Schwarz is under
license.
All other trademarks are the properties of their respective owners.
1178.6462.02 | Version 29 | R&S®ZNA
Throughout this manual, products from Rohde & Schwarz are indicated without the ® symbol, i.e. R&S® is abbreviated as R&S.

Contents
R&S®ZNA
3User Manual 1178.6462.02 ─ 29
Contents
1 Safety and regulatory information......................................................15
1.1 Safety instructions......................................................................................................15
1.2 Warning messages in the documentation................................................................ 17
1.3 Korea certification class A......................................................................................... 18
2 Welcome to the R&S ZNA....................................................................19
2.1 What's new in firmware version 2.74.........................................................................19
2.1.1 Firmware version 2.73...................................................................................................19
2.1.2 Firmware version 2.72...................................................................................................19
2.1.3 Firmware version 2.71...................................................................................................19
2.1.4 Firmware version 2.70...................................................................................................20
2.2 Documentation overview............................................................................................21
2.2.1 Getting started manual..................................................................................................21
2.2.2 Getting started manual R&S ZNA67EXT...................................................................... 22
2.2.3 User manual and help................................................................................................... 22
2.2.4 Service manual............................................................................................................. 22
2.2.5 Instrument security procedures.....................................................................................22
2.2.6 Printed safety instructions............................................................................................. 22
2.2.7 Data sheets and brochures........................................................................................... 22
2.2.8 Release notes and open source acknowledgment (OSA)............................................ 23
2.2.9 Application notes, application cards, white papers, etc.................................................23
3 Getting Started..................................................................................... 24
3.1 Preparing for use........................................................................................................ 24
3.1.1 Lifting and carrying........................................................................................................24
3.1.2 Unpacking and checking............................................................................................... 24
3.1.3 Choosing the operating site.......................................................................................... 24
3.1.4 Setting up the product................................................................................................... 25
3.1.5 Considerations for test setup........................................................................................ 27
3.1.6 Connecting the analyzer to the AC supply.................................................................... 28
3.1.7 Switching the instrument on and off.............................................................................. 28
3.1.8 Standby and ready state............................................................................................... 29
3.1.9 Windows operating system........................................................................................... 30

Contents
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3.1.10 Minimizing the VNA application.....................................................................................31
3.1.11 Connecting external accessories.................................................................................. 32
3.2 Instrument tour............................................................................................................34
3.2.1 Front panel.................................................................................................................... 35
3.2.2 Rear panel.....................................................................................................................41
3.3 Operating the instrument........................................................................................... 43
3.3.1 Manual operation.......................................................................................................... 43
3.3.2 Control elements of the application window..................................................................48
3.3.3 Touchscreen gestures................................................................................................... 54
3.3.4 Working with dialogs..................................................................................................... 57
3.3.5 Handling diagrams, traces, and markers...................................................................... 58
3.3.6 Entering data.................................................................................................................62
3.3.7 Scaling diagrams...........................................................................................................66
3.4 Performing measurements.........................................................................................71
3.4.1 Transmission S-parameter measurement..................................................................... 71
3.4.2 Reflection S-parameter measurement.......................................................................... 78
3.5 Getting started with R&S ZNA67EXT........................................................................ 79
3.5.1 Safety and regulatory information................................................................................. 79
3.5.2 Key features.................................................................................................................. 81
3.5.3 Preparing for use...........................................................................................................82
3.5.4 System tour................................................................................................................... 85
3.5.5 Putting the system into operation..................................................................................92
3.5.6 Connecting the external test sets..................................................................................93
3.5.7 Basic operation............................................................................................................. 99
4 Concepts and features...................................................................... 107
4.1 Basic concepts..........................................................................................................107
4.1.1 Global (persistent) settings......................................................................................... 107
4.1.2 Recall sets...................................................................................................................108
4.1.3 Traces, channels and diagrams.................................................................................. 108
4.1.4 Sweep control..............................................................................................................110
4.1.5 Automatic level control................................................................................................ 117
4.1.6 Power correction from pre-measurement....................................................................119
4.1.7 Data flow..................................................................................................................... 120

