
Contents Spectron Gas Control Systems GmbH
ii GES_LM71_1221
Contents
1 Introduction.................................................................................................................................................. 3
2 Description................................................................................................................................................... 4
2.1 Intended use ......................................................................................................................................... 4
2.2 Misuse .................................................................................................................................................. 4
2.3 Identification / label ............................................................................................................................... 4
2.4 Environment.......................................................................................................................................... 5
2.4.1 Temperatures............................................................................................................................. 5
2.4.2 Degree of cleanliness ................................................................................................................ 5
2.4.3 Emissions................................................................................................................................... 5
2.5 Standards and laws .............................................................................................................................. 5
3 Safety............................................................................................................................................................ 7
3.1 Basic information on the safety instructions ......................................................................................... 7
3.2 Safety instructions ................................................................................................................................ 8
3.3 Emergencies and safety devices .......................................................................................................... 10
3.4 Qualification of the operating and maintenance personnel................................................................... 10
4 Design and function .................................................................................................................................... 12
4.1 Design................................................................................................................................................... 12
4.2 Functional description........................................................................................................................... 13
4.3 Technical data ...................................................................................................................................... 14
4.4 Boundaries and interfaces .................................................................................................................... 14
5 Installation.................................................................................................................................................... 15
5.1 General information .............................................................................................................................. 15
5.2 Installation work .................................................................................................................................... 15
5.2.1 Connecting the incoming and outgoing lines ............................................................................. 15
5.3 Checking the armature ......................................................................................................................... 15
6 Commissioning............................................................................................................................................ 16
6.1 Preparations for commissioning ........................................................................................................... 16
6.2 Procedure for commissioning ............................................................................................................... 16
7 Operation...................................................................................................................................................... 17
7.1 Exchanging the process gas source..................................................................................................... 17
8 Maintenance, cleaning and repairs............................................................................................................ 19
8.1 General information on maintenance.................................................................................................... 19
8.2 Regular maintenance work and cleaning.............................................................................................. 20
9 Repair ........................................................................................................................................................... 21
9.1 General information on repair work ...................................................................................................... 21
9.2 Troubleshooting and fault rectification .................................................................................................. 22
10 Dismantling and disposal ........................................................................................................................... 23
10.1 General information on dismantling ...................................................................................................... 23
10.2 Returns ................................................................................................................................................. 23
10.3 Disposal ................................................................................................................................................ 24