Contents
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5User Manual 1178.6462.02 ─ 29
4.2 Screen elements........................................................................................................124
4.2.1 Display elements of a diagram....................................................................................124
4.2.2 Dialogs........................................................................................................................ 136
4.2.3 Trace formats.............................................................................................................. 140
4.3 Measurement results................................................................................................ 149
4.3.1 S-parameters.............................................................................................................. 149
4.3.2 Reference impedances............................................................................................... 152
4.3.3 Impedance parameters............................................................................................... 154
4.3.4 Admittance parameters............................................................................................... 157
4.3.5 Wave quantities and ratios.......................................................................................... 158
4.3.6 Unbalance-balance conversion...................................................................................161
4.3.7 Stability factors............................................................................................................166
4.3.8 Group delay.................................................................................................................167
4.4 Operations on traces................................................................................................ 168
4.4.1 Limit check.................................................................................................................. 168
4.4.2 Trace files....................................................................................................................176
4.5 Calibration................................................................................................................. 186
4.5.1 Calibration types......................................................................................................... 187
4.5.2 Calibration standards and calibration kits................................................................... 199
4.5.3 Calibration pool........................................................................................................... 206
4.5.4 Calibration labels.........................................................................................................206
4.5.5 Automatic calibration...................................................................................................206
4.5.6 Scalar power calibration..............................................................................................218
4.5.7 SMARTerCal................................................................................................................224
4.5.8 Parallel calibration of multiple channels...................................................................... 227
4.5.9 Joining calibrations......................................................................................................227
4.6 Offset parameters and de-/embedding................................................................... 228
4.6.1 Offset parameters........................................................................................................228
4.6.2 Embedding and deembedding.................................................................................... 234
4.7 Optional extensions and accessories.....................................................................246
4.7.1 Spectrum analyzer mode............................................................................................ 247
4.7.2 Time domain analysis..................................................................................................247
4.7.3 Frequency conversion measurements........................................................................ 261

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4.7.4 Phase coherent source control................................................................................... 275
4.7.5 True differential mode................................................................................................. 277
4.7.6 Pulsed measurements................................................................................................ 279
4.7.7 Millimeter-wave converter support.............................................................................. 281
4.7.8 Increased IF bandwidth 30 MHz................................................................................. 288
4.7.9 Frequency resolution 1 mHz....................................................................................... 288
4.7.10 Continuous data recording.......................................................................................... 288
4.7.11 Noise figure measurement.......................................................................................... 289
4.7.12 Measurement uncertainty analysis..............................................................................294
4.7.13 Security write protection..............................................................................................297
4.7.14 Continuous sweep up to 110 GHz (R&S ZNA67EXT only)......................................... 297
4.7.15 Eazy de-embedding based on IEEE 370.................................................................... 298
4.7.16 In-situ de-embedding.................................................................................................. 299
4.7.17 Smart fixture de-embedding........................................................................................300
4.7.18 Delta-L 4.0 PCB characterization................................................................................300
4.7.19 Health and usage monitoring service (HUMS)............................................................301
4.7.20 Internal 3rd and 4th source for 4-port R&S ZNA......................................................... 302
4.7.21 Precision frequency reference.................................................................................... 303
4.7.22 Second internal LO generator for 4-port R&S ZNA.....................................................303
4.7.23 Internal 2nd source and 2nd LO generator for 2-port R&S ZNA................................. 303
4.7.24 Memory extension for data streaming.........................................................................304
4.7.25 LO Out.........................................................................................................................305
4.7.26 RFFE GPIO interface.................................................................................................. 305
4.7.27 Direct generator/receiver access................................................................................ 306
4.7.28 Additional removable system drive............................................................................. 308
4.7.29 Source step attenuators.............................................................................................. 308
4.7.30 Direct IF access.......................................................................................................... 308
4.7.31 Receiver step attenuators........................................................................................... 309
4.7.32 Internal pulse modulators............................................................................................309
4.7.33 Trigger board...............................................................................................................309
4.7.34 Direct source monitor access......................................................................................310
4.7.35 Internal combiner.........................................................................................................311
4.7.36 Internal low noise preamplifier.................................................................................... 312

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4.7.37 Internal low power spur reduction amplifier.................................................................314
4.7.38 USB-to-IEC/IEEE adapter........................................................................................... 316
4.7.39 External power meters................................................................................................ 316
4.7.40 External generators.....................................................................................................321
4.7.41 External switch matrices............................................................................................. 323
4.7.42 Generic devices.......................................................................................................... 331
4.7.43 External DLLs..............................................................................................................332
4.7.44 Power added efficiency............................................................................................... 334
4.7.45 R&S ZNXSIM.............................................................................................................. 335
5 GUI reference......................................................................................339
5.1 Function keys and softtools.................................................................................... 339
5.2 Meas softtool............................................................................................................. 341
5.2.1 Measurement type...................................................................................................... 341
5.2.2 S-Params tab.............................................................................................................. 344
5.2.3 Wave tab..................................................................................................................... 357
5.2.4 Ratio | Harmonics tab..................................................................................................361
5.2.5 Noise Figure tab..........................................................................................................367
5.2.6 Intermodulation tab..................................................................................................... 380
5.2.7 Gain Compression tab................................................................................................ 391
5.2.8 Time Domain tab......................................................................................................... 395
5.2.9 Time Gate tab..............................................................................................................396
5.2.10 Power Sensor tab........................................................................................................396
5.2.11 Spectrum tab...............................................................................................................397
5.2.12 External DLL tab......................................................................................................... 401
5.2.13 Scalar Mixer Meas tab................................................................................................ 408
5.2.14 Vector Mixer Meas tab................................................................................................ 414
5.2.15 Two Tone Group Dly tab (frequency-converting DUT)................................................ 416
5.3 Format softtool..........................................................................................................419
5.4 Scale softtool.............................................................................................................425
5.4.1 Scale Values tab..........................................................................................................425
5.4.2 Scale Coupling tab...................................................................................................... 428
5.4.3 Zoom tab..................................................................................................................... 429
5.5 Traces softtool...........................................................................................................431

Contents
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8User Manual 1178.6462.02 ─ 29
5.5.1 Traces tab................................................................................................................... 431
5.5.2 Mem tab...................................................................................................................... 437
5.5.3 All Mem All Data tab....................................................................................................439
5.5.4 Math tab...................................................................................................................... 441
5.5.5 Time Domain tab......................................................................................................... 447
5.5.6 Time Gate tab..............................................................................................................452
5.5.7 Distance to Fault tab................................................................................................... 455
5.5.8 Trace Statistics tab......................................................................................................455
5.5.9 Smooth Shift Hold tab................................................................................................. 462
5.5.10 Infinite Averaging tab...................................................................................................466
5.5.11 Trace Data tab.............................................................................................................467
5.5.12 Linearity Deviation tab.................................................................................................475
5.6 Lines softtool.............................................................................................................477
5.6.1 Limit Test tab............................................................................................................... 478
5.6.2 Ripple Test tab............................................................................................................ 487
5.6.3 Circle Test tab............................................................................................................. 492
5.6.4 Display Circle tab........................................................................................................ 496
5.6.5 Horiz. Line tab............................................................................................................. 497
5.7 Marker softtool.......................................................................................................... 498
5.7.1 Markers tab................................................................................................................. 498
5.7.2 Marker Props tab.........................................................................................................501
5.7.3 Marker Search tab.......................................................................................................504
5.7.4 Multiple Peak tab.........................................................................................................510
5.7.5 Target Search tab........................................................................................................512
5.7.6 Bandfilter tab............................................................................................................... 514
5.7.7 Set by Marker tab........................................................................................................518
5.7.8 Info Field tab............................................................................................................... 520
5.7.9 Marker Coupling tab....................................................................................................520
5.8 Stimulus softtool.......................................................................................................522
5.8.1 Stimulus tab................................................................................................................ 522
5.8.2 Power tab.................................................................................................................... 525
5.8.3 Time Domain X-Axis tab..............................................................................................533
5.9 Pwr Bw Avg softtool................................................................................................. 535

Contents
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5.9.1 Power tab.................................................................................................................... 535
5.9.2 Bandwidth tab............................................................................................................. 535
5.9.3 Average tab.................................................................................................................538
5.10 Sweep Softtool.......................................................................................................... 539
5.10.1 Sweep Params tab......................................................................................................539
5.10.2 Wait Time Control tab..................................................................................................542
5.10.3 Sweep Type tab.......................................................................................................... 546
5.10.4 Trigger tab................................................................................................................... 558
5.10.5 Sweep Control tab.......................................................................................................565
5.11 Cal softtool................................................................................................................ 569
5.11.1 Start Cal tab................................................................................................................ 570
5.11.2 Cal Devices tab........................................................................................................... 612
5.11.3 Pwr Cal Settings tab....................................................................................................626
5.11.4 Use Cal tab................................................................................................................. 634
5.11.5 METAS Cal tab............................................................................................................642
5.12 Channel Config softtool............................................................................................652
5.12.1 Channels tab............................................................................................................... 652
5.12.2 Port Config tab............................................................................................................ 667
5.12.3 Pwr Cal Settings tab....................................................................................................686
5.13 Mode softtool.............................................................................................................686
5.13.1 Mode tab..................................................................................................................... 686
5.13.2 Pulse Mod tab............................................................................................................. 691
5.13.3 Source Coherence tab................................................................................................ 702
5.14 Offset Embed softtool...............................................................................................706
5.14.1 Offset Embed dock widget.......................................................................................... 706
5.14.2 Offset tab.....................................................................................................................716
5.14.3 One Way Loss tab.......................................................................................................722
5.14.4 Single Ended tab.........................................................................................................724
5.14.5 Fixture modeling dialog............................................................................................... 727
5.14.6 Port Sets tab............................................................................................................... 742
5.14.7 Balanced tab............................................................................................................... 745
5.14.8 Ground Loop tab......................................................................................................... 748
5.14.9 Differential Match tab.................................................................................................. 751

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5.14.10 Config tab....................................................................................................................753
5.14.11 Deembed Assistant tab............................................................................................... 754
5.14.12 Delta-L tab...................................................................................................................764
5.15 File Print softtool.......................................................................................................771
5.15.1 Recall sets tab.............................................................................................................772
5.15.2 Favorites tab............................................................................................................... 776
5.15.3 Print tab.......................................................................................................................778
5.15.4 Printer Setup dialog.....................................................................................................779
5.15.5 Trace Data tab.............................................................................................................781
5.15.6 More tab...................................................................................................................... 781
5.16 DUT softtool...............................................................................................................782
5.16.1 DUT Centric Wizard.................................................................................................... 782
5.16.2 DUT Manager dialog................................................................................................... 794
5.17 Applic softtool........................................................................................................... 797
5.17.1 External Tools application........................................................................................... 798
5.17.2 TDR application...........................................................................................................799
5.17.3 Distance to Fault application....................................................................................... 830
5.18 Display softtool......................................................................................................... 838
5.18.1 Diagram tab.................................................................................................................839
5.18.2 Split tab....................................................................................................................... 842
5.18.3 Config tab....................................................................................................................844
5.18.4 View Bar tab................................................................................................................852
5.18.5 Touchscreen tab..........................................................................................................854
5.19 Setup softtool............................................................................................................ 854
5.19.1 Setup tab.....................................................................................................................854
5.19.2 Freq. Ref. tab.............................................................................................................. 886
5.19.3 Remote Settings tab....................................................................................................888
5.19.4 Power Meter tab..........................................................................................................890
5.19.5 Generator tab.............................................................................................................. 896
5.19.6 Frequency Converter tab............................................................................................ 901
5.19.7 Switch Matrix tab.........................................................................................................908
5.19.8 Port Setup tab............................................................................................................. 918
5.19.9 Generic Device tab......................................................................................................921